Aerotech AGV-HP Series User manual

Revision 2.00
AGV-HP(O) Two-Axis Galvo Scanner
HARDWAREMANUAL

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Copyright © 2015-2021, Aerotech, Inc., All rights reserved.

Table of Contents
AGV-HP(O) Two-Axis Galvo Scanner 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
Laser Safety 9
Classes of Lasers 9
Laser Area 10
Laser Shutter 11
EU Declaration of Incorporation 13
Chapter 1: Overview 15
1.1. Environmental Specifications 20
1.2. Accuracy and Temperature Effects 20
1.2.1. Power-On Thermal Drift 20
1.3. Basic Specifications 21
1.4. Vacuum Operation 23
Chapter 2: Mechanical Specifications and Installation 25
2.1. Unpacking and Handling the ScanHead 26
2.2. Dimensions 27
2.3. Securing the Scan Head to the Mounting Surface 41
2.4. Attaching the Focal Lens to the Scan Head 43
2.5. Air Requirements 45
2.6. Water Requirements 46
Chapter 3: Electrical Specifications and Installation 47
3.1. Motor and Feedback Connectors 48
3.2. Motor and Feedback Wiring 50
3.3. Motor and Feedback Specifications 52
3.4. Limits, Marker, and Machine Direction 53
3.5. Feedback Phasing 55
Chapter 4: Maintenance 57
4.1. Service and Inspection Schedule 57
4.2. Cleaning and Lubrication 57
4.2.1. Focal Lens and Protective Glass 58
4.2.2. Turning Mirrors 59
4.3. Troubleshooting 60
Appendix A: Warranty and Field Service 61
Appendix B: Revision History 63
Index 65
AGV-HP(O) Hardware Manual Table of Contents
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List of Figures
Figure 1-1: Functional Principle of a 2-Axis Galvanometer Scanner 15
Figure 1-2: Standard AGV-HP 16
Figure 1-3: Standard AGV-HPO 16
Figure 2-1: AGV10HP-BE1 Galvanometer Scanner Dimensions 27
Figure 2-2: AGV10HP-BE2 Galvanometer Scanner Dimensions 28
Figure 2-3: AGV10HPO-BE1 Galvanometer Scanner Dimensions 29
Figure 2-4: AGV10HPO-BE2 Galvanometer Scanner Dimensions 30
Figure 2-5: AGV14HP-BE1 Galvanometer Scanner Dimensions 31
Figure 2-6: AGV14HP-BE2 Galvanometer Scanner Dimensions 32
Figure 2-7: AGV14HPO-BE1 Galvanometer Scanner Dimensions 33
Figure 2-8: AGV14HPO-BE2 Galvanometer Scanner Dimensions 34
Figure 2-9: AGV20HP-BE1 Galvanometer Scanner Dimensions 35
Figure 2-10: AGV20HP-BE2 Galvanometer Scanner Dimensions 36
Figure 2-11: AGV20HPO-BE1 Galvanometer Scanner Dimensions 37
Figure 2-12: AGV20HPO-BE2 Galvanometer Scanner Dimensions 38
Figure 2-13: AGV30HP-BE1 Galvanometer Scanner Dimensions 39
Figure 2-14: AGV30HPO-BE1 Galvanometer Scanner Dimensions 40
Figure 2-15: Example of F-Theta Lens (Complete Assembly) 43
Figure 2-16: Assembly of Focal Lens to Scan Head (AGV-HP(O)) 44
Figure 2-17: Air-Cooling (-AC) Locations 45
Figure 2-18: Water Cooling (-WC) Locations 46
Figure 3-1: Motor and Feedback Wiring 51
Figure 3-2: -BE1 Galvo X-Axis Machine Direction (front) 53
Figure 3-3: -BE1 Galvo Y-Axis Machine Direction (side) 53
Figure 3-4: -BE2 Galvo X-Axis Machine Direction (front) 54
Figure 3-5: -BE2 Galvo Y-Axis Machine Direction (side) 54
Figure 3-6: Analog Encoder Phasing Reference Diagram 55
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List of Tables
Table 1-1: Ordering Options 17
Table 1-2: F-Theta Lens Options(1,2,3,4) 18
Table 1-3: Environmental Specifications 20
Table 1-4: AGV-HP(O) Series Specifications 21
Table 1-5: AGV-HP(O) Series Mirror Specifications 22
Table 3-1: Motor and Feedback Connector Pinouts 49
Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connector 49
Table 3-3: Aerotech Motor and Feedback Cable Part Numbers 50
Table 3-4: Wire Gauge and Insulation Specifications 50
Table 3-5: Motor and Feedback Specifications 52
Table 4-1: Troubleshooting 60
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
AGV-HP(O).
