Pfeiffer Vacuum DUO 6 M User manual

Rotary Vane Pump
PK 0197 BE/G (0603)
DUO 5 M
DUO 5 MC
Betriebsanleitung • Operating Instructions

2
1. Safety Precautions .................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2. Understanding The Pump........................ 4
2.1. Main Features..................................................................... 4
Proper Use.................................................................................... 4
Improper Use................................................................................ 4
2.2. Differences Between The Pump Types.......................... 4
3. Installation ............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Pump Set-Up And Location.............................................. 5
3.3. Connecting The Vacuum Side.......................................... 5
3.4. Connecting The Exhaust Side.......................................... 5
3.5. Connecting To The Mains Power Supply....................... 6
4. Operations ................................................ 7
4.1. Filling Up And Checking The Operating Fluid................ 7
4.2. Switching The Pump ON And OFF................................... 7
4.3. Extracting Dry Gases And Vapours................................. 8
5. What To Do In Case Of
Breakdowns? .......................................... 9
6. Maintenance .......................................... 10
6.1. Replacing The Operating Fluid....................................... 10
6.2. Cleaning And Replacing The Silencer.......................... 11
6.3. Shutting Down For Longer Periods............................... 11
7. Service .................................................... 12
8. Technical Data ....................................... 13
8.1. Dimensions........................................................................ 13
9. Accessories............................................ 14
10. Spare Parts ............................................. 15
10.1 Spare Parts Package....................................................... 15
10.2. Exploded view................................................................... 16
Declaration Of Contamination .................... 17
Conformity Declaration ................ (last page)
INDEX
Page
Please note:
Current operating instructions are also available via
www.pfeiffer-vacuum.net.

3
☞Read and follow all the instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can arise in your system;
– Hazards which can be caused by the medium being
pumped.
☞Avoid exposing any part of your body to vacuum.
☞Observe all safety and accident prevention regulations.
☞Check regularly that all safety requirements are being
complied with.
☞Do not use the pump for the purpose of generating
pressure.
☞Do not carry out any unauthorised conversions or
modifications on the pump.
☞When returning the pump to us please note the shipping
instructions in the section on service.
The following safety instructions are only relevant when
dismantling the drive system.
☞When dismantling the drive system from the pump casing
the powerful magnetic field of the coupling system can
influence the function and operational safety of electrical
and electronic units.
Persons who have a heart pacemaker must
stay outside the area of influence of magnetic
fields. There is a danger of life.
☞Do not place the dismantled magnetic coupling in the vici-
nity of computers, data carriers and other electronic
components.
☞On no account allow the two parts of the magnetic
coupling to come into contact. There is a danger of
crushing.
☞Keep all magnetisable parts away from the magnetic
coupling. There is a danger of personal injury.
BEWARE
Danger of damage to the pump or system.
CAUTION
Danger of burns from touching hot parts.
WARNING
1. Safety Precautions
Danger of personal injury.
WARNING
1.2. Pictogram Definitions
Modifications reserved
Attention to particularly important information
on the product, handling the product, or to a
particular part of the documentation.
☞
PLEASE NOTE
1.1. For Your Orientation
Instructions in the text
➡Operating instruction: Here, you have to do something.
Symbols used
The following symbols are used throughout in the
illustrations:
Vacuum flange
Exhaust flange
Gas ballast valve
Power connection
Position numbers
Identical pump and accessory parts have the same position
numbers iin all illustrations.
Strong magnetic field!
Danger of personal injury.
BEWARE

