Aerotech AGV3D Series User manual

Revision 2.00
AGV3D Three-Axis Laser Scan Head
HARDWAREMANUAL

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Copyright © 2020-2021, Aerotech, Inc., All rights reserved.

Table of Contents
AGV3D Three-Axis Laser Scan Head 1
Table of Contents 3
List of Figures 4
List of Tables 5
Safety Procedures and Warnings 7
Laser Safety 9
Classes of Lasers 9
Laser Area 10
Laser Shutter 11
EU Declaration of Incorporation 13
Chapter 1: Overview 15
1.1. Environmental Specifications 18
1.2. Accuracy and Temperature Effects 19
1.2.1. Power-On Thermal Drift 19
1.3. Basic Specifications 20
1.4. Software Configuration 27
Chapter 2: Mechanical Specifications and Installation 29
2.1. Unpacking and Handling the ScanHead 30
2.2. Dimensions 31
2.3. Remove the Shipping Clamp 33
2.4. Securing the Scan Head to the Mounting Surface 35
2.5. Laser Beam Alignment 37
2.6. Air Requirements 40
2.7. Water Requirements 41
2.8. Changing the Dynamic Focusing Field-of-View Setting 42
2.9. Using an F-Theta Lens 44
Chapter 3: Electrical Specifications and Installation 45
3.1. Motor and Feedback Connectors 46
3.2. Motor and Feedback Wiring 49
3.3. Motor and Feedback Specifications 52
Chapter 4: Maintenance 53
4.1. Service and Inspection Schedule 53
4.2. Cleaning and Inspection 54
4.2.1. Protective Windows 54
4.2.2. Turning Mirrors 55
4.3. Troubleshooting 56
Appendix A: Warranty and Field Service 57
Appendix B: Revision History 59
Index 61
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List of Figures
Figure 1-1: Functional Principle of a 3-Axis Galvanometer Scanner 15
Figure 1-2: Standard AGV3D 16
Figure 1-3: Working Distance Detail 24
Figure 1-4: AGV3D-20 X/Y Axis Linear Acceleration vs Working Distance 25
Figure 1-5: AGV3D-30 X/Y Axis Linear Acceleration vs Working Distance 25
Figure 1-6: AGV3D Z-Axis Linear Acceleration vs Working Distance 26
Figure 2-1: AGV3D-20 Scan Head Dimensions 31
Figure 2-2: AGV3D-30 Scan Head Dimensions 32
Figure 2-3: Top Cover Removal 33
Figure 2-4: Shipping Clamp Detail 34
Figure 2-5: Mounting Point Locations 36
Figure 2-6: Alignment Fixture 37
Figure 2-7: Air-Cooling Locations 40
Figure 2-8: Water Cooling Locations 41
Figure 2-9: Dynamic Focusing Module Mounting Screws 42
Figure 2-10: Dynamic Focusing Module Reference 43
Figure 3-1: Connectors 46
Figure 3-2: X- and Y-Axis Motor and Feedback Wiring 50
Figure 3-3: Z-Axis Motor and Feedback Wiring 51
Figure 4-1: Exit Aperture Protective Window Mounting Bracket 55
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List of Tables
Table 1-1: Ordering Options 17
Table 1-2: Environmental Specifications 18
Table 1-3: AGV3D Series Specifications 20
Table 1-4: AGV3D Series Specifications (continued) 21
Table 1-5: AGV3D-20 Spot Diameter Range (µm) within Field of View per Wavelength 22
Table 1-6: AGV3D-30 Spot Diameter Range (µm) within Field of View per Wavelength 23
Table 1-7: FOV Extents by Field Configuration Option and Wavelength 24
Table 2-1: Mounting Hardware Specifications 36
Table 2-2: Mounting Specifications 36
Table 2-3: Recommended Beam Power Settings 38
Table 3-1: Motor and Feedback Connecter Pinouts (X and Y Axis) 47
Table 3-2: Mating Connector Part Numbers for the Motor and Feedback Connectors 47
Table 3-3: Motor and Feedback Connecter Pinout (Z Axis) 48
Table 3-4: Mating Connector Part Numbers for the Motor and Feedback Connector 48
Table 3-5: Aerotech Motor and Feedback Cable Part Numbers 49
Table 3-6: AGV3D-20 Motor and Feedback Specifications 52
Table 3-7: AGV3D-30 Motor and Feedback Specifications 52
Table 4-1: Troubleshooting 56
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Safety Procedures and Warnings
IMPORTANT: This manual tells you how to carefully and correctly use and operate the
AGV3D.
