Talon TP-72S User manual

TP-72S (Rev 1.2)
TALON TECH CO. LTD.
HIGH VISCOSITY & HIGH CAPACITY PR PUMP Pump for PR Dispense
TALON TECH CO. LTD.
MODEL : TP-72S

TP-72S (Rev 1.2)
TALON TECH CO. LTD.
1. System Configurations……………………………….…………………………………………………………………………………….
1
2. System Specifications……………………………………………………………………………………………………………………….
2
2-1. Pump [TP-72S]…….…………………………………………………………………………………...………………………………….
2
2-2. Controller [TPC-7202].………..……………………………………………………………………………………………………….
3
2-3. Touch Pad [TTP-7216]………………………………………………………………………………………………………………….
3
3. System In/Exterior Names………….…………………….………………………………………………………………………………..
4
3-1. Pump Exterior Names….…..………………………………………………………………………………….…………………………
4
3-1-1. Pump Name Explanation…………………………………………………………………………………….………………….
4
3-2. Controller Exterior Names…………………………………………………………………………………………………………..…
5
3-2-1. Controller Name Explanation……….………………………………………………………………………………………...
5
3-3. Touch Pad Exterior Names.………………………………………………………………………………………..…………………..
7
3-3-1. Touch Pad Name Explanation………...………………………………………………………..……………………………..
7
3-4. Touch Pad Connection Board Exterior Names..………………………………………………………………………….....
7
3-4-1. Touch Pad Connection Board Name Explanation…………….……………………..……………………………..
7
4. Track/Auxiliary Interface………….………………………………………………………………………………………………………
8
4-1. Track Interface Signal……….………………………………………………………………………………………………………….
8
4-2. Track Interface Wiring……………………………………...………………………………………………………………………….
9
4-3. Cable Pin Assign……………..……………………………………………………………………………………………………………..
10
4-3-1. Pump Cable……………………….……………………………………………………………………………………………………
10
4-3-2. Track Cable………………………………………….………………………………………………………………………………..
11
4-3-3. Touch Pad Cable……………………………………………………………………………………………………………………..
13
4-3-4. COM Cable……………….…………………………………………………………………………………………………………..
13
5. External Cable Length…………………………………………………………………………………………………………………………
14
5-1. Pump Cable..………………………………………………………………………………………………………………………………..
14
5-2. Track Cable…………………………………………………………………………………………………………………………………..
14
5-3. Touch Pad Cable……..…………………………………………………………………………..…………………………………….…
15
5-4. COM Cable…...........…..………………………………………………………………………………………………………………….…
15
5-5. Communication Cable Connection Method…………..………………………….……………………………………….…
16
6. Touch Pad Operation………………………………………………………………………………………………………………………..
17
6-1. Operation………………………………………………………………………………….…………………………………………………
17
6-1-1. Initial Screen…….………………………………………………………………….………………………………………………….
17
6-1-2. Pump Condition Indicate In Use………………….…………………………………………………………………………
17
6-1-3. Select Function…………….…………………………………………...………………………………………………………….
17
6-1-4. Dispense……………………………………………………………………………………………………………………………….
18
CONTENTS

