Ulvac C30VR Series Operating instructions

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C30V_Rseries Compressor Unit
for Cryopump and Super Trap
Installation, Operation,
Maintenance, and Troubleshooting
Instructions
C30V_R, C30V_RT, C30PV_RT
C30MV_R, C30MV_RT
C30MVE_R, C30MVE_RT
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Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping
speed of 15000L/S or more fall under row 2(35) of
appended table 1 of Japan’s Export Trade Control Order,
which is based on international export control regimes.
Customers must follow all related rules and regulations
such as Foreign Exchange and Foreign Trade Act and
take appropriate procedures when exporting or
re-exporting those products.
D/N.MD30XVRE, 2018MH19 ULVAC CRYOGENICS INCORPORATED

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-1
Introduction
Thank you for choosing our products. This instruction manual gives
information and precautions on handling, installation, operation, and
maintenance of the product.
This product is intended for use by qualified personnel who recognize shock
hazards and are familiar with the safety precautions required to avoid possible
injury. To ensure proper use of this product, read this instruction manual
carefully and keep this manual close at hand so that you can use for reference
during operation.
If you purchased our other products and/or optional devices with this product,
read relevant instruction manuals carefully.
1. About the personnel who are involved in handling our products
All personnel involved in handling our products should take a general safety
education and training that is officially accepted in the country where our product
is used. The personnel are also required to have specialized knowledge/skills and
qualification on the electricity, the machinery, the cargo handling, and the vacuum.
Especially, the personnel should be familiar with handling a cryopump in order to
use it safely. Since we offer a training session (which is subject to fees) as needed
for people who use cryopumps for the first time, please do not hesitate to contact
our Service Engineering Division to join the training session.
2. Warranty
2.1 Gratis warranty period and Warranty coverage
【Gratis warranty period】
Note that an installation period of less than one year after installation in your
company or your customer’s premises or a period of less than 18 months (counted
from the date of production) after shipment from our company, which is shorter, is
selected.
【Coverage】
(1) Failure diagnosis
As a general rule, diagnosis of failure should be done on site by customer.
However, ULVAC CRYOGENICS or our service network can perform this service
for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED
of the breakdown is found to be a fault of ULVAC CRYOGENICS.
(2) Damage during transportation
When damage by delivery/transportation is admitted, the product will be
repaired free of charge within the range of the guarantee expressed in the sales
contract.
(3) Breakdown repairs
There will be a charge for breakdown repairs, replacements and on-site visits
for the following seven conditions. In those cases the cost shall be your own
expense even though the product is within the warranty period.
①Breakdowns due to improper storage or handling, careless accident, software
or hardware design by the customer.
②Breakdowns due to modifications of the product without consent of the
manufacturer.
③Breakdowns due to maintenance of the product without authentic parts or
breakdowns resulting from using the product outside the specified
specifications of the product.
④Breakdowns due to contamination or corrosion caused by user’s use
conditions.
⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,
lightning, salt damage, and so on) , environmental pollution, irregular voltage,
and /or usage of undesignated power source.
⑥Breakdowns that are outside the terms of warranty.
⑦Consumables and/or replacement service.
Since the above services are limited to within Japan, diagnosis of failures, etc are
not performed abroad. If you desire the after service abroad, please contact
ULVAC CRYOGENICS and consult us for details in advance.
2.2 Exclusion of opportunity loss from warranty liability
Regardless of the gratis warranty term, compensation to opportunity losses
incurred to your company or your customers by failures of ULVAC CRYOGENICS
products and compensation for damages to products other than ULVAC
CRYOGENICS products and other services are not covered under warranty.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-3
2.3 Repair period after production is discontinued
ULVAC CRYOGENICS shall accept product repairs for seven years after
production of the product is discontinued.
3. Service Form
After the products are delivered, please fill out the following information in the
blanks. If you have any questions or technical problems, please feel free to contact
the nearest Customer Support Center or headquarters. Please refer to “Service
Network”.
Cryopump／Super trap Model ：
Cryopump／Super trap Serial No. ：
Refrigerator Model ：
Refrigerator Serial No. ：
Compressor Model ：
Compressor Serial No. ：
Temperature controller／Thermal display Model ：
Temperature controller／Thermal display Serial No. ：
Option Part Model ：
Optional Part Serial No. ：
4. Notes for repair and maintenance requests
We may decline your request for the repair or the maintenance of our products if
you refuse to give us information about the presence of the hazardous substance
and/or contaminant.
Also, please be aware that we do not accept liability for damages by the
contaminant, which might be caused during transportation to our office or the
nearest customer support center. To avoid such accident, please pay careful
attention to packing of the product
5．In case of breakdown and accident
When breakdown or accident occurs, we may ask for keeping the product on site
as it is or retrieving the product to investigate its cause. Also we may ask for
reporting the detailed process and/or the operating condition. When unidentified
malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED
the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6．General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-5
Safety Considerations
Our products have been designed to provide extremely safe and dependable operation
when properly used. Following safety precautions must be observed during normal
operation and when servicing them.
CAUTION
WARNING
A warning describes safety hazards or unsafe practices
which could result in severe injury or loss of life.
Acaution describes safety hazards or unsafe practices which
could result in personal injury or equipment damage.
Toxic gas or chemicals used.
There is a risk of severe injury upon contact.
Corrosive chemicals used.
There is a risk of severe injury upon contact.
Flammable gas used.
There is a danger of fire or burn injury.
Explosive gas used.
There is a risk of fire or explosion.
Hazardous voltage .
Electric shock may cause severe injury or loss of life.
Hot heating part present.
There is a risk of burn injury.

