Talon TP-60BA User manual

TP-60BA (Rev 2.2)
TALON TECH CO. LTD.
HIGH VISCOSITY PR PUMP Pump & Controller –Built-in type
TALON TECH CO. LTD.
MODEL : TP-60BA

TP-60BA (Rev 2.2)
TALON TECH CO. LTD.
1. System Configurations……………………………………………………….……………..……………………………………………….
1
2. System Specifications…………………………………………………………………………………………………………..…………….
2
2-1. Pump [TP-60BA]……..……………………………………………………………………………………………………...……………...
2
2-2. Touch Pad [TTP-6008]……………………………………………………...…………………………………………………………….
3
3. System In/Exterior Names.……………………….………………………………………………………………………………………..
4
3-1. Pump In/Exterior Names.…………………………………………………...…………………………………….……………………
4
3-1-1. Pump Name Explanation..……….……….……………………………………………………………….………………..….
4
3-2. Touch Pad Exterior Names……………..……….……………………………………………………………………………..……..
5
3-2-1. Touch Pad Name Explanation………………………………………………………………………………………..……...
5
4. Wiring & Signal Interface……………………………………………………………………………………………………..…………..
6
4-1. Track Interface Signal……………………………………………………………………………………………………..……………..
6
4-2. Track Timing Chart…………………………………………………………………………………………………..……………………
7
4-3. Dispense Trigger Select………………………………………………………………………………………………………...……….
7
4-4. CON1 Pin Assign [Track Cable]………………….…………………………………………………………………………………..
8
4-5. CON2 Pin Assign [Start Sol Cable]…………………………………………………………………………………..…………..
9
4-6. 422 In/Out Pin Assign [Communication Cable]………………………………………………………………..…………
9
5. External Cable Length………….…………………………………………………………………………………………………..………..
10
5-1. CON1 Cable………………..………………………………………………………………….……………………………………..………
10
5-2. CON2 Cable……….………………………………………………………………………….………………………………………..…….
10
5-3. 422 In Cable………………………………...…………………………………………………………………………………………..……
10
5-4. 422 Out Cable……………………….……………………………………….....………………………………………………………….
10
6. Touch Pad Operation………………………………………………………………..………………………………………………………..
11
6-1. Operation……………………………………………………………………………..………….……………………………………………
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6-1-1. Initial Screen…………………………………….……………………………..……….…………………………………………….
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6-1-2. Pump Condition Indicate In Use..…..………………………………..……………………………………………………
11
6-1-3. Select Function………….……………………………………………...………..………………………………………………….
11
6-1-4. Dispense………………………………………………………………………………..……………………………………………….
12
6-1-5. Recipe……………………………………………………………………………………..………………………………………………
12
6-1-6. Configuration of Pump…………………………………………………………..……………………………………………...
13
6-1-7. ID Setting…………………………………………………………………………………..…………………………………………...
13
6-1-8. Maint Mode, Run Mode, Pump Reset Setting…………………………..………………………………………….
15
6-1-9. Calibration……………………………………………………………………………………..……………………………………….
15
6-1-10. Counter………………………………………………………………………………………..……………………………………..
16
CONTENTS

