Keithley 4200A-SCS User manual

User's Manual
4200A-PMU-900-01 Rev. A December 2020
*P4200A-PMU-900-01A*
4200A-PMU-900-01A
tek.com/keithley
Model 4200A-SCS
Pulse Card (PGU and PMU)

Pulse Card (PGU and PMU)
User's Manual
Model 4200A-SCS

© 2020, Keithley Instruments
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments, LLC. Other brand names are trademarks or registered trademarks of their respective
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Document number: 4200A-PMU-900-01 Rev. A December 2020

Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the
product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low
transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient
overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley measuring instruments may be connected to
mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of hazard. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means warning, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains hazards that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor
injury or damage the instrument. Always read the associated information very carefully before performing the indicated
procedure. Damage to the instrument may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits —including the power
transformer, test leads, and input jacks —must be purchased from Keithley. Standard fuses with applicable national safety
approvals may be used if the rating and type are the same. The detachable mains power cord provided with the instrument may
only be replaced with a similarly rated power cord. Other components that are not safety-related may be purchased from other
suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only through
Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement
component, call a Keithley office for information.
Unless otherwise noted in product-specific literature, Keithley instruments are designed to operate indoors only, in the following
environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution degree 1 or 2.
To clean an instrument, use a cloth dampened with deionized water or mild, water-based cleaner. Clean the exterior of the
instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that
consist of a circuit board with no case or chassis (e.g., a data acquisition board for installation into a computer) should never
require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board
should be returned to the factory for proper cleaning/servicing.
Safety precaution revision as of June 2017.

Introduction..............................................................................................................1-1
Models 4220-PGU and 4225-PMU...................................................................................... 1-1
Connections.............................................................................................................2-1
Introduction .......................................................................................................................... 2-1
Connection guidelines.......................................................................................................... 2-1
PMU common connections .......................................................................................................2-2
Shield connections....................................................................................................................2-2
Cable length..............................................................................................................................2-3
High frequency connections...................................................................................................... 2-3
Prober chuck connections.........................................................................................................2-3
PGU and PMU connectors................................................................................................... 2-4
Model 4225-RPM ................................................................................................................. 2-4
RPM input, output, and top panels............................................................................................2-4
Connecting the RPM to the PMU ..............................................................................................2-6
RPM diagrams for local and remote sensing.............................................................................2-7
Using the RPM as a switch .......................................................................................................2-8
Two-terminal device connections......................................................................................... 2-9
Three-terminal device connections.................................................................................... 2-11
Four-terminal device connections...................................................................................... 2-12
Pulse source-measure connections................................................................................... 2-13
Pulse generator connections...................................................................................................2-13
Using an adapter cable to connect pulse card to DUT ...................................................... 2-14
Connections to prober or test fixture bulkhead connectors ............................................... 2-14
RPM connections to DUT................................................................................................... 2-15
Local sensing..........................................................................................................................2-15
RPM connections to a prober..................................................................................................2-16
PMU connection compensation ......................................................................................... 2-18
Short compensation................................................................................................................2-18
Offset current compensation...................................................................................................2-19
Perform connection compensation..........................................................................................2-19
Enabling connection compensation.........................................................................................2-20
Load-line effect compensation (LLEC) for the PMU .......................................................... 2-21
Methods to compensate for load-line effect.............................................................................2-22
How LLEC adjusts pulse output to the target levels................................................................2-22
Coping with the load-line effect............................................................................................... 2-24
LLEC maintains even voltage spacing....................................................................................2-25
Test considerations.................................................................................................................2-26
LPT functions used to configure LLEC....................................................................................2-26
Enable LLEC...........................................................................................................................2-27
Disable LLEC and set the output impedance..........................................................................2-28
Setting up PMUs and PGUs in Clarius....................................................................3-1
Introduction .......................................................................................................................... 3-1
Table of contents

