RAYLASE MINISCAN II-07 User manual

2
-AXIS DEFLECTION UNITS
Translation of the original manual
MINISCAN II
MINISCAN II
-07, MINISCAN II-10, MINISCAN II-14, MINISCAN II-20

This manual has been created by RAYLASE for its customers and employees.
RAYLASE reserves the right to modify the product described in this manual and the information it contains
without prior notification. All rights reserved. Duplication of this manual, including extracts – particularly
by photocopying, scanning or photographing – and any other form of reproduction is only permitted with
the prior written approval of RAYLASE.
Information correct at: 2018/01

CONTENTS
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CONTENTS
1ABOUT THIS MANUAL__________________________________ 5
1.1 Basic information .................................................................................................................5
1.2 Display conventions.............................................................................................................5
1.3 Other applicable documents................................................................................................5
1.4 Manufacturer........................................................................................................................6
1.5 Customer service.................................................................................................................6
1.6 Warranty ..............................................................................................................................6
2GENERAL SAFETY INFORMATION ______________________ 7
2.1 Designated use....................................................................................................................7
2.2 Foreseeable misuse ............................................................................................................7
2.3 Classification of laser systems.............................................................................................8
2.4 Laser area............................................................................................................................9
2.5 Hazards due to laser radiation...........................................................................................10
2.6 Required training and instruction of operating personnel..................................................11
2.7 Required protection measures ..........................................................................................11
2.8 Behaviour in case of destroyed ZnSe lenses....................................................................11
3PRODUCT DESCRIPTION______________________________12
3.1 Items included, accessories and spare parts ....................................................................12
3.2 General description............................................................................................................12
3.3 Product versions................................................................................................................15
3.4 Example uses ....................................................................................................................15
3.5 Signage..............................................................................................................................16
3.6 Technical data ...................................................................................................................17
3.7 Lifespan .............................................................................................................................21
4INSTALLATION _______________________________________22
4.1 Safety during installation....................................................................................................22
4.2 Installation location............................................................................................................23
4.3 Preparing for installation....................................................................................................23
4.4 Installing the lens...............................................................................................................23
4.5 Installing the deflection unit ...............................................................................................23
4.6 Completing installation.......................................................................................................23
5START-UP ____________________________________________24
5.1 Safety during start-up and operation .................................................................................24
5.2 Checking the installation....................................................................................................25
5.3 Start-up..............................................................................................................................25

CONTENTS
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6MAINTENANCE _______________________________________26
6.1 Cleaning.............................................................................................................................26
6.2 Servicing............................................................................................................................27
7UNINSTALLING _______________________________________28
7.1 Safety when uninstalling....................................................................................................28
7.2 Uninstalling the deflection unit...........................................................................................28
8STORAGE ____________________________________________29
9TRANSPORTATION ___________________________________30
10 DISPOSAL____________________________________________31
11 TROUBLESHOOTING__________________________________32
INDEX ____________________________________________________33

1 ABOUT THIS MANUAL
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1ABOUT THIS MANUAL
1.1 Basic information
This manual provides general information about handling MINISCAN II series deflection units. In
subsequent chapters, the general designations “deflection unit” or “product” are used to refer to the
MINISCAN II. The product version is indicated by the type code on the rating plate (see page16,
Signage).
This manual contains important information about professional and safe handling of the deflection
unit. As a result, you should familiarise yourself with the content of this manual before starting to use
the deflection unit. In case of any queries, please contact RAYLASE Customer Service for information
(see page 6, Customer service).
The manual must be accessible to anyone involved in developing, installing, uninstalling or using a
laser system with a RAYLASE deflection unit. If the deflection unit is sold on, this manual or an
authorised copy must be passed on with it.
1.2 Display conventions
The signal word WARNING indicates hazards that can lead to injuries or damage unless
precautionary measures are taken.
The signal word NOTE indicates general precautionary measures to be observed when handling the
product to prevent damage to the product itself.
Bullet points in a list are shown with a square at the beginning of the line.
Instructions are introduced with an objective and are shown with numbered actions. If necessary, an
intermediate result and a final result are specified.
1. First instruction
2. Second instruction
An intermediate result is represented by an arrow symbol.
3. Further instruction
An end result is represented by a tick.
1.3 Other applicable documents
Declaration of incorporation
Production log
Manuals for optional accessories

