Pfeiffer Vacuum HIPACE 10 User manual

Translation of the original instructions
Operating Instructions
EN
PT 0246 BEN/D (1211)
HiPace 10
Turbopump

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.3 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.4 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
6.4 Monitoring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 21
7.2 Replacing the integrated power supply. . . . . . . . . . . . . . . . . . . . . . . . . . . 21
7.3 Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
7.4 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
11 Spare parts HiPace 10. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
13.2 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
13.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

About this manual
3
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refer to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacu-
um.com.
Applicable docu-
ments
*also available via www.pfeiffer-vacuum.com
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
HiPace 10 Operating instructions
Operating instructions "Electronic drive unit TC 110" PT 0204 BN*
Declaration of conformity Part of this document
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

4
About this manual
Pictograph
definitions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used DCU: Display and control unit
HPU: Handheld programming unit
TC: Electronic drive unit for turbopump
OPS: Integrated Power supply
Symbols used The following symbols are used consistently throughout the diagrams:
High vacuum flange
Fore-vacuum flange
Vacuum flange of the backing pump
Exhaust flange of the backing pump
Electrical connection
Prohibition of an action or activity in connection with a source of danger,
the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document
V

Safety
5
2Safety
2.1 Safety precautions
●Do not expose any body parts to the vacuum.
●Observe all safety and accident prevention regulations.
●Regularly check the proper observance off all safety measures.
●Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
●Do not loosen any plug connection during operations.
●Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
●Keep leads and cables well away from hot surfaces (> 70 °C).
●Never fill or operate turbopump with cleaning agent.
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump
must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
NOTICE
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation
speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
Run-up the pump according to this operating instructions.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device as defined in SEMI-S2
Pump and electronic drive unit are not equipped with a power disconnection device. In-
stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.

6
Safety
●The unit has been accredited with protection class IP 30. Take necessary measures
when installing into ambient conditions, which afford other protection classes.
●Do not operate the turbopump with open high vacuum flange.
●Do not carry out any unauthorized modifications or conversions to the pump.
●When returning the turbopump observe the shipping instructions.
2.2 Protective equipment
Determined situations concerning the handling of vacuum pumps require wearing of per-
sonal protective equipment. The owner, respectively the employer are obligated to pro-
vide adequate equipment to any operating persons.
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con-
taminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
kg
WARNING
Risk of injury through falling objects
When transporting vacuum pumps by hand, there is a danger through loads slipping and
falling down.
Carry small and mid-size vacuum pumps two-handed.
Carry vacuum pumps > 20 kg by a suitable lifting device.
Wear safety shoes with steel toe cap according to directive EN 347.
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.
If necessary wear protective gloves according to directive EN 420.
CAUTION
Risk of injury through sharp edges
Rotor and stator disks of turbopumps have very sharp edges.
Before any working wait for the complete standstill of the pump.
Do not reach in the high vacuum flange.
If necessary wear protective gloves according directive EN 420.

Safety
7
2.3 Proper use
●The vacuum pump may only be used to generate a vacuum.
●Only operate the turbopump with an approved backing pump.
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●pumping of corrosive or explosive media
●pumping of condensing vapors
●pumping of liquids
●pumping of dusts
●operation with improper high gas throughput
●operation with improper high fore-vacuum pressures
●operation with improper gas mode.
●operation with improper high levels of insulated heat input
●venting with improper high venting rates
●use of the vacuum pump to generate pressure
●operation of the devices in areas with ionizing radiation
●operation in potentially explosive areas
●operation of the devices in systems where the turbopumps are subjected to impact-
like stress and vibrations or the effect of periodically occurring forces
●use of accessories or spare parts, which are not named in this manual
NOTICE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accor-
dingly.
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the
loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.

8
Transport and storage
3 Transport and storage
3.1 Transport
Reuse the transport container. Vacuum pumps should be transported or shipped in the
original packing only.
Only remove the protective covers from the high vacuum and the fore-vacuum side
immediately before connection.
Keep the original protective covers.
3.2 Storage
Close the flange openings by using the original protective covers.
Close further connection ports by using the corresponding protective covers.
Store the pump only indoors at temperatures between -25 °C and +55 °C.
In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-
wrapped in a plastic bag together with a bag of desiccant.

