Air Products GASGUARD TE10 User manual

AirProducts
Installation, Operation and
Maintenance Manual for the
GASGUARD®TE10
Distribution Systems
Commodity Number: 809-609287
Revision –September 2009
Air Products and Chemicals, Inc.
1919 Vultee Street
Allentown, PA 18103
809-609287MANUAL DISTRIBUTION TE10

Introduction
Revision –September 2009 Page i - i
Manual Matrix Sheet
for the GASGUARDTE10
Distribution Systems
Commodity Number: 809-609287, Revision –September 2009
Manual Section
Revision
Level
Reason for Revision
Cover and Front
September 2009
Updated Rev History
Introduction
November 2004
First Edition
Section 1: Safety Warnings
November 2004
First Edition
Section 2: Dimensions and Mounting
November 2004
First Edition
Section 3: Tubing Connections
February 2005
NRTL Requirements
Section 4: Electrical Connections
August 2005
Updated electrical ratings
Section 5: Helium Leak Testing
November 2004
First Edition
Section 6: Distribution System
Functional Checklist
November 2004
First Edition
Section 7: System Description
September 2009
Revised to remove
password level 4
Section 8: Operating Procedures
September 2009
Revised to remove
password level 4
Section 9: Troubleshooting
November 2004
First Edition
Section 10: Maintenance
November 2004
First Edition
Section 11: System Specific Information
August 2009
Modified Spares List
Appendix A
November 2004
First Edition

GASGUARDTE10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - ii
Manual Section
Revision
Level
Reason for Revision
Appendix B
November 2004
First Edition
Appendix C
November 2004
First Edition

Introduction
Revision –September 2009 Page i - iii
Important Safety Information
Read and understand the safety warnings
section of this manual before working with
the system. Failure to do so can result in
personal injury or death.
Warnings:
Warnings, like the sample shown below are found throughout the manual to
point out hazards which could cause personal injury or death if proper
procedures are not followed:
The operator MUST read and understand
the safety section before operating the
system. All operating and maintenance
personnel must receive training and
instruction by Air Products and Chemicals,
Inc.
System Hazards:
Possible hazards when working with this system are exposure to:
Toxic Gas Hazards
Corrosive Gas Hazards
Flammable Gas Hazards
Oxidizer Hazards
Inert Gas Hazards
Pressurized Gases
Electrical Hazard
Do not make any changes to the equipment
independently. Injury or death may result
from unauthorized modifications. If
equipment needs to be modified, an Air
Products' Representative MUST be
contacted.

GASGUARDTE10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - iv
Air Products Support Systems
Emergency Response - 24 Hour Service
If an emergency occurs that cannot be alleviated by the trained operator or his/her
supervisor, call Air Products and Chemicals, Inc. on one of these telephone numbers.
From anywhere in the continental United States, Canada and Puerto Rico -
800-523-9374 (toll free)
From all other locations - 610-481-7711
FAX -610-481-3772
APCI Operator - 610-481-4911
European Community/Middle East Gases - [phone]
Technical Support Contacts
Visit:
www.airproducts.com/Products/Equipment/equipment_showcase/global_contact
s.htm
to find your Local Representative
or Call:
Canada
Canadian Technical Center Information:
Air Products Canada Ltd.
17C Enterprise Ave.
Nepean, Ontario, Canada K2G 0A7
Phone: [phone]
Fax: [phone]
USA Eastern Region Technical Center (Northeast)
102 Hayes Memorial Drive
Marlborough, MA 10752-1888
Phone: [phone]
Fax: [phone]

Introduction
Revision –September 2009 Page i - v
USA (continued)
Eastern Region Technical Center (Central East)
128 Wembly Road
New Windsor, NY 12553
Phone: [phone]
Fax: [phone]
Eastern Region Technical Center (Southeast)
P.O. Box 12837
Research Triangle Park, NC 27709
Phone: [phone]
Fax: [phone]
Mid- America Tech Center
5508 W Highway 290 Suite 150
Austin, TX 78735-8817
Phone: [phone]
Western Tech Center
2880 Lakeside Drive Suite 150
Santa Clara, CA 95054
Phone: [phone]
Pacific Northwest Tech Center
19955 SW Teton Ave
Tualatin, OR 97062
Phone: [phone]
Fax: [phone]
Southwest Tech Center (New Mexico, Colorado, and Arizona)
2415 W. Erie Drive
Tempe, AZ 85282
Phone: [phone]
Fax: [phone]
Europe
Dublin Tech Center
52 Broomhill Road
Tallaght, Dublin 24 Ireland
Phone: [phone]
Fax: [phone]

GASGUARDTE10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - vi
Europe (continued)
East Kilbride Tech Center
Units 5, 6, & 6A Scottish Enterprise Technology Park
East Kilbride G75 0QD Scotland
Phone: [phone]
Nijmegen Tech Center
Ooskanaaldikj 110
6534 AL Nijmegen, The Netherlands
Phone: [phone]
Fax: [phone]
Asia Singapore Tech Center
8 Tuas Basin Link
Singapore 638762
Phone: [phone]
FAX: [phone]
Shanghai Tech Center
No. 238 Fenju Rd
WGQ Free Trade Zone
Shanghai, China. 200131
Phone: [phone] (WGQ); 86-21-6360-5096 (EAP)
Fax: [phone] (WGQ); 86-21-6360-9090 (EAP)
Factory Contact Information:
USA: Air Products and Chemicals, Inc.
Semiconductor Equipment Manufacturing Center
1919 Vultee Street
Allentown, PA 18103
Phone: [phone]
International: Air Products and Chemicals, Inc.
Semiconductor Equipment Manufacturing Center
1919 Vultee Street
Allentown, PA 18103
Phone: [phone]