4
2.1. Main Features
2. Understanding The Pump
Rotary Vane Vacuum Pump DUO 5/DUO 5 C
Vacuum flange
Exhaust flange
Gas ballast valve
Power connection
26 Support stand
28 Casing
42 Housing gas ballast valve
80 Base plate
110 Sight glass
142 O-ring for operating fluid drain screw
144 O-ring for operating fluid filler screw
198 Operating medium drain screw
200 Operating fluid filler screw
280 Motor
28 200/144 110 42
280 80 26 198/142
The DUO 5/5C is a dual stage rotary vane vacuum pump with
magnetic coupling for various applications in the rough and
medium vacuum.
The separation of the rotor and motor shaft eliminates the
problem of the radial shaft seal providing a hermeticalled
sealed pump. The wear-free drive prevents leaks, minimizes
maintenance and increases the MTTF.
During intentional and unintentional shutdowns, an integrated
high-vacuum safety valve immediately separates the pump
from the vacuum chambers and vents the pump.
Applications:
– Mass Spectrometry
– Backing pump for turbos
– Any Lab-Application
Proper Use
– Rotary Vane Vacuum Pumps may only be used to generate
vacuum.
– Installation, start-up, operating and maintenance
instructions must be observed.
– Accessories other than those named in this manual may
not be used without the agreement of Pfeiffer Vacuum.
Improper Use
The following are regarded as improper:
– The pumping of corrosive gases (except with corrosive
gas processes version).
– The pumping of explosive gases.
– Operating the pump in locations where there is an explosi-
on hazard.
– The pumping of gases which are contaminated with
particles, dust and condensate. Avoid condensation and
sublimation; take note to the vapour compatability.
– The Pump may not be used for the purpose of generating
pressure.
– The pumping of liquids.
– Connection to pumps and units which is not permitted
according to their operating instructions.
– Connection to units which contain touchable and voltage
carrying parts.
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gguuaarraanntteeeessttoobbeeffoorrffeeiitteedd..
2.2. Differences Between The Pump Types
Pump versions
DUO 5 = Standard pump version
DUO 5 C = Corrosive gas processes version pump
Divergences to the standard pump version:
– operating fluid F4
– encapsulated can of the magnetic coupling
– different material for the vanes
– gas vallast valve with hose connection
New drive concept with integrated magnetic coupling

5
3. Installation
3.1. Preparations For Installation
At pumps with three phase motors check the direction of
rotation before filling in the operating fluid. Pumps with single
phase motors are not concerned.
Fill up with operating fluid before operating the
first time (included in a separate pack in the
delivery consignment).
When filled with operating fluid, do not tilt the
pump otherwise operating fluid could escape
via the vacuum and exhaust flanges.
3.2. Pump Set-Up And Location
When transporting, use only the handle provided for the
purpose.
➡Where stationary installation is involved, anchor the pump
on site.
➡Sight glass 110 on the front side must be visible and the
gas ballast valve readily accessible.
➡When installing the pump in a closed housing, ensure
there is sufficient air circulation.
CAUTION
max. 10°
Maximum angle of inclination to each side 10°
Maximum erection height 2000 m N.N
Maximum and minimum ambient temperature 40 °C
and 12 °C respectively
Maximum relative humidity 85%
3.4. Connecting The Exhaust Side
Pressure can rise to dangerous levels in exhaust
lines. Therefore, exhaust lines, which should be
of minimum diameter DN 16, should not be fitted
with shut-off units. Lay lines from the pump
sloping downward so that no condensate can
flow back into the pump. Otherwise fit a separator.
If exhaust gases are extracted, the exhaust pressure must not
fall below 250 mbar .
Forces from the piping system may not be allowed to act on
rotary vane pumps which are anchored.
All piping to the pump must be suspended or supported.
CAUTION
3.3. Connecting The Vacuum Side
➡Keep the connection between the vacuum chamber and
pump as short as possible.
➡Remove all scaling and loose particles from welded lines
prior to assembly.
– To protect the pump, separators, filters and cooling traps
etc.(see Section 9. Accessories) can be fitted upstream of
the pump. However, the conductance values of the acces-
sory causes a reduction in volume flow rate.
– For the intake lines, metal or PVC hoses with small flanges
are available.

