MKS BGS50CC User manual

Goniometric
Cradles
BG Series
USER’SMANUAL
G
U
A
R
A
N
T
E
E
D
S
P
E
C
I
F
I
C
A
T
I
O
N
S

EDH0387En1020 — 09/18 ii
BG Series Goniometric Cradles
Warranty
Newpor Corpora ion warran s his produc o be free from defec s in
ma erial and workmanship for a period of 1 year from he da e of
shipmen . If found o be defec ive during he warran y period, he produc
will ei her be repaired or replaced a Newpor ’s discre ion.
To exercise his warran y, wri e or call your local Newpor represen a ive,
or con ac Newpor headquar ers in Irvine, California. You will be given
promp assis ance and re urn ins ruc ions. Send he ins rumen ,
ranspor a ion prepaid, o he indica ed service facili y. Repairs will be
made and he ins rumen re urned, ranspor a ion prepaid. Repaired
produc s are warran ed for he balance of he original warran y period, or
a leas 90 days.
Limitation of Warranty
This warran y does no apply o defec s resul ing from modifica ion or
misuse of any produc or par .
This warrant is in lieu of all other warranties, expressed or implied,
including an implied warrant of merchantabilit or fitness for a
particular use. Newport Corporation shall not be liable for an indirect,
special, or consequential damages.
b Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document ma be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
information onl , and product specifications are subject to change without
notice. An change will be reflected in future publishings.
CAUTION
Warran y does no apply o damages resul ing from:
• Incorrec usage:
– Load on he s age grea er han maximum specified load.
– Carriage speed higher han specified speed.
–Improper grounding.
¬ Connec ors mus be properly secured.
¬ When he load on he s age represen s an elec rical risk, i mus
be connec ed o ground.
– Excessive or improper can ilever loads.
• Modifica ion of he s age or any par hereof.
CAUTION
Please ret rn eq ipment in
the original (or eq ivalent)
packing.
Yo will be responsible for
damage inc rred from
inadeq ate packaging if the
original packaging is not
sed.
© 2018

iii EDH0387En1020 — 09/18
BG Series Goniometric Cradles
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution .................................................................................................................viii
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics............................................................................3
3.1 Definitions..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Load Specification Definitions.................................................................4
3.4 Load Characteristics and Stiffness .........................................................4
3.5 Goniometric Cradle Weights ...................................................................5
4.0 — Drives and Motors ....................................................................5
4.1 Stepper Drive Versions ............................................................................5
4.2 DC-Servo Drive Versions ..........................................................................6
4.3 Sensor osition..........................................................................................7
4.4 Feedback Signal osition .........................................................................8
4.5 BGS inouts ...............................................................................................9
4.6 MSCABLE-3 Cable......................................................................................9
4.7 BGM inouts ............................................................................................10
4.8 MCAB-3 Cable ..........................................................................................10
5.0 — Connection to Newport Controllers ..............................11
5.1 Warnings on Controllers ........................................................................11
5.2 Connection...............................................................................................12
5.3 Cables .......................................................................................................12
5.4 MSCABLE-3 Cable....................................................................................12
5.5 MCAB-3 Cable ..........................................................................................13
6.0 — Connection to non Newport Electronics.....................14
6.1 Connections.............................................................................................14

EDH0387En1020 — 09/18 iv
BG Series Goniometric Cradles
7.0 — BGM Goniometric Cradles Assembly Pattern..........15
7.1 BGM120 Interfaces ..................................................................................15
7.2 BGM160 Interfaces ..................................................................................16
7.3 BGM200 Interfaces ..................................................................................16
8.0 — Dimensions.................................................................................17
8.1 BGS50 Models ..........................................................................................17
8.2 BGS80 Models ..........................................................................................17
8.3 BGM Models.............................................................................................18
9.0 — Maintenance ..............................................................................19
9.1 Maintenance ............................................................................................19
9.2 Repair .......................................................................................................19
9.3 Calibration ...............................................................................................19
Service Form .........................................................................................................21