lRead all parts of this manual before you install or operate the AGV3D or before you
do maintenance to your system.
lTo prevent injury to you and damage to the equipment, obey the precautions in this
manual.
lAll specifications and illustrations are for reference only and were complete and
accurate as of the release of this manual. To find the newest information about this
product, refer to www.aerotech.com.
If you do not understand the information in this manual, contact Aerotech Global
Technical Support.
IMPORTANT: This product has been designed for light industrial manufacturing or
laboratory environments. If the product is used in a manner not specified by the
manufacturer:
lThe protection provided by the equipment could be impaired.
lThe life expectancy of the product could be decreased.
DANGER: To decrease the risk of electrical shock, injury, death, and damage to the
equipment, obey the precautions that follow.
lElectrical installation must be done by qualified personnel.
lBefore you do maintenance to the equipment, disconnect the electrical power.
lBefore you connect wires to this product, disconnect the electrical power.
lDo not connect or disconnect electrical components, wires, and cables while this
product is connected to a power source.
lRestrict access to the AGV3D when it is connected to a power source.
lMake sure that all components are grounded correctly and that they obey the local
electrical safety requirements.
lSupply each operator with the necessary protection from live electrical circuits.
lInstall the necessary precautions to supply safety and protection to the operator.
lIt is the responsibilty of the system integrator or qualified installer to determine and
meet all safety and compliance requirements when they integrate the AGV3D into a
completed system.
IMPORTANT: The protective ground connection of the AGV3D provides motor frame
ground protection only. Additional ground and safety precautions are required for
applications that require access to the AGV3D while it is energized.
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DANGER: Use of this product increases the risk of exposure to visible and/or invisible laser
radiation.
lDo not stare into the laser beam, put your body parts in the laser area, or expose
yourself to reflections from powerful beams.
lWear certified laser safety eye protection.
lAvoid eye or skin exposure to direct or scattered radiation.
DANGER: High pressure air can cause severe injury.
lLock out the source and bleed off the pressure before you do service to the equip-
ment.
lWear eye protection.
lWear ear protection.
WARNING: To prevent damage to the equipment and decrease the risk of electrical shock
and injury, obey the precautions that follow.
lOnly trained operators should operate this equipment.
lUse this product only in environments and operating conditions that are approved
in this manual.
lMake sure that the product is securely mounted before you operate it.
lAll service and maintenance must be done by approved personnel.
lKeep the scan head free of foreign matter and moisture to prevent a reduction in its
performance and life expectancy.
WARNING: Securely mount and position all system cables.
IMPORTANT: Carefully lift, move, and transport this product.
IMPORTANT: Fingerprints contain aggressive substances that can damage optical
surfaces. Wear clean, powder-free gloves when you handle optical components.
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Laser Safety
It is the responsibility of the user to provide the necessary conditions for safe operation of a laser
system and to safeguard the work area against the dangers that can be caused by laser radiation. The
user must ensure compliance with all local and national regulations.
Although the scan head by itself does not emit laser radiation, the user must undertake a thorough
analysis of system safety before they operate the AGV3D in conjunction with a laser source. Important
information for performing this analysis is presented in this manual. Additional information may be
found in the corresponding documentation supplied by the manufacturer of the laser source.
Classes of Lasers
The AGV3D series scan head can be used with a variety of lasers. Each laser is assigned a particular
hazard level, which is indicated by the Laser Class label that is affixed to the device near the location
where laser radiation is emitted. Brief descriptions of each of the various radiation classes are presented
in the table below.
