Aerotech AGV-HP Series User manual

Revision: 1.05.00
AGV-HP(O) 2-Axis Galvo
Scanner Hardware Manual

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101 Zeta Drive
Pittsburgh, PA 15238-2811
www.aerotech.com
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This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the
express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and
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Copyright © 2015-2020, Aerotech, Inc., All rights reserved.

Table of Contents
AGV-HP(O) 2-Axis Galvo Scanner Hardware Manual 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 6
Laser Safety 7
Classes of Lasers 7
Laser Area 8
Laser Shutter 8
EU Declaration of Incorporation 10
Chapter 1: Overview 11
1.1. Environmental Specifications 16
1.2. Accuracy and Temperature Effects 17
1.2.1. Power-On Thermal Drift 17
1.3. Basic Specifications 18
1.4. Vacuum Operation 20
Chapter 2: Mechanical Specifications and Installation 21
2.1. Unpacking and Handling the ScanHead 21
2.2. Dimensions 23
2.3. Securing the Scan Head to the Mounting Surface 37
2.4. Attaching the Focal Lens to the Scan Head 39
2.5. Air Requirements 41
2.6. Water Requirements 42
Chapter 3: Electrical Specifications and Installation 43
3.1. Motor and Feedback Connectors 44
3.2. Motor and Feedback Wiring 46
3.3. Motor and Feedback Specifications 48
3.4. Limits, Marker, and Machine Direction 49
3.5. Motor and Feedback Phasing 51
Chapter 4: Maintenance 53
4.1. Service and Inspection Schedule 53
4.2. Cleaning and Lubrication 54
4.2.1. Focal Lens and Protective Glass 54
4.2.2. Turning Mirrors 56
4.3. Troubleshooting 57
Appendix A: Warranty and Field Service 59
Appendix B: Revision History 61
Index 63
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AGV-HP(O) Hardware Manual Table of Contents

List of Figures
Figure 1-1: Functional Principle of a 2-Axis Galvanometer Scanner 11
Figure 1-2: Standard AGV-HP 12
Figure 1-3: Standard AGV-HPO 12
Figure 2-1: AGV10HP-BE1 Galvanometer Scanner Dimensions 23
Figure 2-2: AGV10HP-BE2 Galvanometer Scanner Dimensions 24
Figure 2-3: AGV10HPO-BE1 Galvanometer Scanner Dimensions 25
Figure 2-4: AGV10HPO-BE2 Galvanometer Scanner Dimensions 26
Figure 2-5: AGV14HP-BE1 Galvanometer Scanner Dimensions 27
Figure 2-6: AGV14HP-BE2 Galvanometer Scanner Dimensions 28
Figure 2-7: AGV14HPO-BE1 Galvanometer Scanner Dimensions 29
Figure 2-8: AGV14HPO-BE2 Galvanometer Scanner Dimensions 30
Figure 2-9: AGV20HP-BE1 Galvanometer Scanner Dimensions 31
Figure 2-10: AGV20HP-BE2 Galvanometer Scanner Dimensions 32
Figure 2-11: AGV20HPO-BE1 Galvanometer Scanner Dimensions 33
Figure 2-12: AGV20HPO-BE2 Galvanometer Scanner Dimensions 34
Figure 2-13: AGV30HP-BE1 Galvanometer Scanner Dimensions 35
Figure 2-14: AGV30HPO-BE1 Galvanometer Scanner Dimensions 36
Figure 2-15: Example of F-Theta Lens (Complete Assembly) 39
Figure 2-16: Assembly of Focal Lens to Scan Head (AGV-HP(O)) 40
Figure 2-17: Air-Cooling (-AC) Locations 41
Figure 2-18: Water Cooling (-WC) Locations 42
Figure 3-1: Motor and Feedback Wiring 47
Figure 3-2: -BE1 Galvo X-Axis Machine Direction (front) 49
Figure 3-3: -BE1 Galvo Y-Axis Machine Direction (side) 49
Figure 3-4: -BE2 Galvo X-Axis Machine Direction (front) 50
Figure 3-5: -BE2 Galvo Y-Axis Machine Direction (side) 50
Figure 3-6: Analog Encoder Phasing Reference Diagram 51
List of Figures AGV-HP(O) Hardware Manual
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List of Tables
Table 1-1: Ordering Options 13
Table 1-2: F-Theta Lens Options(1,2,3,4) 14
Table 1-3: Environmental Specifications 16
Table 1-4: AGV-HP(O) Series Specifications 18
Table 1-5: AGV-HP(O) Series Mirror Specifications 19
Table 3-1: Motor and Feedback Connector Pinouts 45
Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connector 45
Table 3-3: Aerotech Motor and Feedback Cable Part Numbers 46
Table 3-4: Wire Gauge and Insulation Specifications 46
Table 3-5: Motor and Feedback Specifications 48
Table 4-1: Troubleshooting 57
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AGV-HP(O) Hardware Manual List of Tables

