Talon TP-40BA User manual

TP-40BA (Rev 1.0)
TALON TECH CO. LTD.
Excellent Dispense Volume Reliability Pump & Controller –Built-in type
TALON TECH CO. LTD.
MODEL : TP-40BA

TP-40BA (Rev 1.0)
TALON TECH CO. LTD.
1. System Configurations………………………………………………………………………………………………………………………….
1
2. System Specifications…………………………………………………………………………………………………………………………….
2
2-1. Pump [TP-40BA]…….………………………………………………………………………………………………………………………….
2
2-2. Control Board………..………………………………………………………………………………………………………………………….
3
2-3. Touch pad………………………………………………………………………………………………………………………………………….
3
3. System In/Exterior Names……………..……………………………………………………………………………………………………..
4
3-1. Pump In/Exterior Names...………………………………………………………………………………………….……………………
4
3-1-1. Pump Name Explanation....…………………………………………………………………………………….………………….
5
3-2. Touch Pad Exterior Names..……………………………………………………………………………………………………………..
6
3-2-1. Touch Pad Name Explanation…………………………………………………………………………………………………...
6
3-3. Touch Pad Connection Board Exterior Names………..……………………………..…….…………………………………..
7
3-3-1. Touch Pad Connection Board Name Explanation…….……………………………..………..……………………...
7
4. Wiring & Signal Interface……………………………………………………………………………………………………………………..
8
4-1. Track I/O Signal Timing Chart……………………………………………………...…………………………………………………..
8
4-2. Track Pin Assign………………………………………………………………………………………………………………………………..
9
4-3. COMM & ETC Pin Assign…………………………………………………………………………………………………………………
9
4-4. Touch Pad Pin Assign……………………………………………………………………………...………………………………………..
10
4-5. Dispense Trigger Select..…………………………………………………………………………………………………………………..
11
5. External Cable Length…………….……………………………………………………………………………………………………………..
12
5-1. Track Cable…………….……………………………………………………………………….…………………………………………………
12
5-2. COM Cable…………………………………………………………………………………….………………………………………………….
12
5-3. Touch Pad Cable…………………………….…………………………………………………………………………………………………
12
6. Touch Pad Operation……………………………………………………………………………………………………………………………..
13
6-1. Operation……………………………………………………………………………………….…………………………………………………
13
6-1-1. Initial Screen….……………………………………………………………………….………………………………………………….
13
6-1-2. Pump Condition Indicate In Use….……………………………………………………………………………………………
13
6-1-3. Select Function…….….………………………………………………..……………………………………………………………….
13
6-1-4. Dispense…………………………………………………………………………………………………………………………………….
14
6-1-5. Recipe…………………………………………………………………………………………………………………………………………
14
6-1-6. Degas…………….…………………………………………………………………………………………………………………………...
15
6-1-7. Configuration of Pump……..…………….………………………………………………………………………………………...
15
6-1-8. Calibration.………………………………………………………………..……………………………………………………………….
18
6-2. Example...………………………………………………………………………………………………………………………………………….
18
6-2-1. Dispense…………………………………………………………………………………………………………………………………….
18
CONTENTS