v EDH0387En1020 — 09/18
BG Series Goniometric Cradles
af
f
n
ch
ach
2/
f
an
m
m
f
nf
f
EU Declaration o
f Co
Co
fo
o
f
C
ouncil Directive(s):܈2014/30/EU Electro
a
a
gnetic Co
p
p
܆2014/35/EU Low Voltage Directiv
܆2014/68/EU Europe
n P
P
ressure Eq
܈2011/65/EU Restriction o
f H
H
azardo
܈2006/4
/E
E
CM
i
i
nery Directive (
whi
h co
co
nf
fo
o
rmity isdeclared: ܈EN 61326-1:2013 (EMC); ܆
܆EN 61010-1:2010 (S
fet
et
y);
܆PED Module SEP(Sound E
an
u
i
n
a
ormity
p
atib
tib
ility Directive (EMCD)
e(LVD)
quipme
nt
t
Direct
i
v
e (PED)
ous S
ub
b
st
nces
ces
Directive (RoHS)
(MD)
܆EN 61326-2-3:2013 (EMC);
Engineering Practices);2014
an
f
n
a
Applic
atio
tio
o
f C
St
d
d
ard(s) to
܆PED Module SEP(Sound E
Emissions:
tif
܆CISPR 11:2015 Industrial, Scien
fic
ic
and Medical Equipment Radio-Frequency D
Measurement
f
/
/
f
ita
f
ita
f
܆IEC 61000-3-2:2014 EMC/Limits
fo
o
rHarmonic Current Emission (1)
܆IEC 61000-3-3:2013 EMC/Lim
atio
tio
ns o
f V
V
oltage Fluctuations and Flicker in Low
܆IEC 61000-3-3:2013 EMC/Lim
atio
tio
ns o
f V
V
oltage Fluctuations and Flicker in Low
܈EN 55011: 2009+A1:2010 (4)
܆FCC 47 CFR Part 18: 2015
Immunity:
܈IEC 61000-4-2:2008 EMC/Electrostatic Discharge Immunity Test
܈IEC 61000-4-3:2006 2006+AMD1:2007+AMD2:2010 EMC
/
R
adiated Radio -Fre
܈IEC 61000-4-4:2012 EMC/Electrical Fast Transient/Burst Immunity Test
܈IEC 61000-4-5:2014 EMC/Surge Immunity Test (3)
܈IEC 61000-4-6:2013 EMC/Conducted Disturbances induced by Radio Frequency
܆IEC 61000-4-8:2009 EMC
/
P
ower Frequency Magnetic Field Immunity Test
܆IEC 61000-4-11:2004 EMC/Voltage Dips, Short Interruptions and Variations Imm
܆IEC 61000-4-34:2005+AMD1:2009 EMC/Voltage Dips, Short Interruptions and V
Manu
fa
a
cturers Name: MICRO-CONTROLE Spectra-Physics. EVRY
Engineering Practices);2014
isturbance Characteristics -Limits and Methods of
w-Voltage Supply Systems (2)
w-Voltage Supply Systems (3)
equency Electromagnetic Field Immunity Test
Fields Immunity Test
munity Test (5)
Variations Immunity Test (5)
Y,France.
PP/-PE/-PEBV6
f
n
sin co
n
fo
o
rmity with the selected European Union
f
n
h
f
h
n
n
an
d
d
Standard(s) only whe
n i
i
nstalled i
n acc
acc
ordance
e
e s
ole responsibility o
f t
t
e
e
ma
nu
u
fact
act
urer.
um
m
a
m
I
p
p
orter's Name &Loc
atio
tio
n: /
Equip
e
e
nt Type/Description:High Precision Goniometers
Model N
mbe
be
r(s) (6):BGS50/80/-CC/-PP; M-/BGM120/160/200/-CC/-BP
d a
th
ith
f
n
MKS co
f
fir
ir
ms that, w
h r
r
espect to
he
e
products liste
above
bove
,it believes it is
n
een
n
f
f
an
h
a
h
f
on
la
n
a
n
m
har
o
o
i
iz
atio
tio
le
gis
atio
tio
n. MKS product c
n
for
or
ms to t
he
e
a
bo
ve Directive(s)
wit
h m
m
u
u
fact
act
urer’s speci
fi
i
cations. This declaratio
n h
h
as b
i
ssued u
d
d
er th
u
u
d
n
n
n
n
m
n
Date: 07/26/2018
Le Cointe Hervé
Quality Director
1) Applicable to AC powered product only. Class B
2) Applicable to AC powered product; DCpowered co
nn
n
ections
mus
us
tnot co
nne
ne
ct to a D.C. distributio
n n
n
etwork; I/O Sign
3) Applicable toACpowered product; DCpowered co
nn
n
ections and may co
nn
n
ect to a D.C.
di
i
strib
ut
t
ion network.
4) Class A, Gro
up
p
2
5) Applicable to ACpowered product only.
6) Compliance of the above model numbers requires the use of a braided shielded cable properly terminated at both ends
en
MKS Instrum
t
t
sInc
M
m
m
n
nal and Co
nt
t
rol Lines
mu
u
st be less than 30
m a
a
nd no
oth ends –if so noted in the
KS
Instruction M
m
Document Nu
mb
b
er: M
ot exit the building.
Manual.
MKS-CR-1197
Revision: B
m
en
MKS Instrum
t
t
s, Inc. Document Nu
mb
b
er: M
Andover, MAUSA MKS CONFIDENTIAL
EC Declaration of Conformity

