LEYBOLD DeviceNet ITR 200 D User manual

DeviceNet™
ITR 200 D
Interface for IONIVAC
Interface Manual 17200138_002_C0
Part Numbers
230 253
230 257

General Information
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About This Document
This Communication protocol contains instructions for operating the vacuum
transmitter ITR 200 SD (featuring DeviceNet interfaces) as slave together with a
DeviceNet master. It describes the functionality of DeviceNet for programming
purposes.
Safety aspects and Technical Data of the transmitter are described in the Short
Operating Instructions and the Operating Manual (→[1], [2]).
Validity
This document applies to products with part number:
ITR 200 SD (with DeviceNet interface, 2 switching functions)
230 253 (DN 25 ISO-KF)
230 257 (DN 40 CF-R)
The catalog
number (No.) can
be taken from the
nameplate
We reserve the right to make technical changes without prior notice.
Intended Use
The intended use of the transmitter is described in the instruction sheet and the
operating manual (→[1], [2]).
Function
The intended use of the transmitter is described in the instruction sheet and the
operating manual (→[1], [2]).
The following description of the DeviceNet Interface is compliant to the DeviceNet
specification of the Open DeviceNet Vendor Association (→[3], [4]).
This manual describes the functionality of a DeviceNet Group 2 Only Slave and
supports Explicit Messaging and the I/O Polling.

Contents
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Contents
About This Document 2
Validity 2
Intended Use 2
Function 2
Abbreviations 4
1Starting-Up of the Slave 5
1.1 Power Supply Requirements 5
1.2 Front View of the ITR 200 SD 5
1.3 Connectors on the Device 5
1.4 Side View of the ITR 200 SD 6
1.5 Indicators and Switches 6
2Object Structure 8
2.1 Connection Object 8
2.1.1 Vendor-Specific Object Extension on Instance 2 Poll Connection 8
2.2 Identity Object 9
2.2.1 Class Attributes 9
2.2.2 Instance Attributes 9
2.3 S-Device Supervisor Object 10
2.3.1 Class Attributes 10
2.3.2 Instance Attributes 10
2.3.3 S-Device Supervisor Object States 15
2.3.4 S-Device Supervisor Common Services 15
2.3.5 S-Device Supervisor Object Specific Services 16
2.4 S-Analog Sensor Object 17
2.4.1 Class Attributes 17
2.4.2 Instance Attributes 18
2.4.3 Common Services 25
2.4.4 Object-Specific Services on Instance 1/Pirani 25
2.4.5 Object-Specific Services on Instance 2/Hot Cathode Ion Gauge 26
2.4.6 Behavior 27
3I/O Assembly Object 28
3.1 I/O Assembly Instances 28
3.2 I/O Assembly Object Instance Data Attribute Format 29
Appendix A: Conversion of a Floating Number According to IEEE 754 30
Appendix B: Typical Start-Up Procedure 32
Appendix C: Literature 35
Declaration of Contamination 37
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents, listed under literature, the symbol (→[Z]).

Abbreviations
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Abbreviations
Abbreviation Meaning
NV Nonvolatile; attribute value is maintained through power cycles
V Volatile
INT Integer value (Range –32'767 … 32'768)
UINT Unsigned integer value (Range 0 … 65'635)
USINT Unsigned short integer 8 bit (Range 0 … 255)
UDINT Unsigned double integer (Range 0 … 4'294'967'296)
FLOAT Floating point value (Range according to IEEE 754)
XXhHexadecimal number (Radix = 16)
XXdDecimal number (Radix = 10)
XXbBinary number (Radix = 2)
BOOL Boolean variable
ENGUNITS mbar, Torr, Pa
BYTE 1 logical byte
SHORT
STRING Character string (1 byte per character, 1 byte length indicator)
STRUCT Collection of attributes of different data types