TP-72S (Rev 1.2)
TALON TECH CO. LTD.
6-1-5. Recipe Setting………………………………………………………………………………………………………………………
18
6-1-6. Config Pump………………………………………………………………………………………………………………………...
19
6-1-6-1. ID Setting………………….…………………………………………………………………………………………………...
19
6-1-6-2. Maint Mode, Run Mode, Pump Reset Setting……….……………………………………………………….
19
6-1-7. Calibration…………………………………………………………………………………………………………………………….
19
6-2. Example………………….…………………………………………………………………………………………………………………….
20
6-2-1. Dispense Test….…………………………………………………………………………………………………………………….
20
6-2-2. Recipe Setting………………………………………………………………………………………………………………………
21
6-3. Cycle Purge Method…………………………...…………………………………………………………………………………………
22
6-4. Reset on Pump Error…………………………..………………………………………………………………………………………….
24
6-5. Touch Pad Menu Tree…………………………………………………………………………………………………………………….
25
6-6. Notice……...…………………………………………………………………………………………………………………………………..
25
6-6-1. Dispense Cycle………………………..…..………………………………………………………………………………………..
25
6-6-2. Pump ID Setting……………..………………………………………………………………………………………………………
25
6-6-3. Recipe Setting…………………………………………………………………………………………….………………………...
25
6-7. Notice on Pump Operation.………….……………………………………………………………………………………….………
26
7. Maintenance……………………………………………...………………………………………………………………………………………
27
7-1. Purge Method……………….……………………………………………………………………………………………………………….
27
7-2. Pump Parts Dis/Assembly.…..………..……………………………………………………………………………………………….
28
7-2-1. Pump Cover Dis/Assembly..…..…………………….……..…………………………………………………………………..
28
7-2-2. Driving Shaft Condition Check & Grease up on Ball Screw……...…………………………………………..
28
7-3. Suck-Back Setting………….…………………………………………………………………………………………………………….
29
8. Recommended Spares/Mechanical Dimensions…………..………………………………………………………………..
31
8-1. TP-72S Spare Parts…………………………..…………………………………………………………………………………..………..
31
8-2. Pump Dimensions………………….………………………………………………………………………………………………………
32
8-2-1. Front View…………………….…………………………………………………………………………….………………………...
32
8-2-2. Side View………...………….………………………………………………………………………………………………………...
32
8-3. Controller Dimensions……..………………………………………………………………………………….………………………...
33
8-3-1. Front View………………………….……………………………………………………………………….………………………...
33
8-3-2. Rear View………………….…...……..…………………………………………………………………………………………………
33
8-3-3. Side View………………….……………………..…………………………….……………………………………………………...
33
8-4. Touch Pad Dimensions…………………………..…………………………….……………………………………………………...
34
8-4-1. Front View……………………...……………………………………………………………………………………………………..
34
8-4-2. Rear View…………………...…………………………………………………………………………………………………………
34
8-4-3. Side View………………..……………………..……………………………………………………………….……………………..
34
8-5. Touch Pad Connection Board Dimensions……………………………….………………………….……………………..
35
8-5-1.Top View………………………………………………………………………………………………………………………………...
35

TP-72S (Rev 1.2)
TALON TECH CO. LTD.
8-6. Installation Method……………………………..………………………………………………………………….……………………..
36
8-6-1. Pump Installation Sequence.…..……………………………………………………………………………………………...
36
8-6-2. Piping Method………..…….……………………………………………………………………………………………………...
36
8-6-3. Touch Pad Installation Method…………..…………………………………………………………………………………..
37
8-6-4. Touch Pad Connection Board Bracket Installation Method...…………………………...……………………
38
8-6-5. Suggested Recipe Setting Value(1,800CP)…………….………………………………………………………………
39
8-6-6. Suggested Recipe Setting Value(4,000CP)……………………………………………………………………………
40

TP-72S (Rev 1.2)
- 1 -
TALON TECH CO. LTD.
TP-72S pump can be used as the above configuration and has been developed for the semiconductor
system’s automation by operating RS422 communication. Especially, the adoption of servo motor is good
for the high degree of PR dispense. The basic communication between the touch pad and the pump is
RS422 Multi Drop method. By synchronizing with Windows CE Operating System, Touch Pad MMI 2.0
Software operates TP-70BS pump.
Be careful to use the pump by following this manual or Talon Tech’s acceptance. Or, other defects should
be paid even under the warranty period.
※Features & Merits
1. All the PR contacting points are made by Teflon.
2. Driving Method : Cylinder & bubble trap technology / Outer type edgeless bellows.
3. Micro bubble control. (No Leak point)
4. Touch pad has the same function of controller & it can control upto16 pumps.
5. Encompass or Normal trigger signal.
System Configurations
1
Touch Pad
Max 16ea
Pump Control
Pump 1
Pump 2
PR Bottle
Wafer
Dispense Nozzle
Suck-Back V/V
AC85~264V
50/60Hz
TPC-7202 Controller
2 Pump Control
TP-72S