Product description
9
4 Product description
4.1 Product identification
Pump types The product designation consists of a family designation (1), the size (2), which is orient-
ed on the pumping speed, and if applicable the additional properties (3) of the pump.
HiPace(1) 10(2) (3)
Pump features
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec-
ond edition, including Amendment 1, or a later version of the same standard incorporat-
ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod-
uct or:
●www.tuvdotcom.com
●TUVdotCOM-ID 0000021320
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Example for a rating plate
Scope of delivery ●HiPace 10 with TC 110 and power supply OPS 40
●Protective cover for the high vacuum flange and the fore-vacuum flange
●Operating instructions
1. Family designation 2. Model designation 3. Property designation
HiPace 10 = Model designation of
the pump related to its pump-
ing speed class
none = Standard version
U= Upside-down installation orientation
C= Corrosive gas version
P= Process
M= Active magnetic bearing
T= Temperature management system
Characteristics HiPace 10
HV flange DN 25
Flange material Aluminium
Mod.:
M.-No.:
Ser. -No.:
Oil:
S(N
2
):
n,f:
Made in Germany
HiPace 300
DN 100 ISO-K, 3P
PM P03 900
---
260 l/s
60000 1/min, 1000 Hz
Weight: 6.7 kg
D-35614 Asslar

10
Product description
4.2 Function
The turbopumps HiPace 10 form a complete unit together with the electronic drive unit.
The voltage is supplied via the integrated power supply pack.
Brigdes are closed in the connecting plug of the OPS. So the pump can run up at once
after establishing the mains supply.
Cooling ●Convection cooling
In the case of excess temperature the electronic drive unit reduces the drive power au-
tomatically.
Rotor bearing ●Ceramic ball bearing
Drive Electronic drive unit TC 110
Fig. 2: view of the HiPace 10 with TC 110 and OPS 40
1.1 High vacuum connection
2.1 Fixing hole
8 Power supply pack OPS 40
8.5 Connecting plug OPS-TC
10 Electronic drive unit
18 Connection adapter for fore-vacuum
18
10
8
2.1
8.5
1.1
H

Product description
11
4.3 Range of application
The pump HiPace 10 must be installed and operated under the following ambient condi-
tions:
Installation location weather protected (indoors)
Protection category IP 30
Protection class I
Temperature +5 °C to +35 °C
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤35 °C
Atmospheric pressure 77 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Permissible surr. magnetic field ≤3 mT
Overvoltage category II
Connection voltage power supply 90 - 265 V AC
Remarks to ambient conditions
The denoted permissible ambient temperatures apply to operation of the turbopump at
maximum permissible fore-vacuum pressure or gas throughput depending on the coo-
ling method. The turbopump is intrinsically safe by a redundant temperature monitoring.
●By reducing the fore-vacuum pressure or gas throughput, the turbopump can be ope-
rated at higher ambient temperatures.
●If the maximum permissible operating temperature of the turbopump is exceeded, it
reduces drive power first and switches off then, if necessary.

12
Installation
5 Installation
5.1 Set-up
When installing the pump, observe the following conditions:
●the ambient conditions specified for the range of application
●It is not allowed to operate the device in systems where impact-like stresses and vi-
brations or periodically forces occur.
5.2 Preparatory work
Where magnetic fields > 3 mT are involved, a suitable shielding must be used. Check
installation location and consult Pfeiffer Vacuum if needed!
The maximum permissible rotor temperature for the turbopump is 90 °C. If high tem-
peratures arise for process reasons, the radiated heat input must not exceed 0.6 W.
Install suitable screening sheets, if necessary (design information on request).
5.3 Assembly
●Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-
clean components prolong the pump-down time.
●All flange components must be grease-free, dust-free and dry at installation.
●The operating fluid reservoir is already installed and filled for the turbopump HiPace
10.
Earthquake safety An earthquake can result in contact with the safety bearings. All forces occuring hereby
are safely absorbed by the properly installed flange connections.
The vacuum chamber must be secured by the customer against shifting and tipping.
WARNING
Risk of the turbopump being torn-off
In case of sudden blocking of the rotor, torques of up to 80 Nm can occur, which can
lead with incorrect attachment to tearing the turbopump off. The energy released there-
by can hurl the entire pump or fragments from their inside around the area. This can
cause severest injuries (possibly resulting in death) and large property damage.
Precisely follow installation instructions.
Only use Pfeiffer Vacuum original components (accessories) for installation.
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in-
stallation, operation and maintenance of connected devices are described in detail in
the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.

Installation
13
Mounting orientation
Support pipes in front of the vacuum pump or remove them. No force from the pipe
system may be exerted on the fixed pump.
Fig. 4: Recommended orientation of the fore-vacuum flange
The maximum axial loading capacity of the high vacuum flange is 200 N (equals 20 kg).
A one-sided load on the high vacuum flange is not permitted.
Fig. 3: Example: How to secure against shifting and tipping by external tremors
A High vacuum connection with
claw grips
B High vacuum connection with
connection adapter (accessories)
SC SC
SC
AB
SC SC
SC = Safety Connection
Vacuum chamber
SC SC
SC
SC SC
Vacuum chamber
NOTICE
The orientation of the fore-vacuum flange depending on the backing pump
When using a dry compressing backing pump the turbopump can be mounted and ope-
rated with the fore-vacuum flange in any orientation.
To avoid impurities via the fore-vacuum line when using oil-sealed backing pumps,
the fore-vacuum flange should always point vertically downwards (± 25°).
25 ° max

