ADE ASC 2000 User manual

AdvancedSystem
Controller 2000
User's Guide
Rev. D
ADEP/N 024429-02
Copyright ©1998-2000 ADE Corporation. All rights reserved.
Informationinthisdocumentissubjecttochangewithoutnotice. Nopartofthisdocument
maybereproducedortransmittedinanyformorbyanymeans,electronicormechanical,
for any purpose, without the express written permission of ADE Corporation.
TheADElogoisaregisteredtrademarkofADECorporationintheUnitedStatesandother
countries.
02/10/00

2 -ASC2000User'sGuide

ASC2000User'sGuide- 3
Table of Contents
Manual RevisionHistory ................................................................................... 5
Summary of Notes & Warnings......................................................................... 6
PurposeofThis Manual ..................................................................................... 7
Use of Third-Party Hardware & Software......................................................... 7
Unauthorized Repairs ........................................................................................ 7
Understanding Your SCO Open Server Enterprise License Agreement ........ 8
RecordingImportantSystemInformation ........................................................ 9
The Advanced System Controller 2000........................................................... 10
HardwareComponents................................................................. 10
ASC 2000 Front View (TW-xx serial number) ............................. 11
ASC 2000 Front View (SC-xx serial number) .............................. 11
ASC 2000 Rear View (TW-xx serial number)............................... 12
ASC 2000 Rear View (SC-xx serial number)................................ 13
Back-upTapes .............................................................................. 14
HandlingCompactDisks .............................................................. 15
Using The Keyboard ..................................................................... 16
UsingTheTrackball ...................................................................... 17
Uninterruptable Power Supply..................................................... 18
SoftwareOverview........................................................................ 21
The "/ade/usr/SYS0" Directory........................................................................ 23
Booting The System......................................................................................... 24
Autostarting The STANDARD USER INTERFACE .......................................... 27
Using The Desktop ....................................................................... 28
What Is An Icon?........................................................................... 29
What Is A Window? ...................................................................... 29
How To Start An Application ........................................................ 29
MinimizingAWindow.................................................................... 30
The Window Title Bar ................................................................... 30
The Window Menu Button............................................................ 30
MaximizingAnIcon ....................................................................... 31
Dragging and Dropping Icons and Windows .............................. 31
Resizing A Desktop Window ........................................................ 31
How To Close A Window .............................................................. 32
FilesAndDirectories .................................................................... 33
Moving A File To A Directory Folder ............................................ 33
Deleting A File Using The "Trash" ............................................... 33
Printing AFile ................................................................................ 34
Exiting The Desktop ......................................................................................... 34
Logging Back Into The Desktop...................................................................... 34

4 -ASC2000User'sGuide
APPENDICES:
600210-01 Removing the Universal System Controller Software
600210-02 Installing the Universal System Controller Software
600210-03 Creating "Boot" & "Root" Disks
600210-04 Creating Disk Image Back-Up Tape
600210-05 InstallingDiskImageBack-Up
600210-06 Installing "Sutton" Uninterruptable Power Supply
Model885-7307
600210-07 DOS Copying ASC 2000 Files
600210-08 ConfiguringEthernet
600210-09 Copying ADE SYSTEM CONTROLLER (CSA) Logs
onto Floppy Disks
600210-10 Copying Files and Directories Between Tapes and Hard
Disk for the Advanced System Controller 2000
ADEApplications.............................................................................................. 35
The ADE SYSTEM CONTROLLER (CSA) ....................................................... 37
The System Status Log ................................................................ 38
Using the View Menu .................................................................... 39
EnablingDECnet ........................................................................... 40
EnablingHCA ................................................................................ 41
Soft and Hard Resets ................................................................... 42
TheSTANDARDUSER INTERFACE ................................................................ 43
Manual Starting The STANDARD USER INTERFACE ................. 44
MinimizingTheSTANDARDUSERINTERFACE .......................... 44
Stopping The STANDARD USER INTERFACE ............................ 44
TheSYSTEM SHUTDOWNApplication ........................................................... 45
SystemAdministratorTasks ........................................................................... 46
Logging In As The System Administrator ................................... 47
Setting System Time & Date ........................................................ 48
Creating User Accounts ............................................................... 49
ChangingPasswords.................................................................... 50
DeletingLogFileMessages .......................................................... 51
Reporting Current Hard Disk Usage ........................................... 52
Creating A Print Queue ................................................................ 53
GeneralSystemMaintenanceTasks ............................................................... 54
Clearing The Print Queue ............................................................. 54
Selecting the System Default Printer........................................... 55
Formatting FloppyDiskettes ........................................................ 56
Copying Files And Directories To Tape ....................................... 58
Commonly-UsedTerms ................................................................................... 59