TP-72S (Rev 1.2)
- 2 -
TALON TECH CO. LTD.
2-1 Pump [ TP-72S ]
ITEM
SPEC
REMARKS
Dispense Volume Range
1.0cc ~ 20.0 cc
Dispense/ Reload Rate
0.3 cc/sec ~ 1.2 cc/sec
Dispense Volume Resolution
0.01 cc
Dispense Repeatability
≤±0.04 (Polyimide PIX/PIQ)
Viscosity
200 ~ 20,000cp
Drive System
DC Servo Motor
Pump Type
Outer Type Edgeless Bellows
Motor Power
DC 24V (current consumption : 1.4A)
Air
0.1 ~ 0.3Mpa
Resist In/Out/Vent tube
⅜” Inch Teflon
Ambient Temperature
5 ∼40 ℃
Weight
5.5kg
Dimension
W : 87mm, D : 168mm, H : 286mm
System Specifications
2

TP-72S (Rev 1.2)
- 3 -
TALON TECH CO. LTD.
2-2 Controller [ TPC-7202 ]
ITEM
SPEC
REMARKS
Electric Power
85VAC ~ 264VAC, 50~60Hz
Controller Power
DC 24V (current consumption Max 1A)
Panel Use
Drive Pump No.
2 Pumps
Pump Operation Mode
Fixed Mode
Main CPU
80c296 (16bit Processor)
Input Signal
1. Pump Driving Signal From Track M/C- Pump
Start Signal.
Output Signal
1. Home Signal & Pump Operation Completion
Signal To Track M/C.
2. Air V/V controlled Sol V/V Signal.
3. Alarm Signal on Pump Error.
4. Outside Communication (RS 232,422,485).
Weight
3.30kg
Dimension
W : 250mm, D : 261mm, H : 94mm
2-3 Touch Pad [ TTP-7216 ]
ITEM
SPEC
REMARKS
Main CPU
32Bit ARM920T
Ram
64Mb (OS:32Mb/App:32Mb)
Flash
NAND Flash 64Mb (OS:32Mb/App:32Mb)
LCD Size
4.3 Inch TFT Wide (480*272)
RTC Function Built-in
Exchangeable Coin Battery
Max. Connecting Pump No.
16 Pumps
Communication
RS422
Touch Pad Power
DC12~24V, current consumption: 5W (400~700mA)
Ambient Temperature
-10 ~ 55C
Weight
0.64kg
Dimension
W : 140mm, D : 44mm, H : 88mm

TP-72S (Rev 1.2)
- 4 -
TALON TECH CO. LTD.
3-1 Pump Exterior Names
3-1-1 Pump Name Explanation
①PR Inlet
- Chemical Supply. (⅜Inch Teflon)
②PR Outlet
- Chemical Dispense. (⅜Inch Teflon)
③Pump CON
- Pump to Controller. Connector for Pump Operation. (D-SUB 15P Female)
System In/Exterior Names
3
②PR Outlet ⅜”
①PR Inlet ⅜”
③Pump CON

TP-72S (Rev 1.2)
- 5 -
TALON TECH CO. LTD.
3-2 Controller Exterior Names
3-2-1 Controller Name Explanation
①CH-1 In Sol S/W
- After CH-1 Pump Dispense, LED Lamp Switch for Reload Operation Condition.
②CH-1 Out Sol S/W
- After CH-1 Manual Purge, Suck-Back Valve On-Switch.
③CH-2 In Sol S/W
- After CH-2 Pump Dispense, LED Lamp Switch for Reload Operation Condition.
④CH-2 Out Sol S/W
- CH-2 Manual Purge시Suck-Back Valve On/Off Switch.
⑤CH-1 Power S/W
- CH-1 Power On / Off Switch
⑥CH-2 Power S/W
- CH-2 Power On / Off Switch.
⑦Controller Main S/W
- Main Power Switch for controller.
⑧Main AC-IN
- AC100~220V (50 / 60Hz) Power Connector.
⑨CH-1 Pump, Track I/O, COM
[TPC-7202 Front View]
[TPC-7202 Rear View]
①
②
③
④
⑤
⑥
⑦
⑧
⑨
⑩
⑪

