Advanced Energy FC-77 Series User manual

Mass Flow Controllers
Series FC-77X / 77XX, Series FC-78X / 78XX, and
Series FC-79X
AERA PRODUCTS
June 2006 5700512-C
User Manual

User Manual
Series FC-77X / 77XX,
Series FC-78X / 78XX, and
Series FC-79X MFCs
5700512-C

iv 5700512-C
Advanced Energy®
COPYRIGHT
This manual and the information contained herein is the proprietary property of
Advanced Energy Industries, Inc.
No part of this manual may be reproduced or copied without the express written
permission of Advanced Energy Industries, Inc. Any unauthorized use of this manual
or its contents is strictly prohibited. Copyright ©2006 Advanced Energy Industries,
Inc. All Rights Reserved.
DISCLAIMER AND LIMITATION OF LIABILITY
The information contained in this manual is subject to change by Advanced Energy
Industries, Inc. without prior notice. Advanced Energy Industries, Inc. makes no
warranty of any kind whatsoever, either expressed or implied, with respect to the
information contained herein. Advanced Energy Industries, Inc. shall not be liable in
damages, of whatever kind, as a result of the reliance on or use of the information
contained herein.
PRODUCT USAGE STATEMENT
Read this entire manual and all other publications pertaining to the work to be
performed before you install, operate, or maintain this equipment. Practice all plant
and product safety instructions and precautions. Failure to follow instructions can
cause personal injury and/or property damage. If the equipment is used in a manner
not specified by the manufacturer, the protection provided by the equipment may be
impaired. All personnel who work with or who are exposed to this equipment must
take precautions to protect themselves against serious or possibly fatal bodily injury.
Advanced Energy Industries, Inc., (AE) provides information on its products and
associated hazards, but it assumes no responsibility for the after-sale operation of
the equipment or the safety practices of the owner or user. This equipment produces
or uses potentially lethal high-voltage, high-current, radio frequency (RF) energy.
NEVER DEFEAT INTERLOCKS OR GROUNDS.

5700512-C v
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
TRADEMARKS
CUSTOMER FEEDBACK
Advanced Energy’s technical writing staff has carefully developed this manual using
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the writing staff welcomes and appreciates customer feedback. Please send any
comments on the content, organization, or format of this user manual to:
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®is a registered trademark of Advanced Energy Industries,
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Advanced Energy®is a registered trademark of Advanced Energy Industries,
Inc.
AE®is a registered trademark of Advanced Energy Industries, Inc.
Aera®is a registered trademark of Advanced Energy Industries, Inc.

vi 5700512-C
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5700512-C Table of Contents vii
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter 1. Safety and Product Compliance Guidelines
Important Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Model Numbers for this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Interpreting the Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Type Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Danger, Warning, and Caution Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Interpreting Product Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Safety Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Product Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Conditions of Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Chapter 2. Product Overview
Product Description and Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
MFC Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Flow Sensor Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Bypass Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Electronics Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Valve Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Chapter 3. Installation and Operation
Preparing to Install the Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Installing the Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Overview of Unit Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Confirming the MFC Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Preparing the Installation Site . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Unpacking the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Positioning the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Mounting the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Making the Mechanical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Making the Electrical Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Power Supply Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Ground Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Testing the System for Leaks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Connecting the MFC to Peripheral Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Operating the Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
First-Time Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Zeroing the MFC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
Table of Contents

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Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
Chapter 4. I/O Connections and Communication
20-Pin Card Edge Connector and 20-Pin Honda Connector . . . . . . . . . . . . . . . . . 4-1
Card Edge Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Honda Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
20-Pin Connector Signal Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
9-Pin Subminiature-D Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Pin and Signal Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Special Function Signal Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Alarm Output (Error Detection) Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Control Valve Purge Function Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Card Edge Purge Function Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Honda 20-pin Purge Function Signals . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Subminiature-D Purge Function Signal . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Chapter 5. Troubleshooting and Global Customer
Support
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Alarm Signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Troubleshooting the Gas Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
No Gas Is Being Supplied . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Set Point and Flow Output Do Not Match . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Unstable Flow or Insufficient Output Exists . . . . . . . . . . . . . . . . . . . . . . . 5-4
AE World Wide Web Site . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
AE Global Services . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
USA Support Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
European Sales and Service Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Middle East Sales and Service Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Asian Sales and Service Contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Returning MFCs for Repair . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Packing an MFC for Shipping . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Authorized Returns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Warranty Statement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
Chapter 6. Specifications and Reference Information
Model Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Specifications for Model FC-770 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Specifications for Model FC-771 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

