Pfeifer Vacuum wrn100 User manual

Translation of the original instructions
Operating Instructions
EN
PT 0204 BEN/N (1407)
TC 110
Electronic Drive Unit

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.4 Functional safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.4 General connection description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4 Connection diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5 Connection "X3" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
5.2 Operation via "X3" connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
6 The Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
6.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
6.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . . . . . . 19
6.5 Switching on/off the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
7 Pfeiffer Vacuum Protocol for "RS-485" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.1 Telegram frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.3 Applied data types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
8 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.2 Operation display via LED . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
8.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

About this manual
3
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Pictographs
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations DCU: Display Control Unit
HPU: Handheld Programming Unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
DI / DO: Digital input / digital output
AI / AO: Analog input / analog output
f: Rotation speed (derivated from frequency in Hz)
[P:000]: Parameter of the electronic drive unit with number
Prohibition of an action or activity in connection with a source of danger,
the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document

Safety
5
2Safety
2.1 Safety precautions
●Power supply: The turbopump power supply must apply to the requirements of dou-
ble insulation between mains input voltage and operating voltage according to the reg-
ulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use
exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum
is able to guarantee the compliance of the European and North American guidelines.
●Observe all safety and accident prevention regulations.
●A safe connection to the protective earthing conductor (PE) is recommended (protec-
tion class III).
●Regularly check the proper observance off all safety measures.
●Before carrying out any work disconnect the unit and all associated installations safely
from the mains.
●Do not loosen any plug connection during operations.
●The unit has been accredited with protection class IP 30. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

6
Safety
2.2 Proper use
●The electronic drive unit TC 110 operates designated Pfeiffer Vacuum turbopumps
and their accessories.
2.3 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●use of accessories or spare parts, which are not named in this manual
●operation of the devices in areas with ionizing radiation
2.4 Functional safety
The drive unit (electronic drive unit) TC 110 performs the safety function "Safe Limited
Speed" according to EN 61800-5-2. In case of excess rotation speed the commutation of
the pump motor is switched off and the drive transferred into the safe condition.
Summary of characteristic data for use in safety-relevant applications:
●During the expected device life span of up to 20 years no proof test is required.
●If the user calculates his safety application with the specified values for 20 years, the
safety control system must be taken out of operation after 20 years and returned to
the manufacturer. A proof test cannot be accomplished by the user.
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
Characteristics according to IEC 61508 and IEC 62061
Characteristic Safety Integrity Level PFH PFDav Proof Test Interval T
Value SIL CL 2 4.2 * 10-9 / h 3.7 * 10-4 20 a
Characteristics according to EN ISO 13849-1
Characteristic Performance Level Category MTTFdAverage Diagnostic Coverage DC
Value PL d Cat. 3 high (134 a) medium (90 % - <99 %)

Product description
7
3 Product description
3.1 Product identification
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
Product characteris-
tics The electronic drive unit TC 110 is an integrated component of the turbopump. It's pur-
pose is to drive, monitor and control the entire pump.
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
3.2 Range of application
Pfeiffer Vacuum electronic drive units TC 110 must be installed and operated in the fol-
lowing ambient conditions.
Characteristics TC 110
Connection voltage TC 24 V DC ± 5 %
Connection panel Standard (X3)
Turbopump HiPace 10, 60, 80, 300
Mod.:
M.-No.:
Ser. -No.:
Oil:
S(N
2
):
n,f:
Made in Germany
HiPace 300
DN 100 ISO-K, 3P
PM P03 900
---
260 l/s
60000 1/min, 1000 Hz
Weight: 6.7 kg
D-35614 Asslar
Installation location weather protected (indoors)
Protection category IP 30
Protection class III
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure 750 hPa - 1060 hPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II

8
Product description
3.3 Function
3.4 General connection description
Fig. 2: Standard panel for the TC 110
c Connection "X3"
d Service connection "PV.can"
h LED "Operating display"
cd h
PV.can1
M12 casing socket with screw coupling and LED for Pfeiffer Vacuum Service pur-
poses.
1. The connection "PV.can" serves to service purposes exclusively.
X3
D-sub 15 pole female socket for the connection of a remote control.
Casing socket on the rear side of the electronic drive unit for the connection to the
turbopump.

