Lake Shore Cryotronics CRX-6.5K User manual

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User’s Manual
Model
CRX-6.5K
Probe Station
Lake Shore Cryotronics, Inc.
575 McCorkle Blvd.
Westerville, Ohio
43082-8888 USA
[email protected]
[e-mail]
www.lakeshore.com
Fax: [phone]
Telephone: [phone]
Methods and apparatus disclosed and described herein have been developed solely on company funds of Lake Shore
Cryotronics, Inc. No government or other contractual support or relationship whatsoever has existed which in any
way affects or mitigates proprietary rights of Lake Shore Cryotronics, Inc. in these developments. Methods and
apparatus disclosed herein may be subject to U.S. Patents existing or applied for.
Lake Shore Cryotronics, Inc. reserves the right to add, improve, modify, or withdraw functions, design modifications,
or products at any time without notice. Lake Shore shall not be liable for errors contained herein or for incidental or
consequential damages in connection with furnishing, performance, or use of this material.
Rev. 1.0 P/N 119-515 1 January 2017

Model CRX-6.5K Probe Station
LIMITED WARRANTY STATEMENT
WARRANTY PERIOD: THREE (3) YEARS
1.Lake Shore warrants that products manufactured by Lake Shore (the
"Product") will be free from defects in materials and workmanship for
three years from the date of Purchaser's physical receipt of the Prod-
uct (the "Warranty Period"). If Lake Shore receives notice of any such
defects during the Warranty Period and the defective Product is
shipped freight prepaid back to Lake Shore, Lake Shore will, at its
option, either repair or replace the Product (if it is so defective) with-
out charge for parts, service labor or associated customary return
shipping cost to the Purchaser. Replacement for the Product may be
by either new or equivalent in performance to new. Replacement or
repaired parts, or a replaced Product, will be warranted for only the
unexpired portion of the original warranty or 90 days (whichever is
greater)..
2.Lake Shore warrants the Product only if the Product has been sold
by an authorized Lake Shore employee, sales representative, dealer or
an authorized Lake Shore original equipment manufacturer (OEM).
3.The Product may contain remanufactured parts equivalent to new
in performance or may have been subject to incidental use when it is
originally sold to the Purchaser.
4.The Warranty Period begins on the date the Product ships from Lake
Shore’s plant.
5.This limited warranty does not apply to defects in the Product
resulting from (a) improper or inadequate installation (unless OT&V
services are performed by Lake Shore), maintenance, repair or calibra-
tion, (b) fuses, software, power surges, lightning and non-recharge-
able batteries, (c) software, interfacing, parts or other supplies not
furnished by Lake Shore, (d) unauthorized modification or misuse, (e)
operation outside of the published specifications, (f) improper site
preparation or site maintenance (g) natural disasters such as flood,
fire, wind, or earthquake, or (h) damage during shipment other than
original shipment to you if shipped through a Lake Shore carrier.
6.This limited warranty does not cover: (a) regularly scheduled or ordi-
nary and expected recalibrations of the Product; (b) accessories to the
Product (such as probe tips and cables, holders, wire, grease, varnish,
feedthroughs, etc.); (c) consumables used in conjunction with the
Product (such as probe tips and cables, probe holders, sample tails,
rods and holders, ceramic putty for mounting samples, Hall sample
cards, Hall sample enclosures, etc.); or, (d) non-Lake Shore branded
Products that are integrated with the Product.
7. To the extent allowed by applicable law, this limited warranty is the
only warranty applicable to the Product and replaces all other war-
ranties or conditions, express or implied, including, but not limited to,
the implied warranties or conditions of merchantability and fitness
for a particular purpose. Specifically, except as provided herein, Lake
Shore undertakes no responsibility that the products will be fit for any
particular purpose for which you may be buying the Products.
Any implied warranty is limited in duration to the warranty period.
No oral or written information, or advice given by the Company, its
Agents or Employees, shall create a warranty or in any way increase
the scope of this limited warranty. Some countries, states or provinces
do not allow limitations on an implied warranty, so the above limita-
tion or exclusion might not apply to you. This warranty gives you spe-
cific legal rights and you might also have other rights that vary from
country to country, state to state or province to province.
8.Further, with regard to the United Nations Convention for Interna-
tional Sale of Goods (CISC,) if CISG is found to apply in relation to this
agreement, which is specifically disclaimed by Lake Shore, then this
limited warranty excludes warranties that: (a) the Product is fit for the
purpose for which goods of the same description would ordinarily be
used, (b) the Product is fit for any particular purpose expressly or
impliedly made known to Lake Shore at the time of the conclusion of
the contract. (c) the Product is contained or packaged in a manner
usual for such goods or in a manner adequate to preserve and protect
such goods where it is shipped by someone other than a carrier hired
by Lake Shore.
9. Lake Shore disclaims any warranties of technological value or of
non-infringement with respect to the Product and Lake Shore shall
have no duty to defend, indemnify, or hold harmless you from and
against any or all damages or costs incurred by you arising from the
infringement of patents or trademarks or violation or copyrights by
the Product.
10.THIS WARRANTY IS NOT TRANSFERRABLE. This warranty is not
transferable.
11.Except to the extent prohibited by applicable law, neither Lake
Shore nor any of its subsidiaries, affiliates or suppliers will be held lia-
ble for direct, special, incidental, consequential or other damages
(including lost profit, lost data, or downtime costs) arising out of the
use, inability to use or result of use of the product, whether based in
warranty, contract, tort or other legal theory, regardless whether or
not Lake Shore has been advised of the possibility of such damages.
Purchaser's use of the Product is entirely at Purchaser's risk. Some
countries, states and provinces do not allow the exclusion of liability
for incidental or consequential damages, so the above limitation may
not apply to you.
12.This limited warranty gives you specific legal rights, and you may
also have other rights that vary within or between jurisdictions where
the product is purchased and/or used. Some jurisdictions do not allow
limitation in certain warranties, and so the above limitations or exclu-
sions of some warranties stated above may not apply to you.
13.Except to the extent allowed by applicable law, the terms of this
limited warranty statement do not exclude, restrict or modify the
mandatory statutory rights applicable to the sale of the product
to you.