5700512-C Table of Contents ix
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-772 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Specifications for Model FC-780HT MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Specifications for Model FC-780 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Specifications for Model FC-780X MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Specifications for Model FC-781HT MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Specifications for Model FC-781 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Specifications for Model FC-782 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Specifications for Model FC-785 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Specifications for Model FC-785T-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
Specifications for Model FC-785X-B MFC . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Specifications for Model FC-785Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
Specifications for Model FC-786 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Specifications for Model FC-786T-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-16
Specifications for Model FC-786Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-17
Specifications for Model FC-790 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Specifications for Model FC-791 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Specifications for Model FC-795 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
Specifications for Model FC-795T-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-21
Specifications for Model FC-796 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
Specifications for Model FC-7700 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
Specifications for Model FC-7710 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
Specifications for Model FC-7720 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-25
Specifications for Model FC-7800 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
Specifications for Model FC-7810 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-27
Specifications for Model FC-7820 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
Specifications for Model FC-7850Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . 6-29
Specifications for Model FC-7810 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30
Specifications for Model FC-7820 MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31
Specifications for Model FC-7850Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . 6-32
Specifications for Model FC-785Y-B MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-33
MFC Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33
Dimensions for Standard MFC Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-34
Dimensions For Block-Type MFC Models . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37
Dimensions for High Temperature MFC Models . . . . . . . . . . . . . . . . . . . . . . 6-38
Reference Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
Calibration References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
Flow Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39
Product Label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40

x Table of Contents 5700512-C
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5700512-C List of Figures xi
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Figure 2-1. MFC cutaway view . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Figure 2-2. MFC functional block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Figure 3-1. Connection to peripheral equipment using a RO-Box power supply . . . . . 3-6
Figure 3-2. Connection to peripheral equipment using a dedicated power supply . . . . 3-7
Figure 3-3. Example of connections using dedicated line code LC-OUT-N . . . . . . . . . 3-8
Figure 3-4. MFC zero point adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
Figure 4-1. 20-pin card-edge connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Figure 4-2. 20-pin Honda connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Figure 4-3. 9-pin subminiature-D connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Figure 4-4. Alarm connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Figure 4-5. Card edge purge function signals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Figure 4-6. Card edge normally open internal circuitry for purge function . . . . . . . . . . 4-9
Figure 4-7. Card edge normally closed internal circuitry for purge function . . . . . . . . 4-10
Figure 4-8. Honda 20-pin purge function connection . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
Figure 4-9. Honda 20-pin normally open internal circuitry for purge function . . . . . . . 4-11
Figure 4-10. Honda 20-pin normally closed internal circuitry for purge function . . . . . 4-11
Figure 4-11. 9-pin subminiature-D purge function connection . . . . . . . . . . . . . . . . . . 4-12
Figure 4-12. 9-pin subminiature-D internal circuitry for purge function . . . . . . . . . . . . 4-12
Figure 5-1. No Gas Is Being Supplied troubleshooting flow chart . . . . . . . . . . . . . . . . . 5-2
Figure 5-2. Set Point and Flow Output Do Not Match troubleshooting flow chart . . . . . 5-3
Figure 5-3. Unstable Flow or Insufficient Output Exists troubleshooting flow chart . . . 5-5
Figure 6-1. Dimensions for standard MFC models with 1/4″VCR fitting . . . . . . . . . . 6-34
Figure 6-2. Dimensions of block-type MFC models . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37
Figure 6-3. Dimensions for high temperature MFC models . . . . . . . . . . . . . . . . . . . . 6-38
Figure 6-4. MFC label example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
List of Figures

