Preface
HR8 Motor User Manual IV
Table of Contents
1. INTRODUCTION ........................................................................................................1-1
1.1 About the Motor.................................................................................................1-1
1.2 Vacuum Motors..................................................................................................1-1
1.3 HR8 System Parts..............................................................................................1-2
1.4 Handling.............................................................................................................1-2
1.5 Installation and Servicing .................................................................................1-2
2. PREPARATION AND INSTALLATION ......................................................................2-1
2.1 Preparation.........................................................................................................2-1
2.1.1 Mounting Base..............................................................................................2-2
2.1.2 Limiting Stage Motion....................................................................................2-3
2.2 Motor Installation...............................................................................................2-4
2.2.1 Bonding the Driving Plate to the Stage..........................................................2-4
2.2.2 Mounting the Motor .......................................................................................2-7
2.2.3 Motor Grounding ...........................................................................................2-9
2.2.4 Motor Connections......................................................................................2-10
2.2.4.1 Motor Connector Pinout...............................................................................2-10
2.2.4.2 System Electrical Configuration...................................................................2-11
2.2.5 Motor Run-In...............................................................................................2-12
3. SPECIFICATIONS......................................................................................................3-1
3.1 General...............................................................................................................3-1
3.2 Specification Parameters..................................................................................3-3
3.2.1 Performance..................................................................................................3-3
3.2.2 Electrical .......................................................................................................3-3
3.2.3 Environmental...............................................................................................3-3
3.2.4 Physical Dimensions .....................................................................................3-3
3.2.5 Performance Envelope..................................................................................3-4
3.3 Schematics ........................................................................................................3-5
3.3.1 Dimensions for Standard and High-Vacuum Motors......................................3-6
3.3.2 Dimensions for Ultra-High-Vacuum Motors...................................................3-7
3.3.3 Mounting Base Dimensions...........................................................................3-8