Table of contents Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual
Configure the PGU, PMU, and RPM using tests ................................................................. 3-1
Create a PMU project........................................................................................................... 3-2
Configure the tests............................................................................................................... 3-2
PMU operation modes ......................................................................................................... 3-4
PMU - all terminal parameters ............................................................................................. 3-6
Start (PMU Amplitude Sweep) .................................................................................................. 3-6
Stop (PMU Amplitude Sweep)...................................................................................................3-6
Step (Pulse Amplitude Sweep)..................................................................................................3-6
Points........................................................................................................................................3-7
Base..........................................................................................................................................3-7
Amplitude.................................................................................................................................. 3-7
Dual Sweep (pulse)...................................................................................................................3-7
Force Range (PMU)..................................................................................................................3-8
Disable outputs at completion................................................................................................... 3-8
Current Spot Mean High ...........................................................................................................3-8
Current Spot Mean Low............................................................................................................3-8
Measure Current Range (PMU) ................................................................................................3-9
Low Range..............................................................................................................................3-10
Current Sample Waveform......................................................................................................3-10
Voltage Spot Mean High .........................................................................................................3-10
Voltage Spot Mean Low..........................................................................................................3-10
Voltage Sample Waveform......................................................................................................3-10
Report Timestamps.................................................................................................................3-10
Report Status (PMU)...............................................................................................................3-11
PMU measurement status.......................................................................................................3-11
Compensation Short Connection ............................................................................................3-14
Load Line Effect Compensation.............................................................................................. 3-14
DUT Resistance (R DUT)........................................................................................................ 3-14
Max Voltage Estimator............................................................................................................3-15
Threshold Current...................................................................................................................3-15
Threshold Voltage...................................................................................................................3-15
Threshold Power.....................................................................................................................3-15
PMU Test Settings ............................................................................................................. 3-16
Test Mode (PMU)....................................................................................................................3-16
Measure Mode........................................................................................................................3-17
Number of Pulses....................................................................................................................3-19
Timing Sweep .........................................................................................................................3-19
Period......................................................................................................................................3-20
Width.......................................................................................................................................3-20
Rise Time................................................................................................................................ 3-21
Fall Time .................................................................................................................................3-21
Pulse Delay.............................................................................................................................3-21
Settling Times .........................................................................................................................3-22
Sweep Master.........................................................................................................................3-23
Output Values .........................................................................................................................3-23
Formulator...............................................................................................................................3-23
PMU pulse timing preview.................................................................................................. 3-24
PMU amplitude sweep example (one-channel).......................................................................3-25
PMU amplitude sweep and step example (two-channel) ........................................................3-27
Higher channel count test example.........................................................................................3-30
Pulse parameter definitions ............................................................................................... 3-34
PMU minimum settling times versus current measure range ............................................ 3-34
PMU capacitive charging/discharging effects.................................................................... 3-35
PMU and RPM measure ranges are not source ranges.................................................... 3-38

Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual Table of contents
4220-PGU and 4225-PMU output limitations..................................................................... 3-39
Configure the PGU, PMU, and RPM using tests ............................................................... 3-39
Step or sweep multiple device terminals in the same test................................................. 3-40
Basic troubleshooting procedure ....................................................................................... 3-43
Step 1. Verify prober connections from the PMU or RPM to the DUT..................................... 3-43
Step 2. Verify the pulse shape ................................................................................................3-44
Step 3. Is the pulse level correct for each channel?................................................................ 3-45
Step 4. Is the pulse I-V curve suspect?...................................................................................3-45
Pulse card concepts ................................................................................................4-1
Models 4220-PGU and 4225-PMU...................................................................................... 4-1
PMU block diagram...................................................................................................................4-2
Pulse modes .............................................................................................................................4-3
Pulse measurement types (PMU) .............................................................................................4-3
Measure modes ........................................................................................................................4-4
4200A-SCS power supply limitations................................................................................... 4-5
Pulse source-measure concepts.......................................................................................... 4-7
Ultra-fast I-V tests .....................................................................................................................4-8
Sample rate...............................................................................................................................4-9
Segment Arb waveform...........................................................................................................4-10
Full arb waveform....................................................................................................................4-13
Pulse waveforms for nonvolatile memory testing....................................................................4-14
Waveform capture...................................................................................................................4-15
DUT resistance determines pulse voltage across DUT........................................................... 4-15
Triggering................................................................................................................................ 4-20
Measurement types............................................................................................................ 4-23
Spot mean measurements......................................................................................................4-24
Spot mean discrete readings...................................................................................................4-24
Spot mean average readings..................................................................................................4-25
Waveform measurements.......................................................................................................4-25
Waveform discrete readings....................................................................................................4-26
Waveform average readings...................................................................................................4-27
Measurement timing................................................................................................................ 4-27
KPulse (for Keithley Pulse Cards)...........................................................................5-1
Keithley Pulse Application.................................................................................................... 5-1
Starting KPulse .........................................................................................................................5-1
KPulse setup and help..............................................................................................................5-2
Triggering............................................................................................................................. 5-3
Standard pulse waveforms .................................................................................................. 5-3
Segment Arb waveforms...................................................................................................... 5-5
Exporting Segment Arb waveform files ..................................................................................... 5-7
Custom file arb waveforms (full arb) .................................................................................... 5-8
Custom Arb file operation: Select and configure waveforms.....................................................5-9
Custom Arb file operation: Copy waveforms into Sequencer..................................................5-10
Custom Arb file operation: Load waveform and turn on output ...............................................5-12
Waveform types...................................................................................................................... 5-13