lRead all parts of this manual before you install or operate the galvo or before you do
maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the
moment of the safety note or if you fail to obey the safety note.
The voltage can cause shock, burn, or death.
You are at risk of physical injury.
You could damage the galvo.
A surface can be hot enough to burn you.
Your actions, the temperature of the system, or the condition of the atmosphere
that surround the system could start a fire.
You are at risk of physical injury because of exposure to lasers.
You are at risk of physical injury because of exposure to high pressure in the
system.
Unsecured cables could cause you to:
ltrip and fall
ldrag the product off of its mounting location
ldamage the cable connections.
A blue circle symbol is an action or tip that you should obey. Some examples
include:
lGeneral tip
lRead the manual/section
lWear protective safety equipment (eye protection, ear protection, gloves)
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DANGER: To decrease the risk of electrical shock, injury, death, and damage to the
equipment, obey the precautions that follow.
lElectrical installation must be done by qualified personnel.
lBefore you do maintenance to the equipment, disconnect the electrical power.
lBefore you connect wires to this product, disconnect the electrical power.
lDo not connect or disconnect electrical components, wires, and cables while this
product is connected to a power source.
lRestrict access to the galvo when it is connected to a power source.
lMake sure that all components are grounded correctly and that they obey the local
electrical safety requirements.
lSupply each operator with the necessary protection from live electrical circuits.
lInstall the necessary precautions to supply safety and protection to the operator.
lIt is the responsibilty of the system integrator or qualified installer to determine and
meet all safety and compliance requirements when they integrate the AGV-HP(O)
into a completed system.
IMPORTANT: The protective ground connection of the AGV-HP(O) provides motor
frame ground protection only. Additional ground and safety precautions are required
for applications that require access to the AGV-HP(O) while it is energized.
DANGER: Use of this product increases the risk of exposure to visible and/or invisible
laser radiation.
lDo not stare into the laser beam, put your body parts in the laser area, or expose
yourself to reflections from powerful beams.
lWear certified laser safety eye protection.
lAvoid eye or skin exposure to direct or scattered radiation.
DANGER: High pressure air can cause severe injury.
lLock out the source and bleed off the pressure before you do service to the equip-
ment.
lWear eye protection.
lWear ear protection.
WARNING: To prevent damage to the equipment and decrease the risk of electrical
shock and injury, obey the precautions that follow.
lOnly trained operators should operate this equipment.
lUse this product only in environments and operating conditions that are approved in
this manual.
lMake sure that the product is securely mounted before you operate it.
lAll service and maintenance must be done by approved personnel.
lKeep the scan head free of foreign matter and moisture to prevent a reduction in its
performance and life expectancy.
WARNING: Securely mount and position all system cables.
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IMPORTANT: Carefully lift, move, and transport this product.
IMPORTANT: Fingerprints contain aggressive substances that can damage optical
surfaces. Wear clean, powder-free gloves when you handle optical components.
Laser Safety
It is the responsibility of the user to provide the necessary conditions for safe operation of a laser
system and to safeguard the work area against the dangers that can be caused by laser radiation.
The user must ensure compliance with all local and national regulations.
Although the scan head by itself does not emit laser radiation, the user must undertake a thorough
analysis of system safety before they operate the AGV-HP(O) in conjunction with a laser source.
Important information for performing this analysis is presented in this manual. Look for additional
information in the corresponding documentation supplied by the manufacturer(s) of the laser
source and other system components.
Classes of Lasers
The AGV-HP(O) series scan head can be used with a variety of lasers. Each laser is assigned a
particular hazard level, which is indicated by the Laser Class label that is affixed to the device near
the location where laser radiation is emitted. Brief descriptions of each of the various radiation
classes are presented in the table below.