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CERTIFICATION
Lake Shore certifies that this product has been inspected and tested
in accordance with its published specifications and that this product
met its published specifications at the time of shipment. The accu-
racy and calibration of this product at the time of shipment are trace-
able to the United States National Institute of Standards and
Technology (NIST); formerly known as the National Bureau of Stan-
dards (NBS).
TRADEMARK ACKNOWLEDGMENT
Many manufacturers and sellers claim designations used to distin-
guish their products as trademarks. Where those designations
appear in this manual and Lake Shore was aware of a trademark
claim, they appear with initial capital letters and the ™ or ® symbol.
Apiezon® is a registered trademark of M&I Materials, Ltd.
Parker’s® Perfect is a is a registered trademark of Edmund Optics®.
Kimwipes® is a registered trademark of Kimberly-Clark Worldwide.
Stycast® is a registered trademark of Emerson & Cuming.
Tarn-X® is a registered trademark of Jelmar, Inc.
Teflon® and Kapton® are trademarks of DuPont De Nemours.
Copyright 2017 Lake Shore Cryotronics, Inc. All rights reserved. No portion of this manual may be reproduced,
stored in a retrieval system, or transmitted, in any form or by any means, electronic, mechanical, photocopying,
recording, or otherwise, without the express written permission of Lake Shore.