Connection diagram
9
4 Connection diagram
Fig. 3: Connection diagram and assignment of the TC 110
+U
B
PE
A
B
C
+U
B
PE
A
B
C
DC in DC in
1
2
3
4
5
24 VDC*
RS 485 +
RS 485 -
n.c.
1
2
3
4
5
24 VDC*
RS 485 +
RS 485 -
n.c.
RS485 RS485
2 3 4 5 6 7
10
11
8 9
12 13
14
15
1
1 8
9
15
X3
TC 110
DI Remote Priority
DI1 DI2
DI Pumping station
DI Standby
24 VDC* (V+)
Accessory A1
Accessory B1
DO1 DO2
AO1
RS 485 D+ RS 485 D-
+U
B
FE
34 21
A
B
C
X3
2 3 4 5 6 7
10
11
8 9
12 13
14
15
1
S2 S1
S2 S1
2 3 4 5 6 7
10
11
8 9
12 13
14
15
1
1 3 4 1 3 4
Acc. A1 Acc. B1
34 21
A
B
C
4
31
4
31
X3
Connection cable TC 110 -TPS/DCU, RS485
TPS 110 / 180 and DCU 002 / HPU 001
or
DCU 110 / 180
Connection cableTC 110 -TPS/DCU with accessory ports, RS485
TPS 110 / 180 and DCU 002 / HPU 001
or
DCU 110 / 180
0 - 10 VDC = 0 - 100 % *f
end
R ≥10kΩ
90 - 132 / 185 - 265
VAC
2 3 4 5 6 7
10
11
8 9
12 13
14
15
1
+U
B
PE
B A C
TPS 110 / 180
DCU 110 / 180
X3
24 VDC / max. 200 mA 24 VDC / max. 200 mA 24 VDC / max. 50mA 24 VDC / max. 50mA +24 VDC / 4,6 - 6,3 A ± 5 % FE
DC out AC in
Contact current max. 6 mA / contact
Mains input / Power supply
External connection
Fan Venting valve Relay
Fan Venting valve Relay

10
Connection "X3"
5 Connection "X3"
Remote control options and voltage supply are provided via the 15-pole D-sub connector
with the designation ”X3“ on the TC 110.
Shielded connectors and cables must be used.
The following information display the factory setting. Configuration is possible
using the Pfeiffer Vacuum parameter set.
5.1 Pin assignment
5.2 Operation via "X3" connection
Voltage supply +24 V DC Input / Pin 1
The electrical connection at "X3" is carried out via connecting cables of the Pfeiffer Vac-
uum accessories program or by customized configuration on Pin 1 and Pin 15.
+24 V DC* Output / Pin 7
Inputs 2 - 6 are activated by connecting them with +24 V DC to Pin 7 (active high). They
can also be activated via an external PLC. The functions are deactivated by "PLC high
level" and by "PLC low level".
●PLC high level: +13 V to +33 V
●PLC low level: -33 V to +7 V
●Ri: 7 kΩ
●Imax < 200 mA (with RS-485, if existing)
NOTICE
Danger of the drive unit being destroyed
Cutting the plug connection "X3" can lead to the destruction of the electronic drive unit,
when the power supply is still switched on.
Before pulling the connector "X3" necessarily disconnect the power supply.
Switch off the power supply unit.
Pin Function Designation factory settings
1 +24 V DC input Voltage supply for the electronic drive unit
2 DI Remote priority Control via interface "X3"; open: off;
V+: set and priority over other digital inputs
3 DI1 Enable venting; open: off; V+: on
4 DI2 Heating; open: off; V+: on
5 DI Pumping station open: off; V+: on and error acknowledgement
6 DI Standby
DI Error acknowledgement
Standby rotation speed; open: off; V+: on
Error acknowledgement: V+ pulse (500 - 2000 ms)
7 +24 V DC* output (V+) Reference voltage for all digital inputs
8 DO1 GND: no; V+: yes (Imax = 50 mA/24 V)
9 DO2 GND: no; V+: yes (Imax = 50 mA/24 V)
10 Accessory output A1 open: off; V+: on
11 Accessory output B1 open: off; V+: on
12 AO1 Actual rotation speed;
0-10 V DC is equivalent to 0-100%; RL> 10 kΩ
13 RS-485 D+
14 RS-485 D-
15 Ground (GND) Ground connection for the elctronic drive unit;
Reference ground for all digital inputs and all outputs