Safety Procedures and Warnings
This manual tells you how to carefully and correctly use and operate the AGV-HP(O).
lRead all parts of this manual before you install or operate the AGV-HP(O) or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
If you do not understand the information in this manual, contact Aerotech Global Technical
Support.
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
D A N G E R : Reduce the possibility of electrical shock, bodily injury, or death. This product
contains potentially lethal voltages.
lOperators must be trained before operating this equipment.
lAll service and maintenance must be performed by qualified personnel.
lDisconnect electrical power before servicing equipment.
lDo not connect or disconnect any electrical components or connecting cables while
connected to a power source.
lRestrict access to the AGV-HP(O) and component parts while the AGV-HP(O) is
connected to a power source.
lAll components must be properly grounded in accordance with local electrical safety
requirements.
lOperator safeguarding requirements must be addressed during final integration of the
product.
D A N G E R : Lasers.
lWear eye protection.
lBe aware of the possibility of visible and/or invisible laser radiation. Avoid eye or skin
exposure to direct or scattered radiation.
D A N G E R : Compressed Air.
lWear eye protection when in the proximity of compressed air components.
lThe noise from some compressed air components could be loud enough to require ear
protection.
W A R N I N G : To prevent damage to the equipment:
lOperators must be trained before operating this equipment.
lAll service and maintenance must be performed by qualified personnel.
lDo not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to
the equipment.
Safety Procedures and Warnings AGV-HP(O) Hardware Manual
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lUse care when moving the AGV-HP(O). Lifting or transporting the AGV-HP(O) improperly
can result in injury or damage to the AGV-HP(O).
lThe AGV-HP(O) must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
W A R N I N G : Cables can pose a tripping hazard. Securely mount and position all system
cables to avoid potential hazards.
W A R N I N G : Wear clean, powder-free gloves when you handle optical components.
Laser Safety
It is the responsibility of the user to provide the necessary conditions for safe operation of a laser system and
to safeguard the surrounding area against the hazards that can be caused by laser radiation. The user must
ensure compliance with all local and national regulations.
Although the scan head by itself does not emit laser radiation, the user must undertake a thorough analysis
of system safety before operating the AGV-HP(O) in conjunction with a laser source. Important information
for performing this analysis is presented in this manual. Additional information may be found in the
corresponding documentation supplied by the manufacturer of the laser source.
Classes of Lasers
The AGV-HP(O) series scan head can be used with a variety of lasers. Each laser is assigned a particular
hazard level, which is indicated by the Laser Class label that is affixed to the device near the location where
laser radiation is emitted. Brief descriptions of each of the various radiation classes are presented in the
table below.
Note that in addition to the dangers of radiation, lasers may pose further dangers, such as the risk of
electrical shock or the generation of poisonous fumes.
Classifications of Laser Devices
Class Danger
Class I Inherently safe; no possibility of eye damage during normal operation.
Class IIa Requires in excess of 1000 seconds of continuous viewing to cause eye dam-
age.
Class II The blink reflex will prevent eye damage, unless the person deliberately stares
into the beam for an extended period of time.
Class IIIa
Mostly dangerous in combination with optical instruments which change the
beam diameter or power density. However, even without optical enhancement,
direct contact for over two minutes may cause eye damage.
Class IIIb Direct exposures of 0.01 second or less may cause eye and skin damage.
Class IV Direct or scattered radiation without optical enhancement may cause eye and
skin damage.
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AGV-HP(O) Hardware Manual Laser Safety