TP-40BA (Rev 1.0)
TALON TECH CO. LTD.
6-2-2. Recipe…………………………………………………………………………………………………………………………………………
19
6-2-3. ID Setting…………………………………………………………………………………………………………………………………...
20
6-2-4. Reset on Pump Error…………………………………………………………………………………………………………………
22
6-3. Touch Pad Menu Tree……………………………………………………………………………………………………………………….
23
6-4. Notice…….………………………………………………………………………………………………………………………………………….
24
6-4-1. Degas Function.……………..…………………………………………………………………………………………………………..
24
6-4-2. Dispense Cycle…………………………………………………………………………………………………………………………..
24
6-4-3. Pump ID Setting…..……………………………………………………………………………………………………………………
24
6-4-4. Recipe Setting………………………………………………………………………………………………….………………………...
24
7. Pump Operation Sequence………………………………………..……………………………………………….………………………...
25
7-1. Degas Pump……………………..…………………………………………………………………………………….………………………...
25
7-1-1. Degas Pump Role……….……..………………..……………………………………………………………………………………..
25
7-1-2. Degas Pump Operation Sequence…….………………………….………………………………………………………….
26
7-2. Dispense Pump………………………………...…………..…………………………………………………………………………………..
27
7-2-1. Dispense Pump Role….…….……………………………..…………………………………………………………………………
27
7-2-2. Dispense Pump Operation Sequence….…………………………………………………………….……………………..
27
8. Maintenance…………………………………………………………………………………………………………………………………………...
29
8-1. Pump Parts Dis/Assembly………………………………………………………………………………………………………………...
29
8-1-1. Degas Pump Cover Dis/Assembly….…..……………………………………………………………………………………..
29
8-1-2. Buffer Tank Empty Sensor’s Sensitivity Adjustment……...………………………………………………………….
29
8-1-3. Driving Shaft Condition Check & Grease up on Ball Screw………...………..…………………………………
30
9. Recommended Spares/Mechanical Dimensions…………………………………………………………………………………
31
9-1. TP-40BA Spare Parts………………………………………………………………………….……………………………………………..
31
9-2. Pump Dimensions…………………………………………………………………………………………………………………………….
32
9-2-1. Front View……………………………………………………………………………………………………………………………….…
32
9-2-2. Side View……………………………………………………………………………………………………………………………………
32
9-3. Touch Pad Dimensions……………………………………………………………………………………………………………………..
33
9-3-1. Front View………………………………………………………………………………………………………………………………….
33
9-3-2. Rear View……………………………………………………………………………………………………………………………………
33
9-3-3. Side View……………………………………………………………………………………………………………………………………
33
9-4. Touch Pad Connection Board Dimensions……………………………………………..………………………………………..
34
9-4-1. Top View……………………………………..…………………………………...………………………………………………………..
34
9-5. Installation Method…………………………………………………………………………………………………………………………..
35
9-5-1. Pump Installation Sequence……………………………………………………………………………………………………..
35
9-5-2. Piping Method……………..……………………………………………………………………………………………………………
35
9-5-3. Touch Pad Installation Method………………………………………………………………………………………………...
36
9-5-4. Touch Pad Connection Board Bracket Installation Method.…………………………………………………….
37

TP-40BA (Rev 1.0)
- 1 -
TALON TECH CO. LTD.
TP-40BA pump can be used as the above configuration and has been developed for the semiconductor
system’s automation by operating RS422 communication. Especially, the adoption of servo motor is good
for the high degree of PR dispense. The basic communication between the touch pad and the pump is
RS422 Multi Drop method. By synchronizing with Windows CE Operating System, Touch Pad MMI 2.0
Software operates TP-40BA pump.
Be careful to use the pump by following this manual or Talon Tech’s acceptance. Or, other defects
should be paid even under the warranty period.
※Features & Merits
1. All the PR contacting points are made by Teflon.
2. Driving Method : Outer type Bellows / Ball screw equipped with serve motor.
3. Automatic bubble removal system / Automatic degasing function.
4. Touch pad has the same function of controller & it can control upto16 pumps.
5. Normal trigger signal.
System Configurations
1
Wafer
Dispense Nozzle
Suck-Back V/V
Filter
PR Bottle
Touch Pad
Max 16ea
Pump Control
TP-40BA Pump1
Main Air 6Ø
Suck-Back 4Ø
TP-40BA Pump16
Touch Pad
Connection B/D
(Max 8ea Ch)

TP-40BA (Rev 1.0)
- 2 -
TALON TECH CO. LTD.
2-1 Pump [TP-40BA]
ITEM
SPEC
REMARKS
Dispense Volume Range
0.5cc ~ 7.0cc
Suck-Back Volume Range
0.0cc ~ 3.5cc
Dispense / Reload Rate
0.1cc/sec ~ 7.0cc/sec
Suck-Back Rate
0.1cc/sec ~ 7.0cc/sec
Dispense Volume Resolution
0.0025cc
Dispense Repeatability
≤±0.02(2.2cp, 23℃)
Viscosity
Max : 150cp
Pump Driving Type
DC Servo Motor
1-Cycle Step
4-Dispense Step
Suck-Back Step
Reload Step
Pump Power Source
DC 24VDC (current consumption : 1A)
Ambient Temperature
5 ~ 40 ℃
Air
0.35Mpa
Weight
4.48kg
Pump Dimension
W : 80mm, L : 210mm, H : 309mm
System Specifications
2

