Laurell WS-650 lite Series User manual

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
1
®
WS-650 LITE SERIES SPIN PROCESSOR
OPERATION MANUAL
P/N 10070119F14
July, 2011 /pg
~S/N: 11480
441 Industrial Drive
North Wales, PA 19454
215-699-7278
[email protected]
[email protected]
www.laurell.com

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
2
QUICK START INSTALLATION INSTRUCTIONS
Table of Contents Page#
SECTION 1 – HEALTH, SAFETY AND ENVIRONMENTAL.......................................... 5
1.1 LAURELL TECHNOLOGIES ENVIRONMENTAL, HEALTH AND SAFETY POLICY ..................... 6
1.2 HAZARD WARNINGS........................................................................................................................ 6
1.2.1 LEVEL OF HAZARD INTENSITY............................................................................................... 7
1.2.2 HAZARD PICTOGRAMS............................................................................................................ 8
1.2.3 HAZARD AVOIDANCE TEXT .................................................................................................... 9
1.3 EMERGENCY SHUTDOWN OPTION (STATION INSTALLATIONS ONLY) ................................... 9
1.3.1 EMO (EMERGENCY MACHINE OFF) PROCEDURE ............................................................. 10
1.4 PROTECTIVE APPAREL................................................................................................................. 10
1.5 POTENTIAL EXPOSURE HAZARDS.............................................................................................. 11
1.5.1 ELECTRICAL HAZARDS ......................................................................................................... 11
1.5.2 STATIC ELECTRICITY: BONDING AND GROUNDING ........................................................ 12
1.5.2.1 BONDING .......................................................................................................................... 12
1.5.2.2 GROUNDING..................................................................................................................... 12
1.5.3 MOVING PARTS HAZARDS .................................................................................................... 13
1.5.4 AUDIO NOISE HAZARDS ........................................................................................................ 13
1.5.5 CHEMICAL HAZARDS AND COMPATIBILITY....................................................................... 13
1.5.6 SOLVENTS ............................................................................................................................... 14
1.5.7 ISOPROPYL ALCOHOL........................................................................................................... 15
1.5.8 HYDROGEN PEROXIDE .......................................................................................................... 15
1.5.9 SULFURIC ACID ...................................................................................................................... 16
1.5.10 HAZARDOUS WASTE ........................................................................................................... 16
1.5.11 CHEMICAL DISPOSAL .......................................................................................................... 17
1.5.12 ADDITIONAL SAFETY PRECAUTIONS................................................................................ 17
1.6 ENVIRONMENTAL .......................................................................................................................... 18
1.6.1 MATERIALS SAFETY DATA SHEETS.................................................................................... 18
1.6.2 MIXING INCOMPATIBLE CHEMICALS................................................................................... 19
1.6.3 RECOMMENDED ABATEMENT TECHNOLOGY ................................................................... 19
1.6.4 LOCAL RESTRICTIONS (EXAMPLE) ..................................................................................... 19
1.6.5 EQUIPMENT DISPOSAL.......................................................................................................... 20
SECTION 2 - INSTALLATION...................................................................................... 21
2.1 FACILITY REQUIREMENTS............................................................................................................ 21
2.1.1 FACILITIES ............................................................................................................................... 21
2.1.2 POWER REQUIREMENTS....................................................................................................... 21
2.1.3 MAIN CIRCUIT BREAKER....................................................................................................... 21
2.1.4 DIMENSIONS............................................................................................................................ 21
2.1.5 AMBIENT TEMPERATURE...................................................................................................... 21
2.1.6 CHAMBER PRESSURE ........................................................................................................... 22
2.1.7 DISPENSE LIQUIDS................................................................................................................. 22
2.1.8 EXHAUST REQUIREMENTS ................................................................................................... 22

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
3
2.1.9 VACUUM PUMP (OPTION) ...................................................................................................... 22
2.1.10 SECONDARY CONTAINMENT AND SPILL PREVENTION FEATURES............................. 22
2.2 INSTALLATION ............................................................................................................................... 23
2.2.1 SPIN PROCESSOR CONNECTIONS ...................................................................................... 23
2.2.1.1 COMPRESSION FITTING ASSEMBLY............................................................................ 24