Note that in addition to the dangers of radiation, lasers can pose further dangers, such as the risk of
electrical shock or the generation of poisonous fumes.
Classifications of Laser Devices
Class Danger
Class I Inherently safe; no possibility of eye damage during normal operation.
Class IIa Requires in excess of 1000 seconds of continuous viewing to cause eye
damage.
Class II The blink reflex will prevent eye damage, unless the person deliberately
stares into the beam for an extended period of time.
Class IIIa
Mostly dangerous in combination with optical instruments which
change the beam diameter or power density. However, even without
optical enhancement, direct contact for over two minutes could cause
eye damage.
Class IIIb Direct exposures of 0.01 second or less could cause eye and skin
damage.
Class IV Direct or scattered radiation without optical enhancement could cause
eye and skin damage.
AGV-HP(O) Hardware Manual Laser Safety
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Laser Area
The area in which the maximum permitted radiation value can be exceeded is defined as the laser
area. In general, a laser area is applicable to Class IIIa, IIIb and IV laser systems. A laser area can also
be produced if you focus the beam of a Class I, IIa, or II laser device.
The AGV-HP(O) can aim the laser beam over an approximately pyramidal volume. When the scan
head is used in conjunction with a laser device that can generate a sufficiently intense beam, a laser
area will be produced that includes the aiming volume as well as the reflections from all objects that
can be exposed to the radiation. It is important to note that even apparently diffuse surfaces can
reflect laser radiation and a laser beam that has been reflected several times can still be dangerous.
The laser area must be designated by suitable warning signs or lamps and protected by appropriate
shading and interlock switches.
Figure 1: Laser Area of an AGV-HP(O) Scan Head
Laser Area AGV-HP(O) Hardware Manual
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Laser Shutter
A laser attenuator (beam shutter) is a mechanical or electrical device that blocks the emission of
laser radiation. It is a requirement for most classes of laser systems. The attenuator must be
available for use at all times when the laser system is operated. Power switches and key controls do
not satisfy the attenuator requirement.
The AGV-HP(O) scan head does not include a laser attenuator, and therefore it cannot block or
weaken the laser beam. Due to the unique properties of each laser, it is the responsibility of the user
to incorporate an appropriate shutter as per any and all applicable regulations in order to prevent
unwanted emission of the laser beam.
Place the beam shutter between the laser source and the scan head (refer to Figure 1).
DANGER: The danger to your eyes increases when optical instruments are used in
conjunction with the scan head.
lWear certified laser safety eye protection.
lDo not stare into the laser beam, put your body parts in the laser area, or expose
yourself to reflections from powerful beams.
WARNING: Aerotech recommends that you only use a Class 1 HeNe laser to do
alignments. If a Class 1 HeNe laser is not available, use the lowest power setting on the
available laser and remote beam sensing techniques.
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EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
AGV-HP(O) Scan Head
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC
as amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General
requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to
be incorporated or of which it is to be a component has been found and declared to
be in conformity with the provisions of the Directive 2006/42/EC and with national
implementing legislation, for example, as a whole, including the equipment referred
to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following directive(s):
2011/65/EU RoHS 2 Directive
EU 2015/863 Amendment RoHS 3 Directive
Authorized
Representative / Simon Smith, European Director
Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Engineer Verifying
Compliance / Alex Weibel
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
Date 12/15/2021
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Chapter 1: Overview
A 2-axis galvanometer scanner is used to deflect a laser beam in the X and Y directions. The laser can
be directed to any position within the two-dimensional area, which is called the “marking field”.
Deflection of the laser beam is accomplished by two mirrors, each of which is actuated by a galvano
motor. Every scan head includes a beam entrance aperture, into which the laser beam is fed, and a
beam exit aperture, through which the laser beam is emitted from the unit after deflection. Only
suitable lasers of the appropriate wavelength, power level, beam diameter, etc., may be fed into the
beam entrance aperture. Contact the factory for mirror and coating details. Depending on the
options selected for the particular scan head, the beam exit aperture may be either open or fitted
with a focal lens.