TP-40BA (Rev 1.0)
- 3 -
TALON TECH CO. LTD.
2-2 Control Board
ITEM
SPEC
REMARKS
Power Source
DC 24V (current consumption : 1A)
Drive Pump No.
1 Pumps
Pump Operation Mode
Fixed Mode
Main CPU
80c296 (16bit Processor)
Input Signal
1. Pump Driving Signal From Track M/C-Pump
Start Signal(3ea)
Output Signal
1. Home Signal & Pump Driving Finish
Signal To Track M/C.
2. Suck-Back V/V control Sol V/V Signal
3. On Pump Operation Error, Alarm Signal
4. Outside Communication (RS422)
2-2 Touch Pad
ITEM
SPEC
REMARKS
Main CPU
32Bit ARM920T
Ram
64Mb (OS:32Mb/App:32Mb)
Flash
NAND Flash 64Mb (OS:32Mb/App:32Mb)
LCD Size
4.3 Inch TFT Wide (480*272)
RTC Function Built-in
Exchangeable Coin Battery
Max connect Pump
16 Pumps
Communication
RS422
Touch Pad Power
DC 12~24V, current consumption 5W (400~700mA)
Ambient Temperature
- 10 ~ 55C
Weight
0.64kg
Dimension
W : 140mm, D : 44mm, H : 88mm

TP-40BA (Rev 1.0)
- 4 -
TALON TECH CO. LTD.
3-1 Pump In/Exterior Names
System In/Exterior Names
3
⑤Degas Pump
⑥Dispense Pump
④Buffer Tank
③Air Sol Block Ass’y
②Main Control Board
①Cylinder

TP-40BA (Rev 1.0)
- 5 -
TALON TECH CO. LTD.
3-1-1 Pump Name Explanation
①Cylinder
- Function of containing PR and dispensed by bellows
②Main Control Board
- Main Control Board for all pump controls
③Air Sol Block Ass’y
- Sol Block Ass’y for Degas Pump & Air V/V operation. (2 channel Sol Block)
④Buffer Tank
- Bubble removal and buffering function of about 30cc PR
⑤Degas Pump
- Air Cylinder Type Pump for charging PR into Buffer Tank
⑥Dispense Pump
- Pump for the accurate PR dispense
⑦Vent
- Drain bubbles made by PR. (¼Inch Teflon)
⑧Empty
- Empty sensor to check the emptiness inside the buffer Tank. Automatically & manually charge
⑨S/Back
- Air outlet to operate suck-back valve. (4Ø Air Tube)
⑩PR In
⑦Vent
⑪PR Out
⑨S/Back
⑧Empty
⑩PR In
⑫Track
⑬COM
⑭Air In

TP-40BA (Rev 1.0)
- 6 -
TALON TECH CO. LTD.
- Chemical Supply. (¼Inch Teflon)
⑪PR Out
- Chemical Dispense. (¼Inch Teflon)
⑫Track
- Track cable connector from pump to machine. (D-SUB Male 15P)
⑬COM
- Communication Cable Connector from pump to touch pad. (D-SUB Male 15P)
⑭Air In
- Main air supply outlet to operate degas pump & air valve. (6Ø Air Tube)
3-2 Touch Pad Exterior Names
3-2-1 Touch Pad Name Explanation
①Touch Panel
- Touching area
②Power In
- Touch Pad Power DC12~24V Connector
③Com Port
- Touch Pad RS422 communication Connector (D-SUB 9P Male)
④Com Port
- Touch Pad RS422 communication Connector
②Power Source
(DC12~24V)
③Com Port (RS422)
④Com Port (RS422)
①Touch Panel

TP-40BA (Rev 1.0)
- 7 -
TALON TECH CO. LTD.
3-3 Touch Pad Connection Board Exterior Names
3-3-1 Touch Pad Connection Board Name Explanation
①Touch Pad
- Touch Pad Communication Connector. (Molex 6P)
②Main COM
- In case the machine controls the pump, use this Communication Connector. (Molex 4P)
③Switching I/O
- Switching Connector to exchange Touch Pad & Main COM’s communication. (Molex 5P)
④RS422 Communication
- Pump1 ~ Pump8 COM Cable Connection Connector. (Molex 4P)
④RS422 comm.
(J1 ~ J8)
①Touch Pad
②Main COM
③Switching I/O
[Switching I/O Circuit]
[Main COM Circuit]

TP-40BA (Rev 1.0)
- 8 -
TALON TECH CO. LTD.
4-1 Track I/O Signal Timing Chart.
Wiring & Signal Interface
4