Table of contents Model 4200A-SCS Pulse Card (PGU and PMU) User's Manual
Use the RPM to switch the SMU, CVU, and PMU ...................................................6-1
Introduction .......................................................................................................................... 6-1
Equipment required.............................................................................................................. 6-1
Update the RPM configuration in KCon............................................................................... 6-2
Device connections.............................................................................................................. 6-3
Connection schematic...............................................................................................................6-3
Connect the 4200A-SCS to the DUT.........................................................................................6-4
Set up the measurements in Clarius.................................................................................... 6-5
Create a new project.................................................................................................................6-5
Add a device .............................................................................................................................6-6
Search for and select existing tests in the Test Library............................................................. 6-6
Configure the vfd test................................................................................................................6-8
Configure the cv-diode test .....................................................................................................6-10
Configure the pulse-diode test ................................................................................................6-12
Run the test.............................................................................................................................6-14
View and analyze the test results............................................................................................6-15
PMU for pulsed I-V measurements on a MOSFET .................................................7-1
Introduction .......................................................................................................................... 7-1
Equipment required.............................................................................................................. 7-2
Device connections.............................................................................................................. 7-2
Connection schematic...............................................................................................................7-3
Set up the measurements in Clarius.................................................................................... 7-4
Create a new project.................................................................................................................7-4
Search for and select an existing test .......................................................................................7-5
Configure the test......................................................................................................................7-6
Run the test and analyze the results.........................................................................................7-8
Testing flash memory.............................................................................................. 8-1
Testing flash memory........................................................................................................... 8-1
Flash connection guidelines................................................................................................. 8-3
Programming and erasing flash memory ..................................................................................8-3
Endurance testing ................................................................................................................ 8-9
Connections for endurance testing - no switch matrix...............................................................8-9
Connections for endurance testing - switch matrix..................................................................8-11
Disturb testing .................................................................................................................... 8-12
Connections for disturb testing................................................................................................8-12
Using a switch matrix......................................................................................................... 8-14
Use KPulse to create and export Segment Arb waveforms............................................... 8-15
Enter Segment Arb values into UTM array parameters..................................................... 8-16
Direct connections to single DUT....................................................................................... 8-17
Direct connections to array DUT for disturb testing........................................................... 8-19

In this section:
Models 4220-PGU and 4225-PMU........................................... 1-1
Models 4220-PGU and 4225-PMU
The 4220-PGU High Voltage Pulse Generator Unit and 4225-PMU Ultra-Fast Pulse Measure Unit are
high-speed pulse-generator cards for the 4200A-SCS. The 4220-PGU provides pulse output only.
The 4225-PMU provides both pulse output and pulse measurement. The PGU and PMU have similar
pulse output characteristics.
The 4225-PMU can be paired one or two 4225-RPM Remote Preamplifier/Switch Modules. When the
RPM is used as a preamplifier for the PMU, it provides additional low-current measurement ranges.
When the RPM is used as a switch, it switches between the PMU, SMUs, and CVUs.
LPT functions that pertain to the PGU and PMU are documented in “LPT commands for PGUs and
PMUs” in Model 4200A-SCS LPT Library Programming.
To do quick tests with minimal interaction with other 4200A-SCS test resources, you can use the
Keithley Pulse Application (KPulse). KPulse is a non-programming alternative that you can use to
configure and control the installed Keithley pulse cards. Refer to KPulse (on page 5-1) for additional
information.
The simplified circuits of the 4220-PGU and 4225-PMU pulse generators are shown in the following
figure.
Section 1
Introduction