Pfeiffer Vacuum HiPace 2300 User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 2300
Turbopump

Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 10
1.4 Trademark proof 11
2 Safety 12
2.1 General safety information 12
2.2 Safety instructions 12
2.3 Safety precautions 17
2.4 Limits of use of the product 18
2.5 Proper use 19
2.6 Foreseeable improper use 19
2.7 Personnel qualification 19
2.7.1 Ensuring personnel qualification 20
2.7.2 Personnel qualification for maintenance and repair 20
2.7.3 Advanced training with Pfeiffer Vacuum 20
3 Product description 21
3.1 Function 21
3.1.1 Cooling 21
3.1.2 Rotor bearing 21
3.1.3 Drive 21
3.2 Scope of delivery 21
3.3 Identifying the product 22
3.3.1 Product types 22
3.3.2 Product features 22
4 Transportation and Storage 23
4.1 Transport 23
4.1.1 Transport in vertical position 24
4.1.2 Transport in horizontal orientation 24
4.2 Storage 25
5 Installation 26
5.1 Preparatory work 26
5.2 Connecting the high vacuum side 27
5.2.1 Requirements for the dimensioning of a counter flange 27
5.2.2 Considering the earthquake protection 27
5.2.3 Using a splinter shield or protective screen 28
5.2.4 Using the vibration compensator 28
5.2.5 Mounting orientations 29
5.2.6 Attaching ISO-K flange onto ISO-K 30
5.2.7 Attaching ISO-K flange to ISO-F 30
5.2.8 Attaching ISO-F flange to ISO-F 32
5.2.9 Attaching CF flange to CF-F 33
5.3 Filling the operating fluid 35
5.4 Connecting fore-vacuum side 36
5.5 Connect cooling water supply 37
5.6 Connecting accessories 39
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5.7 Connecting sealing gas 39
5.8 Connecting the electrical supply 40
5.8.1 Implement electrical safety measures 40
5.8.2 Ground the vacuum pump 40
5.8.3 Establishing the electric connection 41
6 Operation 42
6.1 Commissioning 42
6.2 Operating modes 43
6.2.1 Operation without operating unit 43
6.2.2 Operation via connection "E74" 43
6.2.3 Operation via multi-function connection "remote" 43
6.2.4 Operation via Pfeiffer Vacuum display and control units 43
6.2.5 Operation via field bus 44
6.3 Switching on the turbopump 44
6.4 Operation monitoring 45
6.4.1 Operating mode display via LED 45
6.4.2 Temperature monitoring 45
6.5 Switching off and venting 45
6.5.1 Switching off 45
6.5.2 Venting 46
7 Maintenance 47
7.1 General maintenance information 47
7.2 Maintenance intervals and responsibilities 47
7.3 Changing the operating fluid 48
7.3.1 Draining the operating fluid 48
7.3.2 Filling the operating fluid 49
7.4 Replacing the electronic drive unit 50
7.4.1 Removing electronic drive unit 51
7.4.2 Installing the electronic drive unit 52
7.4.3 Confirming the speed specification 53
8 Decommissioning 54
8.1 Stillsetzen für längere Zeit 54
8.2 Recommissioning 54
9 Recycling and disposal 56
9.1 General disposal information 56
9.2 Dispose of turbopumps 56
10 Malfunctions 57
11 Service solutions by Pfeiffer Vacuum 60
12 Spare parts 62
13 Accessories 63
13.1 Accessory information 63
13.2 Ordering accessories 63
14 Technical data and dimensions 66
14.1 General 66
14.2 Technical data 66
14.3 Dimensions 72
Declaration of Conformity 75
Table of contents
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List of tables
Tbl. 1: Stickers on the product 9
Tbl. 2: Abbreviations used in this document 11
Tbl. 3: Permissible ambient conditions 18
Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps 22
Tbl. 5: Turbopump features 22
Tbl. 6: Delivered drive power depending on the supplied mains voltage 22
Tbl. 7: Requirements for the dimensioning of high vacuum connection supplied by
the customer
27
Tbl. 8: Reducing turbopump pumping speed through the use of a splinter shield or
protective screen
28
Tbl. 9: Requirements on the cooling water composition 38
Tbl. 10: Requirements on the cooling water connection 38
Tbl. 11: Factory pre-set accessory connections on the electronic drive unit 39