6
3.5. Connecting To The Mains Power Supply
Single phase motor
Power connections must comply with local
regulations. Voltage and frequency information
given on the rating plate must correspond to the
mains voltage and frequency values.
The DUO 5/DUO 5 C is fitted with a single phase motor with
integrated thermal protection switch, power button and
connecting cable as standard.
CAUTION
The transmission power of the pump’s magnetic
coupling is so great that there is no overload
protection for the motor.
Three phase motor
When switching on pumps with three phase motors for the
first time, check the direction of rotation:
Always check the direction of rotation without
operating fluid filled in, otherwise operating
fluid could eject via the vacuum flange.
WARNUNG
CAUTION
Three phase motors with PTC
The motors of these pumps are fitted with three PTCs which
are built into the stator windings. The connection of a tripping
unit and a contactor in the power supply line (according the
wiring diagram) will protect the pump against overloading.
Power part with motor to be protected
Use a tripping unit with error signal storage, e.g. a PTC
tripping unit with two switchover contacts at the output (see
Section 9. Accessories).
DUO 5 with single phase motor
Checking The Direction Of Rotation
➡Remove locking cap from the exhaust flange .
➡Switch on for a short time (2 ... 3 seconds)
Motor/motor fan must turn clockwise (see arrow on
support stand).
➡If direction of rotation incorrect: Interchange two phases
on the connecting cable.
➡Fill in operating fluid.
The motor protection switch has been set according to the
nominal voltage levels provided.

7
Operating fluid must be disposed of in
accordance with local waste disposal regulati-
ons.
➡Remove operating fluid filler screw 200.
➡Fill up with operating fluid included in the consignment;
refer to rating plate for correct quantity and typ of
operating fluid.
➡Replace operating fluid filler screw 200; be careful with
the O-ring.
➡Check operating fluid level only when the pump is warm
and running and vacuum connection and gas ballast
valvel and operating fluid filler screw are closed.
➡The level should be between the two markings on sight
glass 110. The minimum level is the lower marking on sight
glass 110.
➡Topping up operating fluid is possible when the pump is in
final vacuum operations.
➡In non-stop operations check operating fluid daily,
otherwise whenever the pump is switched on.
4.2. Switching The Pump ON And OFF
The pump can be switched ON and OFF in any pressure
range.
Lowest start-up temperature, in compliance with German
Industrial Standard DIN 28 426: +12 °C.
On switching OFF (intake pressure < 750 mbar) the built-in
high vacuum safety valve to the vacuum chamber closes
automatically and the pump is vented.
Danger of burns when touching hot parts!
During operations temperatures of obove 70°C
can arise at the pump`s surface!
Protect pump by means of suitable measures
(e.g. dust separator) when the pumped gases
are contaminated with particles or dust. If
necessary check operating fluid regular or
change operating fluid more frequent.
To make shure that the high vacuum safety
valve works proper at any intake pressure,
there should be at least a pressure difference
of 250 mbar between the intake and the exhaust
side.
☞
PLEASE NOTE
CAUTION
WARNING
☞
PLEASE NOTE
4. Operations
28 200 110 42
280 80 26 198
Rotary Vane Pump DUO 5/DUO 5 C
Vacuum flange
Exhaust flange
Gas ballast valve
Power connection
26 Support stand
28 Casing
42 Housing gas ballast valve
80 Base plate
110 Sight glass
198 Operating fluid drain screw
200 Operating fluid filler screw
280 Motor
4.1. Filling Up And Checking The
Operating Fluid
Standard version pumps are tested with opera-
ting fluid P3. Guarantees relating to attainment
of final pressures and trouble free functioning
apply only providing this operating fluid is used.
The delivery consignment contains sufficient operating fluid
for one filling.
Pumps for special applications (e.g. for pumping corrosive
gases) can be operated with special operating fluids such as
F4 and other Pfeiffer Vacuum operating fluids. The use of
such operating fluids requires prior authorisation from the
manufacturer.
CAUTION