2.2.2 DIMENSIONAL DRAWINGS .................................................................................................... 24
2.2.3 DRAIN AND EXHAUST CONNECTIONS ................................................................................ 25
2.2.4 INDECK CONNECTIONS ......................................................................................................... 27
SECTION 3 - OPERATION PROCEDURES – 650 CONTROLLER............................. 29
3.1 POWER ............................................................................................................................................ 30
3.2 INTERLOCKS .................................................................................................................................. 30
3.2.1 LID INTERLOCK....................................................................................................................... 30
3.2.2 VACUUM INTERLOCK............................................................................................................. 30
3.2.3 SEAL PURGE INTERLOCK ..................................................................................................... 32
3.3.4 EXHAUST FLOW INTERLOCK................................................................................................ 32
3.3 - KEYPAD......................................................................................................................................... 33
3.3.1 OPERATIONAL KEYS ............................................................................................................. 34
3.4 - THE LCD DISPLAY ....................................................................................................................... 39
3.4.1“SELECT PROCESS” SCREENS........................................................................................ 39
3.4.2 “RUN MODE” SCREENS......................................................................................................... 40
3.4.2.1 “RUN MODE” – DISPLAYED FIELDS – see figure 3-11 ................................................ 41
3.4.2.2 “RUN MODE” – OPERATION .......................................................................................... 45
3.4.3 “EDIT MODE” SCREENS ........................................................................................................ 48
3.4.3.1 EDIT MODE – DISPLAYED FIELDS – see figure 3-15 ................................................... 48
3.4.3.2 “EDIT MODE” – OPERATION .......................................................................................... 50
3.4.4“INFO MODE” SCREENS .................................................................................................... 53
3.4.4.1 “INFO MODE” - STATISTICS - DISPLAYED FIELDS – see figures 3-21A & 3-21B .... 53
3.4.4.2 “INFO MODE” - CONFIGURATION - DISPLAYED FIELDS – see figures 3-22A-3-22E54
3.4.4.3 “INFO MODE” - ABOUT - DISPLAYED FIELDS – see figures 3-23A ........................... 57
3.5 – PROGRAMMING THE 650 CONTROLLER ................................................................................. 57
3.6 - RUNNING THE 650 CONTROLLER ............................................................................................. 58
3.7 - REMOVING/CHANGING CHUCKS............................................................................................... 59
3.7.1 “SCREW ON” CHUCK ............................................................................................................. 59
3.7.2 “PRESS-ON” OR “SCREW DOWN” CHUCK ......................................................................... 59
3.7.3 HIGH PERFORMANCE DRIVE (HPD2) MOTOR - PRESS-ON OR SCREW DOWN CHUCK61
3.8 – HIGH PERFORMANCE DRIVE MOTOR (HPD2)......................................................................... 61
3.8.1 PROGRAMMING THE HPD2 ................................................................................................... 61
3.9 – FIRMWARE VERSION.................................................................................................................. 63
3.10 – WAFER SIZE vs. SPIN SPEED.................................................................................................. 63
SECTION 4 - MAINTENANCE...................................................................................... 65

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
4
4.1 ERROR MESSAGES ....................................................................................................................... 66
4.1.1 VACUUM LOSS (ON UNITS EQUIPPED WITH VACUUM SENSOR ONLY.)........................ 69
4.1.2 REMOVING, CLEANING AND INSTALLING THE VACUUM VALVE .................................... 69
4.1.3 VACUUM CHUCK WET TEST ................................................................................................. 72
4.1.4 CLEANING AND REPLACING THE CHUCK O-RING ............................................................ 73
4.1.4.1 O-RING COMPOSITION, USES & RECOGNITION ......................................................... 74
4.1.4.2 O-RING PART LIST FOR WS-400X – xxNPP/TFM-LITE ................................................ 75
4.1.5 MOTOR OPERATION............................................................................................................... 77
4.1.6 MOTOR CALIBRATION ........................................................................................................... 78
4.2 REPLACEMENT PARTS ................................................................................................................. 78
4.3 WARRANTY..................................................................................................................................... 78
SECTION 5 – APPENDIX ............................................................................................. 79

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
5
SECTION 1 – HEALTH, SAFETY AND ENVIRONMENTAL
INTRODUCTION
This chapter covers safety information pertaining to the spin processor system. The
spin processor uses high voltage electrical power, mechanical motion, and varying
temperatures in the processing of semiconductors. Safety precautions MUST be
followed when servicing or maintaining the spin processor system.
