Oerlikon Leybold Vacuum PHOENIX L300i User manual

Leak detector
Operating Manual
GA10218_002_A7
PHOENIX L300i
Part numbers
250000V01
250001V01
250002V01
251000V01
251001V01
251100V01
251101V01

Contents
2GA10218_002_A7 - 9/2015 - © Oerlikon Leybold Vacuum
Important safety informations 5
1 Description 9
1.1 Design and Function .................................................................... 9
1.1.1 Vacuum Diagram PHOENIX L300i .............................................. 10
1.1.2 Vacuum Diagram PHOENIX L300i DRY ...................................... 11
1.1.3 Vacuum Diagram PHOENIX L300i MODUL ................................ 12
1.1.4 Vacuum Method ........................................................................ 13
1.1.5 Partial Flow Method ................................................................... 14
1.1.6 Sniffer Mode .............................................................................. 14
1.2 Supplied Equipment ................................................................... 14
1.3 Technical Data ........................................................................... 15
1.3.1 Technical Data PHOENIX L300i ................................................. 15
1.3.2 Technical Data PHOENIX L300i DRY ......................................... 17
1.3.3 Technical Data PHOENIX L300i MODUL .................................... 19
1.3.4 Dimensional Drawings ................................................................ 21
1.4 Ordering Information .................................................................. 24
1.5 Accessories ............................................................................... 24
1.6 Default Settings .......................................................................... 26
2 Installation 28
2.1 Placement ................................................................................. 28
2.2 Conforming Utilisation ................................................................ 28
2.3 Ambient Conditions ................................................................... 28
2.4 Electrical Connections ................................................................ 28
2.4.1 Mains Power .............................................................................. 28
2.4.2 Connection for the Controller Signal and Accessories ................ 30
2.4.3 Vacuum Connections ................................................................. 33
3 Operation 35
3.1 Media Compatibility/Purge Gas .................................................. 35
3.2 Start-Up ..................................................................................... 35
3.2.1 Display ....................................................................................... 35
3.2.2 The Display in Run-Up Mode ..................................................... 36
3.2.3 The Display in Standby Mode ..................................................... 36
3.2.4 Gas Ballast/Purge ..................................................................... 36
3.2.5 The Display in Measurement Mode ............................................ 36
3.2.6 Call for Calibration ...................................................................... 37

Contents
GA10218_002_A7 - 9/2015 - © Oerlikon Leybold 3
3.2.7 Speaker Volume ........................................................................ 37
3.2.8 Status Line in the Display ........................................................... 37
3.2.9 Measurement Mode with Bargraph ............................................ 38
3.2.10 Measurement Mode with Trend Information ............................... 38
3.3 First Operation Check ................................................................ 38
3.4 Control Panel ............................................................................. 40
3.5 Interfaces ................................................................................... 45
3.6 Operation .................................................................................. 52
3.6.1 Main Menu ................................................................................ 53
3.6.2 View .......................................................................................... 55
3.6.3 Scale Linear/Logarithmic ........................................................... 55
3.6.4 Display-Range Auto/Manual ...................................................... 56
3.6.5 Time Axis ................................................................................... 57
3.6.6 Contrast .................................................................................... 57
3.6.7 Background in standby .............................................................. 58
3.6.8 Lower Display Limit .................................................................... 58
3.7 Mode ......................................................................................... 59
3.8 Trigger & Alarms ........................................................................ 60
3.8.1 Trigger Level 1 ........................................................................... 60
3.8.2 Trigger Level 2 ........................................................................... 61
3.8.3 Trigger Level 3 ........................................................................... 61
3.8.4 Units .......................................................................................... 61
3.8.5 Volume ...................................................................................... 62
3.8.6 Alarm Delay ............................................................................... 62
3.8.7 Audio Alarm Type ...................................................................... 63
3.9 Calibration ................................................................................. 64
3.10 Settings ..................................................................................... 65
3.10.1 Vacuum Settings ....................................................................... 66
3.10.2 Filter & Background ................................................................... 74
3.10.3 Mass ......................................................................................... 76
3.10.4 Miscellaneous (Language, Calibration request, Service interval...) 76
3.10.5 Parameter Save/Load ................................................................ 79
3.10.6 Monitoring Functions ................................................................. 79
3.11 Information ................................................................................ 83
3.11.1 Service ...................................................................................... 83