Tbl. 12: Terminal lay-out of the power supply connector 41
Tbl. 13: Preconfigured settings for turbopumps when delivered 42
Tbl. 14: Behavior and meaning of the LEDs on the electronic drive unit 45
Tbl. 15: Factory settings for delayed venting in turbopumps 46
Tbl. 16: Characteristic nominal rotation speeds of the turbopumps 53
Tbl. 17: Troubleshooting turbopumps 59
Tbl. 18: Available spare parts 62
Tbl. 19: Accessories 65
Tbl. 20: Conversion table: Pressure units 66
Tbl. 21: Conversion table: Units for gas throughput 66
Tbl. 22: Technical data for HiPace 2300 Standard 68
Tbl. 23: Technical data for HiPace 2300 U 69
Tbl. 24: Technical data for HiPace 2300 C 71
Tbl. 25: Technical data for HiPace 2300 UC 72
List of tables
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List of figures
Fig. 1: Position of the stickers on the product 10
Fig. 2: Design HiPace 2300, standard version and upside-down version 21
Fig. 3: Slinging points for vertical transport of the turbopump without packaging 24
Fig. 4: Slinging points for horizontal transport of the turbopump without packaging 25
Fig. 5: Example: Securing against displacement and tipping caused by external vi-
brations
28
Fig. 6: Mounting orientations of the standard version, upright 29
Fig. 7: Mounting orientations of the upside-down version 29
Fig. 8: Alignment of the fore-vacuum connection with horizontal mounting orienta-
tion
29
Fig. 9: Flange connection ISO-K to ISO-F, bracket screws 30
Fig. 10: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 31
Fig. 11: Flange connection ISO-K to ISO-F, stud screw and tapped hole 31
Fig. 12: Flange connection ISO-K to ISO-F, stud screw and through hole 31
Fig. 13: Flange connection ISO-F, hexagon head screw and tapped hole 32
Fig. 14: Flange connection ISO-F, hexagon head screw and through hole 32
Fig. 15: Flange connection ISO-F, stud screw and tapped hole 33
Fig. 16: Flange connection ISO-F, stud screw and through hole 33
Fig. 17: Flange connection CF-F, hexagon head screw and through hole 34
Fig. 18: Flange connection CF-F, stud screw and tapped hole 34
Fig. 19: Flange connection CF-F, stud screw and through hole 34
Fig. 20: The position of the filler screws depends on the mounting orientation. Exam-
ple: Standard versions
35
Fig. 21: The position of the filler screws depends on the mounting orientation. Exam-
ple: U versions
36
Fig. 22: Example of fore-vacuum connection 37
Fig. 23: Cooling water connection 38
Fig. 24: Example: Connecting the grounding cable 41
Fig. 25: Examples: Draining operating fluid for the standard and U versions 48
Fig. 26: The position of the filler screws depends on the mounting orientation. Exam-
ple: Standard versions
49
Fig. 27: The position of the filler screws depends on the mounting orientation. Exam-
ple: U versions
50
Fig. 28: Removing the electronic drive unit 51
Fig. 29: Fitting the electronic drive unit 52
Fig. 30: Attaching the electronic drive unit 52
Fig. 31: Spare parts HiPace 2300 62
Fig. 32: Dimensions HiPace 2300 and HiPace 2300 C | DN 250 ISO-K 73
Fig. 33: Dimensions HiPace 2300 and HiPace 2300 C | DN 250 ISO-F 73
Fig. 34: Dimensions HiPace 2300 and HiPace 2300 C | DN 250 CF-F 73
Fig. 35: Dimensions HiPace 2300 U and HiPace 2300 UC | DN 250 ISO-K 74
Fig. 36: Dimensions HiPace 2300 U and HiPace 2300 UC | DN 250 ISO-F 74
Fig. 37: Dimensions HiPace 2300 U and HiPace 2300 UC | DN 250 CF-F 74
List of figures
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1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instruc-
tions describe the functions of the named product and provide the most important information
for the safe use of the device. The description is written in accordance with the valid direc-
tives. The information in this operating instructions refers to the product's current develop-
ment status. The document shall remain valid provided that the customer does not make any
changes to the product.