EDH0387En1020 — 09/18 vi
BG Series Goniometric Cradles
Definitions and Symbols
The following erms and symbols are used in his documen a ion and also
appear on he produc where safe y-rela ed issues occur.
General Warning or Caution
The exclama ion symbol may appear in warning and cau ion ables in his
documen . This symbol designa es an area where personal injury or
damage o he equipmen is possible.
The following are defini ions of he Warnings, Cau ions and No es ha may
be used in his manual o call a en ion o impor an informa ion regarding
personal safe y, safe y and preserva ion of he equipmen , or impor an
ips.
WAR NIN G
Warning indicate a potentially dangerou ituation which can re ult in
bodily harm or death.
CAUTION
Caution indicate a potentially hazardou ituation which can re ult in
damage to product or equipment.
NOTE
Note indicate additional information that mu t be con idered by the
u er or operator.
European Union CE Mark
The presence of he CE Mark on Newpor Corpora ion equipmen means
ha i has been designed, es ed and cer ified as complying wi h all
applicable European Union (CE) regula ions and recommenda ions.
Warning and Caution
ATTENTION
Thi tage i a Cla A device. In a re idential environment, thi device
can cau e electromagnetic interference. In thi ca e, uitable mea ure
mu t be taken by the u er.

vii EDH0387En1020 — 09/18
BG Series Goniometric Cradles
Warnings
WARNING
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WAR N I N G
D n t use this stage when its m t r is emitting sm ke r is unusually
h t t the t uch r is emitting any unusual d r r n ise r is in any
ther abn rmal state.
St p using the stage immediately, switch ff the m t r p wer and then
disc nnect the electr nics p wer supply.
After checking that sm ke is n l nger being emitted c ntact y ur
Newp rt service facility and request repairs. Never attempt t repair the
stage y urself as this can be danger us.
WAR N I N G
Make sure that this stage is n t exp sed t m isture and that liquid d es
n t get int the stage.
Nevertheless, if any liquid has entered the stage, switch ff the m t r
p wer and then disc nnect the electr nics fr m p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N I N G
D n t insert r dr p bjects int this stage, this may cause an electric
sh ck, r l ck the drive.
D n t use this stage if any f reign bjects have entered the stage.
Switch ff the m t r p wer and then disc nnect the electr nics p wer
supply.
C ntact y ur Newp rt service facility f r repairs.
WAR N I N G
D n t place this stage in unstable l cati ns such as n a w bbly table r
sl ping surface, where it may fall r tip ver and cause injury.
If this stage has been dr pped r the case has been damaged, switch ff
the m t r p wer and then disc nnect the electr nics p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N I N G
D n t attempt t m dify this stage; this may cause an electric sh ck r
d wngrade its perf rmance.
WAR N I N G
D n t exceed the usable depth indicated n the m unting h les (see
secti n “Dimensi ns”). L nger screws can damage the mechanics r
cause a sh rt-circuit.

EDH0387En1020 — 09/18 viii
BG Series Goniometric Cradles
Caution
Only the BGM-PEBV6 stages are compatible and can be used in a
vacuum environment up to 10-6 hPa.
CAUTION
Do not place this stage in a hostile environment such as X-Rays, har
UV,… or in any vacuum environment.
C
CAUTION
Do not place this stage in a location affecte by ust, oil fumes, steam or
high humi ity. This may cause an electric shock.
CAUTION
Do not leave this stage in places subject to extremely high temperatures
or low temperatures. This may cause an electric shock.
• Operating temperature: +10 to +35 °C
• Storage temperature: -10 to +40 °C (in its original packaging)
CAUTION
Do not move this stage if its motor power is on.
Make sure that the cable to the electronics is isconnecte before
moving the stage. Failure to o so may amage the cable an cause an
electrical shock.
CAUTION
Be careful that the stage is not bumpe when it is being carrie . This
may cause it to malfunction.
CAUTION
When han ling this stage, always unplug the equipment from the power
source for safety.
CAUTION
When the carriage is in its en -of-run position, it is strongly recommen e
not to go beyon this point as this may amage the stage mechanism.
CAUTION
Contact your Newport service facility to request cleaning an
specification control every year.