1 ABOUT THIS MANUAL
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1.4 Manufacturer
RAYLASE GmbH
Argelsrieder Feld 2+4
82234 Wessling
Germany
T: +49.8153.88 98-0 | F: +49.8153.88 98-10
www.raylase.de | [e-mail]
Referred to in this text as RAYLASE.
1.5 Customer service
The USB stick supplied contains the manual and answers numerous questions about RAYLASE
products. If any questions are not answered, RAYLASE Customer Service will be pleased to assist:
Monday to Friday between 08:00 and 17:00
Germany (Wessling)
T: +49.8153.88 98-0 | F: +49.8153.88 98-10
[e-mail]
China (Shenzhen)
T: +86.755.2824-8533 | F: +86,755.8222-8193
[e-mail]
1.6 Warranty
The customer's rights in the event of any material or legal defects in the product are set out in
RAYLASE’s general terms and conditions of business. These can be viewed at:
https://www.raylase.de/en/terms-and-conditions.html
RAYLASE GmbH has no obligation to repair any defects occurring under the following circumstances:
If the product has been operated outside the specifications.
If unauthorised repairs have been carried out on the product.
If unauthorised modifications have been made to the product.
If the product has been connected to non-compatible devices.
If the product has been damaged by unacceptably high laser power or by focusing the laser on
optical surfaces.
If the product has been damaged by unqualified cleaning of the optics.
If the warranty has elapsed.
There is no implicit guarantee or warranty regarding suitability for particular purposes. RAYLASE is not
responsible for damage resulting from the application. Individual assemblies or other assemblies
manufactured by RAYLASE may be subject to different warranty terms. Further information can be
found in the corresponding manuals.

2 GENERAL SAFETY INFORMATION
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2GENERAL SAFETY INFORMATION
2.1 Designated use
The deflection unit is intended to deflect laser radiation within an appropriate operating range for the
purposes of material processing.
The deflection unit is designed as a sub-assembly for laser systems and is classed as an incomplete
machine as defined in the Machine Directive. Each product version may only be operated with the
wavelength specified in the type code and with the specified beam diameter (see page 16, Signage).
Depending on the version, the MINISCAN II is designed for lasers with wavelengths of 193 nm to
11,000 nm, and an input aperture of 7, 9, 14 or 20 mm.
2.2 Foreseeable misuse
Foreseeable misuse includes the following:
Use of the deflection unit outside the specifications set out in this manual (see page 17, Technical
data).
Failure to comply with generally recognised technical regulations, as well as electrical engineering,
optical mechanical and laser technology directives, laws and standards.
Lack of or unsuitable fume extraction during material processing.
Lack of or unqualified process monitoring during material processing.
Use of the deflection unit with unsuitable laser protection measures.
Working on the deflection unit without or with unsuitable protective equipment.
Processing of flammable materials.
Installation, operation, maintenance and repair by unqualified personnel.

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2.3 Classification of laser systems
The deflection unit can be installed on a range of different laser systems. Every laser system is assigned
to a laser class, which must be specified at the output location of the laser radiation (e.g. using a laser
warning sign).
The following laser classes are defined in DIN EN 60825-1 and described in DGUV Regulation 11:
Class Description
1 The accessible laser radiation is not dangerous under reasonably foreseeable conditions.
1M The accessible laser radiation is in the wavelength range 302.5 nm to 4,000 nm. The accessible laser
radiation is not dangerous to the eyes, provided the beam cross-section is not reduced by optical
instruments (e.g. magnifiers, lenses, telescopes).
2 The accessible laser radiation is in the visible spectral range (400 nm to 700 nm). Short exposure times
(up to 0.25 s) are not dangerous to the eyes. Additional beam components outside the wavelength
range 400 nm to 700 nm meet the conditions for Class 1.
2M The accessible laser radiation is in the visible spectral range 400 nm to 700 nm. Short exposure times
(up to 0.25 s) are not dangerous to the eyes, provided the beam cross-
section is not reduced by optical
instruments (e.g. magnifiers, lenses,
telescopes). Additional beam components outside the wavelength
range 400 nm to 700 nm meet the conditions for Class 1M.
3R The accessible laser radiation is in the wavelength range 302.5 nm to 106nm and is dangerous to the
eyes. The power or energy is a maximum of five times the permitted Class 2 radiation limit in the
wavelength range 400 nm to 700 nm and five times the Class 1 limit for other wavelengths.
3B The accessible laser radiation is dangerous to the eyes and frequently also to the skin.
4 The accessible laser radiation is very dangerous to the eyes and dangerous to the skin. Diffusely
scattered radiation can also be dangerous. The laser radiation can cause a risk of fire and explosion.
Note that the deflection unit changes the beam output location of the laser system. The new beam
output must be indicated by a laser warning sign on the deflection unit, stating the corresponding
classification.
The use of a deflection unit can change the laser system’s laser class. This can necessitate additional
protective measures.

