Mindman MFP01 Series User manual

Flow & Pressure Sensor
INSTRUCTION
MANUAL
MFP01 series
210107

II
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Contents
Product features.....................................................................................................................................................................1
Application..................................................................................................................................................................................3
Thermal mass ow sensor principles.................................................................................................................5
Order example..........................................................................................................................................................................5
Specications...........................................................................................................................................................................6
Output type.................................................................................................................................................................................7
Pressure loss characteristics.....................................................................................................................................8
Installation instructions...................................................................................................................................................9
● Piping ..................................................................................................................................................................................................9
● Mounting bracket.................................................................................................................................................................................9
● Wiring diagrams ................................................................................................................................................................................10
● Dimensions........................................................................................................................................................................................11
● Mounting accessories........................................................................................................................................................................12
How to use.................................................................................................................................................................................13
● Names and functions of individual parts ...........................................................................................................................................13
● Internal structure ...............................................................................................................................................................................14
● Functions instructions........................................................................................................................................................................15
Functions setting mode .................................................................................................................................................................15
Measurement mode ......................................................................................................................................................................16
● Operation setting instructions............................................................................................................................................................17
[F-01] OUT1 setting selection .......................................................................................................................................................17
[F-02] OUT2 setting selection .......................................................................................................................................................19
[F-03] LCD display color selection ................................................................................................................................................19
[F-04] Response time selection.....................................................................................................................................................19
[F-05] Display refresh time selection.............................................................................................................................................20
[F-06] Unit selection ......................................................................................................................................................................21
[F-07] Flow reference standard selection......................................................................................................................................22
[F-08] Display rotation ...................................................................................................................................................................22
[F-09] Accumulated value hold selection.......................................................................................................................................22
[F-10] Flow sensor display mode selection ...................................................................................................................................23
[F-91] Power-save mode selection................................................................................................................................................23
[F-92] External input selection.......................................................................................................................................................23
[F-93] Modbus RTU setting ...........................................................................................................................................................24
[F-94] Fine adjustment setting.......................................................................................................................................................25
[F-95] Forced output function ........................................................................................................................................................26
[F-99] Reset to the default setting .................................................................................................................................................26
Pressure zero adjustment function................................................................................................................................................25
Instantaneous ow zero adjustment function ................................................................................................................................25
Reset accumulated ow function ..................................................................................................................................................27
Peak value display ........................................................................................................................................................................27
Bottom value display .....................................................................................................................................................................27
Key lock / Unlock mode.................................................................................................................................................................27
Modbus RTU instruction...............................................................................................................................................28
Error code instruction.....................................................................................................................................................30
Caution for safety................................................................................................................................................................31

1
Flow Pressure
Indicator accuracy ± 3% F.S. ± 2% F.S.
Repeatability ± 1% F.S. ± 0.2% F.S.
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Product features
Cost Control
User-friendly
High Performance
High Precision
Cost Reduction
Traditional
2 × Sensor cost
2 × Power supply
2 × Plumbing costs & Time
2 × Wiring work cost & Time
2 × Location of installation
MFP01
Total cost & Time
Reduction
COST
DRY AIR, N2
RS-485 MODBUS
CONTROL

2
Flow rate (L/min)
MFP01-005
MFP01-010
MFP01-050
MFP01-100
MFP01-500
MFP01-101
MFP01-201
Digital display Switch output Analog output Accumulated pulse output
Instantaneous ow value
Accumulated ow value
Pressure value
NPN output
PNP output
Voltage output 1~5V
Current output 4~20 mA 50ms pulse output
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Product features
2-in-1 Design
Pressure and ow rate
simultaneous monitoring
Accumulated ow rate
display at a glance
Multiple output function
Wide range of ow rates
Flow display
Pressure display
Accumulated ow rate display
0 0.5 1 5 10 50 100 200

3
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Application
Application
01 Paint and coating ow monitoring
Air ow and pressure management of paint and
coating processes.
Application
02 Laser welding monitoring
Precision management of shielding gas,
ow rate and pressure.