8
4.3. Extracting Dry Gases And Vapours
No special measures are necessary providing the correct
pump version is being operated (selection of operating fluid,
materials etc.).
To avoid condensation in the pump, vapours
should only be pumped off when the pump is
warm and with gas ballast valve open. Note
pump water vapour compatibility levels under
Section 8. Technical Data. When the process
has been completed, allow the pump to continue running for
about 30 minutes with open gas ballast valve for operating
fluid regeneration purposes.
Gas Ballast Valve (Standard Version)
Air is periodically fed into the working chamber at the
beginning of the compression phase via the gas ballast valve.
The gas ballast valve is shut when turning to the right to posi-
tion 0 and open when turning to the left to position 1.
Intermediate settings are not possible.
Gas Ballast Valve (Corrosiv Gas Version)
If the pumping process requires the connection of flushing
gas, an elbow fitting can be provided for the gas ballast valve
in c version (please refer to Chapter 10. Spare Parts).
➡Connect flushing gas at the gas ballast inlet 224.
➡Adjust pressure of sealing gas.
➡Open gas ballast valve.
Flushing gas pressure may not exceed 1.5 bar
(absolute). The type of flushing gas is
dependent on the medium being pumped. Our
specialists would be pleased to give advice
regarding the type and volume of flushing gas
required.
☞
HINWEIS
CAUTION
Gas ballast valve
closed
open
Gas ballast valve
224 Elbow fitting (c version)
224

9
5. What To Do In The Case Of Breakdowns?
Problem Possible Cause Remedy
Pump doesn't attain final pressure • Pump dirty • Cleaning the pump
• Operating fluid dirty • Operate pump for a longer period with open gas
ballast valve or change operating fluid
• Leak in system • Repair leak
Unusual operating noises • Silencer dirty • Clean silencer or change as per section 6.2.
• Pump stage damage • Request repair by Pfeiffer Vacuum Service
Pump doesn't start • Ambient temperature <12 °C • Warm up pump
• Dirty pump stages • Request cleaning by Pfeiffer Vacuum Service
• Damaged pump stages • Request repair by Pfeiffer Vacuum Service
Any other repairs may only be carried out by qualified personnel in conjunction with the service instructions.

10
6. Maintenance
When carrying out servicing work, take the following
precautions:
Always ensure the pump cannot be switched
on when carrying out any work on the pump. If
necessary, remove the pump from the system to
carry out inspection work.
➡Only dismantle the pump as far as is necessary in order to
repair defects.
➡Dispose of used operating fluid in compliance with local
regulations.
➡When working with synthetic operating media, toxic
substances and substances contaminated with corrosive
gases, the relevant instructions governing their use must
be observed.
➡Only use benzine or similar agents for cleaning pump
parts. Do not use soluble cleaning agents.
6.1. Changing The Operating Fluid
The rate of deterioration of the operating fluid depends on the
pump applications.
➡The level of deterioration of organic operating fluids (for
example P3) can be read off from the colour scale in
accordance with DIN 51578 on the supplementary sheet
PK 800 219 BN/B, on request.
– The colour scale enables precise colour determination.
➡Fill a specimen in a test tube or some similar vessel and
test by holding against the light.
➡Where the discolouration is dark yellow to red brown
(equivalent to 4 ... 5 on the scale) change operating fluid.
Where organic operating fluids, for example P3,
are involved, the operating fluid should be
changed at least once a year!
Replacing The Operating Fluid
➡Switch off the pump.
➡Unscrew operating fluid drain screw 198 and drain opera-
ting fluid.
CAUTION
WARNING
The operating fluid temperature can be as high
as 80 °C. During maintenance and repair work,
process related toxic gases and vapours can
escape from the operating fluid which may
become contaminated with harmful substances
(radioactive, chemical etc.).
Disposal of used operating fluid is subject to
the relevant regulations.
➡Screw in operating fluid drain screw 198.
➡Allow pump to run for about 10 seconds with open vacuum
flange.
➡Drain off remaining operating fluid.
➡In the case of serious contamination, the operating fluid
will have to be changed several times.
➡Screw in operating fluid drain screw 198 with O-ring.
➡Fill in fresh operating fluid and check level as per
section 4.1.
Operating fluid can contain substances from
the medium pumped. Operating fluid must be
disposed of in accordance with the local
respective regulations.
Please request safety instruction data sheets for operating
fluids from Pfeiffer Vacuum.
WARNING
WARNING