Model CRX-6.5K Probe Station

i
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Table of Contents
Chapter 1
Introduction
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.2 Product Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.3 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.4 Station Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.5 Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Chapter 2
System Overview
2.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Major Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2.1 Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.2.1.1 Vacuum Chamber and CCR Vacuum Shroud . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.2.1.2 Sample Cooling Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.2.1.3 Closed Cycle Refrigerator (CCR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
2.2.1.4 Micro-manipulated Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12
2.2.2 Temperature Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13
2.2.3 Pressurized Gas System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14
2.2.4 Vision System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
2.2.5 Turbo Pumping System (Optional TPS-FRG or Equivalent) . . . . . . . . . . . . . . . . . .15
2.3 Configurations, Options and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.3.1 Probing Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.3.2 DC/RF (ZN50) Probe Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
2.3.2.1 ZN50 Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16
2.3.2.2 ZN50-Compatible Probe Cables and Connectors . . . . . . . . . . . . . . . . . . . . .17
2.3.2.3 ZN50-Compatible Probe Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18
2.3.3 Microwave Probe Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
2.3.3.1 Microwave-Compatible Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18
2.3.3.2 Microwave-Compatible Cables and Connectors . . . . . . . . . . . . . . . . . . . . . .19
2.3.3.3 Microwave Calibration Substrate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19
2.3.4 Optical Fiber Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.3.5 Sample Holders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.3.5.1 Grounded Sample Holders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.3.5.2 Isolated Sample Holders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.3.5.3 Coaxial Sample Holders. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.3.5.4 Triaxial Sample Holders . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
2.3.6 Vision System Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
2.3.6.1 Microscopes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
2.3.6.2 Lighting Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .22
2.3.7 Turbo Pumping System (TPS-FRG) and Pumping Kit (PS-TP-KIT) . . . . . . . . . . .23
2.3.8 High Temperature Option (PS-HTSTAGE) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .24
2.3.9 Pump Line Vibration Isolator (PS-PLVI-40) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
2.3.10 Recirculating Chiller Option (RC-EM10) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .24
2.4 Considerations for DC/RF Electrical Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .25
2.4.1 Grounding, Shielding, and Isolation for DC/RF Measurements . . . . . . . . . . . . . .25
2.4.1.1 Ground Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .25
2.4.1.2 Avoiding Ground Loops . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
2.4.1.3 Shielding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
2.4.1.4 Noise Isolation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .27
2.4.2 Basic DC Electrical Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
2.4.3 Basic RF Electrical Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
2.4.4 Conductive Back Side Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
2.4.5 Back Side Voltage Biasing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .30
2.4.6 Small Signal/Low Noise DC/RF Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Model CRX-6.5K Probe Station
2.4.6.1 Noise Isolation for Low Noise Measurements . . . . . . . . . . . . . . . . . . . . . . . . 30
2.4.6.2 Sample Isolation for Low Noise Measurements . . . . . . . . . . . . . . . . . . . . . . 31
2.4.6.3 Additional Considerations for Low Noise Measurements . . . . . . . . . . . . 31
2.4.7 Measuring Low Resistance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
2.4.8 High Impedance/Low Leakage Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
2.4.8.1 Grounding and Shielding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
2.4.8.2 Driven Guards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
2.4.8.3 Guarded Probe Station Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
2.4.8.4 Measurement Voltage Limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
2.5 Considerations for Microwave Measurements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
2.5.1 Microwave Cables and Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
2.5.2 Ground Return Path . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
2.5.3 Pad Construction and Impedance Matching. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
2.5.3.1 Probe Crosstalk. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
2.5.4 Calibration with the CS-5 Calibration Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
2.5.5 Temperature Effects of Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
2.5.6 Planarization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
2.6 Contact Quality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
2.6.1 Contact Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
2.6.2 Contact Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
2.6.3 Oxidation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2.6.4 Four-Lead Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2.6.5 Ohmic versus Non-ohmic Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2.6.6 Measuring Contact Quality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
2.6.7 Lab Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Chapter 3
Installation and
Setup
3.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.1.1 Lake Shore Assisted Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.2 Site Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
3.2.1 Space Requirements and Suggested Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
3.2.2 Environmental Requirements and Concerns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.2.2.1 Vibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.2.2.2 Electrical Noise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.2.2.3 Ventilation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.2.2.4 Safety Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
3.2.3 Power Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
3.2.4 Water Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
3.2.4.1 Water Flow and Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
3.2.4.2 Water Quality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
3.2.4.3 Water Routing and Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
3.2.5 Vacuum Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
3.2.6 Gas Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
3.3 Unpacking the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
3.3.1 Shipping Containers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
3.3.2 Inspecting for Shipping Damage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
3.3.3 Required Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
3.3.4 Moving and Lifting the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
3.3.5 Uncrating the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
3.3.6 Unpacking the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.3.7 Unpacking the Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.3.7.1 Unpacking the Model 336 Temperature Controller . . . . . . . . . . . . . . . . . 53
3.3.7.2 Unpacking the Vision System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.3.7.3 Unpacking the Tool Kit and Spares Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
3.3.7.4 Unpacking the Probe Starter Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
3.3.8 Unpacking the CCR Compressor and Components . . . . . . . . . . . . . . . . . . . . . . . . . . 54
3.3.8.1 Inspecting the CCR Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
3.3.9 Unpacking the Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55