4
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Application
Application
03 Suction operation
Detect the suction state of micro-
electronic parts by ow rate.
Application
05 Leakage detect
Container with gas and inspect
whether it leaks.
Application
04 Electronic part installation
Control the tension of gold wire for
bonding electronic parts.
Application
06 Air consumption
monitoring
Monitor air consumption of devices.

5
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Thermal mass ow sensor principles / Order example
MFP01 – 005 – 010 – R6
MP – A26
MODEL
PORT SIZE OUTPUT SPEC.
FLOW RATE
RANGE
010: 2 NPN output +
Analog output 1 ~ 5 V
011: 2 NPN output +
Analog output 4 ~ 20 mA
02 : 2 NPN output + RS485
030: 2 PNP output +
Analog output 1 ~ 5 V
031: 2 PNP output +
Analog output 4 ~ 20 mA
04 : 2 PNP output + RS485
005: 500 (ml/min)
010: 1000 (ml/min)
050: 5 (l/min)
100: 10 (l/min)
500: 50 (l/min)
101: 100 (l/min)
201: 200 (l/min)
Thermal mass wo sensor principles
Order example
Mounting accessories
Symmetric
temperature prole
(a) No ow
In the absence of ow, the heat
from the heater spreads evenly
left and right, so the temperature
distribution is like (a).
(b) Small ow
When ow begins, the inlet side
is cooled by the ow, the outlet
side is warmed by the heat of the
inlet side of the heater, and the
temperature distribution is like (b).
(c) Large ow
When the ow increases, it
becomes a distribution like (C).
Since the temperature distribution
before and after the heater is
proportional to the ow rate, the
ow rate can be determined from
the ratio.
Temperature
Sensor 1
Temperature
Sensor 1
Temperature
Sensor 1
Temperature
Sensor 2
Temperature
Sensor 2
Temperature
Sensor 2
Heating
Element
Heating
Element
Heating
Element
Skewed
temperature prole
Skewed
temperature prole
MODEL
R6: ø6 mm, for ow rate range
005, 010, 050, 100, 500.
R8: ø8 mm, for ow rate range
101, 201.
F1C: Rc1/8", with internal threads,
for ow rate range
005, 010, 050, 100, 500
F4C: Rc1/4", with internal threads,
for ow rate range 101, 201
A26: Mounting bracket
B4: Panel adapter
C4: Panel adapter + Front protective lid
OPTION PARTS
A26 C4B4