11
6.2. Cleaning And Replacing The Silencer
The Silencer 44 is a nozzle inside the pump housing and
cannot be altered; when dirty it should either be cleaned or
replaced.
Dismantling
➡Unscrew 2 cheesehead screws 182 from the casing.
➡Remove the gas ballast valve housing 42 from the casing
28, taking care with o-ring 148.
➡Unscrew silencer nozzle 44 and remove in vertical
direction; take care with o-ring 138.
➡Clean silencer nozzle 44 and o-ring and replace if
necessary.
6.3. Shutting Down For Longer Periods
Should the pump have to be shut down for an longer period,
the complete pumping system must be adequately protected
against corrosion.
➡Switch off pump.
➡Unscrew operating fluid drain screw 198 and drain opera-
ting fluid as per Section 6.1.
➡Screw in operating fluid drain screw 198; keep an eye on
the position of the O-ring.
➡Allow pump to run for about 10 seconds with open vacuum
flange. .
➡Drain off remaining operating fluid.
➡Fill up pump with fresh operating fluid: filling level - upper
end of sight glass 110.
If this amount of operating fluid is filled in, the level is
extremely high but this is necessary to protect all parts of the
pump against corrosion.
Before operating, the operating fluid must be
reduced to its normal level.
CAUTION
211 44 138 51 148
182 42 28
141*
224*
* C version
Dismantling silencer
28 Casing
42 Gas ballast valve housing
44 Silencer nozzle
51 Leaf spring
138 O-ring
141 O-ring
148 O-ring
182 Cheesehead screws
211 Washer
224 Elbow-fitting

12
7. Service
Decontaminate units before returning or
possible disposal. Do not return any units which
are microbiologically, explosively or radio-
actively contaminated.
Returning Contaminated Units
If contaminated units have to be returned for
maintenance/repair, the following instructions concerning
shipping must be followed without fail:
➡Neutralise the pump by flushing with nitrogen or dry air.
➡Seal all openings to the air.
➡Seal pump or unit in suitable protective foil.
➡Ship units only in appropriate transport containers.
Repair orders are carried out according to our
general conditions of sale and supply.
➡If repairs are necessary, please send the unit together
with a short damage description to your nearest Pfeiffer
Vacuum Service Center.
☞
PLEASE NOTE
WARNING
Do Make Use Of Our Service Facilities
In the event that repairs are necessary to your pump, a
number of options are available to you to ensure any system
down time is kept to a minimum:
– Have the pump repaired on the spot by our
Pfeiffer Vacuum Service Engineers;
– Return the individual components to the manufacturer for
repairs;
– Replace individual components with a new value
exchange units.
Local Pfeiffer Vacuum representatives can provide full
details.
Before Returning:
➡Dismantle all accessories.
➡Drain lubricant.
➡Attach a clearly visible notice: “Free of contamination” (to
the unit being returned, the delivery note and accompany-
ing paperwork).
Harmful substances" are substances and preparations as
defined in current legislation. Pfeiffer Vacuum will carry out
the decontamination and invoice this work to you if you have
not attached this note. This also applies where the operator
does not have the facilities to carry out the decontamination
work. Units which are contaminated microbiologically, explo-
sively or radioactively cannot be accepted as a matter of
principle.
Fill Out The Contamination Declaration
➡In every case the "Contamination Declaration" must be
completed diligently and truthfully.
➡A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local
Pfeiffer Vacuum Service Center.
Please get in touch with your local Pfeiffer Vacuum represen-
tatives if there are any questions regarding contamination.