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3.4 Utility Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
3.4.1 Power Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
3.4.2 Cooling Water Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .56
3.5 Pre-Assembly Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .57
3.5.1 Testing the Turbo Vacuum Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .57
3.6 Assembling a Basic Probe System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
3.6.1 Positioning and Leveling the CCR Stand . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .58
3.6.2 Connecting the CCR Compressor to the Probe Station . . . . . . . . . . . . . . . . . . . . . .59
3.6.2.1 Flexible Helium Line Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
3.6.2.2 Cold Head Electrical Cable Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .61
3.6.3 Connecting the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
3.6.3.1 Probe Station Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .62
3.6.4 Assembling the Vision System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
3.6.4.1 Assembling the Vertical Post . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
3.6.4.2 Assembling the Microscope and Horizontal Boom . . . . . . . . . . . . . . . . . .64
3.6.4.3 Connecting the Vision System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .65
3.6.5 Assembling the Turbo Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
3.6.5.1 Preparing the Probe Station Before Attaching the Vacuum . . . . . . . . . 67
3.6.5.2 Preparing the Turbo Vacuum Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
3.6.6 Assembling Probe Station Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
3.6.6.1 Assembling the Pump Line Vibration Isolator (PS-PLVI-40) . . . . . . . . . 69
3.7 Installing and Removing Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
3.7.1 Installing a Probe: Prep Instructions for All Probe Types . . . . . . . . . . . . . . . . . . . . .70
3.7.2 Installing a ZN50 Probe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
3.7.2.1 Installing the ZN50 Probe Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .71
3.7.2.2 Installing the ZN50 Probe Blade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .72
3.7.3 Removing a ZN50 Probe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
3.7.3.1 Removing the ZN50 Probe Blade . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .73
3.7.3.2 Removing the ZN50 Probe Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
3.7.4 Installing a Microwave Probe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
3.7.5 Removing a Microwave Probe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
3.8 System Verification and Testing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .78
3.8.1 Instrumentation Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .78
3.8.1.1 Verifying Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
3.8.1.2 Verifying Power On . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
3.8.1.3 Verifying the Model 336 Temperature Controller Settings . . . . . . . . . .78
3.8.2 Temperature Sensor and Heater Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .78
3.8.3 CCR Operation Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .79
3.8.4 Microscope Light and Focus Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .80
3.8.5 Testing the Probe Arm Reach . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
3.8.6 Probe Continuity Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .80
3.8.7 Vacuum Chamber Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Chapter 4
Basic Operation
4.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .83
4.1.1 Common Operational Mistakes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .83
4.1.2 Temperature Limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
4.2 Operating the Probe Arm Translation Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .84
4.3 Sample Exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .86
4.3.1 Opening the Vacuum Chamber and Radiation Shield . . . . . . . . . . . . . . . . . . . . . . .86
4.3.2 Removing the Sample Holder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .87
4.3.3 Mounting Samples on the Sample Holder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
4.3.3.1 Sample Alignment and Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .88
4.3.3.2 Reducing the Risk of Cracking Wafers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
4.3.3.3 Temporary Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
4.3.3.4 Semi-Permanent Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .89
4.3.3.5 Permanent Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
4.3.4 Mounting the Sample Holder onto the Sample Stage . . . . . . . . . . . . . . . . . . . . . . .90

Model CRX-6.5K Probe Station
4.3.5 Closing the Vacuum Chamber and Radiation Shield . . . . . . . . . . . . . . . . . . . . . . . . 91
4.4 Vacuum Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
4.4.1 Turbo Pump Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
4.4.1.1 Vacuum Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
4.4.1.2 Vacuum Gauge Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
4.4.1.3 Vacuum Performance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
4.4.2 Evacuating the Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
4.4.3 Shutting Down the Turbo Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
4.4.4 Purging the Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
4.5 Temperature Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
4.5.1 Controls for Temperature Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
4.5.1.1 CCR Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
4.5.1.2 Electronic Temperature Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
4.5.2 Cooling the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
4.5.2.1 Preparing the System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
4.5.2.2 Starting the CCR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
4.5.2.3 Allowing the Sample and Radiation Shield Stages to Cool . . . . . . . . . . 98
4.5.3 Operating the Sample Stage from Base Temperature to 350 K . . . . . . . . . . . . . 98
4.5.4 Returning to Room Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
4.5.5 Temperature Control Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
4.6 Imaging and Probing the Sample . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
4.6.1 Using the Microscope to Image the Sample . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
4.6.2 Landing the Probe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
4.6.3 Using the Planarization Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
4.6.3.1 Adjusting the Angle of the Planarization Assembly . . . . . . . . . . . . . . . 103
Chapter 5
Advanced
Operation
5.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
5.2 Advanced Temperature Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
5.2.1 Reducing Condensation on the Sample . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
5.2.1.1 Heated Cycle Purge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
5.2.1.2 Maintaining the Sample at Room Temperature
While Cooling the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
5.2.2 High Temperature Sample Stage Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
5.2.2.1 Configuring the Model CRX-6.5K for High Temperature
Sample Stage Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
5.2.2.2 HT Sample Stage Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
5.2.2.3 HT Sample Stage Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
5.2.2.4 Reconfiguring the Model CRX-6.5K for Standard Operation . . . . . . 109
5.2.2.5 Temperature Operation with the HT Sample Stage . . . . . . . . . . . . . . . 110
5.3 Probe Arm Assembly Reconfiguration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
5.3.1 Installing a Micro-manipulated Translation Stage (MMS-07) . . . . . . . . . . . . 111
5.3.2 Removing a Micro-manipulated Translation Stage (MMS-07) . . . . . . . . . . . 113
5.3.3 Removing a Probe Arm and Base . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
5.3.4 Installing a Probe Arm and Base . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
5.3.5 Reconfiguring Ultra-miniature Cryogenic Coaxial Cables . . . . . . . . . . . . . . . . . 117
5.3.5.1 Removing an Ultra-miniature Cryogenic Coaxial Cable . . . . . . . . . . 117
5.3.5.2 Installing an Ultra-miniature Cryogenic Coaxial Cable . . . . . . . . . . . 117
5.3.6 Reconfiguring Microwave Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
5.3.6.1 Removing a Microwave Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
5.3.6.2 Installing a Microwave Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
5.3.6.3 Adjusting the Fit of Microwave Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
5.3.7 Reconfiguring an Optical Fiber Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
5.3.7.1 Removing an Optical Fiber . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
5.3.7.2 Installing an Optical Fiber Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
5.3.8 Installing the Planarization Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 125

