Pfeiffer Vacuum TMH 071 User manual

TurboDrag Pump
with Electronic Drive Unit TC 600
PM 0504 BE/M (0702)
TMH 071
TMU 071
Betriebsanleitung • Operating Instructions
Translation of the Original Operating Instructions

2
Index
Page Page
1. Safety Instructions .......................... 3
1.1. For Your Orientation ......................................... 3
1.2. Pictogram Definitions ....................................... 3
2. Understanding The Pumps............. 4
TMH 071 / TMU 071
2.1. Main Features................................................... 4
Proper Use ....................................................... 5
Improper Use ................................................... 5
2.2. Differences Between The Pump Types............ 5
2.3. Scope Of Delivery............................................. 5
3. Installation ....................................... 6
3.1. Preparations For Installation ............................. 6
3.2. Connecting The High Vacuum Side ................. 6
Installing The High Vacuum Flange................... 7
Directly Flanging The Pump.............................. 8
3.3. Connecting The Fore-Vacuum Side ................. 9
3.4. Connecting The Cooling Unit ............................ 9
3.5. Connecting The Venting Valve........................ 10
3.6. Connecting The Casing Heating Unit.............. 10
3.7. Connecting The Sealing Gas Valve ................. 10
3.8. Connecting The Electronic Drive Unit TC 600 11
3.9. Installing The Power Supply .......................... 11
3.10. Installation Of Pfeiffer Vacuum ...................... 12
Display And Control Units
Connection ..................................................... 12
3.11. Connecting The RS 485 ................................ 12
3.12. Connecting The Remote Control Unit ............ 13
3.13. Connections Diagram ..................................... 14
4. Operations...................................... 15
4.1. Before Switching On ...................................... 15
4.2. Switching On .................................................. 15
4.3. Operations With The Remote Control Unit..... 15
Venting Release (Optional) ............................. 15
Motor, Turbopump ......................................... 15
Pumping Station ............................................ 15
Heating/Reset ................................................ 16
Standby........................................................... 16
Rotation Speed Setting Mode ........................ 16
Via Input PWM
Switching Outputs .......................................... 16
Analog Output................................................. 16
4.4. Gas Type Dependent Operations .................. 16
4.5. Operations With The DCU 001/DCU 100 ...... 17
or HPU 001
4.6. Switching Off And Venting ............................. 17
4.7. Shutting Down For Longer Periods ............... 17
5. Monitoring Operations.................. 18
5.1. Operations Display Via LED ............................ 18
5.2. Turbopump Temperature Management ......... 18
6. What To Do In Case Of .................. 19
Breakdowns ?
7. Maintenance / Exchange .............. 20
7.1. Replacing The Electronic Drive Unit ............... 20
7.2. Replacing The Lubricant Reservoir ................. 21
Standard Version............................................. 21
“Y”-Version (Mounting In Any Orientation) .... 22
8. Service............................................ 23
9. Technical Data ................................ 24
9.1. Dimensions Diagram ..................................... 25
10. Spare Parts ..................................... 26
11. Accessories..................................... 27
Declaration of Contamination............ 28
Manufacturer’s Declaration .. (last page)
PPlleeaasseennoottee::Current operating instructions are available via
www.pfeiffer-vacuum.net
For information about certifications, if applicable, please see
the signet on the pump or:
☞www.tuvdotcom.com
☞TUVdotCOM-ID 0000021320

3
1. Safety Instructions
1.1. For Your Orientation
Instruction in the text
➡Working instruction: here, you have to do something.
Symbols used
The following symbols are used throughout in all illustrations.
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Air cooling
Electric connection
Sealing gas connection
Abbreviations used
DCU = Display and control unit
HPU = Handheld programming unit
TC = Electronic drive unit, turbopump
TPS = Power unit
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions
Warning, danger of burns from touching hot
parts.
Warning, danger of personal injury.
Caution, danger of damage to the pump or to
the system.
Warning, danger of injury from rotating parts.
Please note, attention to particulary important
information
on the product, handling the product or to a
particular part of the documentation.
☞
PLEASE NOTE
WARNING
CAUTION
WARNING
WARNING
☞Read and follow all instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞Avoid exposing any part of the body to vacuum.
☞Observe the safety and accident prevention regulations.
☞Regularly check that all accident prevention measures are
being complied with.
☞Do not operate the turbopump with open high vacuum
flange.
☞Do not carry out any unauthorised conversions or
alterations to the turbopump with TC 600.
☞When returning the turbopump observe the shipping
instructions.
☞The turbopump must be anchored in accordance with the
installation instructions.
☞Do not disconnect the plug between the TC 600 and
accessory components during operations.
☞Disconnect the voltage supply to the TC 600 before
opening the turbopump.
☞When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange. Take care
to avoid burns !
☞During operations, temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!
☞Keep leads and cables well away from hot
surfaces ( > 70 °C).
☞Operate the turbopump with TC 600 only in conjunction
with the relevant power unit (accessory).
☞The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken. Protection class IP 54 is afforded by retro-fitting a
cover plate (Accessory) to the TC 600.
☞The mains connection must be subject to a safe
connection to the PE (protection class 1).
☞If the turbopump and the TC 600 are operated
independently of each other (only permissible with the
agreement of the manufacturer) the turbopump must be
connected to the PE.
☞The turbopump and the TC 600 must only be disconnected
from each other when the turbopump is completely at rest
and the TC 600 has been disconnected from the power
supply.
☞The cause of any operating voltage leakage to earth (red
LED flashes) must be eliminated to avoid the danger of an
electric shock.
Modifications reserved.