Figure 1-1: Functional Principle of a 2-Axis Galvanometer Scanner
The AGV-HP(O) control connections are two 25-pin D-style connectors. The scanner cables can be
oriented in any direction and terminated on the machine to ensure there is no interference with
beam delivery. The AGV-HPO is also available with right-side and left-side input apertures for “mirror
image” machine builds or side-by-side scanner mounting with a single laser beam split to source
both scanners.
AGV-HP(O) Hardware Manual Chapter 1: Overview
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Figure 1-2: Standard AGV-HP
Figure 1-3: Standard AGV-HPO
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Table 1-1: Ordering Options
AGV-HP(O)Series High Performance Galvanometer Scanner
AGV10HP 2-axis galvanometer scanner with 10 mm diameter beam aperture
and integral high-precision feedback
AGV14HP 2-axis galvanometer scanner with 14 mm diameter beam aperture
and integral high-precision feedback
AGV20HP 2-axis galvanometer scanner with 20 mm diameter beam aperture
and integral high-precision feedback
AGV30HP 2-axis galvanometer scanner with 30 mm diameter beam aperture
and integral high-precision feedback
Housing Type (Required)
- Closed scanner housing (AGVxxHP)
O Open scanner housing (AGVxxHPO)
Beam Entry Orientation (Required)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-BE1 Right-side
(standard)
Right-side
(standard)
Right-side
(standard)
Right-side
(standard)
-BE2 Left-side Left-side Left-side N/A
Wavelength of Mirror Coating(1) (Required)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-W001 10.6 µm
-W002 Durable Silver (450 nm-10.6 µm)
-W003 1552 nm
-W004 1064 nm
-W005 1030 nm
-W006 532 nm
-W007 515 nm
-W008 355 nm
-W009 343 nm
-W012 9.3 µm
NOTE: Custom coatings available. Contact factory for details.
F-Theta Lenses Available (Optional)
-Lxx See Table 1-2 for standard F-Theta Lens options
Mounting Plate (Optional)
-MP Mounting plate
Air Cooling (Optional, refer to Section 2.5.)
-AC Air cooling
Water Cooling (Optional, refer to Section 2.6.)
-WC Water cooling
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Table 1-2: F-Theta Lens Options(1,2,3,4)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-L1
Wavelength 1552 nm -- 10.6 µm 10.6 µm
Focal Length 100 mm -- 100 mm 255 mm
Design Telecentric -- Telecentric --
-L2
Wavelength 1552 nm -- 10.6 um 1064 nm
Focal Length 163 mm -- 160 mm 200 mm
Design Telecentric -- -- --
-L3
Wavelength 1064 nm 1552 nm 10.6 um 1064 nm
Focal Length 100 mm 100 mm 255 mm 255 mm
Design Telecentric Telecentric -- --
-L4
Wavelength 1064 nm 1552 nm 1064 nm 1064 nm
Focal Length 100 mm 163 mm 100 mm 500 mm
Design Telecentric Telecentric Telecentric --
-L5
Wavelength 1064 nm 1064 nm 1064 nm --
Focal Length 160 mm 100 mm 163 mm --
Design -- -- -- --
-L6
Wavelength 1064 nm 1064 nm 1064 nm --
Focal Length 163 mm 100 mm 163 mm --
Design Telecentric Telecentric Telecentric --
-L7
Wavelength 1030 nm 1064 nm 1064 nm --
Focal Length 100 mm 160 mm 255 mm --
Design Telecentric -- -- --
-L8
Wavelength 1030 nm 1064 nm 532 nm --
Focal Length 163 mm 163 mm 255 mm --
Design Telecentric Telecentric -- --
-L9
Wavelength 532 nm 1064 nm -- --
Focal Length 100 mm 170 mm -- --
Design -- -- -- --
-L10
Wavelength 532 nm 1030 nm -- --
Focal Length 100 mm 100 mm -- --
Design Telecentric Telecentric -- --
-L11
Wavelength 532 nm 1030 nm -- --
Focal Length 160 mm 163 mm -- --
Design -- Telecentric -- --
-L12
Wavelength 532 nm 532 nm -- --
Focal Length 163 mm 100 mm -- --
Design Telecentric Telecentric -- --
-L13
Wavelength 515 nm 532 nm -- --
Focal Length 100 mm 160 mm -- --
Design Telecentric -- -- --
(1) Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e^2 Gaussian profile.