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Table of Contents
ULVAC CRYOGENICS INCORPORATED I
Table of Contents
Compressor unit Safety Instructions·································································· S-1
Disposal Considerations·················································································IW-1
Section 1. C30VR_Compressor Description····················································· 1-1
1.1 Introduction······················································································ 1-1
1.2 Compressor model descriptions ··························································· 1-1
1.3 Terminology ····················································································· 1-2
1.4 Cryopump system documents ······························································ 1-2
1.5 Roles of compressor in cryopump system··············································· 1-2
1.6 Compressor specifications ·································································· 1-3
1.7 Component descriptions ····································································· 1-7
1.8 CRYO-U®cryopump multiple installation ·············································· 1-12
1.9 Compressor with inverter for refrigerator··············································· 1-13
Section 2 Considerations before Installation ······················································ 2-1
2.1 Combination of cryopump and compressor ············································· 2-1
2.2 Installation environment requirements···················································· 2-1
2.3 Wiring requirements··········································································· 2-2
2.4 Cooling water requirements ································································· 2-4
2.5 Length of cables and flexible hoses······················································· 2-7
2.6 Remote functions ·············································································· 2-7
Section 3 Unpacking and Inspection ································································ 3-1
3.1 Compressor carton ············································································ 3-1
3.2 Shipping carton inspection ·································································· 3-1
3.3 Unpacking ······················································································· 3-2
3.4 Carton contents ················································································ 3-3
3.5 Inspection of the compressor and accessories········································· 3-4
3.6 Flexible hoses and specifications·························································· 3-4
Section 4 Equipment Installation, Piping, and Wiring ··········································· 4-1
4.1 Before installation·············································································· 4-1
4.2 Connecting cooling water piping ··························································· 4-2
4.3 Connecting and disconnecting helium flexible hoses ································· 4-2
4.4 Single cryopump installation ································································ 4-4
4.5 Multiple cryopump installation ······························································ 4-5
4.6 Electrical connections········································································· 4-7
4.7 Wire rooting for compressor and other equipments ································· 4-13
Section 5 Operation ····················································································· 5-1
5.1 Verification of helium static pressure······················································ 5-1
5.2 Compressor operation ········································································ 5-2
5.3 Inspection after replacing helium circulation components ··························· 5-4
5.4 Precautions for when compressor is not in operation································· 5-5
5.5 Maintenance operation for a compressor suspended for a long period ·········· 5-5

