Keysight Technologies B1500A User manual

Keysight Technologies B1500A
Semiconductor Device Analyzer
User’s Guide

Notices
© Keysight Technologies 2005-2014
No part of this manual may be reproduced in
any form or by any means (including elec-
tronic storage and retrieval or translation into
a foreign language) without prior agreement
and written consent from Keysight Technolo-
gies as governed by United States and inter-
national copyright laws.
Manual Part Number
B1500-90000
Edition
Edition 1, July 2005
Edition 2, December 2005
Edition 3, April 2006
Edition 4, January 2007
Edition 5, June 2007
Edition 6, November 2007
Edition 7, October 2008
Edition 8, February 2009
Edition 9, June 2009
Edition 10, June 2010
Edition 11, June 2011
Edition 12, June 2013
Edition 13, October 2013
Edition 14, August 2014
Keysight Technologies
1400 Fountaingrove Parkway 
Santa Rosa, CA 95403
Warranty
The material contained in this docu-
ment is provided “as is,” and is subject
to being changed, without notice, in
future editions. Further, to the maxi-
mum extent permitted by applicable
law, Keysight disclaims all warranties,
either express or implied, with regard
to this manual and any information con-
tained herein, including but not limited
to the implied warranties of merchant-
ability and fitness for a particular pur-
pose. Keysight shall not be liable for
errors or for incidental or consequential
damages in connection with the fur-
nishing, use, or performance of this
document or of any information con-
tained herein. Should Keysight and the
user have a separate written agreement
with warranty terms covering the mate-
rial in this document that conflict with
these terms, the warranty terms in the
separate agreement shall control.
Technology Licenses
The hardware and/or software described in
this document are furnished under a license
and may be used or copied only in accor-
dance with the terms of such license.
Restricted Rights Legend
If software is for use in the performance of a
U.S. Government prime contract or subcon-
tract, Software is delivered and licensed as
“Commercial computer software” as defined
in DFAR 252.227-7014 (June 1995), or as a
“commercial item” as defined in FAR 2.101(a)
or as “Restricted computer software” as
defined in FAR 52.227-19 (June 1987) or any
equivalent agency regulation or contract
clause. Use, duplication or disclosure of
Software is subject to Keysight Technologies’
standard commercial license terms, and
non-DOD Departments and Agencies of the
U.S. Government will receive no greater than
Restricted Rights as defined in FAR
52.227-19(c)(1-2) (June 1987). U.S. Govern-
ment users will receive no greater than Lim-
ited Rights as defined in FAR 52.227-14
(June 1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any tech-
nical data.
Declaration of Conformity
To get the latest version of the declaration of
conformity, go to http://regulations.prod-
ucts.keysight.com/DoC/search.htm and type
in the product number in the Search field.
Latest Information
To get the latest firmware/software/elec-
tronic manuals/support information, go to
www.keysight.com and type in the product
number in the Search field at the top of the
page.

COMPLIANCE WITH GERMAN NOISE REQUIREMENTS
This is to declare that this product is in conformance with the German Regulation on
Noise Declaration for Machines
(Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland).
•Herstellerbescheinigung
GERÄUSCHEMISSION
Lpa < 70 dB
am Arbeitsplatz
normaler Betrieb
nach DIN 45635 T. 19
•Manufacturer’s Declaration
ACOUSTIC NOISE EMISSION
Lpa < 70dB
operator position
normal operation
per ISO 7779
South Korean Class A EMC declaration
This equipment is Class A suitable for professional use and is for use in electromagnetic
environments outside of the home.

Safety Summary
The following general safety precautions must be observed during all phases of
operation, service, and repair of this instrument. Failure to comply with these precautions
or with specific warnings elsewhere in this manual may impair the protections provided
by the instrument. In addition, it violates safety standards of design, manufacture, and
intended use of the instrument. Keysight Technologies assumes no liability for
customer’s failure to comply with these requirements.
Product manuals may be provided on CD-ROM or in printed form. Printed manuals are an
option for many products. Manuals may also be available on the Web. Go to
www.keysight.com and type the product model number in the Search field at the top of
the page.
NOTE Do not use this instrument in any manner not specified by the manufacturer. The
protective features of this instrument may be impaired if it is used in a manner not
specified in the operation instructions.
This instrument is an INDOOR USE product.
This instrument complies with INSTALLATION CATEGORY II for mains input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2
defined in IEC 61010-1.
If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with a
measurement category, its measurement terminals must not be connected to
line-voltage mains.
•DANGEROUS PROCEDURE WARNINGS
Warnings, such as example below, shall be complied. Procedures throughout in this
manual prevent you from potentially hazard. Their instructions contained in the
warnings must be followed.
WARNING Hazardous voltage, instrument maximum output voltage may appear at the
measurement terminals (Force, Guard, and Sense) if Interlock terminal is closed. Open
the Interlock terminal when the measurement terminals are accessible. Voltage
applied to the terminals will be limited up to ±42 V.
Do not work the interlock function intentionally in order to bring the output voltage to
the safe level. While the high voltage indicator is lit, the dangerous voltage by the
output voltage or the residual charge appears on the measurement terminal.