Connection "X3"
11
Inputs The digital inputs at connection "X3" are used to connect various functions of the elec-
tronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory. These can be
configured via interface RS-485 and the Pfeiffer Vacuum parameter set.
DI Remote priority / Pin 2
V+ : The connection "X3" has operation priority over all other digital inputs.
open: Remote priority inactive
DI1 (Enable venting) / Pin 3
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI2 (Heating) / Pin 4
V+ : Heating on
open: Heating off
DI Pumping station / Pin 5
The turbopump is placed in operation and connected pumping station components (e.g.
backing pump, venting valve, air cooling unit) are triggered. Any ongoing error messages
are reset when their cause has been eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby - Error acknowledgement / Pin 6
In standby mode, the turbopump operates at a specified rotor speed < nominal rotation
speed. Factory setting and recommended operation are 66.7 % of the nominal rotation
speed.
V+ : Standby activated
V+ : Reset ongoing error messages when cause has been eliminated with a pulse of
500 - 2000 ms duration
open: Standby off, operation at nominal rotation speed
Outputs The digital outputs at the connection "X3" can be loaded with a maximum of 24 V / 50
mA per output. All outputs listed below are configurable by the Pfeiffer Vacuum parame-
ter set via interface RS-485 (description related to factory settings).
DO1 (Rotation speed switchpoint attained) / Pin 8
Active high after the rotation speed switchpoint is attained. Rotation speed switchpoint 1
is factory-set to 80% of the nominal rotation speed. It can, for example, be used for a
"pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage has been established, digital output DO2 permanently outputs
24 V DC which means "no errors". Active low in case of error (collective error message).
Accessory outputs / Pin 10 and Pin 11
The accessory outputs can be loaded with a maximum of 24 V / 200 mA per output. Ad-
ditional functions can be assigned to the accessory inputs and outputs via DCU, HPU or
PC. Works settings:
●Accessory output A1: A connected air cooling unit is activated.
●Accessory output B1: A connected venting valve is activated, if venting release is
transmitted via input DI1.

12
Connection "X3"
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 V DC equals 0 - 100 % x fNominal) can be
picked up via the analog output (load R ≥10 kΩ). Additional functions (optionally current/
power) can be assigned to the analog output via DCU, HPU or PC.
RS-485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected respectively to the electronic drive unit via Pin 13 and Pin 14 of the connec-
tion "X3" on the electronic drive unit.
●The group address of the electronic drive unit is 961.
●All units connected to the bus must have differing RS-485 device addresses [P:797].
Connecting Pfeiffer Vacuum display and control units or PC
Fig. 4: Optional connection possibilities for interface RS485
Use the connection cable supplied with the control panel or from the range of acces-
sories.
The connection of respectively one external operating unit is possible on the interface
RS-485.
A USB interface (PC) can be connected via the USB/RS-485-converter.
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
Connect only suitable devices to the bus system.
Designation Value
Serial interface RS-485
Baud rate 9600 bauds
Data word length 8 bits
Parity none (no parity)
Start bits 1
Stop bits 1..2
DCU 002
DCU 110 - 310
HPU
USB/RS485-converter
TPS TC
RS485
RS485
RJ45
M12
M12
DC in
DC in
M12
M12 M12

Connection "X3"
13
Cross-linking via the connection RS-485
Fig. 5: Cross-linking via connection RS485 with connection cables and accessory
Establish the connections according to the specification of the interface RS-485.
Connect all units with RS-485 D+ and RS-485 D- to the bus.
●The group address of the electronic drive unit is 961.
●All units connected to the bus must have differing RS-485 device addresses [P:797].
USB/RS485-converter
Y-Connector
RS485
RS485
RS485 M12 M12
M12
M12
TC TC
D+
D-
USB/RS485-converter
RS 485
USB
PC

14
The Pfeiffer Vacuum parameter set
6 The Pfeiffer Vacuum parameter set
6.1 General
All function-relevant variables of a turbopump are anchored in the electronic drive unit as
parameters. Each parameter has a three-digit number and a designation. Parameters
can be used via Pfeiffer Vacuum display and control units or via RS-485 with the Pfeiffer
Vacuum protocol.
Conventions Parameters are displayed in square brackets as a three-digit number in bold font. The
designation may also be stated if necessary.
Example: [P:312] Software version
6.2 Parameter overview
Annotation
Operation with DCU
Additional parameters in the control unit
For the control of connected external components (e.g. vacuum measurement devices)
there are additional parameters fixed in the respective Pfeiffer Vacuum display and con-
trol unit.
Please consider the respective operating instructions.
#Three figure number of the parameter
Display Notification of the parameter in a Pfeiffer Vacuum display and control unit
Designation Short description of the parameter
Functions Functional description of the parameter
Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro-
tocol
Access method R: read access; W: write access
Unit Physical unit of the described characteristic
min / max Permissible limits for value input
default Factory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may be re-
used after resetting of the mains supply.
Parameter set and Pfeiffer Vacuum display and control unit
Pfeiffer Vacuum display and control units DCU show the basic parameter set by default.
Furthermore the DCU contains parameters, which are not positioned in the electronic
drive unit.
Parameter [P:794] = 1 (Display of all available parameters).
# Display Designation Functions
Data type Access
Unit min max default 
340 Pressure Active pressure value 7 R mbar 1E-
10
1E3
350 Ctr Name Type of display and control unit 4 R
351 Ctr Software Software of display and control unit 4 R
738 Gaugetype Type of pressure gauge 4 RW
794 Param set Parameterset 0 = basic parameter set
1 = extended parameter set
7RW 0 1 0
795 Servicelin Insert service line 7 RW 795