6
Model 005 010 050 100 500 101 201
Fluid Dry air, N2, Non-corrosive / Non-ammable gas
Sensor element
Flow
Measured ow rate range 0 ~ 500 mL/min 0 ~ 1000 mL/min 0 ~ 5 L/min 0 ~ 10 L/min 0 ~ 50 L/min 0 ~ 100 L/min 0 ~ 200 L/min
Flow direction Unidirection
Pressure Rated pressure range -90 ~ 800 kPa
Display
Display 4 digital × 4 digital, 7 segment LCD display ( Red / Green / Orange )
Instant ow
rate
Display range 0 ~ 525 mL/min 0 ~ 1050 mL/min 0 ~ 5.25 L/min 0 ~ 10.50 L/min 0 ~ 52.5 L/min 0 ~ 105.0 L/min 0 ~ 210 L/min
Min. setting
scale
LPM 1 mL/min 0.01 L/min 0.1 L/min 1 L/min
CFM *1 0.01 ft3/min 0.1 ft3/min 1 ft3/min
Accumulated
Flow
Display range 99999999 mL 999999.99 L 9999999.9 L 99999999 L
Min. Setting Scale *1 1 mL 0.01 L 0.1 L 1 L
0.01 ft30.1 ft31 ft3
Pressure
Display
Display range -100 ~ 1000 kPa
Min. Setting
Scale
kPa 1
kgf/cm20.01
bar / psi 0.01 / 0.1
Accuracy
Flow
Guaranteed range 2 ~ 100 % F.S.
Indicator accuracy ± 3 % F.S. ± 1 digit *2
Analog output accuracy ± 5 % F.S. *2
Repeatability ± 1 % F.S. ± 1 digit *3
Linearity ± 3 % F.S. *3
Temp. characteristic ± 2 % F.S. ( 15 ~ 35 °C ) ; ± 5 % F.S. ( 0 ~ 15 °C, 35~ 50 °C ) ( compare with *3 )
Pressure characteristic ± 5 % F.S. ± 1 digit *4
Pressure
Guaranteed range 0 ~ 100 % F.S.
Indicator accuracy ± 2 % F.S. ± 1 digit *5
Analog output accuracy ± 2.5 % F.S. *5
Repeatability ± 0.2 % F.S. ± 1 digit *5
Linearity ± 1 % F.S. *5
Temp. characteristic ± 2 % F.S. ( compare with *5 )
Switch output
Switch output
2 NPN : open collector 2 outputs
Max. Load Current : 125 mA
Max. Supply Voltage : 28 V DC
Voltage Drop : ≤ 1.5 V
2 PNP : open collector 2 outputs
Max. Load Current : 125 mA
Max. Supply Voltage : 24 V DC
Voltage Drop : ≤ 1.5 V
Response
time
Flow 800 ms ( 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 1500 ms selectable )
Pressure 2.5 ms ( 25 ms, 100 ms, 250 ms, 500 ms, 1000 ms, 1500 ms selectable )
Output
mode
Flow Hysteresis Mode, Window Comparator Mode, Accumulated Output, Accumulated Pulse Output
Pressure One Point Set Mode, Hysteresis Mode, Window Comparator Mode
Hysteresis Adjustable
Output short circuit proterction Yes
Accumulated pulse output *1 5 mL/Pulse 10 mL/Pulse 0.05 L/Pulse 0.1 L/Pulse 0.5 L/Pulse 1 L/Pulse 2 L/Pulse
0.02 ft3/Pulse 0.04 ft3/Pulse 0.2 ft3/Pulse 0.4 ft3/Pulse 2 ft3/Pulse 4 ft3/Pulse 7 ft3/Pulse
Analog
output
Voltage output Voltage output range : 1 ~ 5 V *6 ; Output impedance : 1 KΩ
Current output Current output range : 4 ~ 20 mA *6 ; Load impedance : ≤ 300 Ω
Response time Pressure : ≤ 50 ms ; Flow : ≤ 100 ms
External input Non-voltage input, < 0.4 V, ≥ 30 ms
Communication interface RS-485 *7
Power Power supply voltage 12 ~ 24 V DC ± 10 %, Ripple ( P-P ) ≤ 10 %
Current consumption ≤ 50 mA
Environment
Withstand Pressure 1000 kPa
Enclosure IP40
Working Fluid Temp. 0 ~ 50 °C ( No condensation or freezing )
Ambient Temp. Range Operation : 0 ~ 50 °C ; Storage : -10 ~ 60 °C ( No condensation or freezing )
Ambient Humidity Range Operation / Storage : 35 ~ 85 % R.H. ( No condensation )
Insulation Resistance ≥ 50 MΩ ( 500 V DC, between case and lead wire )
Withstand Voltage 1000 V AC in 1-min ( between case and lead wire )
Vibration Total amplitude 1.5 mm or 10 G, 10 Hz ~ 55 Hz ~ 10 Hz scan for 1 minute, 2 hours each direction of X, Y and Z
Shock 100 m/s² ( 10 G ), 3 times each in direction of X, Y and Z
EMC IEC 61000-6-2, IEC 61000-6-4
Lead wire ø4 Oil-resistance cable ( PVC ) - 26 AWG ( 0.15 mm2 ) - 6 cores
Port
Size
R6, F1C
R8, F4C
Weight (with 2 meter lead wire) Approx. 109.3 g ( ø6 port ) ; Approx. 112.7 g ( ø8 port ) ; Approx. 118 g ( Rc1/4" port ) ; Approx. 128.5 g ( Rc1/8" port )
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Specications
*1. CFM ( ft3/min*10-2 ) and ft3*10-2
*2. Condition: Inlet pressure: 300 kPa , Outlet pressure: 1 atmospheric pressure, 25 °C
*3. Condition: Outlet pressure: 1 atmospheric pressure, 25 °C
*4. -90 ~ 800 kPa, Outlet pressure: 1 atmospheric pressure, 25 °C
*5. Outlet ow rate = 0 L/min, 25 °C
*6. PWM output, corresponding to pressure sensor 0 ~ 1000 kPa
*7. This function only available for Output Specication -02 and -04