Starting-Up
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1 Starting-Up of the Slave
1.1 Power Supply Requirements
The ITR 200 SD has to be powered with two voltages:
1. 24 VDC, 18 W at the 15 pole Sub-D connector for the transmitter itself;
2. 24 VDC nominal, <2 W range (+11 … +25 V) at the DeviceNet micro style
connector for the DeviceNet transceiver.
1.2 Front View of the ITR 200 SD
Position Function
1 Address switch ×10, decimal
2 Address switch ×1, decimal
3 DeviceNet connector
4 Data rate switch
5 Network status LED
6 Module status LED
7 "Sensor cable" connector
(Power, analog I/O, RS232C
I/O and Relay contacts)
8 Filament status LED
1.3 Connectors on the Device
The ITR 200 SD uses a "Sealed Micro-Style Connector" for the DeviceNet connec-
tion. The DeviceNet part of the transmitter is powered via the DeviceNet connector.
Pin Function
1 Drain
2 +24 V nominal (range 11 … 25 V)
3 V–
4 CAN_H
5 CAN_L
12
34567
8
3
4
2
5
1
Pin Assignment of the Sealed
Micro-Style Connector

Starting-Up
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Pin Function
1 Setpoint A, relay common
2 Pressure output signal (0 … +10 V)
3 Threshold Setpoint A output (0 … +10 V)
4 Setpoint A, relay, n.o. contact
5 Supply sensor electronics common
6 Threshold Setpoint B output (0 … +10 V)
7 Degas input , high active
8 Supply sensor electronics +24 Volt
9 Setpoint B, relay common
10 Transmitter identification
11 Setpoint B, relay, n.o. contact
12 Signal common GND
13 RS232, TxD
14 RS232, RxD
15 do not connect
1.4 Side View of the ITR 200 SD
Position Function
9 Potentiometer for Setpoint A
threshold adjustment
10 Potentiometer for Setpoint B
threshold adjustment
11 Full Scale adjustment push
button
1.5 Indicators and Switches
Device state LED state Description
Power off dark No power applied to device.
Device self-test flashing
green-red Device is in self-test.
Device operational green Device is operating normally.
Unrecoverable
fault red Device has detected an unrecoverable fault. As stated previously, all module level faults
are considered as unrecoverable faults.
Minor fault flashing red Device has detected a recoverable fault (e.g.
DeviceNet power supply not connected).
15 8
91
9
10
11
Pin Assignment of the 15-pin
D-Sub Connector
Module Status LED

Starting-Up
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The network status LED indicates the status of the DeviceNet communication link.
For this
state LED state To indicate
Not
powered,
Not online
dark Device is not online.
•The device has not completed the Duplicate
MAC_ID test yet.
•The device may not be powered, look at Module
Status LED.
On-line, Not
connected flashing green Device is online but has no connections in the estab- lished state.
•The device has passed the Dup_MAC_ID test, is
online, but has no established connections to other
nodes.
•The device is not allocated to a master.
Link OK
Online,
connected
green The device is online and has connections in the estab-
lished state.
•The device is allocated to a Master.
Connection
time out flashing red One or more I/O Connections are in the timed out state.
Critical link
failure red Failed communication device. The device has detected an error that has rendered it incapable of communicat-
ing on the network (Duplicate MAC ID, or Bus–off).
The status of the dual filament hot cathode is indicated by a LED on top of the
transmitter.
Filament status Emission Status LED
– off dark
Both filaments OK on green
One filament broken on green, flashing
Both filaments broken on red
During device initialization, the node address switches are read by the device firm-
ware. If the switches specify a valid DeviceNet MAC ID, i.e. a value from 0 … 63,
this value is used as the device MAC ID. If the specified MAC ID differs from the
value stored in the device’s non-volatile RAM (NVRAM), the new MAC ID will be
saved in NVRAM. If the switches specify an invalid DeviceNet MAC ID, i.e. a value
greater than 63, the current value stored in the device’s NVRAM is used as the
device MAC ID.
A single, rotary switch is provided for configuring the data rate of the device. The
switch has three valid positions for the DeviceNet data rates, 125, 250, and
500 kBaud, where the position 1 is equal to 125 kBaud, 2 equal 250 kBaud and 5
equal 500 kBaud. All remaining switch positions specify software selection of the
data rate.
The device has two setpoint relays (Setpoint A and Setpoint B). The setpoints of
these relays are adjustable only by two potentiometers (marked SETPOINT A and
SETPOINT B).
The relay contacts are available at the 15-pin D-Sub connector.
Network Status LED
Filament Status LED
Node Address Switch
Data Rate Switch
Setpoint

