Talon TP-50BS User manual

TP-50BS (Rev 1.0)
TALON TECH CO. LTD.
Pump for PR Dispense High Viscosity Pump
TALON TECH CO. LTD.
MODEL : TP-50BS

TP-50BS (Rev 1.0)
TALON TECH CO. LTD.
1. System Configurations……………………………….………………………………………………………………………………………….
1
2. System Specifications…………………………………………………………………………………………………………………………….
2
2-1. Pump [TP-50BS]…….………………………………………………………………………………………………………………………….
2
2-2. Controller [TPC-5002].………..…………………………………………………………………………………………………………….
3
2-3. Touch Pad [TTP-5016]……………………………………………………………………………………………………………………….
3
3. System In/Exterior Names…….………………………….…………………………………………………………………………………..
4
3-1. Pump Exterior Names…………………………………………………………………………………………….…………………………
4
3-1-1. Pump Name Explanation……………………………………………………………………………………….………………….
4
3-2. Controller Exterior Names....…………………………………………………………………………………………………………..…
5
3-2-1. Controller Name Explanation..……..…………………………………………………………………………………………...
5
3-3. Touch Pad Exterior Names..……..………………………………………………………………………………..……………………..
7
3-3-1. Touch Pad Name Explanation.……..…………………………………………………………..………………………………..
7
4. Track/Auxiliary Interface………….……………………………………………………………………………………………………………
8
4-1. Track Interface Signal……….……………………………………………………………………………………………………………….
8
4-2. Track Interface Wiring……………………………………...……………………………………………………………………………….
9
4-3. Cable Pin Assign……………..………………………………………………………………………………………………………………..
10
5. External Cable Length……………………………………………………………………………………………………………………………
12
5-1. Pump Cable..……………………………………………………………………………………………………………………………………..
12
5-2. Track Cable………………………………………………………………………………………………………………………………………..
12
5-3. Touch Pad Cable……..………………………………………………………………………….………………………………………….…
13
6. Touch Pad Operation……………………………………………………………………………………………………………………………..
14
6-1. Operation……………………………………………………………………………………….…………………………………………………
14
6-1-1. Initial Screen ………………………………………………………………………….………………………………………………….
14
6-1-2. Pump Condition Indicate In Use..…..…………………………………………………………………………………………
14
6-1-3. Select Function…….…………………………………………………...……………………………………………………………….
14
6-1-4. Dispense…………………………………………………………………………………………………………………………………….
15
6-1-5. Recipe Setting……………………………………………………………………………………………………………………………
15
6-1-6. Configuration of Pump……………………………………………………………………………………………………………...
16
6-1-6-1. ID Setting………………….………………………………………………………………………………………………………...
16
6-1-6-2. Maint Mode, Run Mode, Pump Reset Setting……….………………………………………………………….
16
6-1-7. Calibration………………………………………………………………………………………………………………………………….
16
6-2. Example..……..…………………………………………………………………………………………………………………………………….
17
6-2-1. Dispense Test….………………………………………………………………………………………………………………………….
17
CONTENTS