TP-40BA (Rev 1.0)
- 9 -
TALON TECH CO. LTD.
4-2 Track Pin Assign
Track Pin Assign [Male Type D-SUB 15P]
Pin NO.
Signal Name
I/O
Description
1
+ 24VDC
Input
Machine -> Pump Supply Power
2
+ 24VDC
Input
Machine -> Pump Supply Power
3
GND
Input
Machine -> Pump Supply Power
4
GND
Input
Machine -> Pump Supply Power
5
TRACK_START1
Input
Signal for Recipe Select
6
TRACK_START2
Input
Signal for Recipe Select
7
TRACK_START3
Input
Signal for Recipe Select
8
ALARM (STOP)
Output
Alarm (Pump Stop)
9
ALARM (WARNING)
Output
Alarm (Pump works)
10
TRACK_HOME
Output
Pump Ready
11
TRACK_END
Output
Pump Dispense End
12
TRACK GND
Output
Track GND
13
TRACK VCC
Input
Track Power 24V
14
TRACK VCC
Input
Track Power 24V
15
TRACK GND
Input
Track GND
4-3 COMM & ETC Pin Assign
COMM & ETC Pin Assign [Male Type D-SUB 15P]
Pin NO.
Signal Name
I/O
Description
1
Not Use
Not Use
2
Not use
Not Use
3
Not Use
Not Use
4
TX+
Output
Pump -> CONN Board (RS422)
5
TX-
Output
6
RX+
Input
7
RX-
Input
8
Not Use
Not Use
9
Not Use
Not Use
10
Not Use
Not Use
11
Not Use
Not Use
12
Not Use
Not Use
13
Not Use
Not Use
14
Not Use
Not Use
15
Not Use
Not Use

TP-40BA (Rev 1.0)
- 10 -
TALON TECH CO. LTD.
4-4 Touch Pad Pin Assign
Touch Pad RS422 Pin Assign [Male Type D-SUB 9P]
Pin NO.
Signal Name
I/O
Description
1
+5V
Output
CONN Board Supply Power
2
Not Use
Not Use
3
Not Use
Not Use
4
RX+
Input
RS422 Receive + (Pump side)
5
RX-
Input
RS422 Receive - (Pump side)
6
TX+
Output
RS422 Send + (Pump side)
7
TX-
Output
RS422 Send –(Pump side)
8
GND
Output
CONN Board Supply Power
9
Not Use
Not Use
Touch Pad Power Pin Assign [3P]
Pin NO.
Signal Name
I/O
Description
1
MC +24V
Input
Touch Pad Supply Power
2
Not Use
Not Use
3
MC_GND
Input
Touch Pad Supply Power
Touch Pad Main COM Pin Assign [4P]
Pin NO.
Signal Name
I/O
Description
1
RX+
Input
RS422 Receive + (Pump side)
2
RX-
Input
RS422 Receive - (Pump side)
3
TX+
Output
RS422 Send + (Pump side)
4
TX-
Output
RS422 Send –(Pump side)
Touch Pad Switching I/O Pin Assign [5P]
Pin NO.
Signal Name
I/O
Description
1
Not Use
Not Use
2
Not Use
Not Use
3
Not Use
Not Use
4
+24V
Input
MC Power
5
- SIGNAL
Input
Switching Signal

TP-40BA (Rev 1.0)
- 11 -
TALON TECH CO. LTD.
4-5 Dispense Trigger Select
“0”Trigger Off
“1”Trigger On
Recipe
Select
Start1
[1]
Start2
[2]
Start3
[3]
Remark
1
1
0
0
2
0
1
0
3
1
1
0
4
0
0
1
Cycle Recipe
5
1
0
1
6
0
1
1
7
1
1
1

TP-40BA (Rev 1.0)
- 12 -
TALON TECH CO. LTD.
5-1 Track Cable
5-2 COM Cable
5-3 Touch Pad Cable
External Cable Length
5
Cable for Touch Pad in Use
Cable for Touch Pad in no Use
Touch Pad Power Cable
Touch Pad Main COM Cable
Touch Pad Switching I/O Cable