Goniometric Cradles
BG Series
1.0 —Introduction
This manual provides operating instructions for the BG series goniometric
cradles:
(M-) indicates that imperial and metric interface versions are available
(e.g. BGM160B and M-BGM160B ). Mechanical and electrical
characteristics are identical for both models.
1) REMARK
Vacuum compatible goniometric cradles to 10-6 hPa. In this case, max.
speed and load capacity have to be divided by two.
BGS50CC, BGS80PP and BGM120BPP gonio etric cradles.
RECOMMENDATION
We recommend you read carefully the chapter “Connection to
electronics” before using the BG goniometric cradle.
• (M-)BGM-CC • BGS- • BGS-CC• (M-)BGM-B
• (M-)BGM- E
• (M-)BGM- EBV6 (1)
Adjacent sizes of BG cradles
can easily be stacked to
provide orthogonal 2 axis
rotation around a fixed point.
1 EDH0387En1020 — 09/18
BG Series Goniometric Cradles

EDH0387En1020 — 09/18 2
BG Series Goniometric Cradles
2.0 —Description
BG Series goniometric cradles rotate on a transverse axis above the
platform. Compared to full 360° rotation stages, they offer maximum
access to the rotating part and allow construction of very compact multi-
axis rotation assemblies. BG cradles are designed so that orthogonal
mounting of two adjacent-sized cradles (e.g., BGS50 and BGS80) provides
two perpendicular axes of rotation at about the same point in space.
Mounting a rotation stage under the assembly adds a third orthogonal
rotation axis through the same point.
recise rotation is ensured by a precision ground, hardened worm gear
drive. Single-row ball bearings and precision-ground tool-steel races
ensure smooth rotation with minimal wobble and eccentricity. A home
switch, conveniently located at center of travel, facilitates the return of the
platform to a level position.
BG Series goniometric cradles are available in 5 sizes and may be
configured with DC motors or stepper motors. The selection of the
motorization is dependent on the application.
2.1 Design Details
Base Material Stainless steel with aluminum body
Bearings Ball bearings
Drive Mechanism Ground worm gear
Worm Gear Ratio BGS50, BGS80 and BGM120: 1:180
BGM160 and BGM200: 1:60
Reduction Gear BGS50CC: 14:1, BGS50PP: 43:1, BGS80CC: 44:20
BGS80PP and BGM120 (1): None
BGM160 (1) and BGM200 (1): 3:1
Feedback BGS50CC: Motor mounted rotary encoder, 2,048 cts/rev
BGS50PP and BGS80PP: none
BGS80CC: Worm mounted rotary encoder with index pulse, 4,000 cts/rev
BGM120 to BGM200: Worm mounted rotary encoder with index pulse, 2000 cts/rev
Limit Switches Mechanical, at ±45° (for BGS50 Mechanical, at ±30°)
rigin ptical, at 0°
Cable 3 m long cable included
Vacuum Compatibility Available up to 10-6 hPa using full step motor (BGM120PE to BGM200PE only)
1) Additional moto mounted 10:1 eduction gea with PE ve sions.

3 EDH0387En1020 — 09/18
BG Series Goniometric Cradles
3.0 —Characteristics
3.1 Definitions
Specificatio s of our products are established i refere ce to ISO 230
sta dard part II “Determi atio of accuracy a d repeatability of
positio i g umerically co trolled axes”.
This sta dard gives the defi itio of positio u certai ty which depe ds
o the 3 followi g parameters:
Absolute Accuracy
Differe ce betwee ideal positio a d real positio .
Accuracy
Differe ce betwee ideal positio a d real positio after the compe satio
of li ear errors.
Li ear errors i clude: cosi e errors, i accuracy of screw or li ear scale
pitch, a gular deviatio at the measuri g poi t (Abbe error) a d thermal
expa sio effects. All Newport motio electro ics ca compe sate for
li ear errors.
The relatio betwee absolute accuracy a d o -axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor xTravel
Repeatability
Ability of a system to achieve a comma ded positio over ma y attempts.
Reversal Value (Hysteresis)
Differe ce betwee actual positio values obtai ed for a give target
positio whe approached from opposite directio s.
Minimum Incremental Motion (MIM or Sensitivity)
The smallest i creme t of motio a device is capable of deliveri g
co siste tly a d reliably.
Resolution
The smallest i creme t that a motio device ca theoretically move
a d/or detect. Resolutio is ot achievable, whereas MIM, is the real
output of a motio system.
Eccentricity
Displacement of the geometric center of a rotation stage from the rotation
axis in the plane defined by bearings.
Wobble
Tilt of rotation axis during rotation of a stage, measured on a reference
surface.
The testing of accuracy, repeatability, and reversal error are made
systematically with test e uipment in controlled environment (20 ±1 °C).
A linear cycle with 21 data points on the travel and 4 cycles in each
direction gives a total of 168 points.
G