The Pfeiffer Vacuum parameter set
15
Control commands
# Display Designation Functions
Data type Access
Unit min max default 
001 Heating Heating 0 = off
1 = on
0RW 0 1 0 x
002 Standby Standby 0 = off
1 = on
0RW 0 1 0 x
004 RUTimeCtrl Run-up time control 0 = off
1 = on
0RW 0 1 1 x
009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1
010 PumpgStatn Pumping station 0 = off
1 = on and error acknowledgement
0RW 0 1 0 x
012 EnableVent Enable venting 0 = no
1 = yes
0RW 0 1 0 x
017 CfgSpdSwPt Configuration rotation speed switchpoint 0 = Rotation speed switchpoint 1
1 = Rotation speed switchpoint 1&2
7RW 0 1 0 x
019 Cfg DO2 Configuration output DO2 0 = Rot. speed switchpoint attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
7RW 0 17 1 x
023 MotorPump Motor pump 0 = off
1 = on
0RW 0 1 1 x
024 Cfg DO1 Configuration output DO1 0 = Rot. speed switchpoint attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pump decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
16 = Pump rotates
17 = Pump does not rotate
7RW 0 17 0 x
025 OpMode BKP Backing pump mode 0 = Continuous operation
1 = Intermittent operation
2 = Delayed switching on
3 = Delayed intermittent operation
7RW 0 3 0 x
026 SpdSetMode Rotation speed setting mode 0 = off
1 = on
7RW 0 1 0 x
027 GasMode Gas mode 0 = Heavy gases
1 = Light gases
2 = Helium
7RW 0 2 0 x
030 VentMode Venting mode 0 = Delayed venting
1 = No venting
2 = Direct venting
7RW 0 2 0 x
035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 0 x

16
The Pfeiffer Vacuum parameter set
Status requests
036 Cfg Acc B1 Configuration accessory connection B1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 1 x
037 Cfg Acc A2 Configuration accessory connection A2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 3 x
038 Cfg Acc B2 Configuration accessory connection B2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Power failure venting unit
7RW 0 8 2 x
050 SealingGas Sealing gas 0 = off
1 = on
0RW 0 1 0 x
055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed
1 = Power
2 = Current
3 = always 0 V
4 = always 10 V
7RW 0 4 0 x
060 CtrlViaInt Control via interface 1 = Remote
2 = RS-485
4 = PV.can
8 = Field bus
16 = E74
255 = Unlock interface selection
7 RW 1 255 1 x
061 IntSelLckd Interface selection locked 0 = off
1 = on
0RW 0 1 0 x
062 Cfg DI1 Configuration input DI1 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
6 = Motor
Setting ≠[P:063]
7RW 0 6 1 x
063 Cfg DI2 Configuration input DI2 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
6 = Motor
Setting ≠[P:062]
7RW 0 6 2 x
# Display Designation Functions
Data type Access
Unit min max default 
# Display Designation Functions
Data type Access
Unit min max default 
300 RemotePrio Remote priority 0 = no
1 = yes
0R 0 1
302 SpdSwPtAtt Rotation speed switchpoint attained 0 = no
1 = yes
0R 0 1
303 Error code Error code 4R
304 OvTempElec Excess temperature electronic drive unit 0 = no
1 = yes
0R 0 1
305 OvTempPump Excess temperature pump 0 = no
1 = yes
0R 0 1
306 SetSpdAtt Set rotation speed attained 0 = no
1 = yes
0R 0 1