C30VR Compressor Instruction Manual
II ULVAC CRYOGENICS INCORPORATED
Section 6 Wiring and Piping Removal and Storage ············································· 6-1
6.1 Removal of wiring and piping and displacement of compressor ··················· 6-1
6.2 Maintenance in storage ······································································ 6-2
Section 7 Maintenance ················································································· 7-1
7.1 Scheduled maintenance ····································································· 7-1
7.2 Replacement of adsorber ···································································· 7-1
7.3 Adjusting system helium pressure························································· 7-5
7.4 Regular maintenance of helium lines, cooling water piping and electrical
wiring ··················································································· 7-10
7.5 Maintenance parts ··········································································· 7-10
Section 8 Troubleshooting············································································· 8-1
8.1 Problem types ·················································································· 8-1
8.2 Troubleshooting procedures ································································ 8-2
8.3 Alarm code descriptions······································································ 8-4
Appendix A Operating Log ············································································· A-1
Appendix B Combination of C30V R Compressor Unit and Cryopump/Supertrap ······ B-1
Appendix C C30V RSchematic Diagram ·························································· C-1
Appendix D C30V R Compressor Flow Diagram ················································· D-1
List of Figures
Figure 1-1 C30VR Compressor models ························································· 1-1
Figure 1-2 C30VR External view ·································································· 1-3
Figure 1-3 C30VR Front panel (Part)···························································· 1-4
Figure 1-4 C30MVR Front panel (Part) ························································· 1-4
Figure 1-5 C30VR Compressor dimensions ···················································· 1-5
Figure 1-6 Compressor front view································································· 1-7
Figure 1-7 Compressor rear view ································································· 1-8
Figure 1-8 Anchor bolts mounting positions (example) ······································ 1-9
Figure 1-9 Cryopump installation with C30MVR compressor····························· 1-12
Figure 1-10 C30VR compressor with inverter·················································· 1-13
Figure 2-1 Required space for compressor installation (scale: mm) and levelness··· 2-2
Figure 2-2 Equipment-side power circuit ························································ 2-3
Figure 2-3 Cooling water flow rate, water supply temperature, and water pressure
loss························································································ 2-5
Figure 2-4 Cooling water flow rate, water supply temperature, and water pressure
loss························································································ 2-6
Figure 2-5 Remote input interface circuit ························································ 2-8
Figure 2-6 Remote output interface circuit ······················································ 2-8
Figure 2-7 Timing chart for Alternate operating mode with two refrigerators ········· 2-12
Figure 2-8 Timing chart for Momentary operating mode with two refrigerators ······ 2-12
Figure 2-9 Signal delay when powered on（In Alternate operating mode）············ 2-13
Figure 2-10 Signal delay when the time period from a stop to a restart is short······· 2-14
Figure 2-11 Timing chart of C30VR when a short power interruption occurs ·········· 2-14

Table of Contents
ULVAC CRYOGENICS INCORPORATED III
Figure 3-1 Appearance of compressor carton·················································· 3-1
Figure 3-2 Remove cardboard and insert forks underneath the compressor··········· 3-3
Figure 4-1 Installation procedure ·································································· 4-1
Figure 4-2 Tighten with hands first ································································ 4-3
Figure 4-3 Tighten with two spanners ···························································· 4-3
Figure 4-4 Connecting and disconnecting helium flexible hoses to compressor
and refrigerator········································································· 4-4
Figure 4-5 Connections of the compressor and single cryopump ························· 4-5
Figure 4-6 Connections of the compressor and multiple cryopumps ····················· 4-6
Figure 4-7 Connecting input power cable connector ········································· 4-8
Figure 4-8 Remote connector pin assignments for C30VR ································· 4-8
Figure 4-9 Remote connector pin assignments for C30MVR······························· 4-9
Figure 4-10 (C30VR) “Alternate operating mode” wiring example for Single
cryopump operation··································································· 4-9
Figure 4-11 (C30MVR) “Momentary operating mode” wiring example for Multiple
cryopumps operation ································································4-11
Figure 4-12 Connector parts descriptions ······················································· 4-12
Figure 4-13 Cut length of insulation coating···················································· 4-12
Figure 4-14 Fix with set screw ····································································· 4-12
Figure 5-1 Helium static pressure and ambient temperature ······························· 5-2
Figure 5-2 Ready for operation ···································································· 5-3
Figure 5-3 Reversed phase or open phase ····················································· 5-3
Figure 5-4 Status display during C30MVR operation········································· 5-3
Figure 7-1 Remove two nuts from the helium gas connectors ····························· 7-3
Figure 7-2 Remove all seven screws from the rear panel··································· 7-3
Figure 7-3 Remove the rear panel ································································ 7-3
Figure 7-4 Remove self-sealing coupling························································ 7-3
Figure 7-5 Connecting and disconnecting self-sealing coupling with two spanners ·· 7-4
Figure 7-6 Remove adsorber mounting bolt ···················································· 7-4
Figure 7-7 Slide adsorber outward ································································ 7-4
Figure 7-8 Locations of front panel screws and components inside the compressor· 7-7
Figure 7-9 Items for adding helium gas to the compressor ································· 7-8
Figure 8-1 Alarm status table······································································· 8-1
Figure 8-2 Alarm status code table ······························································· 8-2
Figure C-1 C30VR schematic diagram ························································· C-2
Figure C-2 C30MVR and C30MVER schematic diagram ·································· C-3
Figure C-3 C30VRT and C30PVRT schematic diagram ··································· C-4
Figure C-4 C30MVRT and C30MVERT schematic diagram ······························ C-5
Figure D-1 Compressor flow diagram ··························································· D-2