EDH0387En1020 — 09/18 4
BG Series Goniometric Cradles
3.2 Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of 5 µm.
3.3 Load Specification Definitions
Normal Load Capacity (Cz)
Maximum load a rotation stage can move while maintaining specifications.
This value is given with speed and acceleration specified for each rotation
stage, and with a load perpendicular to bearings.
Off-Centered Load ( )
Maximum cantilever-load a rotation stage can move: Q ≤ Cz ÷ (1 + D/a)
D: Cantilever distance.
3.4 Load Characteristics and Stiffness
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at www.newport.com
BGS50CC BGS50PP BGS80CC BGS80PP BGM120, BGM160,
BGM200
Travel Range (°) ±30 ±30 ±45 ±45 ±45
Minimum Incremental Motion (°) 0.0005 0.0002 0.0005 0.0002 0.002
Uni-directional Repeatability Typical (1) (°) 0.001 0.001 0.001 0.001 0.004
Bi-directional Repeatability, Typical (1) (°) 0.013 or ±0.0065 0.016 or ±0.008 0.003 or ±0.0015 0.005 or ±0.0025 0.024 or ±0.012
Absolute Accuracy, Typical (1) (°) 0.05 or ±0.025 0.07 or ±0.035 0.05 or ±0.025 0.06 or ±0.03 0.05 or ±0.025
Maximum Speed (°/s) 10 4 20 20 CC and BPP: 20, PE: 2
Wobble, Typical (1) (µrad) 200 or ±100 200 or ±100 200 or ±100 200 or ±100 200 or ±100
MTBF (h) 20,000
1) Fo the definition of Typical and Gua anteed specifications see "Motion Basics Te minology & Standa ds" Tuto ial at www.newpo t.com
The actual pe fo mance of BG stages a e not ve ified on all p oduction units, hence typical specifications a e p ovided.
G
U
A
R
A
N
T
E
E
D
S
P
E
C
I
F
I
C
A
T
I
O
N
S
BGS50 BGS80 BGM120 BGM160 BGM200
Cz, Normal centered load capacity (N) 20 60 200 300 500
a, Construction parameter (mm) 30 40 70 90 120
ka, Radial compliance (µrad/Nm) 100 20 10 52
My, Maximum torque (Nm) PE: ––10 20 29
BPP: 0.5 16 16 17
CC: 0.5 19 10 10
Q, ff-center load: Q ≤ Cz ÷ (1 + D/a)
Where D = Cantilever distance in mm
k
α
Z
Q
Y
D
Cz
X
My

5 EDH0387En1020 — 09/18
BG Series Goniometric Cradles
3.5 Goniometric Cradle Weights
Weights indicated into the below table are average values for goniometric
cradles with a typical drive unit installed, without any cable.
The weight variation between drive units is not very significant.
4.0 —Drives and Motors
4.1 Stepper Drive Versions
Stepper motor-driven stages are available in 2 versions:
• The mini-step drive version ( and B ) enables high angular speed up
to 20 °/s. The larger models, BGM120B to BGM200B , feature a
worm mounted rotary encoder for improved accuracy and repeatability.
The encoder also provides a method for detecting motor stalling, an
important feature for applications with loads or high torques.
The BGS50 and BGS80 are not equipped with an encoder. Instead,
position is attained by the number of commanded steps and micro-
steps. The high output torque of the stepper motor, combined with
extensive performance tests, ensures position accuracy as long as the
recommended load and torque are not exceeded. The BGS50 and
BGS80 provide very high motion sensitivity with good linearity
between commanded micro-steps and the actual motion of the stage at
a very reasonable price.
• The full-step version ( E) is equipped with a reduction gear providing
higher torque. This version is only available on the models BGM120 to
BGM200 and is recommended for high inertia payloads and vacuum
applications.
Weight [lb (kg)]
BGS50 1.76 (0.8)
BGS80 4.63 (2.1)
3-meter MSCABLE-3 Cable for BGS80 models 0.66 (0.3)
(M-)BGM120 18.7 (8.5)
(M-)BGM160 39.7 (18.0)
(M-)BGM200 83.8 (38.0)
3-meter MCAB-3 Cable for (M-)BGM models 1.32 (0.6)