TP-50BS (Rev 1.0)
TALON TECH CO. LTD.
6-2-2. Recipe Setting……………………………………………………………………………………………………………………………
18
6-3. Cycle Purge Method…………………………...……………………………………………………………………………………………
19
6-4. Reset on Pump Error……..………….………..…………………………………………………………………………………………….
21
6-5. Touch Pad Menu Tree……………………………………………………………………………………………………………………….
22
6-6. Notice………………………………………………………………………………………………………………………………………………..
22
6-6-1. Dispense Cycle………………………..…..……………………………………………………………………………………………..
22
6-6-2. Pump ID Setting……………..…………………………………………………………………………………………………………
22
6-6-3. Recipe Setting………………………………………………………………………………………………….………………………...
22
6-7. Notice on Pump Operation.………….………………………………………………………………………………………….………
23
7. Maintenance……………………………………………...……………………………………………………………………………………………
24
7-1. Manual Purge Method……….…………………………………………………………………………………………………………….
24
7-2. Suck-Back Setting………….………………………………………………………………………………………………………………….
25
8. Recommended Spares/Mechanical Dimensions…………..……………………………………………………………………..
27
8-1. TP-50BS Spare Parts…………………………..……………………………………………………………………………………………..
27
8-2. Pump Dimensions………………….…………………………………………………………………………………………………………
28
8-2-1. Front/Rear View……………………………………………………………………………………………….………………………...
28
8-2-2. Side View………...………….……………………………………………………………………………………………………………...
28
8-3. Controller Dimensions……..…………………………………………………………………………………….………………………...
29
8-3-1. Front View………………………….…………………………………………………………………………….………………………...
29
8-3-2. Rear View………………….…...……..……………………………………………………………………………………………………
29
8-3-3. Side View………………….……………………..………………………………….……………………………………………………...
29
8-4. Touch Pad Dimensions…………………………..………………………………….……………………………………………………...
30
8-4-1. Front View……………………...…………………………………………………………………………………………………………..
30
8-4-2. Rear View…………………...………………………………………………………………………………………………………………
30
8-4-3. Side View………………..……………………..…………………………………………………………………….……………………..
30
8-5. Installation Method……………………………..…………………………………………………………………….……………………..
31
8-5-1. Pump Installation Sequence.……..……………………………………………………………………………………………...
31
8-5-2. Piping Method………..…….…………………………………………………………………………………………………………...
31
8-5-3. Touch Pad Installation Method…………..……………………………………………………………………………………..
32
8-5-4. Suggested Recipe Setting Value………….……………………………………………………………………………………
33

TP-50BS (Rev 1.0)
- 1 -
TALON TECH CO. LTD.
TP-50BS pump can be used as the above configuration and has been developed for the semiconductor
system’s automation by operating RS422 communication. Especially, the adoption of servo motor is good
for the high degree of PR dispense. The basic communication between the touch pad and the pump is
RS422 Multi Drop method. By synchronizing with Windows CE Operating System, Touch Pad MMI 2.0
Software operates TP-50BS pump.
Be careful to use the pump by following this manual or Talon Tech’s acceptance. Or, other defects
should be paid even under the warranty period.
※Features & Merits
1. All the PR contacting points are made by Teflon.
2. Driving Method : Diaphragm & bubble trap technology.
3. Micro bubble control : Special Welding, no leak point.
4. Touch pad has the same function of controller & it can control up to 16 pumps.
5. Encompass or Normal trigger signal.
6. Compact sized resist pump and controller. (1 Controller covers 2 pumps)
System Configurations
1
TPC-5002 Controller
2 Pump Control
Wafer
Dispense Nozzle
Suck-Back V/V
PR Bottle
TP-50BS Pump
Touch Pad
Max 16ea
Pump Control
Pump 1
Pump 2
AC85~264V
50/60Hz

TP-50BS (Rev 1.0)
- 2 -
TALON TECH CO. LTD.
\
2-1 Pump [ TP-50BS ]
ITEM
SPEC
REMARKS
Dispense Volume Range
1.0cp ~ 7cc
Dispense Volume Resolution
±0.01cc
Dispense / Reload Rate
0.3cc/sec ~ 1.2cc/sec
Dispense Repeatability
≤±0.04 (Polyimide PIX/PIQ)
Viscosity
200cp ~ 20,000cp
Drive System
DC Servo Motor
Pump Type
Diaphragm Type
Ambient Temperature
5 ∼40 ℃
Motor Power
DC 24V (current consumption : 1A)
Air
0.1 ~ 0.3Mpa
Resist In/Out
3/8 Inch Teflon
Weight
6.30kg
Pump Dimension
W : 97mm, D : 291mm, H : 362mm
System Specifications
2