1.1.1 Applicable documents
Document Number
Operating instructions, Electronic drive unit TC 1200, Standard PT 0239 BN
Operating instructions, Electronic drive unit TC 1200 PB, Profi-
bus
PT 0269 BN
Operating instructions, Electronic drive unit TC 1200 E74, ac-
cording to Semi E74
PT 0303 BN
Operating instructions, Electronic drive unit TC 1200 DN, Device-
Net
PT 0353 BN
Operating instructions, Electronic drive unit TC 1200 EC, Ether-
Cat
PT 0455 BN
Operating instructions, Electronic drive unit TC 1200 EN, Profinet PT 0658 BN
Declaration of conformity A component of these
instructions
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
●HiPace 2300, DN 250 ISO-K
●HiPace 2300, DN 250 ISO-F
●HiPace 2300, DN 250 CF-F
●HiPace 2300 U, DN 250 ISO-K
●HiPace 2300 U, DN 250 ISO-F
●HiPace 2300 U, DN 250 CF-F
●HiPace 2300 C, DN 250 ISO-K
●HiPace 2300 C, DN 250 ISO-F
●HiPace 2300 C, DN 250 CF-F
●HiPace 2300 UC, DN 250 ISO-K
●HiPace 2300 UC, DN 250 ISO-F
●HiPace 2300 UC, DN 250 CF-F
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on
the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
About this manual
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●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the
appropriate technical qualifications (expert personnel) or who have received the relevant
training from Pfeiffer Vacuum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The
required action is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meanings.
CUS
TÜV Rheinland
Oil
S/N
Mod.
HiPace 2300
PM P06 300
- - - - - - - -
P/N
n, f
Mass Made in Germany 2021/08
PM 006 525 -T
31500 1/min, 525 Hz
36.0 kg
D-35614 Asslar
Rating plate
Rating plates of individual assemblies are located on the
lower part of the turbopump or on the relevant attachments.
Operating instructions note
This sticker indicates that this operating instructions must
be read before performing any tasks.
Mounting orientation upright note
This sticker depends on the variant. The sticker shows the
valid spatial positions for the installation and operation of
the turbopump.
About this manual
8/76

Overhead mounting orientation note
This sticker depends on the variant. The sticker shows the
valid spatial positions for the installation and operation of
the turbopump.
Operating fluid filler screw
This sticker describes the position of the respective filler
screw for operating fluid.
Protection class
This sticker describes protection class 1 for the product.
The positioning indicates the position for the ground con-
nection.
COOLING WATER IN
max. 6 bar (90 psi)
Cooling water connection
This sticker indicates the position and conditions for the
cooling water supply of the turbopump.
COOLING WATER OUT
Cooling water connection
This sticker indicates the position for the cooling water dis-
charge of the turbopump.
warranty seal
Warranty seal
The product is sealed ex factory. Damaging or removing a
warranty seal results in loss of the warranty.
Is stuck on concealed underneath the electronic drive unit.
PURGE
Sealing gas connection note
This sticker describes the position for the exclusive sealing
gas connection.
Tbl. 1: Stickers on the product
About this manual
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1
6
7
8
9
10 52
3
4
Fig. 1: Position of the stickers on the product
1 Sticker for operating instructions 6 Sticker for operating fluid
2 Sticker for cooling water discharge 7 Sticker for sealing gas connection (purge)
3 Sticker for cooling water inlet 8 Sticker for ground terminal
4 Sticker for mounting orientation 9 Rating plate for electronic drive unit
5 Sticker for operating instructions 10 Turbopump type plate
1.3.4 Abbreviations
Abbreviation Meaning in this document
AC Alternating current (AC)
CCorrosive gas version
dDiameter value (in mm)
DCU Display Control Unit (Pfeiffer Vacuum display and control unit).