EDH0387En1020 — 09/18 6
BG Series Goniometric Cradles
Mini-Step Drive
Is used for stepper motors, when 1 pulse emitted by electronic
corresponds to theoretical physical motion of a fraction of a full step of
the motor.
For these goniometric cradles a mini-step equals 1/10 of a full step.
Full-Step Drive
Is used for stepper motors, when 1 pulse emitted by electronic
corresponds to theoretical physical motion of 1 full step of the motor.
Stepper Motor Performance Specifications and Characteristics
Command Signals for the Stepper Motors
4.2 DC-Servo Drive Versions
DC motor-driven stages use 3 different motors and encoders depending on
the size of the cradle:
• The BGS50CC uses a miniature DC servo motor with a motor mounted
rotary encoder, a reduction gear and a belt drive in order to fold the
motor. The result is a very small and lightweight package providing very
high resolution output and great minimum incremental motion capabili-
ty. However, reversibility is compromised due to some backlash and
hysteresis in the reduction gear and belt drive system.
• The BGS80CC features a high resolution 4,000 cts/rev rotary encoder
with index pulse for precision homing and is the recommended choice
for applications requiring accurate bi-directional positioning. For tight-
est position control, the rotary encoder is directly mounted on the
worm screw. This avoids the majority of drive train error sources that
affect other stages with indirect position read-out.
• The BGM120CC to BGM200CC use higher-torque DC servo motors. The
motor also features a built-in tachometer to provide superior speed sta-
bility.
Resolution Speed Angle by Step RMS Current Resistance Inductance
(°) (°/s) (°) per Phase (A) (Ω) (mH)
BGS50PP 0.0000969 4 0.23 0.25 12.5 5.5
BGS80PP 0.001 20 1.8 0.71 1.7 2.8
BGM120BPP 0.001 20 1.8 1.0 1.13 3.6
BGM160 & 200BPP 0.001 20 1.8 1.77 0.85 3.0
BGM120 to 200PE 0.001 2 1.8 0.71 1.65 3.2
Direction +
Direction +
0 2
-1
1
10.5 1.5
Step 1 2 3 4 5 8 7 8
+ Phase 1 + + – – + + – –
– Phase 1 –– + + – – + +
+ Phase 2 –+ + – – + + –
– Phase 2 +– – + + – – +
Direction –MOTION +
+Phase 1
–Phase 1
+Phase 2
–Phase 2

7 EDH0387En1020 — 09/18
BG Series Goniometric Cradles
DC-Motor Performance Specifications and Characteristics
Command Signals for the DC-Motors
In the above drawings, + Motor signal is referred to – Motor signal, +
Tacho Generator signal is referred to – Tacho Generator signal.
➀When the stage moves in + Direction, the + Motor voltage is higher than
– Motor voltage, and + Tacho Generator voltage is higher than – Tacho
Generator voltage.
➁When the stage moves in – Direction, the + Motor voltage is lower than
– Motor voltage, and + Tacho Generator voltage is lower than – Tacho
Generator voltage.
4.3 Sensor Position
End-of-Run and Mechanical Zero are 5 V open collector type.
The Index ulse provides a repeatable Home osition at ±1 step.
CAUTION
“End-of-Run” and “Mechanical Zero” are active signals and should not
be connected to any other source.
Resolution Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer
(°) (°/s) oltage ( ) Current (A) Current (A) (Ω) (mH) Const. ( /krpm)
BGS50CC 0.0000698 10 24 0.15 0.21 54.6 1.19 –
BGS80CC 0.001 20 48 0.9 1.8 2.52 0.51 –
BGM120 to 200CC 0.001 20 48 1.5 2.3 5.1 3.2 7 (±10%)
Direction +
Direction +
+V
+ Motor
+ Tachometer
– Motor
– Tachometer –V
MOTION Direction +
MOTIONDirection –
–EOR Limit
Mechanical
Zero
Stage Travel Range
Index Pulse
Index Pulse
+ EOR Limit
Home Position (Origin)
at Center of Travel Range
Direction – MOTION Direction +

EDH0387En1020 — 09/18 8
BG Series Goniometric Cradles
4.4 Feedback Signal Position
The incremental sensor consists of an optical scale and an encoder head.
When the carriage moves, the encoder head generates square signals in
quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25
connector or pins #6, #7, #13 and #14 of the SUB-D15 connector.
“Encoder” and “Index ulse” are “differential pair” (type RS-422) type
output signals. Using these signals permits a high immunity to noise.
Emission circuits generally used by Newport are 26LS31 or MC3487.
Reception circuits to use are 26LS32 or MC3486.
0
1
Encoder
Phase A
0
1
Encoder
Phase A
1234
0
1
Encoder
Phase B
0
1
Encoder
Phase B
Direction – MOTION Direction +
Direction +
Direction +
SUD-D25 SUB-D15
Encoder Phase A 19 13
Encoder Phase A 23 6
Encoder Phase B 20 14
Encoder Phase B 24 7
Index Pulse Phase I 15 15
Index Pulse Phase I 25 8
21 12
22 5
NEWPORT
STAGE USER
CONNECTOR PIN #
Output Signals
Encoders
& Sensors
Power Supply
+5 V 5%
150 mA max.
0 V
}