TP-50BS (Rev 1.0)
- 3 -
TALON TECH CO. LTD.
2-2 Controller [ TPC-5002 ]
ITEM
SPEC
REMARKS
Electric Power
85VAC ~ 264VAC, 50~60Hz
Controller Power
DC 24V (current consumption Max 1A)
Panel Use
Drive Pump No.
2 Pumps
Pump Operation Mode
Fixed Mode
Main CPU
80c296 (16bit Processor)
Input Signal
1. Pump Driving Signal From Track M/C- Pump
Start Signal.
Output Signal
1. Home Signal & Pump Operation Completion
Signal To Track M/C.
2. Air V/V controlled Sol V/V Signal.
3. Alarm Signal on Pump Error.
4. Outside Communication (RS 232,422,485).
Weight
3.30kg
Dimension
W : 250mm, D : 261mm, H : 94mm
2-3 Touch Pad [ TTP-5016 ]
ITEM
SPEC
REMARKS
Main CPU
32Bit ARM920T
Ram
64Mb (OS:32Mb/App:32Mb)
Flash
NAND Flash 64Mb (OS:32Mb/App:32Mb)
LCD Size
4.3 Inch TFT Wide (480*272)
RTC Function Built-in
Exchangeable Coin Battery
Max. Connecting Pump No.
16 Pumps
Communication
RS422
Touch Pad Power
DC12~24V, current consumption: 5W (400~700mA)
Ambient Temperature
-10 ~ 55C
Weight
0.64kg
Dimension
W : 140mm, D : 44mm, H : 88mm

TP-50BS (Rev 1.0)
- 4 -
TALON TECH CO. LTD.
3-1 Pump In/Exterior Names
3-1-1 Pump Name Explanation
①PR Out
- Chemical Dispense. (⅜Inch Teflon)
②PR In
- Chemical Supply. (⅜Inch Teflon)
③PR Drain
- Chemical Drain. (⅜Inch Teflon)
④Toggle Valve
- One Touch Toggle Valve for chemical drain.
⑤Buffer Tank
- Bubble removal and buffering function
⑥Pump Connector
- Pump to Controller. Connector for Pump Operation. (D-SUB 15P Female)
System In/Exterior Names
3
⑤Buffer Tank
③PR Drain
④Toggle Valve
②PR In
①PR Out
⑥Pump Connector

TP-50BS (Rev 1.0)
- 5 -
TALON TECH CO. LTD.
3-2 Controller Exterior Names
3-2-1 Controller Name Explanation
①CH-1 In Sol S/W
- After CH-1 Pump Dispense, LED Lamp Switch for Reload Operation Condition.
②CH-1 Out Sol S/W
- After CH-1 Manual Purge, Suck-Back Valve On-Switch.
③CH-2 In Sol S/W
- After CH-2 Pump Dispense, LED Lamp Switch for Reload Operation Condition.
④CH-2 Out Sol S/W
- On CH-2 Manual Purge, Suck-Back Valve On-Switch.
⑤CH-1 Power S/W
- CH-1 Power On / Off Switch.
[TPC-5002 Front]
[TPC-5002 Rear]
①
②
③
④
⑤
⑥
⑦
⑧
⑨
⑩
⑪
⑫
⑬
⑭
⑮

TP-50BS (Rev 1.0)
- 6 -
TALON TECH CO. LTD.
⑥CH-2 Power S/W
- CH-2 Power On / Off Switch.
⑦Controller Main S/W
- Main Power Switch for controller.
⑧Main AC-IN
- AC100~220V (50 / 60Hz) Power Connector.
⑨CH-1 Pump Connector
- CH-1 Pump Connector. (D-SUB 15P Female)
⑩CH-1 Track I/O Connector
- CH-1 Track I/O Connector. (D-SUB 15P Female)
⑪CH-2 Pump Connector
- CH-2 Pump Connector. (D-SUB 15P Female)
⑫CH-2 Track I/O Connector
- CH-2 Track I/O Connector. (D-SUB 15P Female)
⑬DC 24V Connector
- Touch Pad Power Connector.
⑭COM In Connector
- Touch Pad RS-422 Communication In Connector. (D-SUB 9P Female)
⑮COM Out Connector
- Touch Pad RS-433 Communication Out Connector. (D-SUB 9P Female)

TP-50BS (Rev 1.0)
- 7 -
TALON TECH CO. LTD.
3-3 Touch Pad Exterior Names
3-3-1 Touch Pad Name Explanation
①Touch Panel
- Touching area
②Power In
- Touch Pad Power DC12~24V Connector.
③Not Use
- No Use. (D-SUB 9P Male)
④Com Port
- Touch Pad RS-422 Communication Connector.
①Touch Panel
②Power Source
(DC12~24V)
③Com Port (RS422)
④Com Port (RS422)