Contents
4GA10218_002_A7 - 9/2015 - © Oerlikon Leybold Vacuum
3.12 Access Control .......................................................................... 84
3.12.1 Zero ........................................................................................... 84
3.12.2 Access to CAL Function ............................................................ 85
3.12.3 Change Menu-PIN ..................................................................... 85
3.13 Calibration ................................................................................. 85
3.13.1 Introduction ............................................................................... 85
3.13.2 The calibration Routines ............................................................. 86
3.13.3 Internal Calibration ..................................................................... 86
3.13.4 External Calibration .................................................................... 87
3.14 Switching Off/Shutting Down ..................................................... 89
4 Maintenance 90
4.1 Safety Information ...................................................................... 90
4.2 Maintenance Intervals ................................................................ 90
4.3 Oerlikon Leybold Vacuum Service .............................................. 90
4.4 Maintenance Work ..................................................................... 91
4.4.1 Opening of the PHOENIX L300i ................................................. 91
4.4.2 Exchanging the Filter Mats ......................................................... 92
4.4.3 Exchanging the Oil ..................................................................... 93
4.4.4 Cleaning .................................................................................... 93
4.4.5 Exchanging the Fuses ................................................................ 93
4.4.6 Exhaust Oil Filter ........................................................................ 95
4.4.7 Turbo Molecular Pump ............................................................... 95
4.5 Calibrated Leak TL7 ................................................................... 96
4.5.1 Technical Data ........................................................................... 96
4.5.2 Factory Inspection ..................................................................... 96
5 Troubleshooting 97
5.1 Hints for Troubleshooting ........................................................... 97
5.2 List of Errors & Warnings ............................................................ 97
6 Waste Disposal 105

Safety Information
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Important Safety Information
Indicates procedures that must be strictly observed to prevent hazards to persons.
Indicates procedures that must be strictly observed to prevent damage to, or
destruction of the product.
Emphasizes additional application information and other useful information pro-
vided within these Operating Instructions.
The Oerlikon Leybold Vacuum PHOENIX L300i leak detector has been
designed for safe and efficient operation when used properly and in accordance
with these Operating Instructions. It is the responsibility of the user to carefully
read and strictly observe all safety precautions described in this section and
throughout the Operating Instructions. The PHOENIX L300i must only be oper-
ated in the proper condition and under the conditions described in the Operat-
ing Instructions. It must be operated and maintained by trained personnel only.
Consult local, state, and national agencies regarding specific requirements and
regulations. Address any further safety, operation and/or maintenance ques-
tions to our nearest office.
Failure to observe the following precautions could result in serious
personal injury!
Electrical hazards
During all maintenance and connection work, make sure that the mains cable have
been reliable disconnected and do not carry a mains voltage.The leak detector
must only be used in with the hoods closed. The electrical connections must only
be provided by a trained electrician as specified, for example, by the regulations EN
50110-1.
Avoid exposing any part of the human body to the vacuum. Only handle the leak
detector when the pump is vented.
After a mains power failure the leak detector can run up automatically once more.
Before changing oil or fuses, make sure that the mains cable have been discon-
nected.
The leak detector is not suited for operation in explosion hazard areas.
Warning
Caution
Note
Warning

Safety Information
6GA10218_002_A7 - 9/2015 - © Oerlikon Leybold Vacuum
During operation the pump can become so hot that there is a danger of burns
(>70°C, 158°F).Provide protection against contact with the hot components.
Contaminated parts can be detrimental to health and environment. Before begin-
ning to work, find out whether any parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions when handling contaminated
parts.
Failure to observe the following precautions could result in damage to
the pump!
Unauthorized opening or modifications of the mechanical or electrical components
of the leak detector void the warranty.
The leak detector must only be opened by such persons who have been autho-
rised by Oerlikon Leybold Vacuum to do so.
The leak detector can be damaged when using the wrong voltage. The voltage
must be in the range 230V (+/- 5%), 115V (+/- 5%) e.g. 100V (+/- 5%) depending
on the leak detector version. Make sure that the mains voltage rating on the PHOE-
NIX L300i coincides with the locally available mains voltage.
When the PHOENIX L300i is running in closed rooms the exhaust has to be put out
of doors so that the oil vapor can not be breathed in.
Ensure a sufficient air cooling. The air inlet as well the air discharge openings must
never be obstructed. By using the optional iPad it is recommended to pull the fix-
ture of the iPad into a raised position to optimize the cooling.
The PHOENIX L300i is designed for indoor use only.
Operate the PHOENIX L300i only in the permitted temperature range between
+10°C and +40°C.
Only Leybonol-LVO-310 (cat. no. L31001) must be used in the TIVAC D2,5E.
Pumping condensable gases and steams: When pumping test sample water
vapour that is inside the test object can attain to the forepump. With the water
vapor that is in the air - especially in humid areas or when using humid or wet test
samples - the acceptable compatibility of water vapor or capacity of water vapor
respectively can be exceeded.
The steam in the oil of the pump condenses when the water vapor rises over the
acceptable value. So the attribute of the oil changes and danger of corrosion
occurs for the pump.
While using the leak detector with condensable gases and steams the oil of the
forepump has to be controlled regularly. So you can recognize a condensation of
water vapor in the pump. Usually the oil is light and lucent. When water vapor is
Caution