The Pfeiffer Vacuum parameter set
17
Set value settings
6.3 Configuring the connections
The electronic drive unit is pre-configured in the factory. Thereby the turbopump is im-
mediately operational with the necessary functions. The connections of the electronic
drive unit can be configured to suit individual requirements using the parameter set.
307 PumpAccel Pump accelerates 0 = no
1 = yes
0R 0 1
308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999
309 ActualSpd Active rotation speed (Hz) 1 R Hz 0 999999
310 DrvCurrent Drive current 2 R A 0 9999.99
311 OpHrsPump Operating hours pump 1 R h 0 65535 x
312 Fw version Firmware version electronic drive unit 4 R
313 DrvVoltage Drive voltage 2 R V 0 9999.99
314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x
315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999
316 DrvPower Drive power 1 R W 0 999999
319 PumpCylces Pump cycles 1 R 0 65535 x
326 TempElec Temperature electronic 1 R °C 0 999999
330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999
336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999
342 TempBearng Temperature bearing 1 R °C 0 999999
346 TempMotor Temperature motor 1 R °C 0 999999
349 ElecName Name of electronic drive unit 4 R
354 HW Version Hardware version electronic drive unit 4 R
360 ErrHist1 Error code history, pos. 1 4 R x
361 ErrHist2 Error code history, pos. 2 4 R x
362 ErrHist3 Error code history, pos. 3 4 R x
363 ErrHist4 Error code history, pos. 4 4 R x
364 ErrHist5 Error code history, pos. 5 4 R x
365 ErrHist6 Error code history, pos. 6 4 R x
366 ErrHist7 Error code history, pos. 7 4 R x
367 ErrHist8 Error code history, pos. 8 4 R x
368 ErrHist9 Error code history, pos. 9 4 R x
369 ErrHist10 Error code history, pos. 10 4 R x
397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999
398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999
399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999
# Display Designation Functions
Data type Access
Unit min max default 
# Display Designation Functions
Data type Access method
Unit min max default 
700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x
701 SpdSwPt1 Rotation speed switchpoint 1 1 RW % 50 97 80 x
707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 65 x
708 PwrSVal Set value power consumption 7 RW % 10 100 1001x
710 Swoff BKP Switching off threshold backing pump in intermit-
tend mode
1 RW W 0 1000 0 x
711 SwOn BKP Switching on threshold backing pump in intermit-
tend mode
1 RW W 0 1000 0 x
717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x
719 SpdSwPt2 Rotation speed switchpoint 2 1 RW % 5 97 20 x
720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x
721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x
777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 0 x
797 RS485Adr RS-485 device address 1 RW 1 255 1 x
1. depending on the pump type

18
The Pfeiffer Vacuum parameter set
Digital outputs on
"X3"
Configuration via parameters [P:019] and [P:024].
Analog output on
"X3"
Configuration via parameter [P:055].
Accessory connec-
tion
Configuration via parameters [P:035] or [P:036].
The standard version electronic drive unit TC 110 only can control two accessory ports
via connection cable. Therefore the parameters [P:037] and [P:038] are ineffective.
Option Description
0 = Rotation speed switchpoint attained active, if switchpoint attained
1 = No error active, if failure-free operation
2 = Error active, if error message is active
3 = Warning active, if warning message is active
4 = Error and / or warning active, if error and / or warning is active
5 = Set rotation speed attained active, if set rotation speed is attained
6 = Pump on active, if Pumping station and Motor is on; No Error
7 = Pump accelerates active, if Pumping station is on;
Actual rotation speed < Set rotation speed
8 = Pump decelerates active, if Pumping station is on;
Actual rotation speed > Set rotation speed
Pumping station is off;
Rotation speed > 3 Hz
9 = always 0 GND for the control of an external device
10 = always 1 +24 V DC for the control of an external device
11 = Remote priority active active, if Remote priority is active
12 = Heating Control is equal to parameter [P:001]
13 = Backing pump Control is equal to parameter [P:010] and [P:025]
14 = Sealing gas Control is equal to parameter [P:050]
15 = Pumping station Control is equal to parameter [P:010]
16 = Pump rotates active, if rotation speed > 1 Hz
17 = Pump does not rotate active, if rotation speed < 2 Hz
Option Description
0 = Rotation speed Rotation speed signal; 0 - 10 V DC = 0 - 100 % x fNominal
1 = Power Power signal; 0 - 10 V DC = 0 - 100 % x Pmax
2 = Current Current signal; 0 - 10 V DC = 0 - 100 % x Imax
3 = always 0 V always GND
4 = always 10 V output of continously 10 V DC
Option Description
0 = Fan (continous operation) Control via parameter Pumping station
1 = Venting valve, normally closed Control via parameter Enable venting, when using a venting
valve which is normally closed.
2 = Heating Control via parameters Heating and Rotation speed switch-
pont attained
3 = Backing pump Control via parameters Pumping station and operation
mode backing pump
4 = Fan (temperature controlled) Control via parameter Pumping station and temperature
thresholds
5 = Sealing gas Control via parameters Pumping station and Sealing gas
6 = always 0 GND for the control of an external device
7 = always 1 +24 V DC for the control of an external device
8 = Power failure venting unit Control via parameter Enable venting, when using a power
failure venting unit.