13
8.1. Dimensions
145
DN 16 ISO-KF
58
365 79
216
248
L
H
100-114
135
160
o 7 variabel
107
18
215
4,5
o 7
PK197 massb
M61 47
8. Technical Data
Feature Unit DUO 5/DUO 5 C
Connection nominal diameter
Input DN 16 ISO-KF
Output DN 16 ISO-KF
Nominal pumping speed at
50 Hz m3/h 5.5
60 Hz m3/h 6.6
Pumping speed at
50 Hz m3/h 5
60 Hz m3/h 6
Final pressure
Total without gas ballast mbar < 5 •10-3
Total with gas ballast mbar < 2 •10-2
Exhaust pressure,, min. mbar > 250
Exhaust pressure, max. mbar < 1500
Water vapour compatibility
50 Hz mbar 25
60 Hz mbar 28
Water vapour capacity
50 Hz g/h 90
60 Hz g/h 120
Noise level without gas ballast
Alternating current version dB(A) 57
Three phase current version dB(A) 55
Operating fluid l 0.75
Max. permissible operating temperature ÞC 80
(at 25 °C ambient temperature and
operating fluid P3, without gas ballast)
Rotation speed at
50 Hz 1/min 1415
60 Hz 1/min 1690
Rated power, motor
Alternating current version kW 0.37
Three phase current version kW 0.25
Weight, approx.
Alternating current version kg 22
Three phase current version kg 19
DUO 5/DUO 5 C
Pump with three phase motor Pump with alternating current motor
L 433 435 mm
H 204 (without motor protection switch) 221 mm
223 (with motor protection switch)
M 215 217 mm

14
9. Accessories
Description Size Number Comments/ Order Quantity
Operating Instructions
Dust Separator STP 025 DN 25 ISO-KF PK Z60 106 only with adapter
DN 25/16 (PK 800 120 BN)
Oil Mist Filter ONF 16 DN 16 ISO-KF PK Z40 003 PK 800 213 BN
Oil Return Unit ONFR PK 196 172 -T PK 800 213 BN
Condensate Separator KAS 16 DN 16 ISO-KF PK Z10 003 PK 800 220 BN
Cooling Trap KLF 025 DN 25 ISO-KF PK Z80 006 PD 0015 BN
Adsorption Filter FAK 025 DN 25 ISO-KF PK Z30 006 PD 0017 BN
Adsorption Filter FBL 025 DN 25 ISO-KF PK Z30 106 PD 0017 BN
Zeolite Trap ZFO 0252) DN 25 ISO-KF PK Z70 006 PD 0016 BN
PTC Tripping Unit P 4768 051 FQ
Operating Fluid F4 1 litre PK 005 887 -T
Operating Fluid F4 0,5 litre PK 005 886 -T
Operating Fluid F4 0,25 litre PK 005 885 -T
2) Filled with zeolite.
Please refer to the Pfeiffer Vacuum catalogue “Components
For Vacuum Technology” for further accessories, or on
request.