7
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Output type
Hysteresis mode Hysteresis mode
One point set mode One point set mode
Accumulated pulse output mode
NOTE
1. In case hysteresis is set at less than or equal to 2 digits,
switch output may chatter if input pressure uctuates near the
set point.
2. When using window comparator mode, the difference
between two set points must be greater than the xed
hysteresis, otherwise will cause the switch output to
malfunction.
Window comparator mode Window comparator mode
Accumulated output mode Accumulated output mode
Flow / pressure
FH-1(FH-2)
H-1(H-2)
FL-1(FL-2)
L-1(L-2)
ON
OFF
Flow / pressure
FH-1(FH-2)
H-1(H-2)
FL-1(FL-2)
L-1(L-2)
ON
OFF
Flow / pressure
FH-1(FH-2)
H-1(H-2)
FL-1(FL-2)
L-1(L-2)
ON
OFF
Hys
Hys
Flow / pressure
FH-1(FH-2)
H-1(H-2)
FL-1(FL-2)
L-1(L-2)
ON
OFF
Hys
Hys
Pressure
P-1(P-2)
ON
OFF
Hys
Pressure
P-1(P-2)
ON
OFF
Hys
Flow
AdH1 AdL1
AdH2 AdL2
0 L Time
ON
OFF
Flow
AdH1 AdL1
AdH2 AdL2
0 L Time
ON
OFF
Time
ON
OFF
50ms
Flow range 500mL 1000 mL 5 L 10 L 50 L 100 L 200 L
Pulse output rate 5 mL 10 mL 0.05 L 0.1 L 0.5 L 1 L 2 L
Normal open mode Normal close mode

8
FLOW & PRESSURE SENSOR ( INSTRUCTION MANUAL )
MFP01 Pressure loss characteristics
MFP01 - 005 - -
MFP01 - 050 - -
MFP01 - 500 - -
Pressure loss (kPa) Pressure loss (kPa)Pressure loss (kPa)Pressure loss (kPa)
Pressure loss (kPa) Pressure loss (kPa)
Flow rate (l/min)
Flow rate (ml/min)
Flow rate (l/min)
Flow rate (l/min)
Flow rate (l/min)
Flow rate (ml/min)
5
4
3
2
1
0
0.006
0.005
0.004
0.003
0.002
0.001
0
0.08
0.07
0.06
0.05
0.04
0.03
0.02
0.01
0
20
18
16
14
12
10
8
6
4
2
0
12
10
8
6
4
2
0
0.018
0.016
0.014
0.012
0.010
0.008
0.006
0.004
0.002
0
0.1 MPa
0.1 MPa
0.1 MPa
0.1 MPa
0.1 MPa
0.2 MPa
0.3/0.35/0.4
MPa
0.5 MPa
0.2 MPa
0.2 MPa
0.2 MPa
0.2 MPa
0.2 MPa
0.3 MPa
0.3 MPa
0.3 MPa
0.3 MPa
0.3 MPa
0.4 MPa
0.4 MPa
0.4 MPa
0.4 MPa
0.4 MPa
0.5 MPa
0.5 MPa
0.5 MPa
0.5 MPa
0.5 MPa
0.35 MPa
0.35 MPa
0.35 MPa
0.35 MPa
0.35 MPa
0 10 20 30 40 50
0 100 200 300 400 500
0 1 2 3 4 5
0 50 100 150 200
0 20 40 60 80 100
0 200 400 600 800 1000
MFP01 - 201 - -
MFP01 - 010 - -
MFP01 - 100 - -
MFP01 - 101 - -
Pressure loss (kPa)
Flow rate (l/min)
0.25
0.20
0.15
0.10
0.05
00 1 2 3 4 5 6 7 8 9 10
0.3 MPa
0.4 MPa
0.5 MPa
0.35 MPa