Service and maintenance personnel should be trained in:
Electrical safety
Hazardous Chemical Handling
Mechanical Motion
NOTE: Only LTC factory-trained personnel should service the spin processor system.
Some maintenance tasks may require more than one person to perform. The presence
of potentially hazardous chemicals may require two or more workers to safely complete
the tasks. Whenever possible turn off and lockout gases, chemical delivery valves, and
electrical power before service or maintenance is performed.
Possible hazards associated with the spin processor system are:
Electrical shock
Inhalation, exposure, and skin contact with solvent chemicals
Fire
Mechanical hazards
Safety procedures associated with the spin processor are noted within this section and
throughout this volume. The OEM components for your system also contain specific
safety instructions, which are provided in their respective documentation.
Each spin processor is configured to use specific chemical materials in its standard
process, as well as facility gases and fluids for certain maintenance tasks. These
chemical materials may be hazardous, flammable and/or toxic and require careful
handling. Safe handling procedures for these chemical materials are discussed in this
manual.
Laurell Technologies Corporation is not liable for damages resulting from improper
installation or misuse of their spin processor system. Every operator and service
person must read and thoroughly understand the operation and maintenance manuals,
as well as any additional information, provided by Laurell with respect to this product.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
6
1.1 LAURELL TECHNOLOGIES ENVIRONMENTAL, HEALTH AND SAFETY POLICY
Laurell Technologies maintains an EHS (Environmental, Health and Safety) policy and
will periodically notify its customers of new issues, which may affect the way in which its
equipment is being used. All technical information regarding each customer and
process use is entered into the company wide database. Hard copy and electronic
backups are maintained as part of the company’s vital information and recovery policy.
This information is reviewed and updated if necessary on a daily basis.
1.2 HAZARD WARNINGS
Potential safety hazards associated with the spin processor system are clearly labeled
on the equipment and in this manual using the preferred hazard-warning trilogy of alert
words, pictograms, and avoidance techniques. This hazard-warning system is in
accordance with ANSI Standard Z535 and OSHA 29 CFR 1910.144-147. The labels
will be contained within a box border and will apply to the text immediately following the
warning. (See Figure # 1-2A)
Hazard Alert Labels are subdivided into three areas:
The Level of Hazard Intensity
Hazard Pictograms
Hazard Avoidance Text
Warning
!
MOVING
PARTS
Keep hands away
from chamber area
while in operation.
Figure # 1-2A
HAZARD ALERT LABEL
The spin processor manual uses this system of hazard warnings before each service or
maintenance procedure that may involve hazards to personnel. When working on OEM
sub-systems please refer to the manufacturer’s documentation for specific hazard
warnings. READ and UNDERSTAND precautions and hazard warnings BEFORE
performing any service or maintenance task.
Hazard
Avoidance Text
Alert Word
(Level of Intensity)
Hazard
Pictogram

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
7
1.2.1 LEVEL OF HAZARD INTENSITY
Alert words are used to communicate the level of hazard intensity. The hazard alerts
provided in the manual utilize some or all of the following key words:
“CAUTION”- (Depicted by black lettering on a yellow background) - This
indicates potential hazard or unsafe practices or operations that could cause
damage to the tool or product. Proper precautions should be taken. (See Figure
# 1-2B)
Caution
!
Figure # 1-2B
CAUTION ALERT
“WARNING” - (Depicted by black lettering on an orange background) - This
indicates that an immediate hazard exists and special precautions are necessary.
Loss of life or limb may occur if WARNING labels are not heeded. (See Figure #
1-2C)
Warning
!
Figure # 1-2C
WARNING ALERT
“DANGER” - (Depicted by black lettering on a red background) - This indicates
that an immediate hazard exists, which, if not avoided, will result in serious injury
or death. (Typically not used on Laurell spin processor) (See Figure # 1-2D)
Danger
!
Figure # 1-2D
DANGER ALERT
NOTE: All Danger, Warning, and Cautionary notices must be carefully read,
thoroughly understood and strictly observed. The users of this product assume
the responsibility of implementing all Governmental, Federal, State, and Local
safety regulations applicable to the use of this product.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
8
1.2.2 HAZARD PICTOGRAMS
Hazard Pictograms (pictorial hazard alert symbols/icons) are used to visually convey the
nature, avoidance technique, and possible consequences of a given hazard, if the
instructions are not followed. Pictograms help assure that non-English speaking
persons are alerted to potential hazards and how the hazard may be avoided.