•BEFORE APPLYING POWER
Verify that all safety precautions are taken. Make all connections to the instrument
before applying power. Note the instrument's external markings described under
“Safety Symbols”.
•GROUND THE INSTRUMENT
This is Safety Class I instrument. To minimize shock hazard, the instrument chassis
and cabinet must be connected to an electrical ground. The power terminal and the
power cable must meet International Electrotechnical Commission (IEC) safety
standards.
•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes.
Operation of any electrical instrument in such an environment constitutes a definite
safety hazard.
•DO NOT REMOVE COVERS
No operator serviceable parts inside. Refer servicing to qualified personnel. To
prevent electrical shock do not remove covers.
•IN CASE OF DAMAGE
Instruments that appear damaged or defective should be made inoperative and
secured against unintended operation until they can be repaired by qualified service
personnel. Return the instrument to a Keysight Technologies sales or service office
for services and repair to ensure that safety features are maintained.
•USE ONLY THE SPECIFIC ACCESSORIES
Specific accessories satisfy the requirements for specific characteristics for using the
instrument. Use the specific accessories, cables, adapters, and so on for safety
reasons.

Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed
below.
Direct current.
Alternating current.
Earth (ground) terminal.
Protective conductor terminal. For protection against electrical shock in case of a fault.
Used with field wiring terminals to indicate the terminal which must be connected to
ground before operating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
Grounded terminal which indicates the earth potential.
On supply.
Off supply.
Standby supply. The equipment will be marked with this symbol is not completely
disconnected from AC mains when power switch is in the standby position.
In position of a bi-stable push switch.
Out position of a bi-stable push switch.
Hazardous voltage and potential for electrical shock. Do not touch terminals that have
this symbol when the equipment is on.
Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched.
Instruction manual symbol. The equipment will be marked with this symbol when it is
necessary for the user to refer to the instruction manual.
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition
or the like, which, if not correctly performed or adhered to, could result in injury or
death to personal.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of part or all of the equipment.
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IEC Measurement Category I
The CE mark shows that the product complies with all applicable European Directives.
The CSA mark is a registered trademark of the Canadian Standards Association.
The RCM mark is a registered trademark of the Australian Communications Authority. This
signifies compliance with the Australian EMC Framework Regulations under the terms of
the Radio communications Act.
This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.
This is the symbol for an Industrial, Scientific and Medical, Group 1 Class A product.
(CISPR 11)
Korea’s safety and EMC mark
China RoHS - Environmentally Green Product Label
China RoHS - Product with Toxic Substance 40 yr EPUP
The Chinese mark for paper-based packaging materials; Paperboard and Corrugated
Fiberboard
Plastic Material Coding Identification
CAT I

Power Supply and Measurement Safety
•PowerSupplySafety
This instrument can output high currents and voltages. Make sure that the load or
device under test can safely handle the output current and voltage. Also, make sure
that the connection leads can safely withstand the expected currents and are
insulated for the expected voltages.
The instrument outputs may be connected so as to float relative to earth ground.
Isolation or floating voltage ratings are indicated on the instrument, near the output
terminal or the Circuit Common terminal. There is the danger of electric shock by
touching the floated measurement terminals. Keep in mind it to protect yourself. And
it is a reason of using the recommended accessories.
• Voltage/Current Measurement Safety
Multimeters and other instruments capable of measuring high voltages and currents
are subject to specific safety concerns because of the circuits to which they may be
connected. To safely use these instruments, you need to understand the markings on
the instrument near the input terminals, which include the Protection Limits and the
IEC Measurement Category.
• Protection Limits
Keysight multimeters and other voltage measurement instruments provide protection
circuitry to prevent damage to the instrument and to protect against the danger of
electric shock, provided the Protection Limits are not exceeded. To ensure safe
operation of the instrument, do not exceed the Protection Limits shown on the input
terminals.