Laser Area
The area in which the maximum permitted radiation value can be exceeded is defined as the laser area. In
general, a laser area is applicable to Class IIIa, IIIb and IV laser systems. A laser area may also be produced
by focusing the beam of a Class I, IIa, or II laser device.
The AGV-HP(O) has the capability of aiming the laser beam over an approximately pyramidal volume. When
the scan head is used in conjunction with a laser device capable of generating a sufficiently intense beam, a
laser area will be produced that includes the aiming volume as well as the reflections from all objects that
can be exposed to the radiation. It is important to note that even apparently diffuse surfaces can reflect laser
radiation and a laser beam that has been reflected several times can still be dangerous.
The laser area must be designated by suitable warning signs or lamps and protected by appropriate shading
and interlock switches.
Figure 1: Laser Area of an AGV-HP(O) Scan Head
Laser Shutter
A laser attenuator (beam shutter) is a mechanical or electrical device that blocks the emission of laser
radiation. It is a requirement for most classes of laser systems. The attenuator must be available for use at
all times during operation of the laser system. Power switches and key controls do not satisfy the attenuator
requirement.
The AGV-HP(O) scan head does not include a laser attenuator, and therefore it cannot block or weaken the
laser beam. Due to the unique properties of each laser, it is the user’s responsibility to incorporate an
appropriate shutter as per any and all applicable regulations in order to prevent unwanted emission of the
laser beam.
Laser Area AGV-HP(O) Hardware Manual
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The beam shutter should be fitted between the laser source and the scan head (refer to Figure 1).
W A R N I N G : Do no stare into the laser beam, place your body parts in the beam path, or
expose yourself to reflections from powerful beams.
W A R N I N G : Only a Class 1 HeNe laser is recommended for performing alignments. If this is
not possible, use the lowest power setting on the available laser and employ remote beam
sensing techniques.
W A R N I N G : Wear eye protection. The danger to your eyes increases when optical
instruments are used in conjunction with the scan head.
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AGV-HP(O) Hardware Manual Laser Shutter

EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
AGV-HP(O) Scan Head
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred to in
this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 RoHS3 Directive
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name
/ Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 7/1/2020
EU Declaration of Incorporation AGV-HP(O) Hardware Manual
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Chapter 1: Overview
A 2-axis galvanometer scanner is used to deflect a laser beam in the X and Y directions. The laser can be
directed to any position within the two-dimensional area, which is called the “marking field”. Deflection of the
laser beam is accomplished by two mirrors, each of which is actuated by a galvano motor. Every scan head
includes a beam entrance aperture, into which the laser beam is fed, and a beam exit aperture, through which
the laser beam is emitted from the unit after deflection. Only suitable lasers of the appropriate wavelength,
power level, beam diameter, etc., may be fed into the beam entrance aperture. Contact the factory for mirror
and coating details. Depending on the options selected for the particular scan head, the beam exit aperture
may be either open or fitted with a focal lens.
Figure 1-1: Functional Principle of a 2-Axis Galvanometer Scanner
Integration Flexibility
Most scanner control interfaces are on the same surface as the laser input aperture which can create
interference problems if the laser beam path approaches the scanner from the top. The AGV-HP(O) control
connections are two 25-pin D-style connectors.The scanner cables can be oriented in any direction and
terminated on the machine to ensure there is no interference with beam delivery. The AGV-HPO is also
available with right-side and left-side input apertures for “mirror image” machine builds or side-by-side
scanner mounting with a single laser beam split to source both scanners.
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AGV-HP(O) Hardware Manual Chapter 1: Overview