DN Nominal diameter as size description
EMS Emergency Stop
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
HPU Handheld Programming Unit. Aid for control and monitoring pump parame-
ters
HV High vacuum flange, high vacuum side
ISO Flange: Connector in accordance with ISO 1609 and ISO 2861
LED Light emitting diode
PE Earthed conductor (protective earth)
[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit
number in square brackets. Frequently displayed in conjunction with a
short description.
Example: [P:312] software version
remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit
WAF width across flats
TTemperature (in °C)
TC Turbo Controller
About this manual
10/76

Abbreviation Meaning in this document
UUpside-down version
VV Fore-vacuum flange, fore-vacuum connection
Tbl. 2: Abbreviations used in this document
1.4 Trademark proof
●DeviceNet® is a trademark of Open DeviceNet Vendor Association Inc.
●Profibus® is a trademark of Profibus Nutzerorganisation e.V.
●Profibus® is a registered trade name of Profibus Nutzerorganisation e.V. (Profibus user
organization).
●EtherCAT® is a registered trade name of Beckhoff Automation GmbH, Germany.
●Han® 3 A is a trademark of HARTING Electric GmbH & Co. KG.
About this manual
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2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not ob-
served.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about
this document.
2.2 Safety instructions
All safety instructions in this document are based on the results of the risk assessment car-
ried out in accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Sec-
tion 5. Where applicable, all life cycle phases of the product were taken into account.
Risks during transport
WARNING
Risk of serious injury from swinging, toppling or falling objects
During transport, there is a risk of crushing and impact on swinging, toppling or falling ob-
jects. There is a risk of injuries to limbs, up to and including bone fractures and head inju-
ries.
►Secure the danger zone if necessary.
►Pay attention to the center of gravity of the load during transport.
►Ensure even movements and moderate speeds.
►Observe safe handling of the transport devices.
►Avoid sloping attachment aids.
►Never stack products.
►Wear protective equipment, e.g. safety shoes.
Safety
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Risks during installation
DANGER
Danger to life from electric shock
Touching exposed and voltage-bearing elements causes an electric shock. Improper con-
nection of the mains supply leads to the risk of touchable live housing parts. There is a risk
to life.
►Before the installation, check that the connection leads are voltage-free.
►Make sure that electrical installations are only carried out by qualified electricians.
►Provide adequate grounding for the device.
►After connection work, carry out an earthed conductor check.
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensa-
tor in the event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with
ISO 27892. When using a vibration compensator, this will probably lead to the turbopump
being sheared off in use. The energy that this would release could throw the entire turbo-
pump or shattered pieces from its interior through the surrounding space. Potentially dan-
gerous gases can escape. There is a risk of very serious injuries, including death, and ex-
tensive property damage.
►Take suitable safety precautions on-site for the compensation of the occurring torques.
►Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
WARNING
Danger to life from poisoning where toxic process media leak from damaged con-
nections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There
is the risk of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks.
This results in leakage of process media. In processes involving toxic media, there is a risk
of injury and danger to life due to poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
WARNING
Risk of fatal injury due to electric shock on account of incorrect installation
The device's power supply uses life-threatening voltages. Unsafe or improper installation
can lead to life-threatening situations from electric shocks obtained from working with or on
the unit.
►Ensure safe integration into an emergency off safety circuit.
►Do not carry out your own conversions or modifications on the unit.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection
device (mains switch).
►Install a mains disconnection device according to SEMI-S2.
►Install a circuit breaker with an interruption rating of at least 10,000 A.
Safety
13/76

WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vac-
uum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rota-
tion of the rotor increases the danger situation. There is the risk of cuts, up to the separa-
tion of body parts (e.g. fingertips). There is a risk of hair and loose clothing being drawn in.