14
Installation
Use of a mesh screen The installation of a Pfeiffer Vacuum mesh screen in the high vacuum flange protects the
turbopump against foreign bodies coming from the vacuum chamber. The volume flow
rate is reduced as followed.
Installing the high
vacuum flange In the case the rotor suddenly blocks, the torques arising from the system and the high
vacuum flange must be absorbed. Only the components listed in the following can be
used to fasten the turbopumps to the high vacuum flange. The components for installing
the turbopumps are special designs of Pfeiffer Vacuum. Observe the minimum strength
of 170 N/mm2 for the flange material.
For the installation of the flange connections the following components are available:
●the valid mounting kit of the Pfeiffer Vacuum accessories programme
●a centering ring with mesh screen is optionally
Mind that the sealing surfaces are not damaged.
Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 4claw grips.
Tighten the claw grips crosswise in three steps.
Tightening torque: 5 ± 0,5 Nm.
Reduced volume flow rate in %
H2He N2Ar
Mesh screen DN 25 3 8 27 47
NOTICE
Observe shape tolerances for the counter flange!
Unevennesses of the customer supplied counter flange can lead to warping of the pump
casing despite proper fastening. Leakiness and negative running characteristics can be
the result.
Do not exceed an evenness of max. 0.05 mm for the whole surface.
Mounting of ISO flanges
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or
ISO-K can lead to twisting despite proper installation.
●The tightness of the high vacuum flange is not at risk thereby.

Installation
15
5.4 Connections to the turbopump
Electronic drive unit ●TC 110 in standard version
●TC 110 PB for Profibus linking
●TC 110 DN for DeviceNet linking
●TC 110 E74 in dependence on specification SEMI E74
●TC 110 RS with interface RS-485
Detailed description for function, configuration and operation with the respective connec-
tion panel are given in the specific operating instructions for the electronic drive unit.
Connections diagram
Brigdes are closed in the connecting plug of the OPS. So the pump can run up at once
after establishing the mains supply.
2
3
4
5
6
7
10
11
8
9
12
13
14
15
1
X3
TC 110
DI Remote
DI1
DI2
DI PumpgStatn
DI Standby
24 V DC* (V+)
ACC A1
ACC B1
DO1
DO2
AO1
RS 485 D+
RS 485 D-
+U
B
FE
X3
2
3
4
5
6
7
10
11
8
9
12
13
14
15
1
S2
S1
+U
B
90 - 132 /
185 - 265 V AC
2
1
OPS 40

16
Installation
Accessory connec-
tion
Fig. 5: Example: Connections on the electronic drive unit TC 110 with adapter TCS 12
ON
12
X3
RS485
PV.can
ACC. A1/B1 DO1+2
Accessory connection on the TC 110 with OPS 40
Connection and configuration of Pfeiffer Vacuum accessory units to the electronic drive
unit TC 110 with integrated power supply is only possible by using respective adapters
and after deactivation of the remote priority.
Remove bridges in the connecting plug via DIL swichtes S1 and S2.
Configurate the preferred accessory output via RS485 using a Pfeiffer Vacuum dis-
play and control unit or a PC.
Consider the operating instructions "Electronic Drive Unit TC 110"
Accessory connection to an electronic drive unit in special design
Differing to the standard model, drive units in special design (e.g. Profibus panel) can
be equipped with accessory connections.
Refer to the operating instructions of the respective electronic drive unit.
Connect the control lead of the accessory directly to the electronic drive unit.
Configurate the preferred accessory output via RS-485 using a Pfeiffer Vacuum dis-
play and control unit or a PC.

Installation
17
Connecting the fore-
vacuum side Recommendation: As backing pump, use a dry-compressing vacuum pump or a rotary
vane pump from the Pfeiffer Vacuum programme. The backing pump must generate a
vacuum pressure of ≤ 5 hPa.
With rigid pipe connections: Install bellows for attenuation of vibrations in the connec-
tion line.
Connect the fore-vacuum line with small-flange components or threaded hose cou-
plings. Do not narrow the free cross section of the fore-vacuum flange!
The backing pump is connected electrically via a relay box.
Plug in and fix the accessory’s control lead to a free connection port on the connecting
cable or adapter of the electronic drive unit.
Establish the mains supply for the relay box according to the accessory operating in-
structions.
– Observe the valid supply voltage of the backing pump.
Make the settings and control via the interfaces of the electronic drive unit.
DANGER
Voltage-bearing elements
Danger to life from electric shock.
The electrical connection can be carried out only by trained and authorised electrici-
ans.
Disconnect the power supply and secure it against being switched back on.
Ensure the system is adequately earthed.
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
Safely lead away the gas emission from the backing pump!
Observe all safety recommendations of the gas producer.
Fig. 6: Connecting the backing pump
18 Fore-vacuum connection
18a Backing pump
18b Backing pump relay box
18.1 Centering ring
18.2 Clamping ring
8.5 Connecting plug
470 Adapter TCS 12
V
18b
18a
18
470
8.5
18.1
18.2

