Talon TP-70BS User manual

TP-70BS (Rev 3.0)
TALON TECH CO. LTD.
HIGH VISCOSITY & HIGH CAPACITY PR PUMPPump& Controller System
TALON TECH CO. LTD.
MODEL : TP-70BS

TP-70BS (Rev 3.0)
TALON TECH CO. LTD.
1. System Configurations……………………………….………………………………………………………………………………………….
1
2. System Specifications…………………………………………………………………………………………………………………………….
2
2-1. Pump [TP-70BS]…….………………………………………………………………………………………………………………………….
2
2-2. Controller [TPC-7002].………..…………………………………………………………………………………………………………….
3
2-3. Touch Pad [TTP-7008]……………………………………………………………………………………………………………………….
3
3. System In/Exterior Names………….…………………….…………………………………………………………………………………..
4
3-1. Pump Exterior Names….…..…………………………………………………………………………………….…………………………
4
3-1-1. Pump Name Explanation……………………………………………………………………………………….………………….
4
3-2. ControllerExterior Names……………………………………………………………………………………………………………..…
5
3-2-1. Controller Name Explanation……….…………………………………………………………………………………………...
5
3-3. Touch Pad Exterior Names.………………………………………………………………………………………..……………………..
6
3-3-1. Touch Pad Name Explanation………...………………………………………………………..………………………………..
6
4. Track/Auxiliary Interface………….……………………………………………………………………………………………………………
7
4-1. Track Interface Signal……….……………………………………………………………………………………………………………….
7
4-2. Track Interface Wiring……………………………………...……………………………………………………………………………….
8
4-3. Cable Pin Assign……………..………………………………………………………………………………………………………………..
9
4-3-1. Pump Cable……………………….………………………………………………………………………………………………………
9
4-3-2. Track Cable………………………………………….……………………………………………………………………………………..
10
4-3-3. Touch Pad Cable………………………………………………………………………………………………………………………..
12
4-3-4. COM Cable……………….………………………………………………………………………………………………………………..
12
5. External Cable Length……………………………………………………………………………………………………………………………
13
5-1. Pump Cable..……………………………………………………………………………………………………………………………………..
13
5-2. Track Cable………………………………………………………………………………………………………………………………………..
13
5-3. Touch Pad Cable……..………………………………………………………………………….………………………………………….…
14
5-4. COM Cable………………………………………………………………………………………………………………………………………..
14
5-5. Communication Cable Connection Method…….…………………………………………………………………..……….…
15
6. Touch Pad Operation……………………………………………………………………………………………………………………………..
16
6-1. Operation……………………………………………………………………………………….…………………………………………………
16
6-1-1. Initial Screen…….…………………………………………………………………….………………………………………………….
16
6-1-2. Pump Condition Indicate In Use………………….……………………………………………………………………………
16
6-1-3. Select Function…………….…………………………………………...……………………………………………………………….
17
6-1-4. Dispense…………………………………………………………………………………………………………………………………….
17
6-1-5. Recipe Setting……………………………………………………………………………………………………………………………
18
6-1-6. Config Pump……………………………………………………………………………………………………………………………...
29
CONTENTS