Laurell Technologies Corporation has adopted a series of pictograms used to identify
various hazards, which may be present in the spin processor. These icons appear in
the manual and on the equipment wherever exposure to hazards is possible. Several
may be used in each manual; however, not all pictograms are applicable to each
system. Figure # 1-2E depicts some or all of the pictograms used on Laurell spin
processors. Service and maintenance personnel should become familiar with all of the
pictograms shown so that the hazard represented by each will be recognized on sight.
General
Hazard
Flammable
Material
Toxic
Chemical
Pinch Point
Hazardous
Voltage
Enclosed
Moving Parts
Chemical
Hazard
DO NOT
OPEN
Compressed
Gas
Figure # 1-2E
HAZARD PICTOGRAMS

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
9
1.2.3 HAZARD AVOIDANCE TEXT
Text is also used to convey methods of avoiding certain hazards and the consequences
that will occur if proper precautions are not taken. (See Figure # 1-2F)
Warning
!
INCOMPATIBLE
MATERIALS
Avoid mixing incompatible
materials in chamber or
waste stream.
Failure to follow operating
instructions could result
in death or injury.
Figure # 1-2F
AVOIDANCE TEXT
1.3 EMERGENCY SHUTDOWN OPTION (STATION INSTALLATIONS ONLY)
This spin processor is NOT equipped with its own EMO (Emergency Machine Off)
circuit; it should be powered by a system with EMO capability. If your safety department
or policies allow: simply having the incoming power plug far enough away from the spin
processor, properly labeled and fully accessible may be sufficient.
The EMO button area should be located within easy reach of the spin processor
operator. In the event of an emergency, pressing the EMO button will remove all power
to the spin processor.
After the EMO circuit has been reset and power has been restored, the spin processor
will automatically reset. The spin processor will revert to the normal “power up”
condition. The motor will revert to a “stopped” condition, and any process that was being
performed when the EMO occurred will have been terminated. Any wafer that was
being processed during this shutdown may have incurred some damage and should be
treated as such.
By following the normal steps, described in Section 3.6, for initiating the spin processor,
a new process may be started.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
10
1.3.1 EMO (EMERGENCY MACHINE OFF) PROCEDURE
1. Locate the nearest EMO button.
2. Press the EMO button to immediately interrupt system
power.
EMO
Figure # 1-3
EMO (Emergency Machine Off) PROCEDURE
1.4 PROTECTIVE APPAREL
Always wear personal protective equipment when handling any potentially hazardous
chemicals. Use and maintenance of the spin processor may require using protective
gloves, an apron, and chemical goggles and/or face shield, depending on the operation.
Be sure to select protective apparel that is appropriate for the chemicals being used.
Refer to your company's safety policies and procedures for the personal protective
equipment required.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
11
1.5 POTENTIAL EXPOSURE HAZARDS
The following section will cover potential exposure hazards, which may occur while
operating the spin processor system.
NOTE: This section should be READ and UNDERSTOOD before using the spin
processor.
1.5.1 ELECTRICAL HAZARDS
WARNING
240/115 Volts AC is used throughout the system. Do not attempt to
troubleshoot or make repairs. (Refer to Section 2 for spin processo
r
power requirements and main circuit breaker information.)
Caution: an extreme electrical hazard will exist if this system is immersed in liquid. The
system must not be located where it could be accidentally knocked into any open liquid
bath. An earthquake-proof base can be supplied for any system.
Electrical components are located internally, and electrical power is distributed
throughout the spin processor system. Access can only be gained by removal of the
bottom panel, which is secured by screws. Only LTC factory trained, qualified
technicians should be permitted to work on an uncovered machine. Use all precautions
and safety measures characteristically taken with AC and DC circuitry.
The spin processor should be locked and tagged out according to the procedure
outlined below before any maintenance or service is performed.
Maintenance tasks are categorized by “TYPE TASK” as described below. The spin
processor has no tasks that are above Type 2. The maintenance manual identifies
tasks that may have electrical energy present using the following conventions:
Type 1 - Equipment is fully de-energized (electrically "cold"). Lockout and tag-out
procedures should be used.