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Chapter 6
Maintenance and
Troubleshooting
6.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
6.2 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
6.2.1 Preventive Maintenance Schedule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
6.2.2 Cleaning the Vacuum Chamber Exterior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
6.2.3 Cleaning the Vacuum Chamber Interior . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128
6.2.4 Viewport Window Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
6.2.4.1 Cleaning the Viewport Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
6.2.4.2 De-fogging the Viewport Windows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
6.2.5 O-Ring Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
6.2.5.1 Re-greasing O-Rings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129
6.2.5.2 Accessing Other O-Rings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
6.2.6 Cleaning the Sample Holder . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 130
6.2.7 Cleaning BeCu Probe Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
6.2.8 Cleaning Microwave Probe Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
6.2.8.1 General Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
6.2.8.2 Removing Oxidation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
6.2.9 Probe Arm Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 132
6.2.10 CCR Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.2.10.1 Charging the CCR Compressor Helium Gas . . . . . . . . . . . . . . . . . . . . . . 133
6.2.10.2 CCR Cold Head 10,000 Hour Maintenance . . . . . . . . . . . . . . . . . . . . . . 133
6.2.10.3 CCR Compressor Oil Mist Adsorber 30,000 Hour Maintenance . 133
6.2.11 Vacuum Pump Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.2.11.1 Turbo Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.2.11.2 Scroll Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.2.11.3 Oil Mist Eliminators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133
6.2.11.4 Diaphragm Pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 134
6.2.12 Removing Condensation from Inside the Vacuum Chamber . . . . . . . . . . . . 134
6.3 Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
6.3.1 Vacuum Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 135
6.3.1.1 Testing the Turbo Vacuum Pump Alone . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136
6.3.1.2 Testing the Vacuum Pumping System Along with the
Connection to the Probe Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 136
6.3.1.3 Testing the Vacuum Pumping System, the Connection to the
Probe Station and the Probe Station Vacuum Chamber . . . . . . . . . . 137
6.3.1.4 The Impact of Cryopumping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137
6.3.1.5 Vacuum Chamber Leak Test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137
6.3.1.6 Will Not Achieve 10-2 Torr . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
6.3.1.7 Will Not Achieve 10-3 Torr . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138
6.3.1.8 Will Not Achieve Less Than 10-3 Torr or Cool to 10 K . . . . . . . . . . . . . . 139
6.3.2 CCR Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
6.3.3 Probe Station Cooling Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
6.3.3.1 Probe Station Does Not Begin to Cool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
6.3.3.2 Sample Stage Will Not Cool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
6.3.3.3 Radiation Shield Stage Will Not Cool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
6.3.3.4 Sample Stage Does Not Reach Base Temperature . . . . . . . . . . . . . . . . . 140
6.3.3.5 Takes Too Long to Cool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
6.3.3.6 Erratic Temperature Readings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
6.3.4 Image System Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
6.3.4.1 No Image . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
6.3.4.2 Insufficient Sample Illumination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
6.3.4.3 Poor Image Quality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
6.3.4.4 Fog on the Viewport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
6.3.4.5 Height Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
6.3.4.6 Vibration in the Image System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
6.3.4.7 Poor Contrast Images . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
6.3.4.8 Image Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144
6.3.5 Probe Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145