9 EDH0387En1020 — 09/18
BG Series Goniometric Cradles
4.5 BGS Pinouts
The pinout diagrams for BGS stage SUB-D connectors are shown below:
4.6 MSCABLE-3 Cable
A 3-meter length MSCABLE-3 cable is supplied with each BGS80
goniometric craddle.
13
25
141
BGS50PP
1 + Phase 1
2 N.C.
3 – Phase 1
4 N.C.
5 + Phase 2
6 N.C.
7 – Phase 2
8 N.C.
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
14 Ground
15 N.C.
16 0
17 + End-of-Run
18 – End-of-Run
19 N.C.
20 N.C.
21 +5
22 0
23 N.C.
24 N.C.
25 N.C.
BGS80PP
1 + Phase 1
2 + Phase 2
3 Mechanical Zero
4 – End-of-Run
5 0
6 N.C.
7 N.C.
8 N.C.
9 – Phase 1
10 – Phase 2
11 + End-of-Run
12 +5
13 N.C.
14 N.C.
15 N.C.
BGS50CC
1 N.C.
2 N.C.
3 N.C.
4 N.C.
5 + Motor
6 + Motor
7 – Motor
8 – Motor
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
14 Ground
15 N.C.
16 0
17 + End-of-Run
18 – End-of-Run
19 Encoder Phase A
20 Encoder Phase B
21 +5
22 0
23 Encoder Phase /A
24 Encoder Phase /B
25 N.C.
BGS80CC
1 N.C.
2 + Motor
3 Mechanical Zero
4 – End-of-Run
5 0
6 Encoder Phase /A
7 Encoder Phase /B
8 Index Pulse /I
9 N.C.
10 – Motor
11 + End-of-Run
12 +5
13 Encoder Phase A
14 Encoder Phase B
15 Index Pulse I
SUB-D25M
CONNECTOR
1
3
5
7
21
22
13
17
18
19
23
20
24
15
25
SUB-D15F
CONNECTOR
1
9
2
10
12
5
3
11
4
13
6
14
7
15
8
(0.25 mm2) White
(0.25 mm2) Brown
(0.25 mm2) Yellow
(0.25 mm2) Green
(0.14 mm2) Rose
(0.14 mm2) Gray
(0.05 mm2) Brown
(0.05 mm2) Yellow
(0.05 mm2) Green
(0.05 mm2) Red
(0.05 mm2) Blue
(0.05 mm2) Rose
(0.05 mm2) Gray
(0.05 mm2) Black
(0.05 mm2) White
(AWG23) White
(AWG23) Brown
(AWG23) Yellow
(AWG23) Green
(AWG26) Rose
(AWG26) Gray
(AWG30) Brown
(AWG30) Yellow
(AWG30) Green
(AWG30) Red
(AWG30) Blue
(AWG30) Rose
(AWG30) Gray
(AWG30) Black
(AWG30) White
Connected
to the cap
Connected
to the cap

EDH0387En1020 — 09/18 10
BG Series Goniometric Cradles
4.7 BGM Pinouts
The pinout diagrams for BGM stage SUB-D25 connectors are shown below:
4.8 MCAB-3 Cable
A 3-meter length MCAB-3 cable is supplied with each BGM goniometric
craddle.
13
25
141
BGM-BPP & -PE
1 + Phase 1
2 + Phase 1
3 – Phase 1
4 – Phase 1
5 + Phase 2
6 + Phase 2
7 – Phase 2
8 – Phase 2
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
14 Ground
15 Index Pulse I
16 0
17 + End-of-Run
18 – End-of-Run
19 Encoder Phase A
20 Encoder Phase B
21 +5
22 0
23 Encoder Phase /A
24 Encoder Phase /B
25 Index Pulse /I
BGM-CC
1 + Tachometer
2 + Tachometer
3 – Tachometer
4 – Tachometer
5 + Motor
6 + Motor
7 – Motor
8 – Motor
9 N.C.
10 N.C.
11 N.C.
12 N.C.
13 Mechanical Zero
14 Ground
15 Index Pulse I
16 0
17 + End-of-Run
18 – End-of-Run
19 Encoder Phase A
20 Encoder Phase B
21 +5
22 0
23 Encoder Phase /A
24 Encoder Phase /B
25 Index Pulse /I
Connected
to the cap
Connected
to the cap
SUB-D25M
CONNECTOR
1
2
3
4
5
6
7
8
14
22
21
16
13
19
23
20
24
15
25
17
18
10
11
12
9
SUB-D25F
CONNECTOR
1
2
3
4
5
6
7
8
14
22
21
16
13
19
23
20
24
15
25
17
18
10
11
12
9
(0.6 mm2) White 1
(0.6 mm2) White 2
(0.6 mm2)White 3
(0.6 mm2) White 4
(0.6 mm2) White 6
(0.6 mm2) White 7
(0.6 mm2) White 8
(0.6 mm2) White 9
(0.6 mm2) White 5
(0.6 mm2) White 12
(0.6 mm2) White 10
(0.6 mm2) White 11
(0.09 mm2) White
(0.09 mm2) Brawn
(0.09 mm2) Green
(0.09 mm2) Yellow
(0.09 mm2) Grey
(0.09 mm2) Pink
(0.09 mm2) Blue
(0.09 mm2) Red
(0.09 mm2) Black
(0.09 mm2) Purple
(0.09 mm2) Orange
(0.09 mm2) Blue
(AWG20) White 1
(AWG20) White 2
(AWG20) White 3
(AWG20) White 4
(AWG20) White 6
(AWG20) White 7
(AWG20) White 8
(AWG20) White 9
(AWG20) White 5
(AWG20) White 12
(AWG20) White 10
(AWG20) White 11
(AWG28) White
(AWG28) Brawn
(AWG28) Green
(AWG28) Yellow
(AWG28) Grey
(AWG28) Pink
(AWG28) Blue
(AWG28) Red
(AWG28) Black
(AWG28) Purple
(AWG28) Orange
(AWG28) Blue