Connection Object
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2 Object Structure
2.1 Connection Object
Class Code 05h= 05d
The connection class allocates and manages the internal resources associated
with both I/O and explicit messaging connections. The specific instance generated
by the connection class is referred to as a connection instance or a connection
object.
The following instances of the connection object are supported:
•Instance 1: Explicit Messaging
•Instance 2: I/O-Polling
Please refer to the DeviceNet specification for further information.
2.1.1 Vendor-Specific Object Extension on Instance 2 Poll
Connection
For the selection of the active input assembly the following vendor specific attribute
can be used.
Vendor specific extension:
Attr.
ID Require- ment in
implemen
tation
Access
rule NV/ V Name DeviceNet data type Description of attribute Semantics
100 Optional Get/
Set NV Poll Produce
Assembly
Instance
USINT Contains the In-
stance number of
the assembly used
by this connection
to send data
1, 2, 4, 5,
8, 9, 10,
12, 13
This vendor-specific attribute facilitates the configuration of the data assembly, sent
by the ITR 200 SD to the DeviceNet Master as Poll response. It offers the possibi-
lity to select a (predefined) data assembly via a configuration tool and the EDS file
→[5]. Attribute 100 allows the user to configure the Poll I/O Data Assembly via
EDS even when the Poll Connection of the ITR 200 SD is in the established state.
The Assembly Number is stored non volatile. Modifications of the Poll Produce
Assembly Instance will take effect only after a reset of the ITR 200 SD.
Thus, definition of the ITR 200 SD data assembly can be done in two ways:
1. Standard methode (without using attribute 100):
The DeviceNet Master configures the "Produced Connection Path” Attribute of
the Poll connection (Connection Instance 2) when establishing communication
to the ITR 200 SD. This requires a Master to support expanded explicit mes-
saging capabilities.
2. Directly setting Attribute 100 e.g. by a configuration tool
(e.g. RS Networks) + Device Reset.

Identity Object
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2.2 Identity Object
Class Code 01h= 01d
2.2.1 Class Attributes
This object provides identification of and general information about the device.
Attr.
ID Access rule Name DeviceNet Data Type Description of attribute Semantics of values
1 Get Revision UINT Revision of this object.
Note: All class defini-
tions are required to
include this class
attribute.
The current value as-
signed to this attribute is
one (01). If updates that
require an increase in
this value are made,
then the value of this
attribute increases by
one.
2 Get Max
Instance UINT Maximum instance number of an object
currently created in this
class level of the device.
The largest instance
number of a created
object at this class
hierarchy level.
2.2.2 Instance Attributes
Attr.
ID Access rule NV/ V Name DeviceNet data type Description of attribute
1 Get NV Vendor ID UINT 79 02 Manufacturer identification
Value: 633
2 Get NV Device Type UINT 1Ch = Vacuum pressure
gauge
3 Get NV Product Code UINT 12
4 Get NV Revision STRUCT
5 Get NV Status WORD
6 Get NV Serial Number UDINT
7 Get NV Product Name SHORT STRING ITR 200 SD
Service Code Name Description
5 (05h) Reset 0 = last installation,
1 = default installation
14 (0Eh) Get_Attribute_Single
Services