Note that in addition to the dangers of radiation, lasers can pose further dangers, such as the risk of
electrical shock or the generation of poisonous fumes.
Classifications of Laser Devices
Class Danger
Class I Inherently safe; no possibility of eye damage during normal operation.
Class IIa Requires in excess of 1000 seconds of continuous viewing to cause eye
damage.
Class II The blink reflex will prevent eye damage, unless the person deliberately
stares into the beam for an extended period of time.
Class IIIa
Mostly dangerous in combination with optical instruments which change
the beam diameter or power density. However, even without optical
enhancement, direct contact for over two minutes could cause eye
damage.
Class IIIb Direct exposures of 0.01 second or less could cause eye and skin damage.
Class IV Direct or scattered radiation without optical enhancement could cause eye
and skin damage.
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Laser Area
The area in which the maximum permitted radiation value can be exceeded is defined as the laser area.
In general, a laser area is applicable to Class IIIa, IIIb and IV laser systems. A laser area can also be
produced if you focus the beam of a Class I, IIa, or II laser device.
The AGV3D can aim the laser beam over an approximately pyramidal volume. When the scan head is
used in conjunction with a laser device that can generate a sufficiently intense beam, a laser area will be
produced that includes the aiming volume as well as the reflections from all objects that can be exposed
to the radiation. It is important to note that even apparently diffuse surfaces can reflect laser radiation
and a laser beam that has been reflected several times can still be dangerous.
The laser area must be designated by suitable warning signs or lamps and protected by appropriate
shading and interlock switches.
Figure 1: Laser Area of an AGV3D Scan Head
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Laser Shutter
A laser attenuator (beam shutter) is a mechanical or electrical device that blocks the emission of laser
radiation. It is a requirement for most classes of laser systems. The attenuator must be available for use
at all times when the laser system is operated. Power switches and key controls do not satisfy the
attenuator requirement.
The AGV3D scan head does not include a laser attenuator, and therefore it cannot block or weaken the
laser beam. Due to the unique properties of each laser, it is the responsibility of the user to incorporate
an appropriate shutter as per any and all applicable regulations in order to prevent unwanted emission
of the laser beam.
Place the beam shutter between the laser source and the scan head (refer to Figure 1).
DANGER: The danger to your eyes increases when optical instruments are used in
conjunction with the scan head.
lWear certified laser safety eye protection.
lDo not stare into the laser beam, put your body parts in the laser area, or expose
yourself to reflections from powerful beams.
WARNING: Aerotech recommends that you only use a Class 1 HeNe laser to do
alignments. If a Class 1 HeNe laser is not available, use the lowest power setting on the
available laser and remote beam sensing techniques.
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EU Declaration of Incorporation
Manufacturer: Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238-2811
USA
herewith declares that the product:
AGV3D Scan Head
is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as
amended;
and that the following harmonized European standards have been applied:
EN ISO 12100:2010
Safety of machinery - Basic concepts, general principles for design
EN 60204-1:2010
Safety of machinery - Electrical equipment of machines - Part 1:General requirements
and further more declares that
it is not allowed to put the equipment into service until the machinery into which it is to be
incorporated or of which it is to be a component has been found and declared to be in
conformity with the provisions of the Directive 2006/42/EC and with national implementing
legislation, for example, as a whole, including the equipment referred to in this Declaration.