C30VR Compressor Instruction Manual
IV ULVAC CRYOGENICS INCORPORATED
List of Tables
Table 1-1 C30VR Compressor models ························································· 1-2
Table 1-2 Compressor weight····································································· 1-5
Table 1-3 Power supply rating ···································································· 1-6
Table 1-4 Cooling water requirements ·························································· 1-6
Table 1-5 Installation environment and operation requirements ·························· 1-6
Table 1-6 Electromagnetic environment resistance characteristics······················ 1-7
Table 2-1 Input power cable specifications ···················································· 2-2
Table 2-2 Control and signal wire gauges······················································ 2-3
Table 2-3 Recommended cooling water for compressor ··································· 2-4
Table 2-4 Standard cables and flexible hoses················································· 2-7
Table 2-5 Remote interface specifications ····················································· 2-7
Table 2-6 Remote interface signals······························································ 2-9
Table 3-1 Carton contents·········································································· 3-3
Table 3-2 Optional parts ············································································ 3-3
Table 3-3 Flexible hose specifications ·························································· 3-4
Table 5-1 Supply line helium pressure during operation···································· 5-4
Table 7-1 Scheduled maintenance······························································· 7-1
Table 7-2 Equipment requirement for adding helium gas ·································· 7-7
Table 7-3 Maintenance parts ···································································· 7-10
Table 8-1 List of troubleshooting before operation ··········································· 8-2
Table 8-2 List of troubleshooting during operation ··········································· 8-3
Table A-1 Operating log·············································································A-1
Table B-1 Combination of C30VR series compressor and cryopump/supertrap······B-1
Table C-1 Differences on devices between compressor unit models ··················· C-1

ULVAC CRYOGENICS INCORPORATED S-1
Compressor Unit Safety Instructions
Read this manual and follow these safety guidelines before installing, operating, or
servicing the compressor unit.
Our Cryo-U®cryopump and Super trap refrigerator systems make a refrigeration cycle by
circulating high pressure helium gas. Filling helium gas more than the defined amount
does not improve refrigeration capacity appreciably. Instead, if excessive helium gas is
filled and pressure becomes higher than the defined value, gas will release from the safety
valve and its sheet may become clogged with dirt. This may even cause a leak as well as
overloading of the compressor motor.
Never charge helium gas more than specified in Table 1-5.
When charging helium gas or performing helium line decontamination, please read the
“Maintenance” section carefully and follow the instruction.
Please supply the equipments (regulators, charging hoses, adopters, etc.) that can be used
at the pressure of 2.0MPaG or above.
Switching between ON and OFF should be less than 6 times per hour, and ON and/or OFF
condition should be maintained longer than 3 minutes.
Frequent starting/stopping shortens the insulation life of the compressor motor and may
cause a failure of the product. When operating multiple refrigerators, the refrigerator
motors must be started / stopped into 6 times or less per hour also.
Do not turn on and off the compressor to control the temperature of super trap.
Please contact us when controlling the temperature of super trap is required.
1. Do not Charge Compressor with Excessive Helium
2. Adding Helium Gas and Charging Equipments
3. Do Not Switch between ON and OFF Frequently