ASC2000User'sGuide- 5
Manual Revision History
06/01/98 Revision A (DR 1235)
07/21/99 Revision B (ECO 7649)
Added support for new ASC 2000 version with SCxx serial numbers:
!different front and rear panel layout
!different number of back-up tapes
!newmethodforcreating"BOOT"and"ROOT"diskettes(see
procedure 600210-03, which can be used for all controller versions)
!different method for creating disk image back-up tapes (see
procedure 600210-04, which includes separate procedures for the
differentcontrollerversions)
!different method for restoring disk image back-up tapes (see
procedure 600210-05, which includes separate procedures for the
differentcontrollerversions)
!corrected typographical errors and used better examples in
procedure600210-07
!added tar copying method to procedure 600210-09
02/10/00 Revision C (ECO 7932)
Corrected procedure 600210-05 to respond n to the destructive scan
prompt when restoring a Disk Image Back-Up.
10/27/00 RevisionD(ECO8219)
Corrected typographical error in procedure 600210-05.

6 -ASC2000User'sGuide
Summary of Notes & Warnings
1. NOTE:
The controller chassis itself should not be opened; please notify ADE Customer
Service if you experience problems with your unit. You will invalidate your
warranty if you install third-party hardware or software or if you attempt
unauthorized repairs to the boards inside the unit.
2. NOTE:
It is extremely important that you keep the license agreement in a safe place for
futurereference. Thisis neededincasetheunitisserviced orreplacedbyADE.
If you own more than one ADE system with the ASC 2000, you should never
duplicate or exchange serial numbers and/or activation keys.
3. WARNING:
The UNIX operating system requires that a "system shutdown" routine be
performedbeforethecomputercansafelybepoweredoff. Ifpowerislostbefore
a system shutdown is performed, the UNIX filesystem may become corrupted,
causing the operating system to have to be reloaded.
4. NOTE:
NotethatADEequipmentitselfwillpoweroffimmediately during a power failure
becauseitcannot bepluggedintothe UPS. Measurementdataforwafersbeing
characterizedatthetimeofpowerfailurewillnotbesavedunlessdatawasbeing
saved to disk as accumulated.
5. NOTE:
ADErecommendsthattheSystemAdministratorperiodicallypurgeaccumulated
mail messages and log files.

ASC2000User'sGuide- 7
Purpose Of This Manual
This manual is designed to familiarize you with the SCO Open Server Enterprise/
UNIXoperatingsystembefore youuseADE'sUniversal SystemControllersoftware
to characterize wafers.
This manual describes the Advanced System Controller 2000 and SCO operating
system, as well as documenting required System Administrator tasks. It also
explains how to use the ADE SYSTEM CONTROLLER (CONTROL/STATUS
APPLICATION) and SYSTEM SHUTDOWN icons. Using the STANDARD USER
INTERFACE/UniversalSystem Controller to characterize wafers isexplained in the
ADE Operation Manual for your system, provided under separate cover.
Use Of Third-Party Hardware & Software
ADE Corporation does not endorse or recommend the use of third-party
hardware or software with the Advanced System Controller 2000. Use of
third-party hardware or software will invalidate your warranty.
Unauthorized Repairs
Do not open your ASC 2000 unit or attempt any unauthorized repairs to the
boards. Do not open the controller chassis. Notify ADE Customer Support
if you are experiencing problems with your unit. Opening the chassis will
invalidate your warranty.
i:\techpubs\ASC2K\usrguideASC2K

