Aerotech AGV-SPO Series User manual

Revision 2.00
AGV-SPO Single Pivot-Point Galvo Scanner
HARDWAREMANUAL

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only and may be trademarks of their respective companies.
Copyright © 2019-2021, Aerotech, Inc., All rights reserved.

Table of Contents
AGV-SPO Single Pivot-Point Galvo Scanner 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
Laser Safety 9
Classes of Lasers 9
Laser Area 10
Laser Shutter 11
EU Declaration of Incorporation 13
Chapter 1: Overview 15
1.1. Environmental Specifications 18
1.2. Accuracy and Temperature Effects 18
1.2.1. Power-On Thermal Drift 18
1.3. Basic Specifications 19
1.4. Vacuum Operation 20
Chapter 2: Mechanical Specifications and Installation 21
2.1. Unpacking and Handling the ScanHead 22
2.2. Dimensions 23
2.3. Securing the Scan Head to the Mounting Surface 24
2.4. Attaching the Focal Lens to the Scan Head 26
2.5. Air Requirements 28
2.6. Water Requirements 29
Chapter 3: Electrical Specifications and Installation 31
3.1. Motor and Feedback Connectors 32
3.2. Motor and Feedback Wiring 34
3.3. Motor and Feedback Specifications 35
3.4. Limits, Marker, and Machine Direction 36
3.5. Feedback Phasing 37
Chapter 4: Maintenance 39
4.1. Service and Inspection Schedule 39
4.2. Cleaning and Lubrication 39
4.2.1. Focal Lens and Protective Glass 40
4.2.2. Turning Mirrors 41
4.3. Troubleshooting 42
Appendix A: Warranty and Field Service 43
Appendix B: Revision History 45
Index 47
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List of Figures
Figure 1-1: Single Point Scanner Component Diagram 15
Figure 1-2: Standard AGV-SPO 16
Figure 2-1: AGV14SPO Galvanometer Scanner Dimensions 23
Figure 2-2: Example of F-Theta Lens (Complete Assembly) 26
Figure 2-3: Assembly of Focal Lens to Scan Head (AGV-SPO) 27
Figure 2-4: Air-Cooling (-AC) Locations 28
Figure 2-5: Water Cooling (-WC) Locations 29
Figure 3-1: Galvo X-Axis Machine Direction (front) 36
Figure 3-2: Galvo Y-Axis Machine Direction (side) 36
Figure 3-3: Analog Encoder Phasing Reference Diagram 37
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List of Tables
Table 1-1: Ordering Options 17
Table 1-2: Environmental Specifications 18
Table 1-3: AGV-SPO Series Specifications 19
Table 1-4: AGV14SPO Series Mirror Specifications 19
Table 3-1: Motor and Feedback Connector Pinouts 33
Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connector 33
Table 3-3: Aerotech Motor and Feedback Cable Part Numbers 34
Table 3-4: Motor and Feedback Specifications 35
Table 4-1: Troubleshooting 42
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
AGV-SPO.
lRead all parts of this manual before you install or operate the galvo or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
The voltage can cause shock, burn, or death.
You are at risk of physical injury.
You could damage the galvo.
A surface can be hot enough to burn you.
Your actions, the temperature of the system, or the condition of the atmosphere
that surround the system could start a fire.
You are at risk of physical injury because of exposure to lasers.
You are at risk of physical injury because of exposure to high pressure in the
system.
Unsecured cables could cause you to:
ltrip and fall
ldrag the product off of its mounting location
ldamage the cable connections.
A blue circle symbol is an action or tip that you should obey. Some examples
include:
lGeneral tip
lRead the manual/section
lWear protective safety equipment (eye protection, ear protection, gloves)
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DANGER: To decrease the risk of electrical shock, injury, death, and damage to the
equipment, obey the precautions that follow.
lElectrical installation must be done by qualified personnel.
lBefore you do maintenance to the equipment, disconnect the electrical power.
lBefore you connect wires to this product, disconnect the electrical power.
lDo not connect or disconnect electrical components, wires, and cables while this
product is connected to a power source.
lRestrict access to the galvo when it is connected to a power source.
lMake sure that all components are grounded correctly and that they obey the local
electrical safety requirements.
lSupply each operator with the necessary protection from live electrical circuits.
lInstall the necessary precautions to supply safety and protection to the operator.
lIt is the responsibilty of the system integrator or qualified installer to determine and
meet all safety and compliance requirements when they integrate the AGV-SPO into
a completed system.
IMPORTANT: The protective ground connection of the AGV-SPO provides motor frame
ground protection only. Additional ground and safety precautions are required for
applications that require access to the AGV-SPO while it is energized.
DANGER: Use of this product increases the risk of exposure to visible and/or invisible
laser radiation.
lDo not stare into the laser beam, put your body parts in the laser area, or expose
yourself to reflections from powerful beams.
lWear certified laser safety eye protection.
lAvoid eye or skin exposure to direct or scattered radiation.
DANGER: High pressure air can cause severe injury.
lLock out the source and bleed off the pressure before you do service to the equip-
ment.
lWear eye protection.
lWear ear protection.