Type 2 - Equipment is energized. Live circuits are covered or insulated. Work is
performed at a remote location to preclude accidental shock.
Type 3 - Equipment is energized. Live circuits are exposed and accidental contact
is possible. Potential exposures are less than 30 volts, 42.2 volts peak,
240 volt-amps, and 20 Joules.
Type 4 - Equipment is energized. Live circuits are exposed and accidental contact
is possible. Voltage potentials are greater than 30 volts RMS, 42.2 volts
peak, 240 volt-amps, and 20 Joules, or radio frequency (RF) is present

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
12
Type 5 - Equipment is energized and measurements and adjustment require
physical entry into the equipment, or equipment configuration will not
allow the use of clamp-on probes.
NOTE: Unless otherwise noted, all maintenance should be performed with the
spin processor system power OFF. There are NO maintenance tasks that require
servicing of the spin processor while it is energized.
1.5.2 STATIC ELECTRICITY: BONDING AND GROUNDING
WARNING
Friction caused by liquids moving can cause a static electricity buildup.
If this charge is not properly dissipated, then fires or explosions may
occur. Be sure to follow appropriate bonding and grounding practices
when supplying flammable and combustible liquids to the spin
processor.
1.5.2.1 BONDING
Bonding is creating a metal-to-metal connection between the dispensing and receiving
containers to keep them both at the same electrical potential.
1.5.2.2 GROUNDING
Grounding is creating a metal-to-metal connection between the dispensing container
and a known grounded object to allow static electricity to dissipate into the ground.
For more information on Bonding and Grounding see NFPA 77, Static Electricity.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
13
1.5.3 MOVING PARTS HAZARDS
WARNING
Use care when opening or closing lids. Lids are heavy, and if dropped
accidentally may crush or injure fingers.
WARNING
The chuck on the spin motor can spin in excess of 10,000 rpm. Keep
hands and other body parts away from process chamber area. (Refer
to Section 3.7 for information on changing chucks.)
1.5.4 AUDIO NOISE HAZARDS
Audible sound pressure readings were taken 3 feet (0.9 m) from the
system during normal operation. The background decibel level during
standby was measured to be 48 dB(A). The sound pressure readings
during normal operations were measured to be 51 dB(A). Readings of
less than 80 dB(A) are considered non-hazardous.
1.5.5 CHEMICAL HAZARDS AND COMPATIBILITY
The following section outlines some general guidelines for using chemicals. Refer to
Section 2 for more chemical information.
CAUTION
Each spin processor is configured to use specific chemicals for its
standard process and includes facility gases and fluids, and
maintenance chemicals.
WARNING
The use of incompatible materials in the spin processor is not allowed.
If incompatible materials mix in the process chamber or in the waste
streams, a hazardous and/or toxic chemical reaction may occur. It is
vitally important not to mix or use incompatible materials (i.e., acids
with bases, corrosives with organics, acids with organics, etc.). Before
any new chemical is used in the spin processor, the compatibility
of the material with other chemicals in the system and the
structural materials used in making the spin processor should be
investigated. (Refer to Section 1.6.2 for more information on
incompatible chemicals.)

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
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distributed without express written permission from a corporate officer.
14
WARNING
Residual chemicals may be left in the process chamber after
processing has occurred. These potentially toxic or corrosive residues
may pose inhalation or dermal hazards. Be sure to adequately rinse
the process chamber before opening, wear appropriate personal
protective equipment and ensure that the spin processor is located in a
properly ventilated area that is also protected from splash hazards.
(Refer to Section 2.1 for facility requirements.)
1.5.6 SOLVENTS
The following section outlines some general guidelines for using solvents.
WARNING
Most solvents are extremely flammable. Keep all flammable liquids
away from ignition sources such as open flames or arcing electrical
equipment. Keep all chemicals in a well-ventilated area, preferably
in a cabinet designed for such storage.
WARNING
Flammable liquids should be stored and transported in approved
safety cans only. When transferring flammable liquids from one
container to another, be sure the pouring and receiving containers
are bonded to each other and to a ground to prevent static electrical
sparks. (Refer to Section 2.1.9 for secondary containment)
if ti )
WARNING
Never store more than a one-day supply of flammable liquid in the
using area, unless it is stored in a cabinet approved for flammable
liquid storage.