11 EDH0387En1020 — 09/18
BG Series Goniometric Cradles
5.0 —Connection to Newport Controllers
5.1 Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize
shock hazards and are familiar with safety precautions required to avoid
possible injury. Read the controller user’s manual carefully before
operating the instrument and pay attention to all written warnings and
cautions.
WAR N I N G
Disconnect t e power plug under t e following circumstances:
• If t e power cord or any attac ed cables are frayed or damaged in
any way.
• If t e power plug is damaged in any way.
• If t e unit is exposed to rain, excessive moisture, or liquids are spilled
on t e unit.
• If t e unit as been dropped or t e case is damaged.
• If you suspect service or repair is required.
• W enever you clean t e electronics unit.
CAUTION
To protect t e unit from damage, be sure to:
• Keep all air vents free of dirt and dust.
• Keep all liquids away from t e unit.
• Do not expose t e unit to excessive moisture (85% umidity).
• Read t is manual before using t e unit for t e first time.
WAR N I N G
All attac ment plug receptacles in t e vicinity of t is unit are to be of
t e grounding type and properly polarized.
Contact your electrician to c eck your receptacles.
WAR N I N G
T is product is equipped wit a 3-wire grounding type plug.
Any interruption of t e grounding connection can create an electric
s ock azard.
If you are unable to insert t e plug into your wall plug receptacle,
contact your electrician to perform t e necessary alterations to ensure
t at t e green (green-yellow) wire is attac ed to eart ground.
WAR N I N G
T is product operates wit voltages t at can be let al.
Pus ing objects of any kind into cabinet slots or oles, or spilling any
liquid on t e product, may touc azardous voltage points or s ort out
parts.

EDH0387En1020 — 09/18 12
BG Series Goniometric Cradles
5.2 Connection
There is a label on every stage indicating its part and serial numbers.
WARNING
Always turn the controller's power OFF before connecting to a stage.
NOTE
These stages are ESP compatible. Enhanced System Performance is
Newport's exclusive technology that enables Newport ESP motion
controllers to recognize the connected Newport ESP stage and upload
the stage parameters. This ensures that the user can operate the motion
system quickly and safely.
5.3 Cables
All BG goniometric cradles are delivered with a 3-meter cable.
This cable is linked to the body of the stage for the BGS50 goniometric
cradles.
BGS80 stages are delivered with a MSCABLE-3 cable and BGM stages with a
MCAB-3 cable. This cable is equipped with a SUB-D25M for direct
connection to Newport Controllers.
5.4 MSCABLE-3 Cable
CABLE
CONNECTOR STAGE
BENDING
STATIC CABLE: ≥.94 (24)
CABLE IN MOTION: ≥2.76 (70)
LOCKING
KNOBS
2.24 (57)
DISCONNECTED
ø.24
(6)
SUB-D15 CONNECTOR SHOWN
DIMENSIONS IN INCHES (AND MILLIMETERS)
WAR N I N G
Th s cable s sh elded correctly. For a correct operat on, make sure to
lock connectors (ground cont nu ty prov ded by the cable).
For a lications where the standard 3-meter cable (MSCABLE-3) included
with your stage is not adequate, New ort offers a 10-m longer length cable
(MSCABLE-10) designed to ensure the integrity of your ositioning
a lication.