18
Operation
6Operation
6.1 Commissioning
The following important settings are programmed in the electronic drive unit ex factory.
●Parameter [P:027] Gas mode: 0 = heavy gases
●Parameter [P:700] Set value max. run-up time monitoring: 8 min
●Parameter [P:701] Rotation speed switchpoint: 80% of the nominal roation speed
●Parameter [P:707] Set value rotation speed setting mode: 65 % of the nominal rota-
tion speed
●Parameter [P:708] Set value power consumption: 100 %
●Parameter [P:720] Venting rotation speed at delayed venting: 50% of the nominal ro-
tation speed
●Parameter [P:721] Venting time: 3600 s
Establish the mains for the power supply.
Connecting the
power supply The turbopumps HiPace 10 form a single unit with the electronic drive unit and the power
supply pack. The power supply is mounted to the pump and connected to the electronic
drive unit ex factory. The valid supply voltage for the power supply amounts 90 - 265
VAC, 50/60 Hz.
NOTICE
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de-
struction of the pump.
Ensure the gas mode is correctly set.
Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
CAUTION
Automatic start
After setting up the mains supply, the turbopump with OPS 40 will run up immediately.
Switch on the mains supply on the turbopump immediately before operation.
Fig. 7: Connecting the mains supply
10 Electronic drive unit TC 110 8.5 Connecting plug 8 Power supply OPS 40
8
8.5 10

Operation
19
Order the mains cable separately (see "accessories").
Insert the mains cable into the mains connection AC in.
Connect the mains cable to the mains.
Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
After the mains voltage is applied to the power supply, the electronic drive unit performs
a self-test to check the supply voltage. The provided supply voltage for the TC 110 is
24 V DC ± 5% in accordance with standard EN 60 742. The turbopump is set into oper-
ation.
6.2 Operation modes
The following operation modes are available:
●Operation without operating unit
●Operation via RS-485 and Pfeiffer Vacuum display and control units or PC
●Operation via field bus
6.3 Function description
Operation without op-
erating unit
Switch on the pump by connecting the mains cable with the mains supply.
After operating voltage is applied, the TC 110 performs a self-test to check the supply
voltage. Once the self-test has been successfully completed on the TC 110, the tur-
bopump and the backing pump - if connected - begin to operate.
Operation with DCU
or HPU
Consider the following manuals for the operation via Pfeiffer Vacuum display and con-
trol units:
●Operating instructions "DCU"
●Operating instructions "HPU"
●Operating instructions "Electronic drive unit TC 110"
Remove the bridges in the connecting plug via DIL switches S1 and S2.
Connect the display and control unit to the plug "RS485" of the adapter or the con-
necting cable.
Settings are possible via the RS-485 by using DCU, HPU or PC.
Operation via field
bus Integrating and operating Pfeiffer Vacuum turbopumps in the customer's field bus system
is possible for electronic drive units with a corresponding field bus panel.
Consider the following manuals for the operation via field bus:
●Operating instructions for the electronic drive unit with the respective connection
panel
WARNING
Danger due to open high vacuum flange
The rotor of the turbopump turns at high speed. If the high vacuum flange is open, there
is a danger of cut injuries and that the pump can be destroyed by objects falling into it.
Never operate the pump with an open high vacuum flange.

20
Operation
6.4 Monitoring of the operation conditions
Operating mode dis-
play via LED LEDs in the front panel of the electronic drive unit show basic operating conditions of the
turbopump. A differentiated malfunction and warning display is possible only for opera-
tion with DCU or HPU.
Temperature monitor-
ing The drive power is reduced in case of impermissible motor temperature or impermissibly
high housing temperature. This can cause falling below the rotation speed switchpoint
and so result in turning off the turbopump.
6.5 Switching off and venting
Switching off After the turbopump is switched off, it must be vented to avoid contamination due to par-
ticles streaming back from the fore-vacuum area.
Close the fore-vacuum line: Switch off the backing pump or close a fore-vacuum
valve.
Switch off the turbopump on the control unit or via remote control.
Vent the pump on the high vacuum side for at least 5 s to atmospheric pressure.
LED Symbol Steady OFF Flashing
(1/12 s active)
Blinking
(1/2 s active)
Steady ON
Green insufficient
power supply
Pumping station "OFF"
Rotation speed ≤ 1Hz
Pumping station "OFF"
Rotation speed > 1 Hz
Pumping station
"ON"
Yellow no warning Warning
Red no malfunction Malfunction