15
Revision Set of seals Maintenance kit Overhaul kit Vacuum safety valve Discharge valves Coupling kit
Pump type index
DUO 5 up to “B” PK E30 005 -T PK E31 004 -T PK E32 008 -T PK E34 004 -T PK E35 002 -T PK E36 005 -T
DUO 5 C wizhout PK E30 005 -T PK E31 004 -T PK E32 006 -T PK E34 004 -T PK E35 002 -T PK E36 006 -T
Spare parts package No. Parts according to the exploded view on the following pages
Set of seals PK E30 005 -T 76, 112 138, 141, 142, 144, 147, 148, 149, 150, 152, 154, 156, 158, 160, 162, 254.
Maintenance kit PK E31 004 -T 138, 144, 162.
Overhaul kit PK E32 008 -T PK E30 005 -T, 7, 8, 9, 10, 32, 44, 51, 100, 102, 106, 110, 114.
PK E32 006 -T PK E30 005 -T, 7, 8, 9, 10, 32, 44, 51, 100, 102, 106, 110, 114.
Vacuum safety valve PK E34 004 -T 30, 32, 34, 70, 100, 106, 108, 147, 152, 154, 160, 188, 204, 208, 220, 250.
Discharge valves PK E35 002 -T 100, 102, 184, 204, 208.
Coupling kit PK E36 005 -T 18, 20, 24, 184, 254.
PK E36 006 -T 18, 20, 24, 184, 254.
Set of seals
The set of seals contains all seals including all o-rings of the
subassemblies.
Maintenance kit
The pack contains the o-rings of the operating fluid filler and
drain screw for changing the operating fluid. Also the o-ring
for the casing after cleaning the operating fluid sump is inclu-
ded.
Overhaul kit
The pack contains all wearing parts of the pump to replace
the following parts after dismantling the whole pump:
– Set of seals
– Wearing parts of the pumping system
– Wearing parts of the vacuum safety valve
– Wearing parts of the gas ballast valve
Set of vacuum safety valve
The pack contains the wearing parts of the vacuum safety
valve. Also the o-rings between valve housing and pumping
system and the o-ring of the casing are included.
Set of discharge valves
The pack contains the wearing parts of the discharge valves.
Also the wearing parts of the exhaust valve and the o-ring of
the casing are included.
Coupling kit
The pack contains the coupling halfs, can and the respective
o-ring.
The use of other spare parts than mentioned in
this instruction requires prior authorisation
from Pfeiffer Vacuum.
The spare parts packages listed above are only valid for the
pumps in ssttaannddaarrddvveerrssiioonnss. When ordering please be sure to
state the full information given on the rating plate.
☞
PLEASE NOTE
Only authorized, experienced and trained personnel are
permitted to make changes or perform maintenance or
repairs. Unapproved changes by the customer void all
warranty and liability claims against Pfeiffer Vacuum.
Please use our Service Training offers (information is also
available via www.pfeiffer-vacuum.net).
10.Spare Parts
10.1 Spare Parts Package

16
PK200/1
7 Vanes, rough stage
8 Vanes, medium stage
9 Hydraulic vanes
10 Compression spring
18 Central coupling, drive
20 Central coupling, pump
24 Can
30 Housing high vacuum safety valve
32 Valve plate
34 Valve cover for vacuum safety valve
42 Housing gas ballast valve (further
parts see Section 6.2.)
44 Silencer screw
51 Plate spring (gas ballast valve)
70 Valve trap
76 Rapid action coupling
78 Compression spring
80 Base plate
84 Oil nozzle
100 Valve buffer
102 Valve plate
106 Hydraulic piston
108 Compression spring, vacuum safety valve
110 Sight glass
112 Sight glass seal
114 Rubber foot
138 O-ring
141 O-ring
142 O-ring
144 O-ring
147 O-ring
148 O-ring
149 O-ring
150 O-ring
152 O-ring
154 O-ring
158 O-ring
160 O-ring
162 O-ring
188 Allan head screw
184 Allan head screw
204 Circlip
208 Compression spring for valve buffer
220 Screw
250 Compression spring for vacuum safety
valve
254 O-ring
10.2.Exploded view
42 76/ 78 9
142
162
110/
112
142
51
44
144
7/ 8/ 34 188
10 10
106
220 108
188 30 204/ 152 32 147 250
70/208/
100
102 184 254 158 20
24 184 80 18 114
154/
160
84
149
150
78/
138/
141/
148 }