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2.4 Laser area
For the purposes of accident prevention, the laser area refers to the area in which the maximum
permitted radiation value can be exceeded. Laser systems must be assigned and marked according to
their laser class and use.X2-010.1
With a corresponding beam intensity, the laser area is defined by the total radiation angle of the
deflection unit and by the reflection of all objects that can be irradiated by it. It is important to note
that, in addition to reflective surfaces, matt and dark surfaces can also reflect laser radiation and that a
laser beam reflected several times can still be dangerous. In addition, the deflection unit can be
destroyed by back reflection.X2-010. 2
The laser area must have permanently and legibly attached markings in accordance with
DIN EN 60825-1. Laser systems must be fitted with the protective mechanisms required for safe
operation according to their class and use.X2 -010 .3
No combustible or explosive objects and liquids may be located in the laser area, as the energy of the
laser beam could ignite them.X2 -010.4
1 Laser 5 Deflected laser beam
2 Protective housing 6 Reflected laser beam
3 Beam stop or attenuator (shutter) 7 Laser area
4 Deflection unit 8 Processing area (example)
Fig. 1: Laser area

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2.5 Hazards due to laser radiation
WARNING
This chapter describes hazards that can result due to interaction with the higher-level laser system.
The operator of the higher-level laser system is responsible for safe operation and for securing the
surrounding area to prevent hazards that can be caused by laser radiation. They must ensure
compliance with all applicable conditions, regulations, laws, standards and directives.X2-020
2.5.1 General safety measures
The following general safety measures are to be observed:
To ensure that the laser beam is immediately switched off in the event of a fault, the laser process
must always be monitored. Alternatively, the entire beam path can be in a radiation-proof housing.X2-030 .1
The laser system must be designed in such a way that the laser beam can only be emitted at the
beam output on the deflection unit.X2-030.2
Appropriate protection mechanisms must be in place to prevent unauthorised activation or use of
the laser system.X2-030.3
The maximum permitted input beam diameter may not be exceeded.X2-03 0.4
If the materials to be processed can result in toxic vapours, safe extraction of these must be
ensured. Oxidising material processing and processing with material removal that is precipitated
onto the optics must be handled properly.X2-030.5
2.5.2 Measures to prevent uncontrolled escape of laser radiation.
If the mirrors in the deflection unit are destroyed, the laser beam no longer exits the deflection unit at
the intended beam output but remains inside the deflection unit. This leads to heating and, in some
cases, destruction of the housing and can lead to uncontrolled escape of the laser beam.X2 -040
To prevent destruction of the mirrors, the following points must be observed:
At the laser beam input, it is essential that the laser beam strikes the centre of the mirrors. If the
laser beam strikes a mirror towards the edge, the mirror can be overheated and destroyed.X2-040.1
To prevent a loss of control, the plug connections to the deflection unit may only be disconnected
when the laser system and the power supply are switched off.X2 -04 0.2
The deflection unit should always be operated with a lens or protective window.X2-040. 3
The maximum permitted laser power may not be exceeded.X2 -040.4
The deflection unit must be installed in such a way that the mirrors cannot come into contact with
liquids. Liquids change the reflective properties of the mirrors, which can lead to them being
destroyed by the laser beam.X2-040. 5
Before processing highly reflective materials, RAYLASE must be contacted as reflections can lead to
the destruction of the deflection unit.X2-040 .6
In general, correct and careful handling of the optical components must be ensured, particularly
during maintenance and cleaning work. Contaminated or scratched optics can absorb
unacceptable amounts of laser power and thus be destroyed.X2-040.7