Figure 1-2: Standard AGV-HP
Figure 1-3: Standard AGV-HPO
Chapter 1: Overview AGV-HP(O) Hardware Manual
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Table 1-1: Ordering Options
AGV-HP(O)Series High Performance Galvanometer Scanner
AGV10HP 2-axis galvanometer scanner with 10 mm diameter beam aperture
and integral high-precision feedback
AGV14HP 2-axis galvanometer scanner with 14 mm diameter beam aperture
and integral high-precision feedback
AGV20HP 2-axis galvanometer scanner with 20 mm diameter beam aperture
and integral high-precision feedback
AGV30HP 2-axis galvanometer scanner with 30 mm diameter beam aperture
and integral high-precision feedback
Housing Type (Required)
- Closed scanner housing (AGVxxHP)
O Open scanner housing (AGVxxHPO)
Beam Entry Orientation (Required)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-BE1 Right-side
(standard)
Right-side
(standard)
Right-side
(standard)
Right-side
(standard)
-BE2 Left-side Left-side Left-side N/A
Wavelength of Mirror Coating(1) (Required)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-W001 10.6 µm
-W002 Durable Silver (450 nm-10.6 µm)
-W003 1552 nm
-W004 1064 nm
-W005 1030 nm
-W006 532 nm
-W007 515 nm
-W008 355 nm
-W009 343 nm
-W012 9.3 µm
NOTE: Custom coatings available. Contact factory for details.
F-Theta Lenses Available (Optional)
-Lxx See Table 1-2 for standard F-Theta Lens options
Mounting Plate (Optional)
-MP Mounting plate
Air Cooling (Optional, refer to Section 2.5.)
-AC Air cooling
Water Cooling (Optional, refer to Section 2.6.)
-WC Water cooling
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AGV-HP(O) Hardware Manual Chapter 1: Overview