Objects falling in destroy the turbopump during subsequent operation.
►Only remove the original protective covers immediately prior to connecting the high
vacuum flange.
►Do not reach into the high vacuum connection.
►Wear protective gloves during installation.
►Do not start the turbopump with open vacuum connections.
►Always carry out the mechanical installation before electrical connection.
►Prevent access to the high vacuum connection of the turbopump from the operator side
(e.g. open vacuum chamber).
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic
run-up of the vacuum pump as soon the power is turned on. Attaching mating plugs before
or during the installation leads to the movement of parts hence the risk of cut injuries by
sharp-edged in the exposed high vacuum flange.
►Only connect mating plugs after the mechanical installation.
►Only switch on the vacuum pump immediately prior to operation.
WARNING
Risk of serious injury from oscillating, toppling or falling objects
Incorrect handling during the mechanical installation leads to a risk of oscillating, toppling
or falling heavy loads. There is a risk of crushing and impacts (e.g. on colliding flange con-
nections). There is a risk of injuries to limbs, up to and including bone fractures and head
injuries.
►Use the intended eye bolts during the installation.
►When approaching the vacuum pump, be particularly careful at the counter flange.
►Note the center of gravity of the load.
WARNING
Danger of poisoning from toxic vapors
Igniting and heating synthetic operating fluid generates toxic vapors. Danger of poisoning if
inhaled.
►Observe the application instructions and precautions.
►Do not allow tobacco products to come into contact with the operating fluid.
WARNING
Risk of scalding from suddenly escaping hot cooling water
The turbopump water connections are open to both sides. When connecting the cooling
water supply, there is a risk of scalding from suddenly escaping, hot cooling water at over
pressure.
►Prior to installation, ensure that pressure is discharged from the cooling water system,
and that it is cooled down.
►Wear protective equipment, e.g., safety goggles and gloves.
Safety
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Risks during operation
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic
run-up of the vacuum pump as soon the power is turned on. Attaching mating plugs before
or during the installation leads to the movement of parts hence the risk of cut injuries by
sharp-edged in the exposed high vacuum flange.
►Only connect mating plugs after the mechanical installation.
►Only switch on the vacuum pump immediately prior to operation.
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during
operation
The use of additional equipment for heating the vacuum pump or for optimizing the process
generates very high temperatures on surfaces that can be touched. There is a risk of burn-
ing.
►If necessary, set up a contact guard.
►If necessary, apply the warning stickers provided for this at the danger points.
►Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
►Wear protective equipment, e.g., gloves.
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is
a risk of serious injury due to ejected objects.
►Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or
the venting and sealing gas connection.
►Make sure that high, process-related over pressures cannot directly enter the vacuum
pump.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of
body parts with the vacuum, e.g. hematomas.
►Do not fully unscrew the venting screw out of the housing during venting.
►Keep a distance from automatic venting device, such as venting valves.
Risks during maintenance, decommissioning and in event of malfunctions
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected
and the turbopump is at a standstill. There is a danger to life from electric shock when mak-
ing contact with live components.
►Before performing all work, switch off the main switch.
►Wait until the turbopump comes to a standstill (rotation speed =0).
►Remove the mains plug from the device.
►Secure the device against unintentional restarting.
Safety
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WARNING
Danger of poisoning from toxic vapors
Igniting and heating synthetic operating fluid generates toxic vapors. Danger of poisoning if
inhaled.
►Observe the application instructions and precautions.
►Do not allow tobacco products to come into contact with the operating fluid.
WARNING
Risk of poisoning from contact with harmful substances
The operating fluid and parts of the turbopump may contain toxic substances from pumped
media.
►Decontaminate affected parts before carrying out maintenance work.
►Prevent health hazards or environmental impacts with adequate safety precautions.
►Observe the operating fluid safety data sheet.
►Dispose of the operating fluid according to locally applicable regulations.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During mainte-
nance work, there is a risk to health from contact with these poisonous substances. Illegal
disposal of toxic substances causes environmental damage.