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2.6 Required training and instruction of operating personnel
The deflection unit is designed exclusively for use in an industrial environment.X2-050. 1
Start-up, operation, installation, maintenance and repairs may only be carried out by trained personnel
who have been instructed by the laser protection officer and are sufficiently qualified to perform the
relevant work.X2-050.2
2.7 Required protection measures
If present in the laser area, protective equipment such as laser protection goggles or special protective
clothing may be required. The required protective equipment is stipulated by the laser protection
officer based on the individual hazards caused by the laser equipment. The laser area must be marked
so that the required protective equipment is clearly indicated to all personnel who intend to enter the
laser area.
2.8 Behaviour in case of destroyed ZnSe lenses
WARNING
Zinc selenide properties hazardous to health
Destruction of zinc selenide lenses can result in dust containing hydrogen selenide and selenium
dioxide. This dust can be carcinogenic and is very toxic when inhaled.02-010
To improve the optical properties of the material, zinc selenide is frequently given an anti-reflective
coating that may contain thorium fluoride. Thorium is a radioactive element. The quantity of thorium
contained in the coating and the relative size of the decomposed area of the lens surface mean that,
even in the worst cases, the resulting radioactive exposure levels are normally well below the limits set
out in the Radiological Protection Ordinance.
If lenses are damaged:
1. Switch off the laser system immediately.
2. Leave the room for at least 30 minutes.
3. Never remove the lens or the protective window from the deflection unit. Toxic dust or fragments
may have been produced in the deflection unit.
4. If the deflection unit should be opened and fragments fall out, the fragments must only be
collected up using appropriate protective clothing and breathing apparatus and disposed of as
hazardous material in line with the applicable conditions, regulations and legislation.
5. Label the defective deflection unit with a clear warning notice and send the deflection unit to
RAYLASE in air-tight protective packaging.
6. The personnel charged with uninstalling the deflection unit must wear appropriate protective
clothing and breathing apparatus.
7. The room in which the zinc selenide lens was destroyed must be adequately cleaned,
decontaminated and ventilated.
8. Wear gloves and mouth protection when carrying out the subsequent tasks.
9. Carefully collect all fragments and pack them in an air-tight sealable container.
10. Clean all contaminated system components and surfaces with a damp cloth and pack the cleaning
cloths in an air-tight sealable container.
11. Send the containers to the supplier of the optics. They are responsible for proper disposal of the
material.
Only for deflection
units with
ZnSe F-Theta lens

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3PRODUCT DESCRIPTION
3.1 Items included, accessories and spare parts
The items included are typically:
Deflection unit
USB stick containing manual, declaration of incorporation and design data
Production log
The deflection unit can be expanded with the following optional components:
F-Theta lens
Control card
Adapter card / interface electronics between control card and deflection unit
Software package
3.2 General description
3.2.1 Deflection unit
The deflection unit can be used to deflect a laser beam in the X and Y direction. This results in a two-
dimensional area in which the laser can be directed to any position. This area is referred to as the
processing area. Deflection is performed by two mirrors, each of which is moved by a galvanometer
scanner.
The beam output can be fitted with an optional focusing lens (see page 14, F-Theta lens).
NOTE
 On the input side, the laser beam must be input precisely into the optical axis (see page 22,
Installation).C1-070.1
Only suitable lasers may be input (see page 16, Signage).C1-070.2

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1 Beam input 4 Beam output
2 Galvanometer scanner with mirror 5 Processing area
3 Galvanometer scanner with mirror
Fig. 2: Functional principle

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3.2.2 F-Theta lens
The optional F-Theta lens is specially designed for use with 2-axis deflection units. It focuses the laser
beam at maximum quality on any position in the processing area. At the same time, it partially optically
compensates for the barrel-shaped distortion that is unavoidably produced by 2-axis deflection units.
The remaining distortion (see figure) must be compensated by the deflection unit.
Distortion caused by XY
deflection
Distortion caused by F-Theta
lens
Distortion caused by XY
deflection with F-Theta lens
3.2.3 Connections
The MINISCAN II has the following connections:
to a laser system (mechanical and optical)
to a focusing unit (e.g. F-Theta lens)
The power supply and control use the analogue or digital interface depending on the product version
(see page 19 ff.).
NOTE
Controlled deflection is only possible if the specified power supply is connected. In addition
proper control using the specified control commands must be guaranteed at all times.C1-060
Optional

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3.3 Product versions
Every deflection unit in the MINISCAN II series is configured for the parameters defined when ordering
and can only be used within these parameters. The parameters are specified in the type code on the
rating plate. Further information on the specifications on the rating plate can be found on the Internet
at:
https://www.raylase.de/_Resources/Persistent/fbae382eda8e3adf8f0dbb63b764a51e624e926c/Produc
t_Naming_V05_P.pdf
3.4 Example uses
The following graphic shows two typical laser systems realised using RAYLASE modules (red outline)
and customer-specific modules (dotted lines).