TP-60BA (Rev 2.2)
TALON TECH CO. LTD.
6-2. Example….………………………………………………………………………..…………………………………………………………….
18
6-2-1. Dispense……………………………………………………………………..………………………………………………………….
18
6-2-2. Recipe Setting…....………………………………………………………..…………………………………………………………
19
6-2-3. ID Setting……………………………………………………………………..………………………………………………………...
20
6-2-4. Name Setting………………………………………………………………..……………………………………………………….
21
6-3. Reset on Pump Error………..………….………………………………………..……………………………………………………...
21
6-4. Log Data…………………………………………………………………………………..……………………………………………………
23
6-4-1. Log Data Analysis ……………………………………………………………..…….…………………………………………….
24
6-5. Touch Pad Menu Tree………………………………………………………………..………………………………………………….
25
6-6. Notice…….……………………………………………………………………………………..……………………………………………….
25
6-6-1. Dispense Cycle………………………………………………………………………………………………………………………..
25
6-6-2. Pump ID Setting……………………………………………………………………………………………………………………..
25
6-6-3. Recipe Setting………………………………………………………………………….…..…………………………………………
25
6-6. Notice on Pump Operation…...……………………………………………………………………………………………………...
26
7. Maintenance………………………………………….……………………………………………………..……………………………………..
27
7-1. Pump Parts Dis/Assembly.………..………………………………………………………….…..…………………………………...
27
7-1-1. Pump Cover Dis/Assembly..……..………………………………………………………..…………………………………..
27
7-1-2. Driving Shaft Condition Check & Grease up on Ball Screw.…...………..………………………………….
27
7-2. Suck-Back Setting………………………………………………………………………………………..………………………………..
28
8. Recommended Spares/Mechanical Dimensions……………………………………………..………………………………
30
8-1. TP-60BA Spare Parts……………………………………………………………………………….……..……………………………..
30
8-2. Pump Dimensions…………………………………………………………………………………………..…………………………….
31
8-2-1. Front View…………………………………………………………………………………………………..…………………….……
31
8-2-2. Side View……………………………………………………………………………………………………..…………………………
31
8-3. Touch Pad Dimensions………………………………………………………………………………………..………………………..
32
8-3-1. Front View……………………………………………………………………………………………………..……………………….
32
8-3-2. Rear View………………………………………………………………………………………………………..………………………
32
8-3-3. Side View…………………………………………………………………………………………………………..……………………
32
8-4. Installation Method…………………………………………………………………………………………………..…………………..
33
8-4-1. Pump Installation Sequence..…..…………………………………………………………………………..………………..
33
8-4-2. Piping Method…………….....………….…………………………………………………………………………..………………
33
8-4-3. Touch Pad Installation Method…..…..………………………………………………………………………..…………...
34
8-4-4. Suggested Recipe Setting Value…….…………………………………………………………………………..…………
35

TP-60BA (Rev 2.2)
- 1 -
TALON TECH CO. LTD.
TP-60BA pump can be used as the above configuration and has been developed for the semiconductor
system’s automation by operating RS422 communication. Especially, the adoption of servo motor is good
for the high degree of PR dispense. The basic communication between the touch pad and the pump is
RS422 Multi Drop method. By synchronizing with Windows CE Operating System, Touch Pad MMI Software
operates TP-60BA pump.
Be careful to use the pump by following this manual or Talon Tech’s acceptance. Or, other defects should
be paid even under the warranty period.
※Features & Merits
1. All the PR contacting points are made by Teflon.
2. It’s the DC serve motor pump, which is suitable for a constant delivery pump.
3. Driving Method : Outer type Edgeless Bellows, No ripple & No shaking.
4. Touch pad has the same function of controller & It can control upto8 pumps.
5. Save Maintenance Time : Purge function, optimized buffer.
6. Normal trigger signal.
System Configurations
1
Touch Panel
Max 8ea
Pump Control
TP-60BA Pump
PR Bottle
Wafer
Dispense Nozzle
Suck-Back V/V
Filter

TP-60BA (Rev 2.2)
- 2 -
TALON TECH CO. LTD.
2-1 Pump [ TP-60BA ]
ITEM
SPEC
REMARKS
Dispense Volume Range
1.0cc ~ 10.0cc
Dispense / Reload Rate
0.3 cc/sec ~ 1.2cc/sec
Dispense Volume Resolution
0.05 cc
Dispense Repeatability
≤±0.05 (0.8cp, 23℃)
Viscosity
50cp ~ 10,000cp
Step Angle Degree
0.3deg / step
Drive System
DC Servo Motor
Pump Type
Outer Type Edgeless Bellows
Control System
Control Board Power : DC 24V (current consumption 2A)
Resist In/Out/Vent
⅜Inch Teflon
Ambient Temperature
5 ∼40 ℃
Weight
5.90kg
Pump Dimension
W : 72mm, D : 339mm, H : 296mm
System Specifications
2

TP-60BA (Rev 2.2)
- 3 -
TALON TECH CO. LTD.
2-2 Touch Pad [ TTP-6008 ]
ITEM
SPEC
REMARKS
Main CPU
32Bit ARM920T
Ram
64Mb (OS:32Mb/App:32Mb)
Flash
NAND Flash 64Mb (OS:32Mb/App:32Mb)
LCD Size
4.3 Inch TFT Wide (480*272)
RTC Function Built-in
Exchangeable Coin Battery
Max. Connecting Pump No.
8 Pumps
Communication
RS422
Touch Pad Power
DC12~24V, current consumption: 5W (400~700mA)
Ambient Temperature
-10 ~ 55C
Weight
0.64kg
Dimension
W : 140mm, D : 44mm, H : 88mm

