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mnl000621 Revision 0 06/27/2019
© Versum Materials US, LLC. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C - 5
VersumMaterialsConfidential
TABLE OF CONTENTS
Chapter 1 Delivery and Inspection
Section 1 Delivery .......................................................................... 1-2
Section 2 Inspection ....................................................................... 1-2
Chapter 2 Site Preparation
Section 1 Facility Preparation ........................................................ 2-2
Section 2 Facility Requirements .................................................... 2-4
Section 3 Tag and Lockout Routine ................................................ 2-16
Section 4 Spill Cleanup Routine ..................................................... 2-17
Chapter 3 Installation
Section 1 Introduction ..................................................................... 3-2
Section 2 Reference Documents ..................................................... 3-2
Section 3 Installation ....................................................................... 3-3
Section 4 Installing the ChemGuard® CG050 Cabinet ................... 3-4
Section 5 Connecting ChemGuard® Gas Lines ............................... 3-11
Section 6 Chemical Delivery Line Requirements ........................... 3-11
Section 7 Installing ChemGuard® Bulk Scale ................................. 3-16
Section 8 Communications ............................................................. 3-17
Section 9 Start-up and Initialization ................................................ 3-23
Section 10 System Configuration ...................................................... 3-28
Section 11 Manual Mode .................................................................. 3-30
Section 12 Regulator Adjustment ..................................................... 3-33
Section 13 Finishing the ChemGuard® Installation .......................... 3-34
Chapter 4 38 Liter Bubbler Installation
Section 1 38 Liter Bubbler Installation ........................................... 4-2
Section 2 Bubbler Valves ............................................................... 4-2
Section 3 Installation of the Bubbler and Valves ............................ 4-3
Section 4 Bubbler and System Leak Test - Setup ........................... 4-5
Section 5 Leak Test – Main Manifold -> Pressure Decay .............. 4-6
Section 6 Leak Test – Vapor Out -> Pressure Decay ...................... 4-6
Section 7 Leak Test – Sample Out/Purge Line -> Pressure Decay . 4-7
Section 8 Leak Test – 38L Bubbler/Outer Cooling Jacket -> Pressure Decay.4-7
Section 9 Leak Test – External Refill Line -> Pressure Decay ....... 4-8
Section 10 System Purge ................................................................... 4-9
Section 11 Install Bubbler Chiller Connections ................................ 4-9
Section 12 Entering Bubbler Liquid Weight ..................................... 4-10
Chapter 5 ChemGuard® GEN III Features and Components
Section 1 Overview ........................................................................ 5-2
Section 2 Component Description .................................................. 5-4
Section 3 Available Options ............................................................ 5-14