TP-50BS (Rev 1.0)
- 8 -
TALON TECH CO. LTD.
4-1 Track Interface Signal
Recipe Select START
Active Recipe
1
2
3
Low
High
High
1
High
Low
High
2
Low
Low
High
3
Low
High
Low
5
High
Low
Low
6
Low
Low
Low
7
[Recipe Select Table]
It is Timing Chart. On Ready condition, when Start Signal becomes active, each signal is same as the
chart. When Stop Alarm occurs, all stop even during dispensing. But, the warning alarm does
dispense. The alarm becomes clear by reset after pump clear.
Track / Auxiliary Interface
4

TP-50BS (Rev 1.0)
- 9 -
TALON TECH CO. LTD.
4-2 Track Interface Wiring
<Stop / Warning Active High>
<End / Home Active Low>
<Start1, 2, 3 Active Low>
Controller Side
Track Side

TP-50BS (Rev 1.0)
- 10 -
TALON TECH CO. LTD.
4-3 Cable Pin Assign
Pin
Number
Pump Cable(D-SUB 15P)
Controller
Pump
1
+5V
1 : 1
2
PUMP_CW
1 : 1
3
PUMP_CCW
1 : 1
4
+24V
1 : 1
5
E_HOME_SIGNAL
1 : 1
6
E_END_SIGNAL
1 : 1
7
E_MOTOR_ALARM
1 : 1
8
E_MOTOR_INPOSITION
1 : 1
9
GND
1 : 1
10
GND
1 : 1
11
Not Use
1 : 1
12
EX_IN_SOL V/V +24V
Sol V/V Connector share
13
E_SUCK_BACK_SOL_V/V +24V
1 : 1
14
EX_IN_SOL V/V -24V
Sol V/V Connector share
15
E_SUCK_BACK_SOL_V/V -24V
1 : 1
Pin
Number
Track Cable(D-SUB 15P)
N2 Type
Connecting Way
Controller
Track (ACT-12)
Track (ACT-12)
1
N.C
Not Use
Alarm is only for Stop. After
disconnecting EXT High 5,
link NO/COM with EXT 2P
cable.
Dispense Trigger links Suck-
Back V/V Cable from the
system after checking (+, -).
2
COM
EXT High 5 (link after disconnect)
3
N.O
EXT High 5 (link after disconnect)
4
START 3
Not Use
5
START 1
Dispense Trigger ( - ) 2P
6
START 2
Not Use
7
IN SOL
Not Use
8
ALARM STOP
Not Use
9
ALARM WARNING
Not Use
10
HOME
Not Use
11
END
Not Use
12
OUT SOL
Not Use
13
+24V
Not Use
14
+24V
Dispense Trigger (+24) 2P
15
MC GND
Not Use

TP-50BS (Rev 1.0)
- 11 -
TALON TECH CO. LTD.
Pin
Number
Track Cable(D-SUB 15P)
Encompass Type
Connecting Way
Controller
Track (ACT-12) Horose 20P
1
Not Use
X
Pump I/O Board
↓
Pump I/O CONN Board
↓
I/F Board
↓
CN3, 4, 6, 7
↓
J164~167(Track1~4)
(Refer to Electric Diagram)
2
Not Use
X
3
Not Use
X
4
Not Use
X
5
START 1
18
6
START 2
17
7
OUT SOL V/V
6 => Jump to END 7
8
ALARM STOP
5
9
ALARM WARNING
4
10
HOME
3
11
END
7 => Jump from 6
12
IN SOL V/V
8
13
+24V JUMP
2
14
+24V JUMP
15
GND
20
Division
Pin
Number
Touch Pad Cable(D-SUB 9P)
Controller to Controller Cable
COM-IN
Touch Pad
COM-IN
COM-OUT
RS422
1
Not Use
1:1 Cable
Not Use
1:1 Cable
2
Not Use
Not Use
3
Not Use
Not Use
4
TX+
TX+
5
TX-
TX-
6
RX+
RX+
7
RX-
RX-
8
Not Use
Not Use
9
Not Use
Not Use
3P
Connector
1
+24
+24
Not Use
2
Not Use
Not Use
Not Use
3
GND
GND
Not Use
[New Type Controller Touch Pad]