S-Device Supervisor Object
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2.3 S-Device Supervisor Object
Class Code 30h= 48d
2.3.1 Class Attributes
Attr.
ID Access rule Name DeviceNet data type Description of attribute Semantics of values
1 Get Revision UINT Revision of this object The current value assigned
to this attribute is one (01).
If updates that require an
increase in this value are
made, then the value of this
attribute increases by one.
2 Get Max
Instance UINT Maximum instance number of an object
currently created in
this class level of the
device.
The largest Instance num-
ber of a created object at
this class hierarchy level.
2.3.2 Instance Attributes
Attr.
ID Access rule NV/ V Name DeviceNet data type Description of attribute
3 Get NV DeviceType SHORT
STRING ASCII Text, "CG" combination gauge
4 Get NV SEMI Standard
Revision Level SHORT STRING Specifies the revision level of the SEMI S/A network standard to
which the device complies ("E54-
0997").
5 Get NV Manufacturer’s
Name SHORT STRING
6 Get NV Manufacturer’s
Model Number SHORT STRING ITR 200 SD
7 Get NV Software Revision
Level SHORT STRING ASCII Text, for example "xxxyyy"
xxx
≙ version of the measuring
print
yyy
≙ version of the DeviceNet
print
8 Get NV Hardware Revision
Level SHORT STRING ASCII text, for example "1.001"
9 Get NV Manufacturer’s
Serial Number SHORT STRING ASCII text
10 Get NV Device
Configuration SHORT STRING Depending on device configura-
tion (→9)
11 Get V Device Status USINT →"Semantics" section below.
12 Get V Exception Status BYTE →"Semantics" section below.

S-Device Supervisor Object
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Attr.
ID Access rule NV/ V Name DeviceNet data type Description of attribute
13 Get V Exception Detail
Alarm STRUCT of: A structure of three structures containing a bit mapped repre-
sentation of the alarm detail
Common
Exception Detail STRUCT of:
Size 2 USINT Number of common detail bytes
Detail 0 ARRAY of:
→"Semantics" section below.
Detail 1 BYTE →"Semantics" section below.
Device Exception
Detail STRUCT of:
Size 4 USINT Number of device detail bytes ≙4
Detail 0 ARRAY of: S-Analog Sensor Instance 1
(Pirani)
Sensor alarm byte 0
Detail 1 BYTE S-Analog Sensor Instance 1
(Pirani)
Sensor alarm byte 0
Detail 2 S-Analog Sensor Instance 2
(Hot cathode) Sensor Alarm byte
0
Detail 3 S-Analog Sensor Instance 2
(Hot cathode) Sensor alarm byte
1
Manufacturer
Exception Detail STRUCT of:
Size 1 USINT Number of Manufacturer detail
bytes
Detail 0 ARRAY of: Serial communication alarm
14 Get V Exception Detail
Warning STRUCT of: A structure of three structures containing a bit mapped repre-
sentation of the warning detail
Common
Exception Detail STRUCT of:
Size 2 USINT Number of Common Detail Bytes
Detail 0 ARRAY of:
→"Semantics" section below.
Detail 1 BYTE →"Semantics" section below.
Device Exception
Detail STRUCT of:
Size 5 USINT Number of device detail bytes ≙5
Detail 0 ARRAY of: S-Analog Sensor object– >
Class Level Status Extension
Detail 1 BYTE S-Analog Sensor Instance 1
(Pirani)
Sensor Warning Byte 0
Detail 2 BYTE S-Analog Sensor Instance 1
(Pirani)
Sensor Warning Byte 1
Detail 3 S-Analog Sensor Instance 2
(hot cathode) Sensor Warning
Byte 0
Detail 4 S-Analog Sensor Instance 2
(hot cathode) Sensor Warning
Byte 1
Manufacturer
Exception Detail STRUCT of:
Size 1 USINT Number of Manufacturer Detail
Bytes
Detail 0 Byte serial common warning
15 Set NV Alarm Enable BOOL →"Semantics" section below.
16 Set NV Warning Enable BOOL →"Semantics" section below.