17
Tradename Chemical name Danger class Precautions associated Action if spillage or human
Product name (or Symbol) with substance contact
Manufacturer
1.
2.
3.
4.
5.
5. Legally Binding Declaration
I hereby declare that the information supplied on this form is complete and accurate. The despatch of equipment will be in
accordance with the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous Substances.
Name of Organisation: _______________________________________________________________________________
Address: _____________________________________ Post code: _____________________________________
Tel.: ______________________________________________________________________________________
Fax: _____________________________________ Telex: ________________________________________
Name: ______________________________________________________________________________________
Job title: ______________________________________________________________________________________
Date: _____________________________________ Company stamp: ________________________________
Legally binding signature: _____________________________________________________________________________
Declaration of Contamination of Vacuum Equipment and Components
The repair and/or service of vacuum components will only be
carried out if a correctly completed declaration has been
submitted. Non-completion will result in delay.
The manufacturer could refuse to accept any equipment
without a declaration.
This declaration can only be completed and signed by authorised and qualified staff:
1. Description of component:
- Equipment type/model: _________________________
- Code No.: __________________________
- Serial No.: __________________________
- Invoice No.: __________________________
- Delivery Date: __________________________
3. Equipment condition
- Has the equipment been used?
yes ❐no ❐
- What type of pump oil was used?
___________________________________________
- Is the equipment free from potentially harmful
substances?
yes ❐(go to section 5)
no ❐(go to section 4)
4. Process related contamination
of equipment
- toxic yes ❐no ❐
- corrosive yes ❐no ❐
- microbiological hazard*) yes ❐no ❐
- explosive*) yes ❐no ❐
- radioactive*) yes ❐ no ❐
- other harmful substances yes ❐no ❐
*) We will not accept delivery of any equipment that has been radioactively or microbiologically contaminated without written
evidence of decontamination!
2. Reason for return:
_____________________________________________
_____________________________________________
_____________________________________________
_____________________________________________
_____________________________________________
Please list all substances, gases and by-products which may have come into contact with the equipment:

im Sinne folgender EU-Richtlinien:
pursuant to the following EU directives:
- Maschinen/Machinery 98/37/EG (Anhang/Annex IIA)
- Elektromagnetische Verträglichkeit/Electromagnetic Compatibility 89/336/EWG
- Niederspannung/Low Voltage 2006/95/EG
Hiermit erklären wir, daß das unten aufgeführte Produkt den Bestimmungen der EU-Maschinen-
richtlinie 98/37/EG, der EU-Richtlinie über Elektromagnetische Verträglichkeit 89/336/EWG
und der EU-Niederspannungsrichtlinie 2006/95/EG entspricht.
We hereby certify, that the product specified below is in accordance with the provision of EU Machinery
Directive 98/37/EEC, EU Electromagentic Compatibility Directive 89/336/EEC and EU Low
Voltage Directive 2006/95/EC.
Produkt/Product:
DUO 5 M, DUO 5 MC
Angewendete Richtlinien, harmonisierte Normen und angewendete nationale Normen in Sprachen und
Spezifikationen:
Guidelines, harmonised standards, national standards in languages and specifications which have been
applied:
DIN EN ISO 12100-1, -2 EN 60335-1, -41
EN 294 EN 60 204
EN 50 081-1, -2 EN 1012-2
EN 61 010
Unterschriften/Signatures:
Unterschriften:
(M. Bender) (Dr. M. Wiemer)
Geschäftsführer Geschäftsführer
Managing Director Managing Director
Pfeiffer Vacuum GmbH
Berliner Str. 43
35614 Asslar
Germany
Konformitätserklärung
Declaration of Conformity
Konf.I/2007

Pfeiffer Vacuum Technology AG · Headquarters/Germany
Tel. [phone] · Fax [phone] · [email protected] · www.pfeiffer-vacuum.net
Vacuum is nothing, but everything to us!
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Rotary Vane Vacuum Pumps
Roots Pumps
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Flanges, Feedthroughs
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