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5700512-C List of Tables xiii
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Table 1-1. Standard MFC model numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Table 1-2. Block-type MFC model numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Table 1-3. High temperature MFC model numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Table 4-1. 20-pin connector signal descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Table 4-2. 9-pin connector signal descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Table 5-1. AE Global Services locations (USA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6
Table 5-2. European sales and service offices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
Table 5-3. European sales representative contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5-4. Middle East sales and service contacts . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
Table 5-5. Pacific Rim sales and service offices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Table 6-1. Specifications for FC-770 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Table 6-2. Specifications for FC-771 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Table 6-3. Specifications for FC-772 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Table 6-4. Specifications for FC-780HT series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Table 6-5. Specifications for FC-780 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Table 6-6. Specifications for FC-780X series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Table 6-7. Specifications for FC-781HT series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Table 6-8. Specifications for FC-781 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Table 6-9. Specifications for FC-782 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10
Table 6-10. Specifications for FC-785 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Table 6-11. Specifications for FC-785T-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-12
Table 6-12. Specifications for model FC-785X-B MFC . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Table 6-13. Specifications for FC-785Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-14
Table 6-14. Specifications for FC-786 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Table 6-15. Specifications for FC-786T-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-16
Table 6-16. Specifications for FC-786Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-17
Table 6-17. Specifications for FC-790 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18
Table 6-18. Specifications for FC-791 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19
Table 6-19. Specifications for FC-795 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20
Table 6-20. Specifications for FC-795T-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-21
Table 6-21. Specifications for FC-796 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22
Table 6-22. Specifications for FC-7700 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-23
Table 6-23. Specifications for FC-7710 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-24
Table 6-24. Specifications for FC-7720 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-25
Table 6-25. Specifications for FC-7800 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
Table 6-26. Specifications for FC-7810 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-27
Table 6-27. Specifications for FC-7820 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
Table 6-28. Specifications for FC-7850Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . 6-29
Table 6-29. Specifications for FC-7810 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-30
Table 6-30. Specifications for FC-7820 series MFCs . . . . . . . . . . . . . . . . . . . . . . . . . 6-31
Table 6-31. Specifications for FC-7850Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . 6-32
Table 6-32. Specifications for FC-785Y-B series MFCs . . . . . . . . . . . . . . . . . . . . . . . 6-33
List of Tables

xiv List of Tables 5700512-C
Advanced Energy®
Table 6-33. Dimensions for standard models in mm (and inches) . . . . . . . . . . . . . . . 6-34
Table 6-34. Dimensions for block-type models in mm (and inches) . . . . . . . . . . . . . . 6-37
Table 6-35. Dimensions of high temperature MFC units in mm (and inches) . . . . . . . 6-38
Table 6-36. Dimensions of high temperature PCB units in mm (and inches) . . . . . . . 6-38
Table 6-37. Calibration references . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39

5700512-C Safety and Product Compliance Guidelines 1-1
Chapter
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs Chapter
1
Safety and Product Compliance
Guidelines
IMPORTANT SAFETY INFORMATION
To ensure safe installation and operation of the Advanced Energy®MFC, read and
understand this manual before attempting to install and operate this unit. At a
minimum, read and follow the safety instructions and practices documented under
“Safety Guidelines” on page 1-6.
MODEL NUMBERS FOR THIS MANUAL
This manual applies to the MFC model numbers shown in the following tables:
•Table 1-1 on page 1-1 shows standard MFC model numbers covered by this
manual
•Table 1-2 on page 1-3 shows block-type MFC model numbers covered by this
manual
•Table 1-3 on page 1-4 shows high temperature MFCs covered by this manual.
Table 1-1. Standard MFC model numbers
Model
Number
Control Valve External Seal Connector
Type
Normally
closed
Normally
Open
Metal Rubber
FC-770A xxCardedge
FC-770AC xxCardedge
FC-771A xxCardedge
FC-771AC xxCardedge

1-2 Safety and Product Compliance Guidelines 5700512-C
Advanced Energy®
FC-772 xxCardedge
FC-772C xxCardedge
FC-780 xx Cardedge
FC-780C xxCardedge
FC-781 xx Cardedge
FC-781C xxCardedge
FC-782 xx Cardedge
FC-782C xxCardedge
FC-780X xx Cardedge
FC-780XC xxCardedge
FC-790 x x Honda 20-pin
FC-790C x x Honda 20-pin
FC-791 x x Honda 20-pin
FC-791C x x Honda 20-pin
FC-795 x x Honda 20-pin
FC-795C x x Honda 20-pin
FC-796 x x Honda 20-pin
FC-796C x x Honda 20-pin
FC-7700 xxCardedge
FC-7700C xxCardedge
FC-7700CD x x Subminiature-D
FC-7700CU xxCardedge
FC-7710 xxCardedge
FC-7710C xxCardedge
FC-7710CD x x Subminiature-D
FC-7710CU xxCardedge
FC-7720 xxCardedge
FC-7720C xxCardedge
FC-7720CD x x Subminiature-D
FC-7800 xx Cardedge
FC-7800C xxCardedge
FC-7800CD x x Subminiature-D
Table 1-1. Standard MFC model numbers (Continued)
Model
Number
Control Valve External Seal Connector
Type
Normally
closed
Normally
Open
Metal Rubber