S-Device Supervisor Object
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2.3.2.1 Semantics
This attribute represents the current state of the device. Its value changes as the
state of the device changes. The following values are defined:
Attribute Value State
0 Undefined
1 Self Testing
2 Idle
3 Self-Test Exception
4 Executing
5 Abort
6 Critical Fault
In case of a Self-Test Exception restart the device with a reset out of the box
(Identity Object Class 1, Instance 1, Service 5, Service target value: 1).
A single byte attribute whose value indicates the status of the alarms and warnings
for the device. The device supports the Expanded Mode.
For the Expanded Mode, bit seven of Exception Status attribute is set to one;
exceptions are reported through the communication of this Exception Status at-
tribute, formatted as specified in the table below. In addition, the Exception Detail
attributes are supported. The Exception Status bits are determined by a logical
”OR” of the related Exception Detail bits, as indicated.
Bit Function
0 ALARM/device-common
(The alarm or warning is not specific to the device type or device type manufacturer).
1 ALARM/device-specific
2 ALARM/manufacturer-specific
3 reserved, set to 0
4 WARNING/device-common
5 WARNING/device-specific
6 WARNING/manufacturer-specific
7 1 ΖExpanded Method
The formats of these two attributes are identical. Therefore, they are described
together:
Attributes that relate the detailed status of the alarms or warnings associated with
the device. Each attribute is a structure containing three members; these three
members, respectively relate the detailed status of exceptions that are common
(i.e., not device-specific), device-specific and manufacturer-specific. The common
and device-specific detail definitions are defined below. A manufacturer-specific
detail has a length of 1 byte. A SIZE value of one indicates that one byte detail is
defined for the associated exception detail structure.
Exception Status
Device Status
Exception Status Bit Map
Exception Detail Alarm and
Exception Detail Warning

S-Device Supervisor Object
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Each of the three structure members is defined as a structure containing an or-
dered list (i.e., array) of bytes of length SIZE, and an unsigned integer whose value
is SIZE. Each of the bytes in each array has a specific mapping. This mapping is
formatted as 8 bits representing 8 independent conditions, whereas a value of 1
indicates that the condition is set (or present), and a value of 0 indicates that the
condition is cleared (or not present). Note that if a device does not support an
exception detail, the corresponding bit is never set. The bitmaps for alarms and
warnings in the corresponding attributes are structured in parallel so that a condi-
tion may have either alarm or warning set depending on severity. If a condition
inherently cannot be both alarm and warning, then the parallel bit position corre-
sponding to the other state will remain "0".
This structure relates exception conditions (i.e., alarms or warnings) which are
common to all devices within the Hierarchy of Semiconductor Equipment Devices.
The Detail element of the structure is an ordered list (i.e., array) of bytes of length
[SIZE=2] which is the value of the structure element size.
Two bytes Common Exception Detail are provided: Common Exception Detail[0]
and Common Exception Detail[1]. The specific exception associated with each of
the bitmaps is given in the table below. The SIZE for this revision is two (2).
Bit Common Exception Detail [0] Common Exception Detail [1]
0 0 0
1 0 0
2 EPROM exception 0
3 EEPROM exception power supply input voltage
4 RAM exception 0
5 reserved 0
6 0 0
7 0 0
Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Common Excep-
tion Detail Size 0 0 0 0 0 0 1 0
Common Excep-
tion Detail 0 0 0 0 Data
Memory Nonvolatile Memory Code Memory 0 0
Common Excep-
tion Detail 1 0 0 0 0 PS Input Voltage 0 0 0
This structure, similar in form to Common Exception Detail, relates exception con-
ditions which are specific to individual devices on the network and are defined in
the following. The Detail element of the structure is an ordered list (i.e. array) of
bytes of length [SIZE = 4 for alarms and SIZE = 5 for warning] which is the value of
the structure element size.
This structure, similar in form to Common Exception Detail, relates exception con-
ditions which are specific to the manufacturers of individual devices on the network.
There is one byte manufacturer exception details defined. The Detail element of
the structure is an ordered list (i.e., array) of bytes of length [SIZE = 1] which is the
value of the structure element size.
Manufacturer Exception Detail
Device Exception Detail
Common Exception Detail
Common Exception Detail
Attribute Values
Common Exception Detail Format
Summary