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Ensure to discharge helium gas and remove either side of the self-sealing couplings from
the used adsorber before disposing of it.
When the refrigerator system is not in operation, the helium gas pressure inside the
adsorber is as high as the fill pressure of the compressor. Disposing the adsorber with
helium gas inside may cause accidents. For example, if the adsorber was thrown in a
burner reactor without discharging helium gas by mistake, the inside pressure of the
adsorber would rise as the inside temperature rises and it may explode. If the adsorber
was pressed with helium gas still inside, it may also cause an explosion. Refer to
“Section 9 Disposal of equipment and component parts” for more information.
4. Disposal of used adsorber
Use appropriate charging adaptor to remove helium gas safely.
☆We collect used adsorbers. If there is any used absorber, please contact a person in your
local dealership or Ulvac Techno Ltd. to have it picked up or send it directory to our
Service Engineering Division. We only accept CTI adsorbers and our adsorbers.
5. Electrical wiring connections
・Power supply voltage must be kept within the allowable range. Applying more than the
allowed voltage may damage the equipment.
・ Refer to “Section 1 Table1-3 Power supply rating” to install a ground-fault circuit
interrupter.
・ Grounding conductor (earth wire) must be connected (D class grounding (with the
ground resistance of 100Ω)).
・ Connect the refrigerator cable and remote cables (signal lines) to the compressor before
connecting the compressor to the power supply. These wiring connections must not be
done when the compressor is powered on. It could lead to a serious accident such as
electric shock and/or damage to the equipment.
・ Follow recommended sizes for wires and cables.
・ Power lines and signal lines must be wired at least 10cm separate from one another.

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If there is a water leak, there is a danger of electric shock. Ensure there is no water leak
from the cooling water piping. If the water pressure is too high, a leak may occur in the
cooling water line inside the compressor unit. Adjust and control the cooling water supply
pressure to maintain an allowable upper limit (lower than 0.7MPaG) indicated in “Section 1
Table 1-4 Cooling water requirements”
If water stain or some products accumulate in the water line inside the heat exchanger, heat
exchange effectiveness will be significantly reduced and helium gas temperature will rise,
this may shut down the compressor unit.
We employ the cooling water quality management standard of the Japan Refrigeration and
Air Conditioning Industry Association as a standard value of water quality for compressor
units. Please refer to “Section 2 Table 2-3 Recommended cooling water for compressor”.
The upper limit of the compressor operating ambient temperature is 35℃(38℃except for
C30VR). Do not use the compressor in unsuitable environments such as dusty, highly
humid environments and/or places that are affected by strong electromagnetic waves.
(Refer to “Section1 Table 1-5 Installation environment and operation requirements” and
“Table 1-6 Electromagnetic environment resistance characteristics”). Keep electric
terminals free from dust to avoid electrical leakage and/or a short circuit.
1. Installation and maintenance of the product must be done by personnel in charge of the
equipment or servicing who are familiar with the product structure and risk associated
with the operation of the compressor.
2. Input power supply must be shut off before opening the cover of the compressor to avoid
the risk of electrical shock.
Also, parts of inside the compressor unit are still hot just after the compressor has been
stopped. Wait at least 15 minutes to open the cover to avoid the risk of burns.
6. Cooling water
7. Compressor unit usage environment
8. Maintenance precautions

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MDIW001E,2010.06 ULVAC CRYOGENICS INCORPORATED IW-1
Disposal Consideration
Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
When it seems that the cryopump and the refrigerator have been used to evacuate a toxic or
dangerous material, you must contact a safety supervisor before discarding, and discard it
after removing the poisonous material according to directions of the safety supervisor.
Do not disassemble, pressurize, heat, and/or throw into fire. The adsorber may explode.
For safe disposal of an adsorber, follow the procedures below.
(1) Depressurize the high pressure helium gas in the adsorber to an ambient atmospheric
pressure. To do so safely, connect the proper tools such as our charging adaptor (for
refrigerator maintenance).
(2) Before proceeding with disposal work, remove the couplings of the adsorber to visually
confirm that it has been depressurized.
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
WARNING
WARNING