• Source/Monitor Terminals
Source/monitor unit, SMU, can simultaneously perform DC voltage or current output
and measurement. Typical SMU has the Force, Guard, Sense, and Circuit Common
terminals as shown below. Normally the Force, Guard, and Sense terminals are the
same potential. Voltage marked around the terminals indicates the Protection Limits.
Force and Sense must be connected to a terminal of a device under test for the Kelvin
connection which is effective for high current measurement and low resistance
measurement. For the non-Kelvin connection to ease the connections, connect Force
only. Do not connect Sense. It must be opened.
Guard should be extended to around the device terminal for reducing leakage current
caused by a coaxial cable used. Guard must be never connected to anything at the
device side.
Circuit Common should be connected to shielding of the coaxial cable used.
The following image is the Kelvin triaxial connector of High Power SMU.
Force Sense Guard Circuit Common
Guard

High Voltage Shock Hazard
Keysight B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V
for MPSMU/HRSMU) at the Force, Guard, and Sense terminals. To prevent electric
shock hazard, the following safety precautions must be observed during the use of
Keysight B1500A.
• Use a three-conductor AC power cable to appliance coupler (inlet) and the
instrument to an electric ground (safety ground).
• Prepare shielding box which covers interface to a device under test and equipped
with interlock circuit that opens when the door is opened.
• Before performing measurement, connect the interlock circuit to the Interlock
terminal of this instrument.
• Confirm periodically that the interlock function works normally.
• Before touching the connections of the Force, Guard, and Sense terminals, turn
the instrument off and discharge any capacitors of the measurement path. If you
do not turn the instrument off, complete “all” of the following items, regardless
of any instrument’s settings.
• Terminate measurement by pressing the Stop key, confirm that the
Measurement status indicator is not lit.
• Confirm that the High Voltage indicator is not lit.
• Open the shielding box access door (open the Interlock terminal).
• Discharge any capacitors if the capacitance is connected to an SMU.
• Warn workers in the vicinity of the instrument about hazardous conditions.

Gefahr durch Hochspannung
Von den Geräten Keysight B1500A können Spannungen an den Anschlüssen
“Force”, “Guard” und “Sense” von bis zu 200 V ausgehen. Um elektrischem Schlag
vorzubeugen, ist bei der Benützung der Geräte Keysight B1500A folgendes zu
beachten.
• Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung
(Eingang) und schließen Sie das Instrument an eine Erdung an
(Sicherheitserdung).
• Bereiten Sie das Abschirmungsgehäuse vor, dass die Oberfläche eines zu
testenden Geräts abdeckt und mit einem Verriegelungsstromkreis ausgestattet
ist, der bei geöffneter Tür unterbrochen wird.
• Vor der Messung verbinden Sie den Verriegelungsstromkreis mit dem
Interlock-Anschluss dieses Instruments.
• Prüfen Sie in regelmäßigen Abständen, dass die Verriegelungsfunktion
ordnungsgemäß funktioniert.
• Bevor Sie die Verbindungen zu den Anschlüssen “Force”, “Guard” und “Sense”
berühren, schalten Sie das Instrument aus und entladen alle Kondensatoren des
Messwegs. Wenn Sie das Instrument nicht ausschalten, führen Sie, unabhängig
von den Instrumenteinstellungen, alle folgenden Schritte durch.
• Beenden Sie die Messung, indem Sie auf die Taste “Stop” drücken. Stellen
Sie sicher, dass die Statusanzeige “Measurement” nicht leuchtet.
• Stellen Sie sicher, dass die Anzeige “High Voltage” nicht leuchtet.
• Öffnen Sie die Tür des Abschirmungsgehäuses (öffnen des
Interlock-Anschlusses).
• Entladen Sie alle Kondensatoren, wenn die Kapazität mit einer SMU
verbunden ist.
• Warnen Sie Mitarbeiter in der Umgebung des Instruments vor den Gefahren.