TP-72S (Rev 1.2)
- 6 -
TALON TECH CO. LTD.
- CH-1 Pump Connector. (D-SUB 15P Female)
- CH-1 Track I/O Connector. (D-SUB 15P Female)
- CH-1 Touch Pad RS-422 Communication Connector. (D-SUB 9P Female)
⑩CH-2 Pump, Track I/O, COM
- CH-2 Pump Connector. (D-SUB 15P Female)
- CH-2 Track I/O Connector. (D-SUB 15P Female)
- CH-2 Touch Pad RS-422 Communication Connector. (D-SUB 9P Female)
⑪DC 24V
- Touch Pad Power Connector.
3-3 Touch Pad Exterior Names
3-3-1 Touch Pad Name Explanation
①Touch Panel
- Touching area
②Power Source
- Touch Pad Power DC12~24V Connector.
③Com Port
- Touch Pad RS422 Communication Connector. (D-SUB 9P Male)
④Com Port
- Touch Pad RS-422 Communication Connector.
①Touch Panel
②Power Source
(DC12~24V)
③Com Port (RS422)
④Com Port (RS422)

TP-72S (Rev 1.2)
- 7 -
TALON TECH CO. LTD.
3-4 Touch Pad Connection Board Exterior Names
★Just in case of over 3 pumps, Touch Pad Connection Board should be used.
3-4-1 Touch Pad Connection Board Name Explanation
①Touch Pad
- Touch Pad Communication Connector. (Molex 6P)
②Main COM
③Switching I/O
④RS422 Communication
- Pump1 ~ Pump8 COM Cable Connection Connector. (Molex 4P)
④RS422 comm.
(J1 ~ J8)
①Touch Pad
②Not Use
③Not Use

TP-72S (Rev 1.2)
- 8 -
TALON TECH CO. LTD.
4-1 Track Interface Signal
Recipe Select Trigger
“0”Trigger Off
“1”Trigger On
Recipe
Select
Start1
[1]
Start2
[2]
Start3
[3]
Remark
1
1
0
0
2
0
1
0
3
1
1
0
4
0
0
1
Cycle Recipe
5
1
0
1
6
0
1
1
7
1
1
1
It is Timing Chart. On Ready condition, when Start Signal becomes active, each signal is same as the
chart. When Stop Alarm occurs, all stop even during dispensing. But, the warning alarm does dispense.
The alarm becomes clear by reset after pump clear.
Track / Auxiliary Interface
4

TP-72S (Rev 1.2)
- 9 -
TALON TECH CO. LTD.
4-2 Track Interface Wiring
<Stop / Warning Active High>
<End / Home Active Low>
<Start1, 2, 3 Active Low>
Controller Side
Track Side

TP-72S (Rev 1.2)
- 10 -
TALON TECH CO. LTD.
4-3 Cable Pin Assign
4-3-1 Pump Cable
Pin
Number
Standard Type(D-SUB 15P)
Controller
Pump
1
+5V
1 : 1
2
PUMP_CW
1 : 1
3
PUMP_CCW
1 : 1
4
+24V
1 : 1
5
E_HOME_SIGNAL
1 : 1
6
E_END_SIGNAL
1 : 1
7
E_MOTOR_ALARM
1 : 1
8
E_MOTOR_INPOSITION
1 : 1
9
GND
1 : 1
10
GND
1 : 1
11
Not Use
1 : 1
12
EX_IN_SOL V/V +24V
1 : 1
13
E_SUCK_BACK_SOL_V/V +24V
Suck-Back Output ( + )
14
EX_IN_SOL V/V -24V
1 : 1
15
E_SUCK_BACK_SOL_V/V -24V
Suck-Back Output ( - )