TP-70BS (Rev 3.0)
TALON TECH CO. LTD.
6-1-6-1. ID Setting………………….………………………………………………………………………………………………………...
19
6-1-6-2. Maint Mode, Run Mode, Pump Reset Setting……….………………………………………………………….
20
6-1-7. Calibration………………………………………………………………………………………………………………………………….
21
6-1-8. Counter……………...……………………………………………………………………………………………………………………….
21
6-2. Example………………….………………………………………………………………………………………………………………………….
23
6-2-1. Dispense Test….………………………………………………………………………………………………………………………….
23
6-2-2. Recipe Setting……………………………………………………………………………………………………………………………
24
6-2-3. ID Setting………………………………………………………………………………………………………………………….............
25
6-2-4. Name Setting………………………………………………………………………………………………………………………….....
26
6-3. Cycle Purge Method…………………………...……………………………………………………………………………………………
27
6-4. Reset on Pump Error…………………………..…………………………………………………………………………………………….
29
6-5. Log Data………..…………………………………………………………………………………………….................................................
30
6-5-1. Log Data Analysis ………..……………………………………………………………………………………………...................
31
6-6. Touch Pad Menu Tree……………………………………………………………………………………………………………………….
32
6-7. Notice……...………………………………………………………………………………………………………………………………………..
32
6-7-1. Dispense Cycle………………………..…..……………………………………………………………………………………………..
32
6-7-2. Pump ID Setting……………..…………………………………………………………………………………………………………
32
6-7-3. Recipe Setting………………………………………………………………………………………………….………………………...
32
6-8. Notice on Pump Operation.………….………………………………………………………………………………………….………
33
7. Maintenance……………………………………………...……………………………………………………………………………………………
34
7-1. Purge Method……………….………………………………………………………………………………………………………………….
34
7-2. Pump Parts Dis/Assembly.…..………..………………………………………………………………………………………………….
35
7-2-1. Pump Cover Dis/Assembly..…..…………………….……..……………………………………………………………………..
35
7-2-2. Driving Shaft Condition Check & Grease up on Ball Screw……...……………………………………………..
35
7-3. Suck-Back Setting………….………………………………………………………………………………………………………………….
36
8. Recommended Spares/Mechanical Dimensions…………..……………………………………………………………………..
38
8-1. TP-70BS Spare Parts…………………………..……………………………………………………………………………………………..
38
8-2. Pump Dimensions………………….…………………………………………………………………………………………………………
39
8-2-1. Front View…………………….………………………………………………………………………………….………………………...
39
8-2-2. Side View………...………….……………………………………………………………………………………………………………...
39
8-3. Controller Dimensions……..…………………………………………………………………………………….………………………...
40
8-3-1. Front View………………………….…………………………………………………………………………….………………………...
40
8-3-2. Rear View………………….…...……..……………………………………………………………………………………………………
40
8-3-3. Side View………………….……………………..………………………………….……………………………………………………...
40
8-4. Touch Pad Dimensions…………………………..………………………………….……………………………………………………...
41
8-4-1. Front View……………………...…………………………………………………………………………………………………………..
41
8-4-2. Rear View…………………...………………………………………………………………………………………………………………
41
8-4-3. Side View………………..……………………..…………………………………………………………………….……………………..
41

TP-70BS (Rev 3.0)
TALON TECH CO. LTD.
8-5. Installation Method……………………………..…………………………………………………………………….……………………..
42
8-5-1. Pump Installation Sequence.…..………………………………………………………………………………………………...
42
8-5-2. Piping Method………..…….…………………………………………………………………………………………………………...
42
8-5-3. Touch Pad Installation Method…………..……………………………………………………………………………………..
43
8-5-4. Suggested Recipe Setting Value…………….…………………………………………………………………………………
44

TP-70BS (Rev 3.0)
- 1 -
TALON TECH CO. LTD.
TP-70BS pump can be used as the above configuration and has been developed for the semiconductor
system’s automation by operating RS422 communication. Especially, the adoption of servo motor is good
for the high degree of PR dispense. The basic communication between the touch pad and the pump is
RS422 Multi Drop method. By synchronizing with Windows CE Operating System, Touch Pad MMI 2.0
Software operates TP-70BS pump.
Be careful to use the pump by following this manual or Talon Tech’s acceptance. Or, other defects
should be paid even under the warranty period.
※Features & Merits
1. All the PR contacting points are made by Teflon
2. Driving Method:Cylinder & bubble trap technology / Outer type edgeless bellows.
3. Micro bubble control. (No Leak point)
4. Touch pad has the same function of controller & it can control upto16 pumps.
5. Encompass or Normal trigger signal.
System Configurations
1
Touch Pad
Max 16ea
Pump Control
Pump 1
Pump 2
PR Bottle
Wafer
Dispense Nozzle
Suck-Back V/V
AC85~264V
50/60Hz
TPC-7002 Controller
2 Pump Control
TP-70BS