Model CRX-6.5K Probe Station
6.3.5.1 Bent or Broken Probe Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145
6.3.5.2 Poor or Non-Ohmic Electrical Contact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
6.3.5.3 Loss of Continuity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 146
6.4 Service Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
6.4.1 Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
6.4.2 Pin Outs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 148
6.4.3 Instrumentation Wiring Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
6.5 Technical Inquiries . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
6.5.1 Contacting Lake Shore . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
6.5.2 Return of Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
6.5.3 RMA Valid Period. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
6.5.4 Shipping Charges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
6.5.5 Restocking Fee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151

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Chapter 1: Introduction
1.1 General This chapter serves as a brief introduction to the components that make up a com-
plete testing environment with the Model CRX-6.5K station at the core of that sys-
tem. Also covered is a brief description of the testing environment and the types of
applications for the probe station.
Features:
DCryogen-free operation
DAllows unsupervised cool down
DLow temperature operation
DMinimize sample condensation during cool-down
DCustomizable to accommodate a 51 mm (2 in) wafer
1.2 Product
Description
Designed for versatility and high performance, the Lake Shore Model CRX-6.5K is our
premium cryogen-free closed cycle refrigerant probe station. This system is the solu-
tion for those looking for the convenience of cryogen-free operation and the excep-
tional measurement performance of a Lake Shore product. Using a self-contained
closed cycle refrigerator (CCR), the station will cool down to cryogenic temperatures
unassisted, eliminating the need for monitoring by the researcher. Various options
and configurations on the Model CRX-6.5K enable the researcher to conduct exacting,
challenging test measurements. The Model CRX-6.5K provides Lake Shore’s best low-
temperature cryogen-free performance, with configurations enabling sample tem-
peratures as low as 10 K. Multiple temperature sensors throughout the station
ensure accurate, repeated measurements.
The 2-stage CCR allows the sample to be maintained at elevated temperature during
cool down, reducing the potential for condensation, a critical requirement for mea-
suring organic materials. The Model CRX-6.5K is designed to accommodate wafers as
large as 51 mm (2 in) diameter.

2CHAPTER 1: Introduction
Model CRX-6.5K Probe Station
1.3 Specifications General specifications about the Model CRX-6.5 K probe station are provided in the
table below.
SAMPLE COOLING ASSEMBLY
Type 2-stage (sample + radiation shield)
Radiation shielding Radiation shield with top viewport surrounds sample
Cooling source 2-stage closed cycle refrigerator (CCR) with 3 W cooling power at 10 K
MAGNET FIELD
Not an option
TEMPERATURE1
Base temperature Control range Configuration
8 K 8.5 K to 350 K 2 probe arms installed
9 K 9.5 K to 350 K 4 probe arms installed
10 K 10.5 K to 350 K 6 probe arms installed
20 K 20 K to 675 K with PS-HTSTAGE option
1
Base temperature assumes heat load for probes thermally anchored as listed in the Probing section, below.
CONTROL STABILITY
Sample stage temperature Stability
Base temperature (no heater control) Not specified
<10 K ±25 mK
11 K to 350 K ±10 mK
Cooling source ±50 mK
VACUUM
Room temperature <5 × 10-4 Torr
Base temperature <1 × 10-5 Torr
Maximum temperature <5 × 10-5 Torr
CYCLE TIME (LHe)
6.25 h
Pump down 0.5 h
Station cool down 3.5 h
Station warm up 2.25 h
VIBRATION AT SAMPLE
<2 µm
SAMPLE
Maximum sample size 51 mm (2 in) diameter
Sample backside optical access Not an option
Sample rotation Not an option
PROBING CONFIGURATIONS
Maximum probes 6
Probe arm sensor Included for monitoring probe temperature
Cooled probe mounts <20 K with sample at base temperature
Probe mount Thermally anchored to sample stage
Probe arm Thermally anchored to radiation shield
DC/RF probes Electrical isolation >100 G)for low leakage measurements
TABLE 1-1 Model CRX-6.5K probe station specifications

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.
Microwave probes Frequency range DC up to 67 GHz for RF measurements
Fiber optic probes Available for electro-optical measurements
Probe landing All probes can land at single point in 25.4 mm (1 in) diameter circle
CRYOGEN CONSUMPTION
Room to base temperature (total) Not required
Helium at 5 K Not required
TABLE 1-1 Model CRX-6.5K probe station specifications