Table 1-2: F-Theta Lens Options(1,2,3,4)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-L1
Wavelength 1552 nm -- 10.6 µm 10.6 µm
Focal Length 100 mm -- 100 mm 255 mm
Design Telecentric -- Telecentric --
-L2
Wavelength 1552 nm -- 10.6 um 1064 nm
Focal Length 163 mm -- 160 mm 200 mm
Design Telecentric -- -- --
-L3
Wavelength 1064 nm 1552 nm 10.6 um 1064 nm
Focal Length 100 mm 100 mm 255 mm 255 mm
Design Telecentric Telecentric -- --
-L4
Wavelength 1064 nm 1552 nm 1064 nm 1064 nm
Focal Length 100 mm 163 mm 100 mm 500 mm
Design Telecentric Telecentric Telecentric --
-L5
Wavelength 1064 nm 1064 nm 1064 nm --
Focal Length 160 mm 100 mm 163 mm --
Design -- -- -- --
-L6
Wavelength 1064 nm 1064 nm 1064 nm --
Focal Length 163 mm 100 mm 163 mm --
Design Telecentric Telecentric Telecentric --
-L7
Wavelength 1030 nm 1064 nm 1064 nm --
Focal Length 100 mm 160 mm 255 mm --
Design Telecentric -- -- --
-L8
Wavelength 1030 nm 1064 nm 532 nm --
Focal Length 163 mm 163 mm 255 mm --
Design Telecentric Telecentric -- --
-L9
Wavelength 532 nm 1064 nm -- --
Focal Length 100 mm 170 mm -- --
Design -- -- -- --
-L10
Wavelength 532 nm 1030 nm -- --
Focal Length 100 mm 100 mm -- --
Design Telecentric Telecentric -- --
-L11
Wavelength 532 nm 1030 nm -- --
Focal Length 160 mm 163 mm -- --
Design -- Telecentric -- --
-L12
Wavelength 532 nm 532 nm -- --
Focal Length 163 mm 100 mm -- --
Design Telecentric Telecentric -- --
-L13
Wavelength 515 nm 532 nm -- --
Focal Length 100 mm 160 mm -- --
Design Telecentric -- -- --
(1) Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e^2 Gaussian profile.
(2) Reported field-of-view (FOV) sizes are approximate and may be subject to minor variation as a function of the application’s laser
and optical parameters. Contact factory for details.
(3) Custom lenses available. Contact factory for details.
(4) Certain F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations).
Contact factory for alternate lens options that are compatible with short-pulse lasers.
Chapter 1: Overview AGV-HP(O) Hardware Manual
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F-Theta Lens Options (Continued)(1,2,3,4)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-L14
Wavelength 515 nm 532 nm -- --
Focal Length 163 mm 163 mm -- --
Design Telecentric Telecentric -- --
-L15
Wavelength 355 nm 532 nm -- --
Focal Length 53 mm 170 mm -- --
Design Telecentric -- -- --
-L16
Wavelength 355 nm 515 nm -- --
Focal Length 100 mm 100 mm -- --
Design Telecentric Telecentric -- --
-L17
Wavelength 355 nm 515 nm -- --
Focal Length 160 mm 163 mm -- --
Design -- Telecentric -- --
-L18
Wavelength 355 nm 355 nm -- --
Focal Length 163 mm 53 mm -- --
Design Telecentric Telecentric -- --
-L19
Wavelength 355 nm 355 nm -- --
Focal Length 255 mm 163 mm -- --
Design -- Telecentric -- --
-L20
Wavelength -- 355 nm -- --
Focal Length -- 255 mm -- --
Design -- -- -- --
-L21
Wavelength -- 343 nm -- --
Focal Length -- 53 mm -- --
Design -- Telecentric -- --
-L22
Wavelength -- 343 nm -- --
Focal Length -- 163 mm -- --
Design -- Telecentric -- --
-L23
Wavelength -- 343 nm -- --
Focal Length -- 255 mm -- --
Design -- -- -- --
(1) Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e^2 Gaussian profile.
(2) Reported field-of-view (FOV) sizes are approximate and may be subject to minor variation as a function of the application’s laser
and optical parameters. Contact factory for details.
(3) Custom lenses available. Contact factory for details.
(4) Certain F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse durations).
Contact factory for alternate lens options that are compatible with short-pulse lasers.
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AGV-HP(O) Hardware Manual Chapter 1: Overview

1.1. Environmental Specifications
W A R N I N G : Do not expose this product to environments or conditions outside of the listed
specifications. Exceeding environmental or operating specifications can cause damage to the
equipment.
Table 1-3: Environmental Specifications
Ambient
Temperature
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below sea
level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical vibration
can affect system performance. Contact Aerotech for information regarding your
specific application.
Protection
Rating
The AGV-HP(O) has some protection from contamination due to laser marking and
cutting processes. However, the scan head is not sealed. Dust and fumes generated
by the laser machining process should be removed via an adequate exhaust or vacuum
system. Failure to control this debris could result in damage to the scan head and the
focal lens.
Use Indoor use only
1.1. Environmental Specifications AGV-HP(O) Hardware Manual
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1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes
could cause a decrease in performance or permanent damage to the AGV-HP(O). At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the AGV-HP(O)
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the AGV-HP(O) is
mounted. Contact the factory for more details.
1.2.1. Power-On Thermal Drift
For the best possible accuracy and repeatability, it is recommended that the +5 V feedback power supply be
connected to the galvano motors for a minimum of four hours prior to performing any critical operations with
the AGV-HP(O). Application of the feedback power supply can raise the temperature of the galvano motors,
resulting in a transient period of "power-on" thermal drift. Allowance for this warm-up period provides the
galvano motors sufficient time to achieve thermal equilibrium.
In applications where a mark-and-measure calibration is performed to improve accuracy, it is essential that
the calibration procedure not be conducted prior to completion of the warm-up period. Otherwise, the
calibration may not be effective due to the change in zero offset that can result from the "power-on" thermal
drift.
To minimize delays in operating the AGV-HP(O), it is recommended that the +5 V feedback power supply is
continuously maintained to the galvano motors, even when they are not under servo control.
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AGV-HP(O) Hardware Manual 1.2. Accuracy and Temperature Effects