Introduction
Revision –September 2009 Page i - vii
Table of Contents
Introduction......................................................................................................................i-xi
Section 1: Safety Warnings..............................................................................................1-1
1.1 Introduction....................................................................................................1-1
1.1.1 Level or Intensity of Hazard .......................................................................1-1
1.1.2 Hazard Types (Symbols).............................................................................1-2
1.2 Important Safety Warnings............................................................................1-3
1.3 Inert Gas Hazards...........................................................................................1-4
1.4 Pressurized Gases ..........................................................................................1-7
1.5 Electrical Hazard............................................................................................1-7
1.6 Falling Equipment Hazard.............................................................................1-8
1.7 Pinch Hazard..................................................................................................1-8
1.8 Personal Protective Equipment......................................................................1-8
1.9 Hazard Warnings...........................................................................................1-12
1.9.1 Toxic Gas Hazards......................................................................................1-13
1.9.2 Corrosive Gas Hazards...............................................................................1-14
1.9.3 Flammable and Pyrophoric Gas Hazards....................................................1-14
1.9.4 Oxygen and Other Oxidizer Hazards..........................................................1-17
1.9.5 Inert Gas Hazards........................................................................................1-18
1.9.6 Pressurized Gases .......................................................................................1-20
1.9.7 Electrical Hazards.......................................................................................1-21
1.9.8 Purge Gas Backstream Hazard....................................................................1-21
1.10 Typical Minimal Lockout or Tagout System Procedures...........................1-21
1.11 Safety Signs and Labels...............................................................................1-26
1.12 Equipment Safety Features..........................................................................1-33
1.13 Material Safety Data Sheets.........................................................................1-34
1.14 Safety Literature for Handling and Use of Instrument Nitrogen
Supply..................................................................................................................1-34
Section 2: Dimensions and Mounting..............................................................................2-1
2.1 Outline Dimensions.......................................................................................2-1
2.1.1 Outline Dimension Figures for 24” Distribution Systems (4
stick) ....................................................................................................................2-2
2.1.2 Outline Dimension Figures for 30” Distribution Systems (6
stick or 8 stick).....................................................................................................2-7
2.2 Mounting Hole Locations..............................................................................2-12
2.2.1 Rack Anchoring for 24” Distribution Systems (4 stick).............................2-13
2.2.2 Rack Anchoring for 30” Distribution Systems (6 stick or 8
stick) ....................................................................................................................2-15
Section 3: Tubing Connections........................................................................................3-1
3.1 Tubing Interconnections ................................................................................3-2
3.2 Process Line Connection ...............................................................................3-2
3.3 Vent Line .......................................................................................................3-5
3.4 Venturi Line...................................................................................................3-6

GASGUARDTE10 Distribution System Manual
Air Products and Chemicals, Inc. Page i - viii
3.5 Purge Line..................................................................................................... 3-6
3.6 Pneumatic Supply.......................................................................................... 3-7
3.6.1 Z-purge Procedure...................................................................................... 3-8
3.7 Enclosure Exhaust System Requirements..................................................... 3-9
3.7.1 Exhaust Flow Clarifications and Definitions:........................................... 3-11
3.8 Weld Shield Gas, Purge Gas Connection (Optional).................................... 3-13
3.9 Helium Leak Test Port (Optional)................................................................. 3-14
3.10 Hazardous Gas Leak Detection System (Customer Requirement)....... 3-14
Section 4: Electrical Connections ................................................................................... 4-1
4.1 Grounding Method........................................................................................ 4-2
4.2 Power Supply Connection............................................................................. 4-3
4.3 Field Connections.......................................................................................... 4-5
4.4 External I/O Communication........................................................................ 4-8
4.4.1 Supervised Inputs....................................................................................... 4-9
4.4.2 Available External I/O Communications................................................... 4-10
Section 5: Helium Leak Testing...................................................................................... 5-1
Section 6: Distribution System Functional Checklist ..................................................... 6-1
Section 7: System Description ........................................................................................ 7-1
7.1 Valve Manifold Enclosure ............................................................................ 7-1
7.2 Hazardous Gas Manifold Panel..................................................................... 7-3
7.3 Panel Schematic and Component Descriptions............................................. 7-4
7.4 GASGUARD TE10 Distribution System Controller............................. 7-8
7.4.1 The Display Screen ................................................................................... 7-9
7.5.1 Security Code Protection............................................................................ 7-12
7.5.2 Menu Operation ......................................................................................... 7-12
7.5.3 Distribution Mode Menu Operations......................................................... 7-13
7.5.4 Active Alarms ........................................................................................... 7-15
7.5.5Analog Trends............................................................................................. 7-15
7.6 Configuration Menu...................................................................................... 7-16
7.7 Manual Mode Operation ............................................................................... 7-16
Section 8: Operating Procedures..................................................................................... 8-1
8.1 Emergency Shutdown Procedure.................................................................. 8-2
8.2 Operation of the GASGUARD TE10 Distribution System Controller......... 8-4
8.3 New System Startup Procedure..................................................................... 8-8
8.4 Line Purge and Process Line Purging Procedures................................... 8-12
8.4.1 Line Purge Procedure................................................................................. 8-12
8.4.2 Rough Line Evacuation Procedure............................................................. 8-15
8.4.3 Flow Purge Procedure................................................................................ 8-16
8.5 Process Gas Flow Procedure......................................................................... 8-18
8.5.1 Start Process Gas Flow............................................................................... 8-18
8.5.2 Stop Process Gas Flow............................................................................... 8-19
8.6 Manual Mode Operation ............................................................................... 8-19
8.6.1 How to Operate in Manual Mode............................................................... 8-20
8.6.2 How to Open and Close Valves................................................................. 8-21
8.6.4 General Principles of Manual Operation.................................................... 8-23