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Section 1 C30VR Compressor Description
Section 1. C30VR_Compressor Description
1.1 Introduction ............................................................................................. 1-1
1.2 Compressor model descriptions ............................................................. 1-1
1.3 Terminology............................................................................................. 1-2
1.4 Cryopump system documents ................................................................ 1-2
1.5 Roles of compressor in cryopump system.............................................. 1-2
1.6 Compressor specifications...................................................................... 1-3
1.7 Component descriptions ......................................................................... 1-7
1.8 CRYO-U®cryopump multiple installation.............................................. 1-12
1.9 Compressor with inverter for refrigerator.............................................. 1-13
1.1 Introduction
C30VR is the successor of C30V/C30MV/C30MVE/C30PV, a compressor for cryopump
systems and it is highly compatible with these conventional compressors.
NOTE: All personnel involved in installation, operation, adjustment, maintenance
and servicing must be familiar with the contents of both the C30VR compressor
and related components.
To ensure safe, reliable system performance, read this manual as well as other
relevant manuals completely to gain a thorough understanding before beginning
work.
1.2 Compressor model descriptions
C30VR has several models as below (See Figure1-1, Table1-1) differentiated by model
designations. The model designation is written on the shipping list and nameplate of the
compressor except for optional products.
*１:Standard helium gas filling pressure is different between a pump and a trap.
C30
V
R
Number of refrigerator
Blank= Single (1 refrigerator)
M= Multiple (Max. 3 refrigerators)
Helium gas filling pressure
Blank= Standard
P= High filling
Power consumption
Blank= Standard
E= Power saving
Refrigerator model
Blank= 2 phase motor drive
T= 3 phase motor drive
Figure 1-1 C30VR Compressor models
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C30VR Compressor Instruction Manual
Table 1-1 C30VR Compressor models
Compressor model
Number of
connectable
refrigerator
Refrigerator
motor Specification*1
Power
consumption
50/60Hz
C30VR 1
(single)
2 phase standard 5.0/6.0kW
C30VRT 3 phase standard 5.0/6.0kW
C30PVRT For R80RTrefrigerator 5.7/7.5kW
C30MVR
Up to 3
（multiple）
2 phase standard 5.0/6.0kW
C30MVER Power saving 4.3/5.2kW
C30MVRT 3 phase standard 5.0/6.0kW
C30MVERT Power saving 4.3/5.2kW
*1 Refer to Appendix B for detailed specifications of connectable pumps and
refrigerators．
1.3 Terminology
1) This manual provides instructions for C30VR, C30MVR, C30MVER, C30VRT,
C30PVRT, C30MVRT, C30MVERT, however “C30VR” is used as the term covers all
models unless a model needs to be differentiated from other models.
Within the term “C30VR”, when it is needed to differentiate multi-compressor and
single-compressor, “C30MVR” is used for all compressor models that can be
connected to multiple refrigerators and “C30VR” is used for all compressor models that
can be connected only to single refrigerator.
2) There are two types of cryopump. One is the CRYO-U® series cryopump which can
pump almost any gas and the other is CRYO-T super trap series which is specialized
for pumping water. Unless otherwise indicated, the term “cryopump” refers to both
types.
3) The term “Compressor” means compressor assembly. The helium compressor which is
a part of the assembly is sometimes called “compressor pump” to differentiate from the
assembly.
4) The cryopump system dose not starts by itself but by the command from a customer’s
equipment or high-order system. Thus, the cryopump system is one of the
components of a customer’s whole system.
Henceforth, an interface between the cryopump system and a customer’s equipment
or high-order system is called “equipment-side” for short.
1.4 Cryopump system documents
The cryopump system documents basically consist of two manuals: the cryopump manual
and the compressor manual. They are shipped with the purchased products.
Accessories for the system and manuals for optional devices are enclosed depending on
the product specifications that the customer orders.
1.5 Roles of compressor in cryopump system
The cryopump system is consists of a cryopump and a compressor and is capable of
condensing and adsorbing almost all kinds of gas molecule inside the pump. Thus clean
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