4CHAPTER 1: Introduction
Model CRX-6.5K Probe Station
1.4 Station Details Station details for the Model CRX-6.5 K probe station are provided in the table below.
TEMPERATURE EQUIPMENT
Sample stage sensor/heater power DT-670-CU-HT calibrated silicon diode/100 W
Radiation shield sensor/heater power DT-670C-CU silicon diode/50 W
CCR 2nd stage sensor/heater power DT-670A-CU silicon diode/50 W installed but not actively monitored
CCR 1st stage sensor/heater power DT-670C-CU silicon diode/100 W
Probe arm DT-670C-SD silicon diode (on one probe arm)/no active control
Temperature controller Model 336
Helium transfer line Not required
INCLUDED SAMPLE HOLDER
Removable SH-1.25-G, 31.8 mm (1.25 in) max sample size, grounded
STATION FOOTPRINT
800 mm (31.5 in) width × 670 mm (26.4 in) depth (does not include CCR compressor)
VACUUM CHAMBER
Material Electroless nickel-plated aluminum
Overall size 203 mm (8 in) outer diameter ×
132 mm (5.2 in) tall
Chamber access 152 mm (6 in) diameter opening
Viewport 63.5 mm (2.5 in) diameter fused quartz
Viewing area 54.0 mm (2.13 in) diameter
Pump port NW 25 with included vacuum isolation valve
Gauge port NW 25
Gas port 0.25 in NPT with valve
Over pressure safety 3.5 kPa (0.5 psi) pressure relief valve
RADIATION SHIELDING
Material Electroless nickel-plated aluminum
Sample access 132 mm (5.2 in) diameter lid
Viewport 63 mm (2.48 in) diameter IR absorbing window
Viewing area 50.8 mm (2.00 in) diameter
INCLUDED KITS
Tool kit Included tools for standard operation
Spares kit Included kit for common consumable items
Probe starter kit ZN50R-25-W (qty 2), ZN50R-25-BECU (qty 2), and
ZN50R-CVT-25-W (qty 2) for training
UTILITIES
1-phase voltage 100/120/220/240 VAC (+5%, -10%), 50/60 Hz
1-phase power 1.5 kVA recommended
1-phase voltage (CCR) 208/230 V (+5%), 60 Hz or 200/230/240 (+5%), 50 Hz
(2 pole, 3 wire single phase plus ground, 20 A)
1-phase power (CCR) 3.0 kW, 15.5 A full load at 208 V, 60 Hz;
2.6 kW, 13 A full load at 200 V, 50 Hz
Cooling water power dissipation (CCR) 3.2 kW 50/60 Hz
APPROVAL
All instruments CE marked
TABLE 1-2 Model CRX-6.5K probe station details

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1.5 Safety
Considerations
Observe these general safety precautions and all warning and cautions throughout
this manual during all phases of instrument operation, service, and repair. Failure to
comply with these precautions or with specific warnings elsewhere in this manual
violates safety standards of design, manufacture, and intended instrument use.
Lake Shore Cryotronics, Inc. assumes no liability for customer failure to comply with
these requirements.
The Model CRX-6.5K probe station protects the operator and surrounding area from
electric shock or burn, mechanical hazards, excessive temperature, and spread of fire
from the probe station when used as directed in the manual. Environmental condi-
tions outside of the conditions below may pose a hazard to the operator and
surrounding area.
DIndoor use
DAltitude to 2000 m
DTemperature for safe operation: 5 °C to 40 °C
DMaximum relative humidity: 80% for temperature up to 31 °C decreasing lin-
early to 50% at 40 °C
DPower supply voltage fluctuations not to exceed ±10% of the nominal voltage
DOvervoltage category II
DPollution degree 2
Power and Ground Connections
1-phase: to minimize shock hazard, the probe station is equipped with a 3-conductor
AC power cable. Plug the power cable into an approved 3-contact electrical outlet or
use a 3-contact adapter with the grounding wire (green) firmly connected to an elec-
trical ground (safety ground) at the power outlet.
Power wiring must comply with electrical codes of the locality in which the unit is
installed. The power jack and mating plug of the power cable meet Underwriters Lab-
oratories (UL) and International Electrotechnical Commission (IEC) safety standards.
Do Not Operate in an Explosive Atmosphere
Do not operate the probe station in the presence of flammable gases or fumes. Opera-
tion of any electrical instrument in such an environment constitutes a definite safety
hazard.
Do Not Substitute Parts or Modify Station Components
Do not install substitute parts or perform any unauthorized modification to the probe
station. Return it to an authorized Lake Shore Cryotronics, Inc. representative for ser-
vice and repair to ensure that safety features are maintained.
Cleaning
Clean only as directed in section 6.2.