8 -ASC2000User'sGuide
Understanding Your SCO Open Server Enterprise
License Agreement
When you purchase an ADE wafer characterization system with the ASC 2000, you
also purchase a SCO Open Server Enterprise license. This license entitles you to
runone copy of the SCO Open ServerEnterprise/UNIX operating system. Included
on the agreement is a serial number and activation key for the operating system.
It is extemely important that you keep the license agreement in a safe place
for future reference.
Yourserialnumberisstoredinsidethecontrollerchassisandisrecorded,alongwith
the activation key, at ADE Corporation before your system ships. The combination
of serial number and activation key is unique to your system and is periodically
checked by the operating system during operation. For that reason, if you own
more than one ADE system with the ASC 2000, you should never exchange or
duplicate serial numbers and/or activation keys.
When you make back-up tapes of your SCO Open Server Enterprise/UNIX operat-
ing system, be sure to keep them with the controller you used to create them. Do
not load them onto another system. By keeping back-up tapes with the controllers
that created them, you will avoid using the tapes with the wrong controllers.

ASC2000User'sGuide- 9
RecordingImportantSystemInformation
You should record information about your system which makes it unique. Keep the
following items in your records, in case they are altered in the future:
SYSTEM NAME: This is the name of your system, shown as the SCO UNIX
operating system is being loaded. Examples are "TW27" and
"SC36".
SERIALNUMBER/
ACTIVATIONKEY: ThesearethetwocodeswhicharesuppliedwithyourSCOOpen
ServerEnterpriselicenseagreementandareperiodicallychecked
for by the operating system.
rtVAX
ADDRESSES: These are the Internet and Hardware addresses of the rtVAX
controller. The Hardware address appears in the System
Options screen in the ADE SYSTEM CONTROLLER (CSA).
The Internet address appears under the View menu.
DECNET KEY: If you have purchased DECNET networking software for your
system, you will be provided with a code which must be entered
in order to use DECNET. This code appears in the DECNET
Options screen in the ADE SYSTEM CONTROLLER (CSA).
HCA KEY: If you have purchased HCA networking software for your
system, you will be provided with a code which must be entered
in order to use HCA. This code appears in the HCA Options
screen in the ADE SYSTEM CONTROLLER (CSA).

10 -ASC2000User'sGuide
The Advanced System Controller 2000
The Advanced System Controller (ASC) 2000 consists of a PC with a SCO-UNIX
operatingsystem and a rtVAX 300 board. Thesystem is designed to run most ADE
wafer characterization systems. The ASC 2000 has a 3 Amp rating. (Ignore any
labels on the unit that indicate it has a 10 Amp rating.)
The "Universal System Controller" (USC) is the name of the software which
operates ADE wafer characterization systems. Its menu display is referred to as
the "STANDARD USER INTERFACE". A program which controls starting and
stopping of the STANDARD USER INTERFACE is referred to as the "ADE
SYSTEMCONTROLLER".
Hardware Components
Standard hardware includes one hard disk drive, 3.5-inch diskette drive, CD-ROM
drive,tapedrive,keyboard,trackball,rtVAX300board,Ethernetcapability,parallel/
serial ports and optional DECNET and HCA capability.
AnUninterruptablePowerSupply (UPS)isalsoprovidedwithyoursystemtoprotect
againstapowerfailure. TheUPSpreventstheoperatingsystemfrombeingharmed
bykeepingthecomputerpoweredonafterapowerfailurelongenoughtosafelyshut
down the operating system.
Thefrontpanelresetswitchhasbeendisabledtoavoidunintendedshutdowns. The
Power On/Off switch should never be used to shut off the unit unless a system
shutdown has been performed as described in The System Shutdown Application
section of this manual.
The ASC 2000 can be positioned for the floor, tabletop or rackmount.
A front view of the ASC 2000 is shown on the following page.

ASC2000User'sGuide- 11
Hard Disk
Drive LED
3.5-inchFloppy
Diskette Drive
Reset Switch
(Deactivated)
CD-ROM
Drive
Tape Drive
Power
ON/OFF
P-0104
Power LED
Keyboard
Lock
ASC 2000 Front View (TW-xx serial number)
ASC 2000 Front View (SC-xx serial number)
3.5-inchFloppy
Diskette Drive Power
ON/OFF
Tape Drive CD-ROM
Drive
Hard Disk
Drive LED
Power LED
Reset Switch
(Deactivated)
Keyboard
Lock
P-0150