►Take suitable safety precautions and prevent health hazards or environmental pollution
by toxic process media.
►Decontaminate affected parts before carrying out maintenance work.
►Wear protective equipment.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vac-
uum connection
Incorrect handling of the turbopump before maintenance work results in hazardous situa-
tions with risk of injury. There is a risk of cuts from accessing sharp-edged, rotating parts
when removing the turbopump.
►Wait until the turbopump comes to a standstill (rotation speed f=0).
►Switch the turbopump off properly.
►Secure the turbopump against re-start.
►Seal open connections immediately following removal, using the original protective cov-
er.
CAUTION
Electric shock and damage to the vacuum pump and electronic drive unit due to im-
proper disconnection of components
Even after the mains power is switched off, the turbopump continues to deliver electrical
energy during its run-down period. If the turbopump and electronic drive unit are discon-
nected prematurely, there is the risk of electric shock from contact with live components.
There is a risk of electric body contact and, as a result, the destruction of electronic compo-
nents.
►Never disconnect the turbopump and electronic drive unit from each other if power is
still connected or if the rotor is running.
►Monitor the turbopump rotation via the parameters available in the electronic drive unit
(e.g., [P:398]).
►Wait until the turbopump comes to a standstill (rotation speed f=0).
Safety
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WARNING
Danger to life from electric shock in the event of a fault
In the event of a fault, devices connected to the mains may be live. There is a danger to life
from electric shock when making contact with live components.
►Always keep the mains connection freely accessible so you can disconnect it at any
time.
WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden jamming of the rotor generates high destructive torques in accordance with
ISO 27892. If the turbopump is not properly secured, it can shear off. The energy that this
would release could throw the entire turbopump or shattered pieces from its interior
through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
►Follow the installation instructions for this turbopump.
►Observe the requirements regarding stability and design of the counter flange.
►Use only original accessories or fixing material approved by Pfeiffer Vacuum for the in-
stallation.
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensa-
tor in the event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with
ISO 27892. When using a vibration compensator, this will probably lead to the turbopump
being sheared off in use. The energy that this would release could throw the entire turbo-
pump or shattered pieces from its interior through the surrounding space. Potentially dan-
gerous gases can escape. There is a risk of very serious injuries, including death, and ex-
tensive property damage.
►Take suitable safety precautions on-site for the compensation of the occurring torques.
►Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
WARNING
Danger to life from poisoning where toxic process media leak from damaged con-
nections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There
is the risk of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks.
This results in leakage of process media. In processes involving toxic media, there is a risk
of injury and danger to life due to poisoning.
►Keep masses connected to the turbopump as low as possible.
►Use flexible lines to connect to the turbopump where necessary.
2.3 Safety precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of
dangers posed by this product.
Every person who is involved in the installation, operation or maintenance of the
product must read, understand and adhere to the safety-related parts of this docu-
ment.
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Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the oper-
ator changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and
re-evaluate the conformity of the overall system in the context of the relevant
European Directives, before commissioning that system.
General safety precautions when handling the product
►Observe all applicable safety and accident prevention regulations.
►Check that all safety measures are observed at regular intervals.
►Do not expose body parts to the vacuum.
►Always ensure a secure connection to the earthed conductor (PE).
►Never disconnect plug connections during operation.
►Observe the above shutdown procedures.
►Before working on the high vacuum connection, wait until the rotor has stopped com-
pletely (rotation speed f = 0).
►Never put the device into operation with the high vacuum connection open.
►Keep lines and cables away from hot surfaces (> 70°C).
►Never fill or operate the unit with cleaning agents or cleaning agent residues.
►Do not carry out your own conversions or modifications on the unit.
►Observe the unit protection class prior to installation or operation in other environments.