This is to certify that the aforementioned product is in accordance with the applicable requirements of the
following Directive(s):
EU 2015/863 Directive, Restricted Substances (RoHS 3)
Authorized Representative: Simon Smith, European Director
Address: Aerotech Ltd
The Old Brick Kiln, Ramsdell, Tadley
Hampshire RG26 5PR
UK
Name / Alex Weibel
Position Engineer Verifying Compliance
Location Pittsburgh, PA
Date 2/26/2021
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Chapter 1: Overview
Aerotech’s AGV3D three-axis laser scan head manipulates a laser beam in three degrees of freedom: X, Y,
and Z. The AGV3D uses two mirrors, each of which is actuated by a galvano motor, to deflect the beam
in the X and Y directions. Before the X and Y deflections, the laser beam travels through the Dynamic
Focusing Module (DFM). The DFM uses an expander lens that is mounted on a high-dynamic linear stage
and stationary optics to adjust the focus the laser beam. Change the distance between the expander
lens and the optics to adjust the focal height (Z-height of the focused spot). Use this in field-flattening
applications to eliminate the need for expensive focusing optics such as an F-theta lens, or in
applications that require different working heights in different stages of the process. The DFM in the
AGV3D can also be used to collimate the incoming laser beam to function as a beam expander to
increase the incoming beam diameter to 2.5X the original size.
The scan head enclosure is fully sealed, featuring cover glass and gaskets over both the input and exit
apertures, to make sure that no dust or particles can infiltrate the enclosure and cause damage to the
internal optical components. Only use a laser that meets the laser specifications that are listed in
Section 1.3. Basic Specifications for details.
Figure 1-1: Functional Principle of a 3-Axis Galvanometer Scanner
Integration Flexibility
The AGV3D offers mounting flexibility, with mounting hole patterns on the side, rear, and bottom faces.
The control connections consist of two 300 mm cables terminated in 25-pin D-style connectors for the X
and Y axes, and an additional 25-pin D-style connector located on the top face of the enclosure for the Z
axis. The cables can be oriented in any direction and terminated on the machine to make sure that there
is no interference with beam delivery from the control cables.
A beam alignment fixture is included with the AGV3D. Bolt the fixture to the front face of the enclosure
to help align the input laser beam to the system (refer to Section 2.5.).
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Figure 1-2: Standard AGV3D
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Table 1-1: Ordering Options
AGV3DSeries High Performance Galvanometer Scanner
Wavelength (Required)
-W001 10.6 µm
-W003 1552 nm
-W004 1064 nm
-W005 1030 nm
-W006 532 nm
-W007 515 nm
-W008 355 nm
-W009 343 nm
-W012 9.3 µm
NOTE: Custom wavelengths are available. Contact the factory for details.
Scanner Aperture (Required)
-20 20 mm Scanner Aperture
-30 30 mm Scanner Aperture
Field Configuration (Required)
-F1 Near Field of View
-F2 Far Field of View
Air Cooling (Optional, refer to Section 2.6.)
-AC Air cooling
Water Cooling (Optional, refer to Section 2.7.)
-WC Water cooling
Plate (Optional)
-MP1 Rear Mounting Plate
-MP2 Bottom Mounting Plate
Integration (Required)
-TAS
Integration - Test as system
Testing, integration, and documentation of a group of components as a complete
system that will be used together (ex: drive, controller, and stage). This includes
parameter file generation, system tuning, and documentation of the system
configuration.
-TAC
Integration - Test as components
Testing and integration of individual items as discrete components that ship together.
This is typically used for spare parts, replacement parts, or items that will not be used
together. These components may or may not be part of a larger system.
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1.1. Environmental Specifications
WARNING: Use this product only in environments and operating conditions that are
approved in this manual.
Table 1-2: Environmental Specifications
Ambient
Temperature
The optimal operating temperature is 20° C ±2° C (68° F ±4° F). If at any time the
operating temperature deviates from 20° C degradation in performance could
occur.
Storage: 0° to 40° C (32° to 104° F) in original shipping packaging
Humidity
Operating: 20% to 60% RH
Storage: 10% to 70% RH, non-condensing in original packaging. The stage should be
packaged with desiccant if it is to be stored for an extended time.
Altitude
Operating: 0 m to 2,000 m (0 ft to 6,562 ft) above sea level
Contact Aerotech if your specific application involves use above 2,000 m or below
sea level.
Vibration
Use the system in a low vibration environment. Excessive floor or acoustical
vibration can affect system performance. Contact Aerotech for information
regarding your specific application.