6CHAPTER 1: Introduction
Model CRX-6.5K Probe Station
FIGURE 1-1 Safety symbols
!
Direct current (power line) Equipment protected throughout
by double insulation or reinforces
insulation (equivalent to Class II of
IEC 536—see Annex H)
CAUTION: High voltages; danger of
electric shock; background color:
yellow; symbol and outline: black
CAUTION or WARNING: See
instrument documentation;
background color: yellow;
symbol and outline: black
Off (supply)
On (supply)
Frame or chassis terminal
Protective conductor terminal
Earth (ground) terminal
Alternating or direct current (power line)
Alternating current (power line)

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Chapter 2: System Overview
2.1 General Chapter 2 illustrates the Model CRX-6.5K probe station major components, options
and accessories necessary to provide the features and specifications listed in
Chapter 1.
2.2 Major
Components
This section is intended as a reference for identifying assemblies, operator interfaces
and controls called out in later chapters. A Model CRX-6.5K probe station comprises
the probe station itself and five major sub-systems. FIGURE 2-1 illustrates an overall
view of the full system. Each major component is detailed in the following sections.
FIGURE 2-1 CRX-6.5K probe station major components

8CHAPTER 2: System Overview
Model CRX-6.5K Probe Station
2.2.1 Probe Station The probe station provides the temperature measurement environment for the
sample or device under test (DUT). It also provides the electrical and optical interface
with the sample. Major components of the probe station include the vacuum
chamber, sample cooling assembly, baseplate and outer stand, probe arm assemblies,
two-stage closed cycle refrigerator (CCR), CCR stand, and ballast weights. FIGURE 2-2
illustrates the probe station components.
FIGURE 2-2 Probe station
CCR
cold head
Vacuum
chamber
Baseplate
Probe arm
assembly
Probe arm
assembly
Sample cooling assembly
CCR stand
CCR second stage
Cryocooler
vacuum
shroud
CCR first stage
Vibration
dampening
feet
Ballast weights

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2.2.1.1 Vacuum Chamber and CCR Vacuum Shroud
Vacuum is important for two reasons. It provides thermal insulation for the cryogenic
refrigeration used to cool the sample and radiation shield, and it also prevents
particulates and air in the chamber from condensing on the sample, which may lead
to sample contamination during measurements.
The vacuum chamber consists of the upper vacuum chamber which contains the
sample space, and the lower CCR vacuum shroud which contains the CCR. The two are
connected by a vibration isolation bellows. Major components of the vacuum
chamber include the vacuum chamber, lid, chamber viewport, vacuum line, purge
valve, pressure relief valve, electrical feedthroughs, and auxiliary gauge port. Major
components of the CCR vacuum shroud are the vacuum isolation valve and the
electrical feedthrough for the CCR thermometry. FIGURE 2-3 illustrates the vacuum
chamber and CCR vacuum shroud.
FIGURE 2-3 Vacuum chamber and CCR vacuum shroud
Chamber viewport
Lid
Probe arm port
Pressure
relief valve Auxillary gauge
port (front)
Ports for electrical
feedthrough
(located on the back)
Vacuum
isolation valve
(side facing out)
Port for CCR electrical
feedthrough
Purge valve
CCR vacuum shroud
Vibration isolation
bellows
Vacuum chamber

10 CHAPTER 2: System Overview
Model CRX-6.5K Probe Station
2.2.1.2 Sample Cooling Assembly
The Model CRX-6.5K sample cooling assembly contains several features to optimize
performance and efficiency. Major components of the sample cooling assembly
include the two-stage CCR cold head, sample stage, radiation shield stage, radiation
shield, and radiation shield viewport. The CCR first stage cools the radiation shield
and the CCR second stage cools the sample stage. A temperature sensor and resistive
heating element on the sample stage provide a means for sample temperature
control. Temperature sensors and heaters on the radiation shield, CCR first, and CCR
second stages allow temperature monitoring and quick warm up to room
temperature for sample exchange. FIGURE 2-4 illustrates the sample cooling
assembly.
FIGURE 2-4 Sample cooling assembly
Radiation shield
viewport
Radiation
shield
CCR second
stage
Sensor: Si diode
Heater: 50 W
Radiation
shield stage
Sensor: Si diode
Heater: 50 W
Sample
stage
Sample stage
Sensor: Si diode
Heater: 100 W
Vacuum
chamber
base CCR first
stage
Sensor: Si diode
Heater: 100 W
Sample space
thermometry port CCR
thermometry
port