12 -ASC2000User'sGuide
GPIB Port
Robot/Loader
Port
ASCII Port
SMIF Port
DSP Board
(if present)
Video Ports
Keyboard/
Trackball Port
(use Y
adapter)
Cognex
Reader
UPS
DECNET
Port
8-Port
Serial I/O
UNIX
Networking
Port
Parallel
Printer Port
SCSI Port
Secondary
GPIB Port
VAX
Diagnostic
Port
Power
Cord
COM 1
Digital I/O
T-0386
Line Voltage
Selection
(should always
be 115 VAC)
ASC 2000 Rear View
(TW-xx serial number)

ASC2000User'sGuide- 13
Power
Cord
Line Voltage
Selection
(shouldalways
be 115 VAC)
Video
(Monitor)
8-Port
Serial I/O
UNIX
Networking
Port
Parallel
Printer Port
SCSI Port
VAXDiagnostic
Port
COM 1
UPS
DSP Board
(optional for
E-Plus, E-Squared)
GPIB Port
SMIF Port
Robot/AutoLoader
Port
ASCII Port
Cognex Reader
Port
Trackball
Keyboard
not used
DECNet Port
not used
T-0386E.DXF
E-SquaredData
Port(optional)
ASC 2000 Rear View
(SC-xx serial number)

14 -ASC2000User'sGuide
Back-up Tapes
Beforeyoursystemisshippedfrom thefactory,aback-upofthehard disk(including
theSCO-UNIXoperatingsystemand ADE softwareandfiles)isstoredtoone or two
tapes. The SCO-UNIX operating system by itself is also stored to one or two tapes.
!ASC 2000 controllers with "TWxx" serial numbers require a single tape for the
disk image back-up and a single tape for the SCO-UNIX operating system.
!ASC2000controllerswith"SCxx" serialnumbersrequiretwotapes(BOOTand
ROOT)forthediskimageback-upandtwotapes(BOOTandROOT)fortheSCO-
UNIXoperatingsystem.
These tapes allow you to restore the system software in case your hard disk
drive fails. ADE software is also be contained separately on a CD-ROM which
will be shipped with your system.
You should periodically create your own back-up tapes according to procedure
600210-04 Creating A Disk Image Back-Up in the appendices section of this
manual. These back-ups will allow you to save the contents of your hard drive,
including recipe and data files, in case you experience a hard drive failure later.
Use procedure 600210-05 Installing Disk Image Back-Up in the appendices section
of this manual to restore the contents of a back-up tape following a drive failure.

ASC2000User'sGuide- 15
Handling Compact Disks
Back-up Universal System Controller and ADE Tools software for the ASC 2000 is
contained on a compact disk. To protect the CD from damage, follow the
precautions listed below:
1. Handle the CD by the outer edge only. This will prevent fingerprints and
smearsonthesurface. NevertouchtherecordingsurfaceoftheCDorplace
it face down on a hard surface.
2. Store the CD in its protective case. Proper storage helps protect the data
from scratches on the CD surface.
3. Donotleave theCDindirectsunlight orinahot,humidenvironment. These
conditions can warp and damage the CD.
4. Use only a felt tip permanent pen when labeling. Write only on the printed
area or on the clear inner diameter of the CD. Never use a ballpoint or hard
point writing utensils - these may damage the CD.
5. CleantheCDwith a soft,lint-freeclothtoremove spots, dustorfingerprints.
Always wipe from the center to the outside edge. Never wipe in a circular
motion. Do not use abrasive or solvent cleaners or conventional vinyl
record cleaning solution. Chemical-based cleaners can damage the CD.

16 -ASC2000User'sGuide
Using The Keyboard
The keyboard is mainly used to operate the STANDARD USER INTERFACE. Use
the arrow keys to move the cursor through the interface's menus. The <INSERT>,
<PAGE UP> and <PAGE DOWN> keys are often used to select menu items.
Two important notes about the keyboard:
1. Do not enable <NUMLOCK> when you are in the desktop or
STANDARD USER INTERFACE. When <NUMLOCK> is on, some
keyboard function keys will not respond.
2. Do not use the keyboard <PRINT SCREEN> key while in the
STANDARD USER INTERFACE. To print a display screen from the
STANDARD USER INTERFACE, press <F2>.
Pause Lot
(F7) End Lot (F8) Stop/Step (F9)
Resume Lot (F10)
Print
Screen
(F2)
Arrow Keys