Danger de choc dû à une haute tension
Une tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/
HRSMU; 100 Vdc) émanant du dispositif Keysight B1500A peut être sortie aux
bornes Force, Guard et Sense. Les précautions suivantes doivent être obserées con-
tre commotion électrique accidentelle.
• Utilisez un câble d’alimentation CA à trois conducteurs vers le coupleur secteur
(entrée) et branchez l’instrument sur une mise électrique à la terre (prise de terre
de sécurité).
• Préparez le boîtier de protection qui couvre l’interface avec le dispositif à tester
et équipez-le d’un circuit de sécurité qui s’ouvre lors de l’ouverture d’une porte.
• Avant de procéder aux mesures, connectez le circuit de sécurité à la borne
Interlock de l’instrument.
• Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité.
• Avant de toucher les connexions des bornes Force, Guard et Sense, mettez
l’instrument hors tension et déchargez tout condensateur du chemin de mesure.
Si vous ne mettez pas l’instrument hors tension, effectuez « toutes » les
opérations ci-dessous, quels que soient les paramètres de l’instrument.
• Terminez les mesures en appuyant sur la touche Stop ; vérifiez que
l’indicateur d’état Measurement est éteint.
• Vérifiez que le témoin High Voltage est éteint.
• Ouvrez la trappe d’accès au boîtier de protection (ouvrez la borne Interlock).
• Déchargez les éventuels condensateurs si la capacité est connectée à une
unité SMU.
• Informez les personnes travaillant à proximité de l’instrument des conditions.

高電圧感電注意
Keysight B1500A のForce、Guard、Sense 端子には、危険電圧が出力されることがあ
ります（HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100
Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。
•3極電源ケーブルを使用して本器を接地してください。
•ドアを開くことによって開放されるインターロック回路を装備し、被測定デバ
イスとのインタフェースを覆うことのできるシールド・ボックスを用意してく
ださい。
•測定を開始する前にはインターロック回路を本器の Interlock 端子に接続してく
ださい。
•インターロック機能が正常であることを定期的に確認してください。
•Force、Guard、Sense 端子に繋がる接続部に触れる前には、本器の電源を切断し
てください。また、測定系のキャパシタを放電してください。電源を切らない
場合は、以下の事項を全て実施してください。
•Stopキーを押して Measurement インジケータが消灯したことを確認してくだ
さい。
•高電圧警告（High Voltage）インジケータが消灯していることを確認してく
ださい。
•シールド・ボックスのドアを開けてください（Interlock 端子を開放してくだ
さい）。
•キャパシタが SMU に接続されているならば、キャパシタを放電してくださ
い。
•周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底してください。

Product Stewardship
• Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/EC
This product complies with the WEEE Directive (2002/96/EC) marking requirements.
The affixed label indicates that you must not discard this electrical/ electronic
product in domestic household waste.
Product Category: With reference to the equipment types in the WEEE directive
Annex 1, this product is classified as a “Monitoring and Control instrumentation”
product.
Do not dispose in domestic household waste.
To return unwanted products, contact your local Keysight office or visit the following
website for more information.
www.keysight.com/environment/product/
•LCDFluorescentLamp
Certain products sold by Keysight contain a liquid crystal display (LCD); backlighting
for the LCD is provided by a fluorescent lamp which contains mercury, and must be
managed, recycled, and/or disposed in accordance with all applicable laws,
ordinances and regulations.
For information on how to recycle or dispose of the fluorescent lamp contained in
your own product, visit the following website.
http://www.keysight.com/environment/mercury.shtml
If you live in the U.S., also visit the following websites.
http://www.lamprecycle.org
http://www.eiae.org
If you have additional questions, please visit the following website.
http://www.keysight.com/go/contactus
•PerchlorateInformation
Perchlorate Material - special handling may apply. Visit the following website.
http://www.dtsc.ca.gov/hazardouswaste/perchlorate/
Equipment's real-time clock battery or coin cell battery may contain perchlorate and
may require special handling when recycled or disposed of in California.

Precautionary Statement
Keysight B1500A Semiconductor Device Analyzer operates in the Microsoft Windows
environment. Keysight B1500A requires Keysight EasyEXPERT software, a
specially-designed Windows application program.
• About guarantee and support for Keysight B1500A
Keysight Technologies guarantees and supports the performance of Keysight B1500A
for the same condition as the preload condition when shipped from the factory.
• About updating Keysight EasyEXPERT and the Windows Update
Keysight Technologies confirms the operation of Keysight EasyEXPERT patch
programs and important Windows security patches, and provides recommended
update information. Visit Keysight B1500A support site, download the patches, and
perform the software update.
• About Windows application programs and peripherals (including driver)
Using commercial products on Keysight B1500A is your responsibility. Keysight
Technologies cannot provide compatibility information for commercial products. If
problems arise, perform Keysight B1500A system recovery.
•Aboutservicing
Bench repair service is available at your nearest Keysight Technologies service
center. Be aware that the B1500A configuration might be updated to the latest one
without notice because of support issues.
The internal hard disk drive (HDD) might be initialized during servicing. If peripherals
are connected, they will be removed.
When Keysight B1500A is returned, the internal HDD might be initialized. Peripherals
will be returned separately.
•Othernotes
• Back up the internal HDD to prevent loss of data by accident or failure.
• Protect Keysight B1500A from computer viruses.
• If you connect Keysight B1500A to the network, take care to protect it from
computer virus.