TP-60BA (Rev 2.2)
- 4 -
TALON TECH CO. LTD.
3-1 Pump In/Exterior Names
3-1-1 Pump Name Explanation
①PR In
- Chemical supply. (⅜Inch Teflon)
②PR Out
- Chemical Dispense. (⅜Inch Teflon)
③PR Drain
- Chemical Drain. (⅜Inch Teflon)
④Toggle Valve
- One Touch Toggle Valve for chemical drain.
⑤Buffer Tank
- Bubble removal and buffering function of about 30cc PR.
⑥Pump Connector
- CON1(Track) => Connector for pump operation. (Round Panel Mount 12P Female)
- CON2(Motor) => Connector for pump operation. (Round Panel Mount 5P Female)
- 422IN => RS422 Connector for communication among pumps. (Round Panel Mount 6P Female)
- 422OUT => RS422 Connector for communication among pumps.
(Round Panel Mount 6P male)
System In/Exterior Names
3
②PR Out ⅜”
①PR In ⅜”
④Toggle Valve
⑤Buffer Tank
⑥Pump Connector
③PR Drain ⅜”

TP-60BA (Rev 2.2)
- 5 -
TALON TECH CO. LTD.
3-2 Touch Pad Exterior Names
3-2-1 Touch Pad Name Explanation
①Touch Panel
- Touching area
②Power Source
- Touch Pad Power DC12~24V Connector.
③Com Port (Not Use)
- No Use. (D-SUB 9P Male)
④Com Port
- Touch Pad RS-422 Communication Connector.
①Touch Panel
②Power Source
(DC12~24V)
③Com Port (RS422)
④Com Port (RS422)

TP-60BA (Rev 2.2)
- 6 -
TALON TECH CO. LTD.
4-1 Track Interface Signal
Wiring & Signal Interface
4
[Input Signal]
[Output Signal]

TP-60BA (Rev 2.2)
- 7 -
TALON TECH CO. LTD.
4-2 Track Timing Chart
4-3 Dispense Trigger Select
“0”Trigger Off
“1”Trigger On
Recipe
Select
Start1
[1]
Start2
[2]
Start3
[3]
Remark
1
1
0
0
2
0
1
0
3
1
1
0
4
Not supported
Cycle Recipe
5
1
0
1
6
0
1
1
7
1
1
1

TP-60BA (Rev 2.2)
- 8 -
TALON TECH CO. LTD.
4-4 CON1 Pin Assign [Track Cable]
Standard Type Pin Assign
Pin NO.
Signal Name
I/O
Description
A
+24V
Input
Pump Main Power Source
B
GND
Input
C
EX_+5V
Input
Home/End signal Power
D
Home
Output
Pump Ready Signal
E
End
Output
Pump End Signal
F
N.C EXH
Output
Alarm+(Option)
G
Stop Alarm
Output
Output
H
Warning Alarm
Output
Output
J
EX_GND
Input
Home/End Signal GND
K
EX_+12V or 24V
Output
Suck-back sol valve Signal
L
Suck Back -
Output
M
COM EXH
Output
Alarm-(Option)
ACT/Mark Type Pin Assign
Pin NO.
Signal Name
I/O
Description
A
+24V
Input
Pump Main Power Source
B
GND
Input
C
EX_+12V
Input
+12V/ACT
D
Not Use
Not Use
E
Not Use
Not Use
F
N.O EXT
Output
Alarm EXH+
G
Not Use
Not Use
H
Not Use
Not Use
J
EX_GND
Input
G12/ACT
K
Suck Back +
Output
Suck-back sol valve Signal
L
Suck Back -
Output
M
COM EXH
Output
Alarm EXH-

TP-60BA (Rev 2.2)
- 9 -
TALON TECH CO. LTD.
4-5 CON2 Pin Assign [Dispense Trigger Cable]
Standard / ACT / Mark Type Pin Assign
Pin NO.
Signal Name
I/O
Description
A
12V~24V
Input
Recipe Select(+)
B
Track Start1
Input
Recipe Select(-)
C
Track Start2
Input
D
Track Start3
Input
E
Not Use
Not Use
4-6 422 In/Out Pin Assign [Communication Cable]
Standard / ACT / Mark Type Pin Assign
Pin NO.
Signal Name
I/O
Description
A
+24V
Input
RS422 Communication Cable
B
TX+
Output
C
TX-
Output
D
RX+
Input
E
RX-
Input
F
GND
Input

TP-60BA (Rev 2.2)
- 10 -
TALON TECH CO. LTD.
5-1 CON1 Cable
5-2 CON2 Cable
5-3 422 In Cable
5-4 422 Out Cable
External Cable Length
5
Standard
Standard
Mark Type
Mark Type