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3.5 Signage
The signs listed below must be attached to the deflection unit. These signs must not be removed. Any
signs that become illegible must be replaced.
The rating plate and the type code printed on it allow key properties of
the product to be determined (see page 15, Product versions). The
rating plate contains at least the following information:
Company name and address
Product designation
Series
Wavelength for which the product is designed
Serial number
Year of production (month)
The series and serial number are also used to identify the product.
The protective seal warns against unauthorised opening of the product.
If the seal is broken, all warranty entitlements against RAYLASE are
rendered void.
Describes the most important safety measures to be followed before
maintenance work is carried out.
A laser warning sign must be attached at the beam output, providing
information about the type of radiation, the specific hazards and the
protection class. The laser warning sign must be attached in line with
DIN EN 60825-1, see page 8, Classification of laser systems, by the
manufacturer of the laser system.

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3.6 Technical data
3.6.1 General specifications
Typical deflection ±0.393 rad
Resolution 12 μrad
Repeatability (RMS) 2 μrad
Max. Gain drift115 ppm/K
Max. Offset drift110 μrad/K
Long-term drift 8 h1, 2 <150 μrad
IP-Code 54
Emission sound pressure level <70 dB(A)
1) Drift per axis.
2) After 30 min warm-up, at constant ambient temperature and process stress.
Remark: All angles optical.
3.6.2 Power supply
Voltage ±15 to ±18 V
Current 2 A, RMS, max. 10 A
Ripple/ Noise Max. 200 mVpp, @ 20 MHz bandwidth
3.6.3 Control signals
Analogue ±5 V, ±10 V
Digital XY2-100 protocol
3.6.4 Ambient conditions
Ambient temperature at operation +15 to +35 °C
Storage temperature -10 to +60 °C
Humidity ≤ 80 % non-condensing

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3.6.5 Aperture-specific parameters
3.6.5.1 Mechanical specifications
Type MINISCAN II-07 MINISCAN II-10 MINISCAN II-14 MINISCAN II-20
Input aperture (mm) 7 9 14 20
Beam displacement (mm) 9.0 12.4 17.0 26.0
Weight without objective
(kg)
approx. 0.8 approx. 0.8 approx. 1.6 approx. 2.2
Dimension (L x W x H) (mm) 100 × 77 × 79.5 100 × 77 × 79.5 134 × 98 × 93.5 145 × 116 ×
103.5
3.6.5.2 Dynamic behaviour
Type MINISCAN II-07 MINISCAN II-10 MINISCAN II-14 MINISCAN II-20
Writing speed (cps)1, 2 900 500 400 300
Positioning speed (m/s)110 7 6 5
Acceleration time (ms)30.19 0.23 0.50 0.70
1) With F-Theta Lens f = 163 mm / field size 120 mm x 120 mm.
2) Single-stroke font with 1 mm height.
3) Calculation of tracking error approx. 0.57 × acceleration time.

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3.6.6 Interfaces
3.6.6.1 Analogue interface
The connector pin assignment for the analogue interface is set out below. The deflection unit is
supplied with electrical power by the 25-pin D-SUB connector and can be controlled using analogue
signals.
Fig. 3: D-SUB-25-M
PIN Signal PIN Signal
1 +X COMMAND 14 -X COMMAND
2 SIGNAL GND 15 X POSITION
3 SIGNAL GND 16 Y POSITION
4 SIGNAL GND 17 -Y COMMAND
5 +Y COMMAND 18 nc
6 nc 19 nc
7 nc 20 nc
8 nc 21 nc
9 +VSS 22 +VSS
10 +VSS 23 GND Input
11 GND Input 24 GND Input
12 -VSS 25 -VSS
13 -VSS --- ---
nc = not connected (not used)
The values for the supply are described on page 17, Power supply.
WARNING
Control error due to interference signalsC1-030
Input the signals as shown below.
Use only screened cables.
Only for deflection
units with analogue
interface

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Signal source Deflection
unit
Signal source Deflection
unit
Fig. 4: Standard input
Fig. 5: Differential input