S-Device Supervisor Object
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Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Device Exception
Detail Alarm Size 0 0 0 0 0 1 0 0
Device Exception
Detail Alarm 0
Pirani 0 0 0 0 0 0 0 0
Device Exception
Detail Alarm 1
Pirani 0 0 0 0 0 0
Electronics
Failure 0
Device Exception
Detail Alarm 2 Hot
cathode 0 0 0 0 0 0
Filament 2
Failure Filament 1 Failure
Device Exception
Detail Alarm 3 Hot
cathode 0 0 0 0 0 0
Electronics
Failure 0
Manufacturer
Exception Detail
Alarm Size 0 0 0 0 0 0 0 1
Manufacturer
Exception Detail
Alarm 0 0 0 0 0 0 0 serial
comm.
Data Component Bit 7...4 Bit 3 Bit 2 Bit 1 Bit 0
Device Exception
Detail Warning Size 0 0 1 1 0
Device Exception
Detail Warning 0 –
Sensor Class
Status Extension
0 0
Under-
range
Exceeded
Overrange
Exceeded Reading Invalid *)
Device Exception
Detail Warning 1
Pirani 0 0 0 0 0
Device Exception
Detail Warning 2
Pirani 0 0 0
Electronics
Warning 0
Device Exception
Detail Warning 3
Hot cathode 0 0 0
Filament 2
Warning Filament 1 Warning
Device Exception
Detail Warning 5
Hot cathode 0 Pressure
too high
for degas 0 0 0
Manufacturer
Exception Detail
Warning Size 0 0 0 0 1
Manufacturer
Exception Detail
Warning 0 0 0 0 serial
comm.
Warning
*) Logical inversion of Reading Valid.
These Boolean attributes are used to enable (1) or disable (0) the S-Device Super-
visor object’s process of setting Exception bits. When disabled, corresponding bits
are never set; and, if they were set, disabling clears them. Also, alarm and warning
states are not retained; when enabled, bits will be set only if the corresponding
condition is true.
The default state for these Enable attributes is enabled (1).
Device Exception Detail
Alarms and Manufacturer
Exception Detail Alarms
Format
Exception Detail Warning
Alarm Enable and Warning
Enable

S-Device Supervisor Object
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2.3.3 S-Device Supervisor Object States
Abort - Used to transition the device application objects to the aborted state. This
service request may be (and generally will) originated internally, from application
objects.
Recover - Used to transition the device application objects, out of the abort state,
to the idle state. This service request may be originated internally, from application
objects.
Perform_Diagnostics - Used to instruct the S-Device Supervisor object to perform
a diagnostic test.
2.3.4 S-Device Supervisor Common Services
Service Code Service Name Description of Service
0EhGet_Attributes_Single Returns the contents of the specified attribute.
10hSet_Attributes_Single Modifies an attribute value.
05hReset Resets the device to the Self-Testing state.
06hStart Starts the device execution.
07hStop Moves the device to the Idle state.
The device transitions from the IDLE state to the EXECUTING state by a
START Request (Service Code 06h) or by the receipt of the first valid I/O
data!
You will not get any valid measurement values from the device until this
service has been requested or the I/O-poll message has been received.
SELF-TEST
EXCEPTION
SELF-TESTING
ABORT
CRITICAL FAULT
IDLE
EXECUTING
Self-Test Failed
Power Applied, or
Reset Request from any state except CRITICAL FAULT, or
Perform Diagnostics Request from any state except CRITICAL FAULT or ABORT
Self-Test
Passed
Exception Condition
Cleared
Critical Fault
from any state
Start
Request
Stop
Request
Recover Request
Abort Request
Abort Request
Abort Request
Recover Request or

S-Device Supervisor Object
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2.3.5 S-Device Supervisor Object Specific Services
Service Code Service Name Description of Service
4BhAbort Moves the device to the Abort state
4ChRecover Moves the device out of the Abort state
4DhPerform_Diagnostics
Causes the device to perform a set of diagnostic
routines
•DS Object Service Parameter dictionary
Parameter Form Description
TestID USINT Type and possibly detail of diagnostic test to be performed
•TestID parameter
The following values are defined for the TestID parameter for the
Perform_Diagnostics Service Request:
Attribute Value State
0 Standard
Type "Standard" is specified if there is only one type of diagnostic defined or if
there are more than one including a type standard.
Explanation to Service Code
4Dh