(2) Reported field-of-view (FOV) sizes are approximate and could be subject to minor variation as a function of the
application laser and optical parameters. Contact the factory for details.
(3) Custom lenses are available. Contact the factory for details.
(4) Some F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse
durations). Contact factory for alternate lens options that are compatible with short-pulse lasers.
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F-Theta Lens Options (Continued)(1,2,3,4)
AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-L14
Wavelength 515 nm 532 nm -- --
Focal Length 163 mm 163 mm -- --
Design Telecentric Telecentric -- --
-L15
Wavelength 355 nm 532 nm -- --
Focal Length 53 mm 170 mm -- --
Design Telecentric -- -- --
-L16
Wavelength 355 nm 515 nm -- --
Focal Length 100 mm 100 mm -- --
Design Telecentric Telecentric -- --
-L17
Wavelength 355 nm 515 nm -- --
Focal Length 160 mm 163 mm -- --
Design -- Telecentric -- --
-L18
Wavelength 355 nm 355 nm -- --
Focal Length 163 mm 53 mm -- --
Design Telecentric Telecentric -- --
-L19
Wavelength 355 nm 355 nm -- --
Focal Length 255 mm 163 mm -- --
Design -- Telecentric -- --
-L20
Wavelength -- 355 nm -- --
Focal Length -- 255 mm -- --
Design -- -- -- --
-L21
Wavelength -- 343 nm -- --
Focal Length -- 53 mm -- --
Design -- Telecentric -- --
-L22
Wavelength -- 343 nm -- --
Focal Length -- 163 mm -- --
Design -- Telecentric -- --
-L23
Wavelength -- 343 nm -- --
Focal Length -- 255 mm -- --
Design -- -- -- --
(1) Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e^2 Gaussian profile.
(2) Reported field-of-view (FOV) sizes are approximate and could be subject to minor variation as a function of the
application laser and optical parameters. Contact the factory for details.
(3) Custom lenses are available. Contact the factory for details.
(4) Some F-theta lenses are not recommended for use with short-pulse lasers (picosecond and femtosecond pulse
durations). Contact factory for alternate lens options that are compatible with short-pulse lasers.
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1.1. Environmental Specifications
WARNING: Use this product only in environments and operating conditions that are
approved in this manual.
Table 1-3: Environmental Specifications
Ambient
Temperature
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should
be packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
The AGV-HP(O) has some protection from contamination due to laser marking
and cutting processes. However, the scan head is not sealed. Dust and fumes
generated by the laser machining process should be removed via an adequate
exhaust or vacuum system. Failure to control this debris could result in damage
to the scan head and the focal lens.
Use Indoor use only
1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature
changes could cause a decrease in performance or permanent damage to the AGV-HP(O). At a
minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to
ensure the AGV-HP(O) specifications are repeatable over an extended period of time. The severity of
temperature effects on all specifications depends on many different environmental conditions,
including how the AGV-HP(O) is mounted. Contact the factory for more details.
1.2.1. Power-On Thermal Drift
For the best possible accuracy and repeatability, it is recommended that the +5 V feedback power
supply be connected to the galvano motors for a minimum of four hours prior to performing any
critical operations with the AGV-HP(O). Application of the feedback power supply can raise the
temperature of the galvano motors, resulting in a transient period of "power-on" thermal drift.
Allowance for this warm-up period provides the galvano motors sufficient time to achieve thermal
equilibrium.
In applications where a mark-and-measure calibration is performed to improve accuracy, it is
essential that the calibration procedure not be conducted prior to completion of the warm-up
period. Otherwise, the calibration may not be effective due to the change in zero offset that can
result from the "power-on" thermal drift.
To minimize delays in operating the AGV-HP(O), it is recommended that the +5 V feedback power
supply is continuously maintained to the galvano motors, even when they are not under servo
control.
1.1. Environmental Specifications AGV-HP(O) Hardware Manual
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