WARNING
Depending on your location of use, other local fire or building code
(e.g. UFC, UBC, NFPA, etc.) requirements may apply in the proper
storage, dispensing, and use of flammable materials. Please consult
with your local
j
urisdiction having authority for specific requirements.
(Refer to Section 1.6.4 for local restrictions.)
WARNING
Before using solvents, read and understand the safety instructions,
provided by the supplier, on the container labels and MSDS (Material
Safety Data Sheets). (Refer to Section 1.6.1 for more information on
Material Safety Data Sheets.)

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
15
1.5.7 ISOPROPYL ALCOHOL
WARNING
Isopropyl alcohol is a colorless liquid with an odor resembling
alcohol. It causes irritation of the eyes, skin, and respiratory tract. It
is extremely flammable and should be stored separately. Wear eye
protection (safety glasses or a full-face shield), gloves, and an
apron as recommended by your company’s safety department or
the manufacturer. If isopropyl alcohol gets on your skin, rinse with
water for 15 minutes, refer to the manufacturers MSDS for first aid
instructions and contact your company’s safety department. Use
isopropyl alcohol under a fume hood or in a well-ventilated area.
Inhalation: Inhalation of vapors irritates the respiratory tract. Exposure to high
concentrations has a narcotic effect, producing symptoms of dizziness, drowsiness,
headache, staggering, unconsciousness, and possibly death.
Ingestion: Can cause drowsiness, unconsciousness, and death. Gastrointestinal pain,
cramps, nausea, vomiting, and diarrhea may also result. The single lethal dose for a
human adult = about 250 ml (8 ounces).
Skin Contact: May cause irritation with redness and pain. May be absorbed through
the skin with possible systemic effects.
Eye Contact: Vapors cause eye irritation. Splashes cause severe irritation, possible
corneal burns, and eye damage.
Chronic Exposure: Chronic exposure may cause skin irritation.
Aggravation of Pre-existing Conditions: Persons with pre-existing skin disorders or
impaired liver, kidney, or pulmonary function may be more susceptible to the effects of
this agent.
1.5.8 HYDROGEN PEROXIDE
DANGER
Hydrogen Peroxide is a strong oxidizer; contact with other
material may cause fire and/or corrosive reaction. It may cause
burns to skin, eyes, and respiratory tract. Harmful if swallowed.
DANGER
Before using, read and understand the safety instructions
provided by the supplier on the container labels and Material
Safety Data Sheets.
Inhalation: Vapors are corrosive and irritating to respiratory tract. In severe cases,
exposures may result in pulmonary edema and death.
Ingestion: Corrosive and irritating to the mouth, throat, and abdomen. Large does
may cause symptoms of abdominal pain, vomiting, and diarrhea as well as blistering or
tissue destruction.
Skin Contact: Corrosive. Symptoms of redness, pain and severe burn can occur.

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Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
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distributed without express written permission from a corporate officer.
16
Eye Contact: Vapors are very corrosive and irritating to the eyes. Symptoms include
pain, redness and blurred vision. Splashes can cause permanent tissue destruction.
Chronic Exposure: No information found.
Aggravation of Pre-existing Conditions: Persons with pre-existing skin disorders or
eye problems or impaired respiratory function may be more susceptible to effects of the
substance.
1.5.9 SULFURIC ACID
DANGER
Sulfuric Acid is a poisonous and corrosive liquid. It will cause
severe burns to all body tissue. It may be fatal if swallowed or
contacted with skin. Harmful if inhaled. Affects teeth. Water
reactive. Cancer Hazard. Strong inorganic acid mists containing
sulfuric acid can cause cancer.
DANGER
Before using, read and understand the safety instructions provided
by the supplier on the container labels and Material Safety Data
Sheets.
Inhalation: Produces damaging effects on the mucous membranes and upper
respiratory tract. Symptoms may include irritation of the nose and throat and labored
breathing. May cause lung edema, a medical emergency.
Ingestion: Corrosive. Swallowing can cause severe burns of the mouth, throat, and
stomach, leading to death. Can cause sore throat, vomiting, and diarrhea. Circulatory
collapse with clammy skin, weak and rapid pulse, shallow respiration, and scanty urine
may follow ingestion or skin contact. Circulatory shock is often the immediate cause of
death.