Object Structure
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2.4 S-Analog Sensor Object
Class Code 31h= 49d
2.4.1 Class Attributes
Attr.
ID Access rule Name DeviceNet data type Description of attribute Semantics of values
1 Get Revision UINT Revision of this object
Note: All class definitions are
required to include this class
attribute.
The current
value assigned
to this attribute
is one (01).
2 Get Max
Instance UINT Maximum instance number of an object currently created in this
class level of the device.
The largest in-
stance number
of a created
object at this
class hierarchy
level.
32 1) Get Class
Level
Status
Extension
USINT Indicates whether all instances
measure above or below its
maximum or minimum measure-
ment range
Bit 0:
Reading Invalid
Bit 1:
Overrange
Exceeded
Bit 2:
Underrange
94 Get Active
Value Specified by Data
Type
Is used by assemblies to pro-
duce this class-level attribute,
instead of the Value (Attribute ID
6) of the S-Analog Sensor
Instances.
95 Get Active
Instance
Number
UINT Identifies the object instance
that is providing the Value which
is copied into the Active Value
for all input Assemblies and the
Alarm/Warning Exception De-
tails for the S-Device Supervisor
object.
→Behavior section.
Default = 1
96 Get Number
of
Gauges
USINT Identifies the number of gauge
instances present in the device. 2
99 Get Subclass UINT Identifies a subset of additional
class attributes, services and
behaviors.
1 ≙Instance
Selector
1) This attribute is not part of the actual S-Analog Sensor Specificiation, but is at this time in
preparation to be implemented as shown. Changes may be possible until the new speci-
fication is published.
Assemblies or connections may produce this class-level attribute, instead of the
Value (Attribute ID 6) of the active S-Analog Sensor instance. The S-Analog Sen-
sor class-level attribute Active Instance Number identifies the object instance that
is currently active and providing the Value to the Active Value class-level attribute
which is, in turn, produced by the input assemblies that have Active Value as a
member.
ID 94 Active Value

Object Structure
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The device internally modifies this attribute, as required, to identify the S-Analog
Sensor object instance providing the Value member which is copied into the Active
Value for all Input Assemblies and the Alarm/Warning Exception Details for the
S-Device Supervisor object.
The Active Instance Number will be modified based upon the Active Value in order
that the best transmitter, corresponding to a given S-Analog Sensor instance, will
be active for the given measurement range.
This attribute is used to determine the size of all Input Assemblies within a node.
2.4.2 Instance Attributes
Four S-Analog Sensor Instances (Instance 1, Instance 2, Instance 21 and In-
stance 22) are available. Instance 1 represents the physical sensor reading of the
heat transfer vacuum gauge (pressure), Instance 2 represents the physical sensor
reading of the hot cathode ion gauge (pressure).
Instance 21 and Instance 22 represent the value of the Setpoint A and Setpoint B.
2.4.2.1 Instance Attributes of Instance 1
Pirani Instance
Following is the Instance 1 with the subclass extension of the heat transfer
vacuum gauge (pirani gauge) part of the ITR 200 SD. This instance is used to
provide control and status information for the Pirani gauge part of the ITR 200 SD.
Attr.
ID Access rule NV/ V Name DeviceNet data type Description of Attribute Semantics of Values
3 Set/
Cond.
→below
NV Data
Type USINT Determines the Data Type of
Value and all
related attributes
as specified in
this table.
→"Semantics" section
below.
Int ≙C3h[default]
float ≙CAh
4 Set
→below NV Data
Units UINT Determines the Units context of
Value and all re-
lated attributes.
Supported Values:
Counts Ζ1001h
[default]
mbar ≙1308h
Torr ≙1301h
Pascal ≙1309h
5 Get V Reading
Valid BOOL Indicates that the Value attribute
contains a valid
value.
0 = invalid
1 = valid
(invalid: e.g., not
warmed up yet)
6 Get V Value INT or
specified
by Data
Type
Analog input
value The corrected, converted, calibrated
final value of the sensor.
→"Semantics" section
below.
7 Get V Status BYTE Alarm and
warning state of
this object
instance
Always zero, because
Alarm and Warning Trip
Points are not
implemented
10 Get NV Full Scale INT or
specified
by Data
Type
The Value of Full
Scale for the sen-
sor.
The value of attribute
Value corresponding to
the Full Scale calibrated
measurement of the
sensor.
[default] = maximum
allowable value for the
Data Type
ID 96 Number of Gauges
ID 95 Active Instance
Number