The Pfeiffer Vacuum parameter set
19
Control via interface Configuration via parameters [P:060] and [P:061].
Digital inputs on "X3"Configuration via parameters [P:062] and [P:063].
6.4 Operation with the Pfeiffer Vacuum parameter set
Factory settings The electronic drive unit is pre-programmed in the factory. This guarantees proper, reli-
able turbopump operation without the need for additional configuration.
Checking the adjust-
ments
Before operating with parameters, check set values and control commands for their
suitability for the pumping process.
Gas type dependent
operations Friction causes the rotor to heat up severely under gas load and high rotation speed. To
avoid overheating, the electronic drive unit has implemented power-rotation speed-char-
acteristics, whereby the pump can be operated at every rotation speed with the maxi-
mum allowable gas load without danger of damage. The maximum power consumption
depends on the gas type. Three characteristics are available in order to completely ex-
haust the pump's capacity for each gas type.
●Gas mode "0" for gases with the molecular mass >39, e.g. argon.
●Gas mode "1" for gases with the molecular mass ≤39.
●Gas mode "2" for helium.
●Power characteristics according to the technical data of the turbopump.
Check and set-up the gas mode via [P:027].
Option [P:060] Description
1 = remote Operation via connection "remote"
2 = RS-485 Operation via connection "RS-485"
4 = PV.can For service purposes only
8 = Field bus Operation via field bus
16 = E74 Operation via connection "E74"
Option [P:061] Description
0 = off Interface selection via [P:060]
1 = on Interface selection locked
Option Description
0 = deaktiviert Connection deactivated
1 = Enable venting Control is equal to parameter [P:012]
2 = Heating Control is equal to parameter [P:001]
3 = Sealing gas Control is equal to parameter [P:050]
4 = Run-up time control Control is equal to parameter [P:004]
5 = Rotation speed setting mode Control is equal to parameter [P:026]
6 = Motor Control is equal to parameter [P:023]
NOTICE
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de-
struction of the pump.
Ensure the gas mode is correctly set.
Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).

20
The Pfeiffer Vacuum parameter set
Fig. 6: Principle of power characteristics lines for gas type dependent operations,
e.g. gas mode = 0
The turbopump runs up with maximum power consumption. When the nominal and/or set
rotation speed is reached, the pump automatically switches over to the chosen power
characteristic of the selected gas mode. Increasing gas load is initially compensated by
a rise in power consumption in order to keep the rotation speed constant. Increasing gas
friction, however, causes the turbopump to heat up more severely. When the gastype-
dependent maximum power is exceeded, the rotation speed of the turbopump is reduced
until an equilibrium between permissible power and gas friction is attained.
To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a some-
what lower frequency in rotation speed setting mode.
Set value power con-
sumption
Adjust the parameter [P:708] to the desired value in %.
If adjusting the set value power consumption below 100 % the run-up time prolongs. To
avoid error messages, the parameter [P:700] RUTimeSVal should be adjusted accord-
ingly.
Run-up time The run-up of the turbopump is time-monitored ex factory. There are various causes of
prolonged run-up times, e.g.:
●Too high gas loads
●Leakage in the system
●The set value run-up time is too low
Eliminate any external and application-related causes.
Adjust the run-up time via parameter [P:700].
Adjustingtherotation
speed switchpoint The rotation speed switchpoint can be used for the message "Pump operational for the
process". Overrunning or underrunning the active rotation speed switchpoint activates or
deactivates a signal at the pre-configured output on the electronic drive unit and at the
status parameter [P:302].
Rotation speed switchpoint 1
Adjust the parameter [P:701] to the desired value in %.
Parameter [P:017] = 0
Signal output and status parameter [P:302] are based on the set value for rotation speed
switchpoint 1 [P:701].
[P:708]
D
F
B
A
C
E
Pmax
fN
Run-up
Rotation speed
Power
C-D = gas mode "0"
A-B = gas mode "1"
E-F = gas mode "2"