5700512-C Safety and Product Compliance Guidelines 1-3
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
FC-7800CU xxCardedge
FC-7810 xx Cardedge
FC-7810C xxCardedge
FC-7810CD x x Subminiature-D
FC-7810CU xxCardedge
FC-7820 xx Cardedge
FC-7820C xxCardedge
FC-785 x x Honda 20-pin
FC-785C x x Honda 20-pin
FC-786 x x Honda 20-pin
FC-786C x x Honda 20-pin
Table 1-2. Block-type MFC model numbers
Model
Number
Control Valve Connector Position
Normally
closed
Normally
Open
Vertical Lateral
FC-7850Y-B xx
FC-7850CY-B xx
FC-785Y-B xx
FC-785CY-B xx
FC-786Y-B xx
FC-786CY-B xx
FC-785X-B xx
FC-785XC-B xx
FC-785T-B xx
FC-785CT-B xx
FC-786T-B xx
FC-786CT-B xx
FC-795T-B xx
Table 1-1. Standard MFC model numbers (Continued)
Model
Number
Control Valve External Seal Connector
Type
Normally
closed
Normally
Open
Metal Rubber

1-4 Safety and Product Compliance Guidelines 5700512-C
Advanced Energy®
INTERPRETING THE MANUAL
The following sections explain the document type conventions and the danger,
warning, and caution boxes that provide information about the specific levels of
hazard seriousness.
Type Conventions
Please note the following type conventions:
• Pin and signal names appear in capitalized italics (POWER_ON).
• New terms appear in italicized text.
• Unit labels (switches, indicators, and so on) appear in boldface text (MODIFY).
• Commands (stx) appear in boldface, lowercase text.
FC-795CT-B xx
Note: All of these models use a Honda 20-pin connector, have metal
external seals, and have a connection with a flange fitting.
Table 1-3. High temperature MFC model numbers
Model
Number
Control Valve External Seal Connector
Type
Normally
closed
Normally
Open
Metal Rubber
FC-780HT x x Card edge
FC-780CHT x x Card edge
FC-781HT x x Card edge
FC-781CHT x x Card edge
Table 1-2. Block-type MFC model numbers (Continued)
Model
Number
Control Valve Connector Position
Normally
closed
Normally
Open
Vertical Lateral

5700512-C Safety and Product Compliance Guidelines 1-5
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Danger, Warning, and Caution Boxes
This symbol represents important notes concerning potential harm to people, this unit,
or associated equipment. Advanced Energy®includes this symbol in Danger,
Warning, and Caution boxes to identify specific levels of hazard seriousness.
Interpreting Product Labels
The following labels may appear on your unit:
DANGER indicates an imminently hazardous situation that, if not
avoided, will result in death or serious injury. DANGER is limited to the
most extreme situations.
WARNING indicates a potentially hazardous situation that, if not avoided,
could result in death or serious injury, and/or property damage.
CAUTION indicates a potentially hazardous situation that, if not avoided,
could result in minor or moderate injury, and/or damage to property.
CAUTION is also used for property-damage-only accidents.
CE label
Refer to manual for more
information

1-6 Safety and Product Compliance Guidelines 5700512-C
Advanced Energy®
SAFETY GUIDELINES
Review the following information before attempting to install and operate the product.
• Do not install substitute parts or perform any unauthorized modification to the
MFC.
• Service and repair the MFC only at authorized service centers to ensure that all
safety features are maintained.
• Do not remove MFC covers. Component replacement and internal adjustments
must be made by qualified service personnel only.
• If hazardous materials are used, observe the proper safety precautions, completely
purge the MFC when necessary, and ensure that the material used is compatible
with sealing materials.
• After installing the MFC, or before its removal from a system, purge the MFC
completely with a clean, dry gas to eliminate all traces of the previously used flow
material.
• This MFC should be purged by qualified personnel following standard company
procedures.
• Do not operate this product in an explosive environment.
• Ensure that all MFC fittings are consistent with MFC specification and
compatible with the intended use of the MFC.
• Before proceeding with the MFC setup, carefully check all plumbing connections
to ensure leak-tight installation.
• Never operate this MFC at pressures higher than the rated maximum pressure.
(Refer to “Model Specifications” on page 6-1 for maximum allowable pressure
specifications.)
Do not attempt to install or operate this equipment if you have not first
reviewed this manual.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.