2.4 Limits of use of the product
Installation location weatherproof (internal
space)
Air pressure 750 hPa to 1060 hPa
Installation altitude max. 2000 m
Rel. air humidity max. 80%, at T < 31°C,
up to max. 50% at T <
40°C
Protection class (according to IEC 61010) I
Degree of pollution (according to IEC 61010) 2
Overvoltage category II
Permissible protection degree IP54
Ambient temperature 5°C to 40°C with water
cooling
Permissible surrounding magnetic field 7 mT
Maximum irradiated thermal output 24 W
Maximum permissible rotor temperature of the turbopump 120 ℃
Maximum permissible bakeout temperature at the high vac-
uum flange
120 ℃
Tbl. 3: Permissible ambient conditions
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Notes on ambient conditions
The specified permissible ambient temperatures apply to operation of the turbo-
pump at maximum permissible backing pressure or at maximum gas throughput,
depending on the cooling type. The turbopump is intrinsically safe thanks to re-
dundant temperature monitoring.
●The reduction in backing pressure or gas throughput permits operation of the
turbopump at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is ex-
ceeded, the electronic drive unit first reduces the drive output and then
switches it off where necessary.
2.5 Proper use
►Use the turbopump only for generating vacuum.
►Use the turbopump only in combination with a suitable backing pump that can deliver up
to the required maximum fore-vacuum pressure.
►Use the turbopump only in closed indoor areas.
►Use the turbopump only for the evacuation of dry and inert gases.
►Exclusively use C-version turbopumps with sealing gas supply for the pumping of corro-
sive media.
2.6 Foreseeable improper use
Improper use of the product invalidates all warranty and liability claims. Any use that is coun-
ter to the purpose of the product, whether intentional or unintentional, is regarded as misuse.
●Transport, installation or operation of the vacuum pump in an impermissible spatial posi-
tion
●Establishing the voltage supply without correct installation
●Installing the pump with unspecified mounting material
●Pumping explosive media
●Pumps of corrosive media with turbopumps in the standard version
●Pumping of fluids
●Pumping of dust
●Operation with impermissible high gas throughput
●Operation with impermissible high fore-vacuum pressure
●Operation with excessively high irradiated heat output
●Operation in impermissible high magnetic fields
●Operation in an incorrect gas mode
●Venting with impermissible high venting rates
●Use for pressure generation
●Use in areas with ionizing radiation
●Operation in explosion-hazard areas
●Use in systems in which sporadic loads and vibrations or periodic forces act on the de-
vice
●The causing of hazardous operating conditions by a presetting on the electronic drive
unit that is contrary to the process
●Use of accessories or spare parts that are not listed in these instructions
2.7 Personnel qualification
The work described in this document may only be carried out by persons who have appropri-
ate professional qualifications and the necessary experience or who have completed the nec-
essary training as provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervi-
sion of trained personnel.
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3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and under-
stood these operating instructions and all applicable documents, in particular the safety,
maintenance and repair information.
2.7.1 Ensuring personnel qualification
Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this docu-
ment, specialists are people responsible for construction, mechanical installation, trouble-
shooting and maintenance of the product, and who have the following qualifications:
●Qualification in the mechanical field in accordance with nationally applicable regulations
●Knowledge of this documentation
Specialist for electrotechnical work
Only a trained electrician may carry out electrical engineering work. Within the meaning of
this document, electricians are people responsible for electrical installation, commissioning,
troubleshooting, and maintenance of the product, and who have the following qualifications:
●Qualification in the electrical engineering field in accordance with nationally applicable
regulations
●Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as
well as the other standards, guidelines, and laws referred to in this documentation. The
above individuals must have an explicitly granted operational authorization to commission,
program, configure, mark, and earth devices, systems, and circuits in accordance with safety
technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, opera-
tion and disposal fields. Such training must ensure that individuals are capable of carrying out
the required activities and work steps safely and properly.
2.7.2 Personnel qualification for maintenance and repair
Advanced training courses
Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:
●Maintenance level 1
─Customer (trained specialist)
●Maintenance level 2
─Customer with technical education
─Pfeiffer Vacuum service technician
●Maintenance level 3
─Customer with Pfeiffer Vacuum service training
─Pfeiffer Vacuum service technician
2.7.3 Advanced training with Pfeiffer Vacuum
For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive
range of courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
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