Object Structure
17200138_002_C0 – (2016-10) – Leybold 19
Attr.
ID Access rule NV/ V Name DeviceNet data type Description of Attribute Semantics of Values
25 Set NV Safe
State USINT Specifies the be- havior for the
Value for states
other than
Execute
→"Semantics" section
below.
[default] = 0
26 Set NV Safe
Value INT or specified
by Data
Type
The Value to be
used for Safe
State = Safe
Value
→"Semantics" section
below.
[default] = 0
32 Get NV Over-
range INT or specified
by Data
Type
Specifies the
highest valid
Value
The value above which
attribute Reading Valid
is set to invalid.
[default] = maximum
allowable value for the
Data Type
33 Get NV Under-
range INT or specified
by Data
Type
Specifies the
lowest valid
Value
The value below which
attribute Reading Valid
is set to invalid.
[default] = minimum
allowable value for the
Data Type
94 Get V Sensor
Warning Struct of Byte Bit definitions of Sensor Warnings 0 = [default]
→"Semantics" section
95 Get V Sensor
Alarm Struct of Byte Bit definitions of Sensor Alarms 0 = [default]
→"Semantics" section
96 Get V Status
Extension BYTE Bit-mapped byte providing addi-
tional status bits
Bit description:
0 Reading Invalid *)
1 Overrange
Exceeded
2 Underrange
Exceeded
99 Get NV Subclass UINT Defines a subset
of additional attri-
butes, services
and behaviors.
02 = Heat Transfer
Vacuum Gauge
*) Logical inversion of Reading Valid.
2.4.2.2 Semantics of S-Analog Sensor Instance 1
All data type attributes use the enumerated values integer or float.
→Abbreviations 4
The data type value will be set automatically based upon the first valid I/O con-
nection established by the device.
If no established I/O connections exist, which include an attribute from this object,
then the Data Type attribute is settable provided that the object is in the Idle State.
Note: Using data type integer in combination with a pressure unit (mbar, Torr or
Pa) will obviously not produce reasonable values below 1.
The Data Unit is only settable in the IDLE state.
ID 3 Data Type
ID 4 Data Unit

Object Structure
20 17200138_002_C0 – (2016-10) – Leybold
An S-Analog Sensor object instance derives a reading from a physical analog sen-
sor. The reading is converted to the data type and units specified for the Value
attribute.
Using Counts and INT the following conversion has to be used:
Counts = [ log10 (pressure) + k ] × 2000
where: kmba
r
= 12.5
k
Tor
r
= 12.624903
k
Pa = 10.5
This attribute specifies what value will be held in Value for states other than Exe-
cuting. The purpose of this mechanism is to allow other devices, who may be using
this Value to transition to (or remain in) a safe state in the event of this device
transitioning to a FAULT, IDLE, or ABORT state. The following values are defined:
Attribute Value State
0 Zero
1 Full Scale
2 Hold Last Value
3 Use Safe Value
For Safe State set to Use Safe Value, this attribute holds the value to which the
Value attribute will be set for object instance states other than Executing.
16 Bits are used as sensor warnings. Bits 8 … 16 are mapped to the Exception
Detail Warning 2, Bits 0 … 7 are mapped to the Device Exception Detail
Warning 1.
Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Sensor Alarm
Byte 0 0 0 0 0 0 0 0 0
Sensor Alarm
Byte 1 0 0 0 0 0 0
Electronics
Warning 0
16 Bits are used as sensor faults. Bits 8 …16 are mapped to the Exception Detail
Alarm 1, Bits 0 …7 are mapped to the Device Exception Detail Alarm 0.
Data Component Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Sensor Alarm
Byte 0 0 0 0 0 0 0 0 0
Sensor Alarm
Byte 1 0 0 0 0 0 0
Electronics
Failure 0
ID 6 Value
ID 25 Safe State
ID 26 Safe Value
ID 94 Sensor Warning
ID 95 Sensor Alarm