1.3. Basic Specifications
Table 1-4: AGV-HP(O) Series Specifications
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
Optical Performance(1)
Beam Aperture 10 mm 14 mm 20 mm 30 mm
Maximum Scan Angle ±20°
Beam Displacement 12.6 mm 16.5 mm 23.2 mm 35.7 mm
Feedback Resolution 0.012 µrad (25 bit)
Dither (2)
(Minimum Incremental Motion) < 0.4 µradRMS
Accuracy 50 µrad pk-pk
Repeatability (3) 0.4 µradRMS
Gain Error 0.05 mrad
Non-Linearity 0.005%
Dynamic Performance
Tracking Error 0 µsec
Peak Acceleration (4,5) 288,000 m/s2224,000 m/s280,000 m/s256,000 m/s2
Continuous Acceleration (4,6) 75,200 m/s256,000 m/s220,800 m/s219,200 m/s2
Positioning Speed (4) 75 m/s 75 m/s 50 m/s 50 m/s
Marking Speed (4,7,8) 5 m/s
Jump & Settle Time, 1 mm Move (4,9) 270 µsec 270 µsec 450 µsec 700 µsec
Stability
Long-Term Drift (3) Offset 10 µrad/12 hrs
15 µrad/24 hrs
Gain 10 ppm/24 hrs
Thermal Drift Offset 10 µrad/°C
Gain 1 ppm/°C
Mechanical Specifications
Mass (AGV-HP) 4.1 kg 4.4 kg 5.1 kg 5.8 kg
Mass (AGV-HPO) 2.5 kg 2.6 kg 2.9 kg 3.1 kg
Material Aluminum (Black Anodize and Blue Paint)
Mean Time Before Failure 20,000 Hours
1. All angles are optical unless otherwise noted.
2. Without -AC air cooling option.
3. After initial 3 hour warm-up, ambient temperature variation < ±0.5°.
4. Typical performance with f = 160 mm F-Theta objective.
5. Based on maximum rated current of the motor.
6. Based on rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value
without water cooling.
7. Achievable with <1% velocity error over continuous velocity portion of move.
8. Marking speed is dependent on allowable tracking error.
9. Settled to within 1% of move distance.
All specifications are per axis unless otherwise noted.
1.3. Basic Specifications AGV-HP(O) Hardware Manual
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Table 1-5: AGV-HP(O) Series Mirror Specifications
Cooling
Option
AGV-HP(O)
Size
Wavelength Coating
-W1 -W2 -W3 -W4 -W5 -W6 -W7 -W8 -W9 -W12
Maximum CW
Laser Power (W)
No
Cooling
AGV10 40 5 40 40 40 10 10 10 10 40
AGV14 200 25 200 200 200 50 50 50 50 200
AGV20 300 50 300 300 300 100 100 100 100 300
AGV30 500 100 500 500 500 150 150 150 150 500
Air
Cooling
AGV10 80 10 80 80 80 20 20 20 20 80
AGV14 400 50 400 400 400 100 100 100 100 400
AGV20 600 100 600 600 600 200 200 200 200 600
AGV30 1000 200 1000 1000 1000 300 300 300 300 1000
Air and
Water
Cooling
AGV10 240 30 240 240 240 60 60 60 60 240
AGV14 1200 150 1200 1200 1200 300 300 300 300 1200
AGV20 1800 300 1800 1800 1800 600 600 600 600 1800
AGV30 3000 600 3000 3000 3000 900 900 900 900 3000
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AGV-HP(O) Hardware Manual 1.3. Basic Specifications

1.4. Vacuum Operation
Contact the factory for information regarding operation in a vacuum environment.
1.4. Vacuum Operation AGV-HP(O) Hardware Manual
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