TP-60BA (Rev 2.2)
- 11 -
TALON TECH CO. LTD.
6-1 Operation
6-1-1 Initial Screen
The pumps’ID, which are cable-connected to touch pad, are auto-searched every 5 sec. On every
lower menu, if there isn’t any input for 1 min, the initial screen is back. The pump, which is not
searched, cannot be chosen.
6-1-2 Pump Condition Indicate In Use
Touch Pad Operation
6
Ready
Dispense
Pump Alarm
Pump Count Over
Not Connect

TP-60BA (Rev 2.2)
- 12 -
TALON TECH CO. LTD.
6-1-3 Select Function
When ID is chosen, the above screen is shown.
ESC
-Go to the previous menu.
Dispense
-Dispense by touching the pad.
Recipe
-Run Recipe & Dispense Recipe Setting.
Config
-Pump Mode, Reset, Error & ID Setting.
Calibration
-Each recipe’s calibration setting.
Counter
-Dispense # & Setting
6-1-4 Dispense
On executing Start Run, Run Recipe runs one time dispense. In case of Start Cycle, Cycle Recipe (4th
Recipe) works as many as set counts.

TP-60BA (Rev 2.2)
- 13 -
TALON TECH CO. LTD.
6-1-5 Recipe Setting
For Recipe Setting, touch # under No. and input recipe # that you want to go in and touch ‘Ent’. At
this time, Recipe Data is automatically shown on the screen. And you can input the data that you
want and touch ‘set’button for setting. ‘Count’is only for 4th recipe(cycle recipe). Total recipes are
1~7. Recipes are automatically chosen by each trigger signal.
However, 4th recipe is for cycle recipe and which works only by Start Cycle of Dispense on touch pad.
Run Recipe No. is Recipe No. used by Start Run under Dispense menu.

TP-60BA (Rev 2.2)
- 14 -
TALON TECH CO. LTD.
6-1-6 Configuration of Pump
On Config Pump, the password needs for the important items’set.
The password is set as ‘0901’.
Vital
-Check pump’s response and in case of response, ‘vital’
window activates and disappears right away. At the left window,
the response data is shown.
Error Status
-Shown Error Code Data.
Name
-Input the pump name of Main Menu.
Set ID
-Change Pump ID.
Maint Mode
-Change Pump Mode to Maint.
Run Mode
-Change Pump Mode to Run.
Purge Mode
-Change Pump Mode to Purge Mode
Pump Reset
-Reset Pump. It means Pump Restart, not Data Reset.
Error Mark
-Not Use
6-1-7 ID Setting

TP-60BA (Rev 2.2)
- 15 -
TALON TECH CO. LTD.
On Config Pump screen, when you touch ‘Set ID’, Password input screen shows and input ‘0901’and
touch Ent. And then, ‘Check ID’‘Set ID’screen shows and disappears right away so the initial starts.
If there is no response from the pump, the window keeps showing. If there is already the same
pump ID, the window –‘Conflict’shows and push ‘OK’and reset.
6-1-8 Maint Mode, Run Mode, Pump Reset Setting
Main Mode is to show the message of pump operation on the text window. Run Mode only shows
as data code. The setting method is to touch Maint Mode, Run Mode button and input password
and touch ‘Ent’. In case of no response from pump, message of mode keeps showing. Pump reset
works right after input password. It goes to the initial screen same as power off and on.

TP-60BA (Rev 2.2)
- 16 -
TALON TECH CO. LTD.
6-1-9 Calibration
Calibration –Per each Recipe, it is possible to set the calibration value. If there is the differences
between the real value and the setting value, set the calibration value higher or lower % at the
standard- 100.
6-1-10 Counter
Counter means to show Pump’s accumulated dispense #.
In order to initialize the count, touch ‘zero’button -> ‘Set’button.
Limit –In order to check out Pump Maint, set “Dispense Count Limit”.
Total –Pump’s Total Dispense #. Total # goes up every dispense.
In case '0' is set, no more Counter Limit function.
Touch # of Limit and input Counter.

TP-60BA (Rev 2.2)
- 17 -
TALON TECH CO. LTD.
After clicking Set, the window goes to Password window. The setting value is adopted
after inputting “2580”. Cancel button means no application even Limit change & Count Zero click.
When dispense # goes over Limit Setting value, “Count Over”shows on Main Menu and also
shows on Touch pad. But, when the trigger signal occurs, pump dispenses normally.