Working in Comfort
To optimize your comfort and productivity, it is important that you set up your work area
correctly and use your instrument properly. With that in mind, we have developed some
set-up and use recommendations for you to follow based on established ergonomic
principles. Improper and prolonged use of keyboards and input devices are among those
tasks that have been associated with repetitive strain injury (RSI) to soft tissues in the
hands and arms. If you experience discomfort or pain while using the instrument,
discontinue use immediately and consult your physician as soon as possible. For more
information on RSI you may wish to consult the About Repetitive Strain Injury section.
Please study the recommendations described below. Included there are references to
relevant parts of international standards, regulations and guidelines, such as ISO 9241
and the European Community Display Screen Equipment directive. You may also wish to
consult your employer’s human resources department or other relevant departments for
guidance specific to your company.
About Repetitive Strain Injury
Because your comfort and safety are our primary concern, we strongly recommend that
you use the instrument in accordance with established ergonomic principles and
recommendations. Scientific literature suggests that there may be a relationship between
injury to soft tissues -especially in the hands and arms- and prolonged improper use of
keyboards or other equipment requiring repeated motions of the hands and forearms.
This literature also suggests that there are many other risk factors that may increase the
chance of such injury, commonly called Repetitive Strain Injury.
What is RSI?
Repetitive Strain Injury (RSI -also known as cumulative trauma disorder or repetitive
motion injury) is a type of injury where soft tissues in the body, such as muscles, nerves,
or tendons, become irritated or inflamed. RSI has been a reported problem for those who
perform repetitive tasks such as assembly line work, meatpacking, sewing, playing
musical instruments, and computer work. RSI also has been observed in those who
frequently engage in activities such as carpentry, knitting, housework, gardening, tennis,
windsurfing and lifting children.
What causes RSI?
The specific causes of RSI have not been established. Nevertheless, the incidence of RSI
has been associated with a variety of risk factors, including:
• Too many uninterrupted repetitions of an activity or motion.
• Performing an activity in an awkward or unnatural posture.

• Maintaining static posture for prolonged periods.
• Failing to take frequent short breaks.
• Other environmental and psychosocial factors.
In addition, there have been reports associating the occurrence of RSI with the use of
keyboards, mice, and other input devices. Also, certain medical conditions, such as
rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of
injury.
What if I experience discomfort?
If you are experiencing any discomfort, seek professional medical advice immediately.
Typically, the earlier a problem is diagnosed and treated, the easier it is to resolve.
Mice and Other Input Devices
Various aspects of using mice and other input devices may increase your risk of
discomfort or injury. Observing the following recommendations may reduce that risk.
• Try to keep your hand, wrist, and forearm in a neutral position while using your mouse
or other input device.
• If you use your thumb to rotate the ball on a trackball or spaceball, keep it in a
relaxed, natural shape, and maintain a neutral posture in your hand, wrist, and
forearm.
• Hold the mouse gently by draping your fingers over it. Keep your hand relaxed and
fingers loose. Do not grip the mouse tightly.
• It takes very little pressure or force from your fingers to activate the buttons or scroll
wheel on your mouse, scrolling mouse, trackball, or other input device. Using too
much force can place unnecessary stress on the tendons and muscles in your hands,
wrists, and forearms.
• If you are using a scrolling mouse, be sure to keep your fingers and hand in a relaxed,
neutral position when activating the scroll wheel. Also, this type of mouse features
software that can minimize the number of mouse movements or button clicks.
• When using a mouse, trackball, or other input device, position it as close to the
keyboard as possible, and keep it at the same level as you do not have to stretch while
using it.
• Be sure to keep your mouse and trackball clean. Regular removal of accumulated
dust and dirt helps ensure proper tracking and reduces unnecessary hand and wrist
motions.

In This Manual
This manual describes the product overview and installation information of Keysight
Technologies B1500A. This manual consists of the following chapters:
•Chapter 1, Getting Started
This chapter describes basic operations of Keysight B1500A.
•Chapter 2, Introduction
This chapter describes basic features of Keysight B1500A.
•Chapter 3, Installation
This chapter describes installation, device connection, and maintenance.
•Chapter 4, Specifications
This chapter describes specifications of Keysight B1500A.
•Chapter 5, Accessories and Options
This chapter describes accessories and options of Keysight B1500A.