TP-50BS (Rev 1.0)
- 12 -
TALON TECH CO. LTD.
5-1 Pump Cable
5-2 Track Cable
External Cable Length
5
N2 Type
Standard
Encompass Type

TP-50BS (Rev 1.0)
- 13 -
TALON TECH CO. LTD.
5-3 Touch Pad Cable

TP-50BS (Rev 1.0)
- 14 -
TALON TECH CO. LTD.
6-1 Operation
6-1-1 Initial Screen
The pumps’ID, which are cable-connected to touch pad, are auto-searched every 20 sec. On every
lower menu, if there isn’t any input for 1 min, the initial screen is back. The pump, which is not
searched, cannot be chosen.
6-1-2 Pump Condition Indicate In Use
<Dispense> <Ready> <Not Connect>
6-1-3 Select Function
When ID is chosen, the above screen is shown.
ESC
-Go to the previous menu.
Dispense
-Dispense by touching the pad.
Recipe
-Run Recipe & Dispense Recipe Setting.
Degas
-Degas Count, Manual Degas, Empty Sensor Setting.
Config
-Pump Mode, Reset, Error & ID Setting.
Calibration
-Each recipe’s calibration setting.
Purge
- Not Use.
Touch Pad Operation
6

TP-50BS (Rev 1.0)
- 15 -
TALON TECH CO. LTD.
6-1-4 Dispense
On executing Start Run, Run Recipe runs one time dispense. In case of Start Cycle, Cycle Recipe
(4th Recipe) works as many as set counts.
6-1-5 Recipe Setting
For Recipe Setting, touch # under No. and input recipe # that you want to go in and touch ‘Ent’. At
this time, Recipe Data is automatically shown on the screen. And you can input the data that you
want and touch ‘set’button for setting. ‘Count’is only for 4th recipe(cycle recipe). Total recipes are
1~7. Recipes are automatically chosen by each trigger signal.
However, 4th recipe is for cycle recipe and which works only by Start Cycle of Dispense on touch
pad. Run Recipe No. is Recipe No. used by Start Run under Dispense menu.

TP-50BS (Rev 1.0)
- 16 -
TALON TECH CO. LTD.
6-1-6 Configuration of Pump
On Config Pump, the password needs for the important items’set.
Vital
-Check pump’s response and in case of response, ‘vital’
window activates and disappears right away. At the left window,
the response data is shown.
Error Status
-Shown Error Code Data.
Set ID
-Change Pump ID. [Discuss with Talon Tech]
Maint Mode
-Change Pump Mode to Maint.
Run Mode
-Change Pump Mode to Run
Pump Reset
-Reset Pump. It means Pump Restart, not Data Reset.
Error Mark
-Stop Error Setting. [Discuss with Talon Tech]
6-1-6-1 ID Setting
ID changes without any discussion could make the controller error. It is much better to ask Talon
Tech.
6-1-6-2 Maint Mode, Run Mode, Pump Reset Setting
Main Mode is to show the message of pump operation on the text window. Run Mode only
shows as data code. The setting method is to touch Maint Mode, Run Mode button and input
password and touch ‘Ent’. In case of no response from pump, message of mode keeps showing.
Pump reset works right after input password. It goes to the initial screen same as power off and
on. It takes about 20sec.
6-1-7 Calibration

TP-50BS (Rev 1.0)
- 17 -
TALON TECH CO. LTD.
Calibration –Per each Recipe, it is possible to set the calibration value. If there is the differences
between the real value and the setting value, set the calibration value higher or lower % at the
standard- 100.
6-2 Example
6-2-1 Dispense Test
If you want to dispense one time, use Start Run. This recipe is Run recipe which set on Recipe
menu. Start Cycle below is 4th Recipe.
Stop Cycle only works the case of using Start Cycle. Keep touching Stop Cycle button.