Protection
Rating
The AGV3D is gasketed at critical interfaces to provide some protection from
contamination due to laser marking and cutting. Dust and fumes generated by the
laser machining process should be removed through exhaust or vacuum systems.
Failure to control this debris could result in rapid contamination of the cover glass
and damage to beam delivery optical components.
Use Indoor use only
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1.2. Accuracy and Temperature Effects
Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature
changes could cause a decrease in performance or permanent damage to the AGV3D. At a minimum, the
environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the AGV3D
specifications are repeatable over an extended period of time. The severity of temperature effects on all
specifications depends on many different environmental conditions, including how the AGV3D is
mounted. Contact the factory for more details.
1.2.1. Power-On Thermal Drift
For the best possible accuracy and repeatability, it is recommended that the +5 V feedback power supply
be connected to the galvano motors for a minimum of four hours prior to performing any critical
operations with the AGV3D. Application of the feedback power supply can raise the temperature of the
galvano motors, resulting in a transient period of "power-on" thermal drift. Allowance for this warm-up
period provides the galvano motors sufficient time to achieve thermal equilibrium.
In applications where a mark-and-measure calibration is performed to improve accuracy, it is essential
that the calibration procedure not be conducted prior to completion of the warm-up period. Otherwise,
the calibration may not be effective due to the change in zero offset that can result from the "power-on"
thermal drift.
To minimize delays in operating the AGV3D, it is recommended that the +5 V feedback power supply is
continuously maintained to the galvano motors, even when they are not under servo control.
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1.3. Basic Specifications
Table 1-3: AGV3D Series Specifications
AGV3D-20 AGV3D-30
Optical Specifications
Compatible Wavelength (1) 343 nm, 355 nm, 515 nm, 532 nm, 1030 nm, 1064 nm,
1550 nm, 9.3 µm, 10.6 µm
Aperture 20 mm 30 mm
Input Beam Diameter (1/e2) 8 mm 12 mm
Beam Displacement 23.2 mm 35.7 mm
Dynamic Performance
Tracking Error 0 µsec
Peak Acceleration Galvo Scanners 500,000 rad/s2350,000 rad/s2
Z-Focus (2) 150 m/s2
Continuous Acceleration Galvo Scanners 130,000 rad/s2120,000 rad/s2
Z-Focus (2) 50 m/s2
Maximum Positioning
Speed
Galvo Scanners
300 rad/s
40 m/s at 100x100 mm FOV
400 m/s 1000x1000 mm
FOV
125 rad/s
17 m/s at 100x100 mm FOV
170 m/s at 1000x1000 mm
FOV
Z-Focus
1000 mm/s (2)
3.8 m/s at 160 mm working distance
30 m/s at 500 mm working distance
100 m/s at 1000 mm working distance
Processing Speed (3)
Galvo Scanners
50 rad/s
at 100x100 mm FOV: 6.5 m/s
at 1000x1000 mm FOV: 65 m/s
Z-Focus
500 mm/s (2)
1.9 m/s at 160 mm working distance
15 m/s at 500 mm working distance
50 m/s at 1000 mm working distance
Stability
Long-Term Drift (4) Galvo Scanners 10 µrad / 12 h
Z-Focus 0.5 μm / 12 h
Thermal Drift Galvo Scanners 10 µrad / °C
Z-Focus 2.5 μm / °C
NOTE:All angles are optical unless otherwise noted. All specifications are per axis unless noted.
(1) Contact Aerotech to inquire about additional wavelengths.
(2) As measured at the focusing apparatus.
(3) The processing speed is dependent on the allowable tracking error. It is achievable with < 2% velocity error over
continuous velocity portion of the move.
(4) After an initial three hour warm-up, expect an ambient temperature variation of < ±0.5°.
(5) Without -AC air cooling option.
(6) Air specifications:Nitrogen must be 99.99% pure and filtered to 0.25 μm. Compressed air must be filtered to 0.25 μm,
dry to 0º F dew point and oil free.
(7) The working distance is measured from the bottom surface of the scan head.
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