Skin Contact: Symptoms of redness, pain, and severe burn can occur.
Eye Contact: Contact can cause blurred vision, redness, pain, and severe tissue burns.
Can cause blindness.
Chronic Exposure: Long-term exposure to mist or vapors may cause damage to teeth.
Chronic exposure to mists containing sulfuric acid is a cancer hazard.
Aggravation of Pre-existing Conditions: Persons with pre-existing skin disorders or
eye problems or impaired respiratory function may be more susceptible to the effects of
the substance.
1.5.10 HAZARDOUS WASTE
CAUTION
Normal operation and maintenance of the system creates
hazardous wastes that require special handling and disposal.
Disposal of these wastes must follow all codes, laws, and your
company’s safety and health requirements.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
17
1.5.11 CHEMICAL DISPOSAL
WARNING
Never mix empty acid, flammable liquid, or oxidizer containers in
the same waste cans. Chemicals must be handled in accordance
with local, state and federal regulations and within the guidelines
established by your company. NEVER dispose of chemically
contaminated wipes or clothes in regular trash. Contact your
companies Safety or Environmental Department for instructions on
how to handle and dispose of chemically contaminated trash.
1.5.12 ADDITIONAL SAFETY PRECAUTIONS
Full compliance with the following safety practices and those appearing earlier in this
chapter is expected.
1. Never work alone on live electrical circuits. You must be within sight or calling
distance of another employee who has the following qualifications:
Knows how to remove power from the equipment.
Knows how to apply artificial respiration.
Is acquainted with emergency procedures, first aid locations, and the location
and use of fire extinguishers.
2. Turn off, lockout, and tag all hazardous energy sources (e.g., gas, pneumatic,
mechanical, gravitational, and electrical) before performing any maintenance.
3. Do not wear rings, wristwatches, or other jewelry on your hands or arms while
working on live electrical circuits.
4. Wear eye protection while working on live electrical circuitry where a flash might
occur. Do not wear contact lenses.
5. Replace all safety shields after completing setup, troubleshooting, and
maintenance procedures.
6. Immediately report any unsafe conditions to your supervisor.
7. Comply with all applicable regulations governing the disposal of hazardous
materials. Dispose of waste materials in a manner that will prevent air or water
pollution and will not expose humans, animals, or vegetation to hazards.
8. Do not permit smoking or food in the work area.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
18
9. Secure electrical cords and cables where they cannot be tripped over or
otherwise accidentally pulled from their connectors.
10. Be sure that all personnel know the location of the main circuit breaker in case of
an electrical emergency.
11. Locate fire extinguishers near the equipment. The extinguishers must be
approved for electrical or chemical fires in accordance with OSHA and local,
state, and federal codes.
12. Operating personnel must NOT remove covers or panels. Only qualified
maintenance personnel may make component replacements and internal
adjustments only.
13. Do not replace components with the power cable connected. Under certain
conditions dangerous voltages may exist, even when the power cable is
removed. To avoid injuries, always disconnect power; lock out the circuit
breaker and discharge circuits before performing a task.
14. Do not attempt internal service or adjustment unless a person capable of
rendering first aid is present. Be sure to follow your company’s safety
procedures.
15. Because of the danger of introducing additional hazards, do not install substitute
parts or make any unauthorized modification to the system.
16. Contact Laurell Field Service for service and repair to ensure that safety features
are maintained.
17. Maintain adequate safety precautions when handling toxic chemicals. Avoid
breathing dust or spray mist. Use chemicals only with adequate ventilation and
keep containers closed when they are not in use. Store chemicals in a locked
cabinet where they cannot be removed accidentally.
1.6 ENVIRONMENTAL
1.6.1 MATERIALS SAFETY DATA SHEETS
Before introducing any new chemical, consult the factory specifications. The chemical
manufacturer or supplier provides MSDS (Material Safety Data Sheets) for each
chemical. The MSDS gives vital chemical safety information on the hazardous
components, the chemical’s physical properties, spill and leak procedures, waste
disposal information, and personal protective equipment required to handle the
chemicals involved. Follow the information on the MSDS when handling, refilling
chemical containers or cleaning up spilled or leaked materials. Before using solvents,
read and understand the safety instructions provided by the supplier on the container
labels and MSDS.