WARNING: To prevent damage to the equipment and decrease the risk of electrical
shock and injury, obey the precautions that follow.
lOnly trained operators should operate this equipment.
lUse this product only in environments and operating conditions that are approved in
this manual.
lMake sure that the product is securely mounted before you operate it.
lAll service and maintenance must be done by approved personnel.
lKeep the scan head free of foreign matter and moisture to prevent a reduction in its
performance and life expectancy.
WARNING: Securely mount and position all system cables.
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IMPORTANT: Carefully lift, move, and transport this product.
IMPORTANT: Fingerprints contain aggressive substances that can damage optical
surfaces. Wear clean, powder-free gloves when you handle optical components.
Laser Safety
It is the responsibility of the user to provide the necessary conditions for safe operation of a laser
system and to safeguard the work area against the dangers that can be caused by laser radiation.
The user must ensure compliance with all local and national regulations.
Although the scan head by itself does not emit laser radiation, the user must undertake a thorough
analysis of system safety before they operate the AGV-SPO in conjunction with a laser source.
Important information for performing this analysis is presented in this manual. Look for additional
information in the corresponding documentation supplied by the manufacturer(s) of the laser
source and other system components.
Classes of Lasers
The AGV-SPO series scan head can be used with a variety of lasers. Each laser is assigned a particular
hazard level, which is indicated by the Laser Class label that is affixed to the device near the location
where laser radiation is emitted. Brief descriptions of each of the various radiation classes are
presented in the table below.
Note that in addition to the dangers of radiation, lasers can pose further dangers, such as the risk of
electrical shock or the generation of poisonous fumes.
Classifications of Laser Devices
Class Danger
Class I Inherently safe; no possibility of eye damage during normal operation.
Class IIa Requires in excess of 1000 seconds of continuous viewing to cause eye
damage.
Class II The blink reflex will prevent eye damage, unless the person deliberately
stares into the beam for an extended period of time.
Class IIIa
Mostly dangerous in combination with optical instruments which
change the beam diameter or power density. However, even without
optical enhancement, direct contact for over two minutes could cause
eye damage.
Class IIIb Direct exposures of 0.01 second or less could cause eye and skin
damage.
Class IV Direct or scattered radiation without optical enhancement could cause
eye and skin damage.
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Laser Area
The area in which the maximum permitted radiation value can be exceeded is defined as the laser
area. In general, a laser area is applicable to Class IIIa, IIIb and IV laser systems. A laser area can also
be produced if you focus the beam of a Class I, IIa, or II laser device.
The AGV-SPO can aim the laser beam over an approximately pyramidal volume. When the scan head
is used in conjunction with a laser device that can generate a sufficiently intense beam, a laser area
will be produced that includes the aiming volume as well as the reflections from all objects that can
be exposed to the radiation. It is important to note that even apparently diffuse surfaces can reflect
laser radiation and a laser beam that has been reflected several times can still be dangerous.
The laser area must be designated by suitable warning signs or lamps and protected by appropriate
shading and interlock switches.
Figure 1: Laser Area of an AGV-SPO Scan Head
Laser Area AGV-SPO Hardware Manual
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Laser Shutter
A laser attenuator (beam shutter) is a mechanical or electrical device that blocks the emission of
laser radiation. It is a requirement for most classes of laser systems. The attenuator must be
available for use at all times when the laser system is operated. Power switches and key controls do
not satisfy the attenuator requirement.
The AGV-SPO scan head does not include a laser attenuator, and therefore it cannot block or weaken
the laser beam. Due to the unique properties of each laser, it is the responsibility of the user to
incorporate an appropriate shutter as per any and all applicable regulations in order to prevent
unwanted emission of the laser beam.
Place the beam shutter between the laser source and the scan head (refer to Figure 1).
DANGER: The danger to your eyes increases when optical instruments are used in
conjunction with the scan head.
lWear certified laser safety eye protection.
lDo not stare into the laser beam, put your body parts in the laser area, or expose
yourself to reflections from powerful beams.
WARNING: Aerotech recommends that you only use a Class 1 HeNe laser to do
alignments. If a Class 1 HeNe laser is not available, use the lowest power setting on the
available laser and remote beam sensing techniques.
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EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
AGV-SPO Scan Head
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 12/15/2021
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Chapter 1: Overview
A 2-axis galvanometer scanner is used to deflect a laser beam in the X and Y directions. The laser can
be directed to any position within the two-dimensional area, which is called the “marking field”. The
single pivot-point galvanometer scanner directs the beam so that the pivot point for the X direction
is at the same point in space as the pivot point for the Y direction. This is accomplished by rotating 3
turning mirrors, each of which is actuated by a galvano motor. Every scan head includes a beam
entrance aperture, into which the laser beam is fed, and a beam exit aperture, through which the
laser beam is emitted from the unit after deflection. Only suitable lasers of the appropriate
wavelength, power level, beam diameter, etc., may be fed into the beam entrance aperture. Contact
the factory for mirror and coating details. Depending on the options selected for the particular scan
head, the beam exit aperture may be either open or fitted with a focal lens.