TP-72S (Rev 1.2)
- 11 -
TALON TECH CO. LTD.
4-3-2 Track Cable
Pin
Number
Pump Cable(D-SUB 15P)
Controller
Pump
1
+5V
1 : 1
2
PUMP_CW
1 : 1
3
PUMP_CCW
1 : 1
4
+24V
1 : 1
5
E_HOME_SIGNAL
1 : 1
6
E_END_SIGNAL
1 : 1
7
E_MOTOR_ALARM
1 : 1
8
E_MOTOR_INPOSITION
1 : 1
9
GND
1 : 1
10
GND
1 : 1
11
Not Use
1 : 1
12
EX_IN_SOL V/V +24V
Sol V/V Connector share
13
E_SUCK_BACK_SOL_V/V +24V
1 : 1
14
EX_IN_SOL V/V -24V
Sol V/V Connector share
15
E_SUCK_BACK_SOL_V/V -24V
1 : 1
Pin
Number
Track Cable(D-SUB 15P)
N2 Type
Connecting Way
Controller
Track (ACT-12)
Track (ACT-12)
1
N.C
Not Use
Alarm is only for Stop. After
disconnecting EXT High 5,
link NO/COM with EXT 2P
cable.
Dispense Trigger links Suck-
Back V/V Cable from the
system after checking (+, -).
2
COM
EXT High 5 (link after disconnect)
3
N.O
EXT High 5 (link after disconnect)
4
START 3
Not Use
5
START 1
Dispense Trigger ( - ) 2P
6
START 2
Not Use
7
IN SOL
Not Use
8
ALARM STOP
Not Use
9
ALARM WARNING
Not Use
10
HOME
Not Use
11
END
Not Use
12
OUT SOL
Not Use
13
+24V
Not Use
14
+24V
Dispense Trigger (+24) 2P
15
MC GND
Not Use

TP-72S (Rev 1.2)
- 12 -
TALON TECH CO. LTD.
Pin
Number
Encompass Type(Hirose 20P)
Controller
Track (ACT-12)
Connecting Way
1
Not Use
X
Pump I/O Board
↓
Pump I/O CONN Board
↓
I/F Board
↓
CN3, 4, 6, 7
↓
J164~167(Track1~4)
(Refer to Electric Diagram)
2
Not Use
X
3
Not Use
X
4
Not Use
X
5
START 1
18
6
START 2
17
7
OUT SOL V/V
6 => Jump to END 7
8
ALARM STOP
5
9
ALARM WARNING
4
10
HOME
3
11
END
7 => Jump from 6
12
IN SOL V/V
8
13
+5VA
2
14
MC POWER
15
GND
20

TP-72S (Rev 1.2)
- 13 -
TALON TECH CO. LTD.
4-3-3 Touch Pad Cable
Pin
Number
Touch Pad Cable(D-SUB 9P)
Signal Name
I/O
Description
1
Not Use
Not Use
2
Not Use
Not Use
3
Not Use
Not Use
4
TX+
Output
RS422
5
TX-
Output
6
RX+
Input
7
RX-
Input
8
Not Use
Not Use
9
Not Use
Not Use
1
+VCC
Input
Touch Pad Power(12V~24V)
2
Not Use
Not Use
3
GND
Input
Touch Pad Power Pin Assign [3P]
Pin NO.
Signal Name
I/O
Description
1
MC +24V
Input
Touch Pad Supply Power
2
Not Use
Not Use
3
MC_GND
Input
Touch Pad Supply Power
4-3-4 COM Cable
Touch Pad RS422 Pin Assign [Male Type D-SUB 9P]
Pin NO.
Signal Name
I/O
Description
1
Not Use
Not Use
2
Not Use
Not Use
3
Not Use
Not Use
4
RX+
Input
RS422 Receive + (Pump side)
5
RX-
Input
RS422 Receive - (Pump side)
6
TX+
Output
RS422 Send + (Pump side)
7
TX-
Output
RS422 Send –(Pump side)
8
Not Use
Not Use
9
Not Use
Not Use

TP-72S (Rev 1.2)
- 14 -
TALON TECH CO. LTD.
5-1 Pump Cable
5-2 Track Cable
External Cable Length
5
External Cable Length
5
ACT Type
Standard Type
Mark Type
ACT Encompass Type

TP-72S (Rev 1.2)
- 15 -
TALON TECH CO. LTD.
5-3 Touch Pad Cable
5-4 COM Cable
COM Cable in case of over 3 pumps in use
Touch Pad COM Cable in case of over 3 pumps in use
Pump 2ea Standard Type
Power cable in case of over 3 pumps in use

TP-72S (Rev 1.2)
- 16 -
TALON TECH CO. LTD.
5-5 Communication Cable Connection Method
In case of 2 pumps in use
In case of over 3 pumps in use