NOTE: Laurell Technologies Corporation recommends that copies of the MSDS
be kept with this manual and be made available to your employees. There are
several websites dedicated to providing chemical information. For reference,
Laurell has listed the following:
www.hazard.com/msds/
http://webbook.nist.gov/chemistry

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
19
1.6.2 MIXING INCOMPATIBLE CHEMICALS
It is important not to mix incompatible materials in the process chamber and/or waste
stream of the spin processor (i.e., mixing acids with bases, corrosives with organics,
and acids with organics...). Mixing incompatible materials can result in unwanted
chemical reactions in either the chamber, exhaust or drain line. Only compatible
materials are recommended for use within the spin processor system. Before any new
chemical is used, compatibility of the material with other chemicals in the system and
the materials used to construct the spin processor should be investigated. Some of this
information may be obtained from the MSDS or the chemical supplier.
NOTE: Use of incompatible materials in the spin processor is strictly forbidden
and should not be done under any circumstances.
1.6.3 RECOMMENDED ABATEMENT TECHNOLOGY
The vapor by-products expected in the effluent of the spin processor system should be
handled and disposed of in accordance with any and all safety and legal abatement
procedures. The recommended abatement technologies for efficient removal of
hazardous process by-products are solvent destruction or solvent recovery. Several
methods exist that are capable of removing the process by-products from the effluent
stream. Some are reportedly more effective than others in terms of efficiency. The
oldest abatement technology is to exhaust this effluent into the house solvent system,
which is normally present in a wafer manufacturing facility.
The trend of the industry is to abate the process by-products at the point-of-use (POU),
which localizes containment of the process effluent allowing ease of handling. Various
POU technologies, as described below, are available for controlling these process
by-products.
Thermal-oxidizers convert the effluent gases into other compounds using either
flame combustion or a heated catalytic process. The flame combustion requires
fuel (usually hydrogen or natural gas) to maintain the flame.
POU dry scrubbers are chemical-absorbent materials that capture the effluent
onto absorbent granules. The benefits of dry scrubbers include cost
effectiveness, non-hazardous cartridge disposal, and, if available, recycling or
recovery of the solvent as a liquid.
More information on abatement technologies may be obtained from Semiconductor
Safety Association (a trade group) at [phone] or http://seshaonline.org/
1.6.4 LOCAL RESTRICTIONS (EXAMPLE)
The use of IPA (Isopropyl Alcohol) creates an environmental concern. Certain local
jurisdictions have limitations on, and/or require permits for, the use of organic cleaning
solvents. For example, the San Francisco Bay Area Air Quality Management District
(BAAQMD) Regulation 2.1.118 limits the amount of volatile organic wipe cleaning
solvents that may be used without obtaining a specific permit to 20 gallons per year per
source area. Regular wipe down of the spin processor components could exceed this
regulation’s exemption limits alone or most likely when combined with similar operations
at an end-user’s facility.

Laurell Technologies
Operations Manual WS-650-Lite Series
Revision Date: 7/26/2011
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
20
1.6.5 EQUIPMENT DISPOSAL
It is well known fact that electrical and electronic products can pollute the environment
by releasing toxic compounds from component decomposition after equipment disposal
(in a landfill for instance). The aim of the European RoHS directive is to reduce the
potential release of toxic substances from electronic products into the environment. All
of Laurell’s products sent to the EU community conform completely to the RoHS
directive. The intent of the European WEEE (Waste Electrical and Electronic
Equipment) directive is to force the recycling of electrical and electronic products as
opposed to disposal as normal refuse. Controlled recycling of products after the end of
their useful life will thereby avoid all negative impact on the environment.
We also feel that this is a very important consideration for all of our customers, no
matter where the end user is located. We at Laurell Technologies support all efforts to
safety dispose of all contaminated products and to minimize any and all potential
environmental pollutants.
As required by the WEEE Directive of the European Union and the corresponding
national laws, Laurell Technologies Corporation offers all end users in the EC and
around the world the option to return, post paid, “end of life” spin processors without
incurring any disposal charges.
If you wish to return a Laurell Technologies spin processor for waste recovery, please
contact our home office at: [email protected] or call [phone].
If you do not return an “end of life” spin processor to Laurell Technologies, you must use
a disposal company specializing in electronic waste recovery. Do not dispose of the
spin processor as normal public refuse.