Figure 1-1: Single Point Scanner Component Diagram
The AGV-SPO control connections consist of three 300 mm cables terminated in 25-pin D-style
connectors. These cables can be oriented in any direction and terminated on the machine to ensure
there is no interference with beam delivery.
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Figure 1-2: Standard AGV-SPO
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Table 1-1: Ordering Options
AGV-SPOSeries High Performance Galvanometer Scanner
AGV14SPO 2-axis single pivot point galvanometer scanner with 14 mm diameter beam aperture
and integral high-precision feedback
Wavelength of Mirror Coating(1) (Required)
-W001 10.6 µm
-W004 1064 nm
-W006 532 nm
-W008 355 nm
-W009 343 nm
NOTE: Custom coatings available. Contact factory for details.
F-Theta Lenses Available (Optional)
-Lxx Contact the factory for F-Theta Lens options
Air Cooling (Optional, refer to Section 2.5.)
-AC Air cooling
Water Cooling (Optional, refer to Section 2.6.)
-WC Water cooling
Lens Mounting Adapter (To be Ordered as a Separate Line Item)
LMxx Lens mounting adapter for AGV14SPO. Standard versions support the lens
configurations offered by Aerotech. Custom versions available upon request.
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1.1. Environmental Specifications
WARNING: Use this product only in environments and operating conditions that are
approved in this manual.
Table 1-2: Environmental Specifications
Ambient
Temperature
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should
be packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
The AGV-SPO has some protection from contamination due to laser marking and
cutting processes. However, the scan head is not sealed. Dust and fumes
generated by the laser machining process should be removed via an adequate
exhaust or vacuum system. Failure to control this debris could result in damage
to the scan head and the focal lens.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature
changes could cause a decrease in performance or permanent damage to the AGV-SPO. At a
minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to
ensure the AGV-SPO specifications are repeatable over an extended period of time. The severity of
temperature effects on all specifications depends on many different environmental conditions,
including how the AGV-SPO is mounted. Contact the factory for more details.
1.2.1. Power-On Thermal Drift
For the best possible accuracy and repeatability, it is recommended that the +5 V feedback power
supply be connected to the galvano motors for a minimum of four hours prior to performing any
critical operations with the AGV-SPO. Application of the feedback power supply can raise the
temperature of the galvano motors, resulting in a transient period of "power-on" thermal drift.
Allowance for this warm-up period provides the galvano motors sufficient time to achieve thermal
equilibrium.
In applications where a mark-and-measure calibration is performed to improve accuracy, it is
essential that the calibration procedure not be conducted prior to completion of the warm-up
period. Otherwise, the calibration may not be effective due to the change in zero offset that can
result from the "power-on" thermal drift.
To minimize delays in operating the AGV-SPO, it is recommended that the +5 V feedback power
supply is continuously maintained to the galvano motors, even when they are not under servo
control.
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1.3. Basic Specifications
Table 1-3: AGV-SPO Series Specifications
AGV14SPO
Optical Performance(1)
Beam Aperture 14 mm
Maximum Scan Angle ±20°
Beam Displacement 35 mm
Dither (Minimum Incremental Motion)(2) 0.3 µradRMS
Accuracy 50 µrad pk-pk
Repeatability(3) 0.6 µradRMS
Gain Error 0.05 mrad
Non-Linearity 0.005%
Dynamic Performance
Tracking Error 0 µsec
Peak Acceleration(4,5) 60,000 m/s2
Continuous Acceleration (4,6) 20,000 m/s2
Positioning Speed(4) 50 m/s
Marking Speed(4,7,8) 5 m/s
Jump & Settle Time, 1 mm Move(4,9) 700 µsec
Stability
Long-Term Drift (3) Offset 10 µrad/12 hrs
15 µrad/24 hrs
Gain 10 ppm/24 hrs
Thermal Drift Offset 20 µrad/°C
Gain 1 ppm/°C
Mechanical Specifications
Mass 5.1 kg
Material Aluminum (Black Anodize and Blue Paint)
Mean Time Before Failure 20,000 Hours
NOTE:All specifications are per axis unless noted.
(1) All angles are optical unless otherwise noted.
(2) Without -AC air cooling option.
(3) After an initial four hour warm-up, expect an ambient temperature variation of < ±0.5°.
(4) Typical performance with f = 160 mm F-Theta objective.
(5) Based on the maximum rated current of the motor.
(6) Based on the rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of
this value without water cooling.
(7) Achievable with <1% velocity error over continuous velocity portion of move.
(8) Marking speed is dependent on allowable tracking error.
(9) Settled to within 1% of move distance.
Table 1-4: AGV14SPO Series Mirror Specifications
Cooling Option Wavelength Coating
-W1 -W4 -W6 -W8 -W9
Maximum CW
Laser Power (W)
No Cooling 200 200 50 50 50
Air Cooling 400 400 100 100 100
Air and Water Cooling 1200 1200 300 300 300
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1.4. Vacuum Operation
Contact the factory for information about operation in a vacuum environment.
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