4
2.1. Main Features
Turbopumps TMH 071 / TMU 071 with the TC 600 form a
complete unit. Voltage is supplied by the power unit (see
”Accessories”).
On delivery, the pumps have been set up for
operations in remote mode.
RReemmootteepplluugg88ddsshhoouullddmmuussttbbeerreemmoovveeddiiff
ooppeerraattiioonnsswwiitthhDDCCUUoorrHHPPUUaarreerreeqquuiirreedd..
☞
PLEASE NOTE
Cooling
– Enhanced convection cooling with cooling unit
(accessory),
– air cooling (accessory) or
– water cooling (accessory).
Integrated protective measures against excess temperatures:
The electronic drive unit TC 600 reduces
the rotor rotation speed.
Bearings
High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Oil circulatory lubricated ball bearing
with ceramic balls.
2. Understanding The Pumps TMH 071 / TMU 071
Turbomolecular Drag Pump TMH 071 / TMU 071
1 High vacuum flange
2 Fore-vacuum flange
4 Venting valve
6 Rubber feet
8 Electronic drive unit TC 600
8d Remote plug
1
8d
86
42
Ambient conditions
The turbomolecular pump needs to be installed in compliance
with the following ambient conditions:
IInnssttaallllaattiioonnllooccaattiioonn::protected against the weather
(rooms within buildings)
TTeemmppeerraattuurree::+5 °C to +40 °C
RReellaattiivveehhuummiiddiittyyoofftthheeaaiirr::max. 80 % at T ≤31 °C
up to max. 50% at T ≤40 °C
AAiirrpprreessssuurree::77 kPa - 106 kPa
IInnssttaalllla
attiioonnaallttiittuuddee::2000 m max.
PPoolllluuttiioonnddeeggrreeee::2
OOvveerrvvoollttaaggeeccaatteeggoorryy::II
CCoonnnneeccttiioonnvvoollttaaggee::24 VDC ±5%

5
Feature TMH 071 TMU 071
High vacuum flange ISO-KF / ISO-K CF-F
High vacuum seal Elastomer Metal
Attainable final < 1 · 10-7 mbar < 5 · 10-10 mbar
pressure (without baking-out) (with baking-out)
2.2. Differences Between The Pump
Types
Abbreviations on the rating plate of the turbopump
Suffix ””PP””: Purge gas connection for the prevention of the
ingress of aggressive gases into the motor and
bearing arena (Sealing gas valve see
“Accessories”).
Suffix “Y”: Installation orientation in all positions possible.
2.3. Scope Of Delivery
Turbomolekular pump with:
- Electronic drive unit TC 600,
- protecting cover for high vacuum flange,
- protecting cover for fore vacuum flange,
- only DN 63 ISO-K: 2 bracket screws.
Proper Use
– The Turbomolecular Pumps TMH 071 / TMU 071 may only
be used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– Only Pfeiffer Vacuum power units may be used to operate
the TC 600. The use of other power units requires the prior
agreement of the manufacturer and equalization with the
valid specification.
– The pumps may only be operated providing the ambient
conditions in compliance with Protection Type IP 30 are
observed.
– Sealing gas must be used to ensure rotor cooling, when
operate the pump with 50% of the maximum gas load.
Improper Use
The following is regarded, inter alia, as improper:
– The pumping of explosive or corrosive gases,
– Operating the pumps in explosive areas,
– The pumping of gases and vapours which attack the mate-
rials of the pumps,
– The pumping of radioactive media,
– The pumping of corrosive gases without sealing gas,
– The pumping of condensating vapours,
Operation involving impermissibly high levels of gas loads.
– Operation with improper gas modes.
– Operation involving too high levels of heat radiation power
(see Section ”Technical Data”).
– Operation without the use of cooling equipment.
– Operation without cover plate for the TC in environments
which require a protection class superior to IP 30.
– Installation in systems where the turbopumps are
subjected to impact-like stress and vibrations or the effect
of periodically occurring forces.
– The use of other power units or accessories which are not
named in this manual or which have not been agreed by
the manufacturer.
– The connection to power units with earthing of a direct
voltage pole.
Improper use will cause all claims for liability and guarantees
to be forfeited.