TP-40BA (Rev 1.0)
- 13 -
TALON TECH CO. LTD.
6-1 Operation
6-1-1 Initial Screen
The pumps’ID, which are cable-connected to touch pad, are auto-searched every 20 sec. On every
lower menu, if there isn’t any input for 1 min, the initial screen is back. The pump, which is not
searched, cannot be chosen.
6-1-2 Pump Condition Indicate In Use
Dispense Ready Purge Mode Not Connect
6-1-3 Select Function
When ID is chosen, the above screen is shown.
ESC
-go to the previous menu.
Dispense
-Dispense by touching the pad.
Recipe
-Run Recipe & Dispense Recipe Setting.
Degas
-Degas Count, Manual Degas, Empty Sensor Setting.
Config
-Pump Mode, Reset, Error & ID Setting.
Calibration
-Each recipe’s calibration setting.
Touch Pad Operation
6

TP-40BA (Rev 1.0)
- 14 -
TALON TECH CO. LTD.
6-1-4 Dispense
On executing Start Run, Run Recipe runs one time dispense. In case of Start Cycle, Cycle Recipe
(4th Recipe) works as many as set counts.
6-1-5 Recipe
For Recipe Setting, touch # under No. and input recipe # that you want to go in and touch ‘Ent’. At
this time, Recipe Data is automatically shown on the screen. And you can input the data that you
want and touch ‘set’button for setting. ‘Count’is only for 4th recipe(cycle recipe). Total recipes are
1~7. Recipes are automatically chosen by each trigger signal.
However, 4th recipe is for cycle recipe and which works only by Start Cycle of Dispense on touch
pad. Run Recipe No. is Recipe No. used by Start Run under Dispense menu.

TP-40BA (Rev 1.0)
- 15 -
TALON TECH CO. LTD.
6-1-6 Degas
Degas Count means to set the degas counts after the empty sensor senses the buffer tank’s empty.
When the set counts are over, warning or stop alarm occurs depending on ‘Error Mask Setting’.
‘Using Empty Sensor’is about the empty sensor’s setting. So, it becomes ‘Yes’on normal situation.
In case of ‘No’, degas doesn’t work even if the buffer tank is empty.
Degas count can be set from 0 ~ 999.
Degas Run / Degas Stop has the function to make Degas work manually even if the buffer tank is
not empty.
Notice : When the degas is working due to the buffer tank’s empty, touch panel’s command never
works.
6-1-7 Configuration of Pump
On Config Pump, the password needs for the important items’set.
The password is set as ‘0901’.

TP-40BA (Rev 1.0)
- 16 -
TALON TECH CO. LTD.
Vital
-Check pump’s response and in case of response, ‘vital’
window activates and disappears right away. At the left window,
the response data is shown.
Error Status
-Shown Error Code Data.
Set ID
-Change Pump ID. [Discuss with Talon Tech]
Maint Mode
-Change Pump Mode to Maint.
Run Mode
-Change Pump Mode to Run
Pump Reset
-Reset Pump. It means Pump Restart, not Data Reset.
Error Mark
-Stop Error Setting. [Discuss with Talon Tech]
▶ID Setting
For ID Setting, Click no. next to Set ID window. On the below screen, input ID and touch Ent.
On Config Pump screen, when you touch ‘Set ID’, Password input screen shows and input ‘0901’and
touch Ent. And then, ‘Check ID’‘Set ID’screen shows and disappears right away so the initial starts.

TP-40BA (Rev 1.0)
- 17 -
TALON TECH CO. LTD.
If there is no response from the pump, the window keeps showing. If there is already the same pump
ID, the window –‘Conflict’shows and push ‘OK’and reset.
▶Maint Mode, Run Mode, Pump Reset Setting
Main Mode is to show the message of pump work on the text window. Run Mode only shows as
data code. The setting method is to touch Maint Mode , Run Mode button and input password and
touch ‘Ent’. In case of no response from pump, message of mode keeps showing. Pump reset works
right after input password. It goes to the initial screen same as power off and on. It takes about
20sec.
▶Error Status
It reads the current ‘Error Code Data’.
In case Pump is normal, [711RE0 0] Data is shown. But, Homing Fail / Motor Alarm are same as
normal data.
★Error Code Data which is possible to detect.
1. [711RE0A Q] : Limit Sensor check.
2. [711RE0O] : Degas Over check.
3. [711RE0D T] : Degas operation impossible
★Response Data Explanation [711RE0 0]
- 7: digit no. except the first digit.
- 11 : responded Pump ID NO.
- RE : read.
- 0 0 : responded Error Code.