ASC2000User'sGuide- 17
Button #1
(leftmost
button)
Using The Trackball
Use the trackball to select icons, windows, and menu items in the desktop. (Use
the keyboard to select menu items in the STANDARD USER INTERFACE.)
Position the pointer on the screen by rolling the trackball with your thumb. Select
an application or menu item by "clicking" the leftmost trackball button (Button #1).
In some applications, clicking the rightmost trackball button (Button #3) is required
to perform certain operations. Unless otherwise noted in this manual, always click
with the leftmost button.
Withpractice,youwilllearnto precisely position the pointeronthescreenusingthe
trackball. You should also practice "clicking" and "double-clicking" the leftmost
button.
A single click of Button #1 with the trackball pointer on an icon or window will make
that item "active". That is, it will be the currently-selected icon or window in the
desktop. (It will appear highlighted.) A double-click of Button #1, performed
quickly, will "open" (start) an application or select a parameter.
When an icon or parameter has been selected, the pointer changes shape to
indicate that you must wait a few seconds. If the pointer doesn't change
shape, double-click again until it does. Do not double-click the trackball
button again if the pointer has already changed shape. This will open two
identical windows.
Place thumb
on ball.
Button #3
(rightmost
button)

18 -ASC2000User'sGuide
On-Line
LED
Voltage Bar
Graph
On-battery
LED
Replace
Battery
On (1) /Test Button Overload
Off (0)
Button
Uninterruptable Power Supply
An Uninterruptable Power Supply is provided with your system for protection in the
event of a power failure at your facility. The UNIX operating system requires that
a system shutdown (refer to The System Shutdown Application) routine be
performed before the computer can safely be powered off. If power is lost
before a system shutdown is performed, the UNIX file system may become
corrupted, causing the operating system to have to be reloaded. The UPS
preventstheoperatingsystemfrombeingharmedbykeepingthecomputerpowered
on after a power failure or "brown-out" long enough for a proper shutdown to occur.
Poweris supplied to the computer(and monitor) from the batteriesstored within the
UPS. ThisallowsplentyoftimeforanorderlyshutdownoftheUNIXoperatingsystem,
which automatically initiates after a power failure occurs.
Note, however, that the ADE equipment itself will power off immediately
during a loss of power (because it cannot be plugged into the UPS).
Measurement data for wafers being characterized at the time of power
failure will not be saved (unless data was being saved to disk as
accumulated).
Uninterruptable Power Supply - Front View

ASC2000User'sGuide- 19
The software which controls your system's UPS is configured at the factory before
shipment. If it becomes necessary to re-configure the UPS software, refer to
procedure 600210-06 Configuring the ASC 2000 for the Sutton UPS in the
appendices section of this manual. The UPS manuals included with your system
are also helpful in learning more on how to use the UPS.
Important switches and indicators are listed below:
ON (1)/Test Button: Press this front panel button to turn on the UPS after all
loads have been plugged in. To initiate a self-test, press
the button until the UPS beeps and the on-line LED
flashes. The UPS automatically performs a self-test at
power-up and every two weeks.
OFF (0) Button: Press this front panel button, located below the ON (1)/
Test Button, to deactivate the UPS.
Front Panel Indicators: Periodically check the front panel lights for: Overload,
Low Battery and Replace Battery conditions. Audible
alarmswillalso beepifanyoftheseconditionsoccur. The
On-line indicator will light during normal operation; the
On-battery indicator will light during a power failure.
WhentheUPSisfully charged, the VoltageBarGraphwill
befullyilluminated. GraphLEDSwillgraduallyshutoffas
the battery's power is used up.
Replace Battery LED: If the Replace Battery LED flashes, wait two hours, then
test the UPS by pressing the Test button. If the LED
remains lit, replace the batteries according to the
instructions listed on the UPS.

20 -ASC2000User'sGuide
Circuit Breaker
UPS Power Cord (Plug
into AC Line Conditioner)
Uninterruptable Power Supply - Rear View
Plug computer
and monitor
into AC
receptacles.
Computer
Interface Port Sensitivity
Switch Site Wire Fault Light
Sensitivity LED
P-0025