Safety Information
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inside it gets blear and milky at operating state temperature.
When turning the pump off water vapor condensates and raises the part of water in
the oil.
The leak detector must not directly be switched off after the process, in which con-
densable gases or steams are pumped, is finished. It must be running (at least 20
minutes) with opened gas ballast valve until the oil of the pump is freed from
detached steam.
When not taking care of this instruction there can be a corrosion within the pump,
which will not be covered by our warranty.
The height of the oil of the pump has to be controlled regularly.
The normal intervals of changing the oil from the producer have to be taken care of.
See instructions of the rotary vane pump.
The references to diagrams, e.g. (1/2) consist of the Fig. no. and the item No. in
that order.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating instructions for further use.
Symbols of vacuum technology
Given in the following are some important symbols which are used in this Operating
Instructions.
Vacuum pump in general
Turbo molecular pump
Measuring instrument
Valve
Definition of Terms
The range of the preamplifier and the vacuum ranges are selected automatically.
The auto ranging feature of the PHOENIX L300i covers the entire range or leak
rates depending on the selected operating mode. Not only the leak rate signal, but
also the pressure in the test sample (inlet pressure P1) and the fore vacuum pres-
sure (P2) are used for control purposes. Range switching between the main ranges
is performed via valves. Fine range switching within the main ranges is imple-
mented by switching over the gain factor of the preamplifier.
Figures
Auto ranging

Safety Information
8GA10218_002_A7 - 9/2015 - © Oerlikon Leybold Vacuum
Mass alignment
This function automatically aligns the mass spectrometer so that a maximum leak
rate is displayed. The control processor changes the voltage which accelerates the
ions in the selected mass range until a maximum ion current is detected by the ion
detector. During each calibration the mass alignment is run automatically.
Determination and automatic adaptation of the internal background.
Through this function, the internal zero level of the instrument is determined which
is then subtracted from the current leak rate signal. This function is run during the
calibration process or when operating the start push button, provided the PHOE-
NIX L300i has been running previously for at least 20 seconds in the standby or
vent mode.
GROSS is a measurement mode which allows high inlet pressure (15 to 0,2 mbar).
The smallest detectable leak rate is 1 · 10-7 mbar l / s.
FINE is a measurement mode with inlet pressure < 0.2 mbar. The minimum detect-
able leak rate is 5 · 10-12 mbar l / s.
Precision is a measurement mode for the PHOENIX L300i DRY only from an inlet
pressure < 0,01 mbar. In this mode the PHOENIX L300i DRY has the highest sen-
sitivity, the minimum detectable leak rate is  3 · 10-11 mbar l / s.
Pressure in the fore vacuum between turbo pump and rotary vane pump.
The existing helium partial pressure in the measurement system. The level of the
internal helium background is measured in the standby mode and subtracted from
the measured signal.
The smallest leak rate the PHOENIX L300i is able to detect (5·10-12 mbar l / s) in
vacuum mode.
The menu allows the user to program the PHOENIX L300i according to his require-
ments. The menu has a tree architecture.
The PHOENIX L300i measures the leak rate of the test sample.
Status of the PHOENIX L300i when supplied by the factory.
Mass alignment
Auto Zero
GROSS
FINE
PRECISION
Fore-Vacuum Pressure
Internal helium background
Minimum detectable leak
rate
Menu
Measurement mode
Default

Description
GA10218_002_A7 - 9/2015 - © Oerlikon Leybold 9
1 Description
The PHOENIX L300i is a leak detector for helium or hydrogen. This instrument may
be used to detect the location and the size of leaks on objects under test in two dif-
ferent ways:
When the test sample has been evacuated first and is sprayed with helium on the
outside. It is required that a vacuum connection is provided between the PHOENIX
L300i and the test sample (vacuum mode).
or
when a helium overpressure is provided in the test sample and the test sample is
searched from the outside with a sniffer probe which is attached to the inlet port
(sniffer mode).
1.1 Design and Function
The PHOENIX L300i basically is a helium leak detector for vacuum applications, i.e.
the part under test is evacuated while the test is performed. The vacuum is
achieved with a pumping system that is part of the PHOENIX L300i. In addition the
vacuum can be generated by pumps which are set up in parallel to the PHOENIX
L300i.
The PHOENIX L300i MODUL needs a fore vacuum pump, dry or wet version, to be
connected because this unit has no internal roughing pump. The connection
(DN25 KF) is on the side or under the bottom of the PHOENIX L300i MODUL (Fig.
7).
Fig. 1 View of the PHOENIX L300i
1inlet flange 2control panel
12

Description
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Another operating mode of the PHOENIX L300i is the Sniffer mode which can only
be used when a sniffer line (See Chapter 1.1.6) is hooked up.
1.1.1 Vacuum Diagram PHOENIX L300i
The vacuum diagram below shows the major components inside the PHOENIX
L300i.
The mass spectrometer (MS) is mainly composed of the ion source with cathode,
the magnetic separator and the ion collector.
Gas molecules getting into the mass spectrometer are ionized by the ion source.
These positively charged particles are accelerated into the magnetic field following
a circular path, the radius of which depends on the mass-to-charge ratio of the
ions. When mass 4 is selected (Default setting) only helium ions can pass this filter
and reach the ion collector where the stream of the ions is measured as an electri-
Fig. 2 Vacuum diagram PHOENIX L300i
Pos. Description
1MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2Turbo molecular pump (TMP, provides high vacuum conditions in
the MS)
3Pirani gauge P2 (fore vacuum pressure)
4Fore pressure pump (provides the fore vacuum pressure for the
TMP and pumps down the parts under test)
5Inlet Port
6Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
1
2
7
4
6
5
3