AIT CMT-SR2000N Instruction and safety manual

Operating&Service Manual
CMT-SR2000N
SheetResistance /
ResistivityMeasurementSystem

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Contents
Chapter 1.Specifications------------------------------------------ 4
Chapter 2.Installation ----------------------------------------------- 9
Chapter 3.Hardwaremanual--------------------------------------11
Chapter 4.Softwaremanual-------------------------------------- 16
Chapter 5.Service Manual---------------------------------------- 39
A. Calibration ------------------------------------------39
B. Theoryof4-pointprobe&C.F----------------40
C. Centerposition Calibration Method-------- 43
D. Service -----------------------------------------------44
E. ProbeHeadSelection Guide-----------------45
Please check below 5items inthe package.
1. MainBody-------------------------------------------------1 set
2. PowerCable ----------------------------------------------1 e/a
3. Communication Cable --------------------------------1 e/a
4. OPSoftware (CD-Rom)-----------------------------1 e/a
5. Operation & Service Manual ------------------------1 e/a

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DECLARATIONOF CONFORMITY
Manufacturer sName: AITCo.,LTD.
Manufacturer sAddress : 103-407DigitalEmpire2, 486 Sindong,Yeongtong,
Suwon, Gyeonggi, 16681 Korea.
Declares thattheproduct.
ProductName:Sheet Resistance/ ResistivityMeasurementSystem.
Model Number:CMT-SR2000N
ProductOption :All
SupplementaryInformation:
Theproductwastested& calibratedinatypicalconfigurationwithAIT
Test System.

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Chapter1. Specifications
1.Overview
CMT-SR2000Nisafullautomaticsystemtomeasuresheetresistanceand
Resistivityformax.200mmwaferor140x140mmsquare sample, etc.
Thissystemcanbe operated byitself, furthermore, perfectremote controlis
availablebyusingaPCandexclusivesoftware,anditprovidesavariousdata
analysisfunctions.
2. Feature
ØX-Y-Zaxisfullautomaticsystem.
ØAutomatic&Manualmeasurementrange selection.
ØUpto200mm waferor140x140mm square sample capability.
ØPerfectremotecontrolbyexclusive operating software.
ØDataanalysisfunctions-2D,3Dmap,Data map, etc.
ØASTM, SEMI measurement mode.
3.Component
The systemconsistsof followingcomponents.
Ø4-pointprobe headunit.
ØAutomaticcontactunit.(Z-axis)
ØRotation sample stage (Xaxis) &Straight-line motionarm(Yaxis).
Ø200mm stage.
ØMembrane keyboardpanel.
ØLCDdisplaywindow.
ØRemote controlcommunicationport.(USB port)
ØVacuuminput port (one-touchfittingconnector).
ØOperatingSoftware.
ØStandardaccessories
-Powerconnectioncable.
-Remotecontrolcommunicationcable.(USBcable)
-Operating&Servicemanual.

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4.Specifications
ØSheetresistance measurement.
-Measuring method :Contactedbyfourpointprobe
-Measuring range :1 mohm/sq 2Mohm/sq
ØResistivitymeasurement.
-Measuring method :Contactedbyfourpointprobe
(Inputthickness)
-Measuring range :10.0 ohm·cm 200.0kohm·cm
ØCurrent Source.
-Range : 5nAto 160mA
ØMeasurementAccuracy.
- ±0.5%(Precision Resistor)
ØMeasurementRepeatability.(2σ)
-±0.15%(Precision Resistor)
ØMeasurementtime :Approx.2 ±1 sec/point
ØFourpointprobe (JANDELENG.)
-Pinspacing :25 50milsby5milincrements
Tolerance ±0.01 mm
-PinLoad:10 250 gram/pin
-Pinradius:12.5 500 microns(polished above25μ)
-Needles:Solidtungsten carbide φ0.40 mm
Ref)
-Atype : 40 micron, 100g, 1mm
-Btype : 100 micron, 100g, 1mm
-C type : 200micron, 100g, 1mm
-D type : 500micron, 100g, 1mm
-Etype : 40micron, 200g,1.59mm
5.Specimen
ØMaximum200mmWaferor140x140 squaresample.
6.Outsidedimensions
Ø254mm(W)x562mm(D)x250mm(H)
Note)The outside dimensionstake to change bymakerin caseofneed.

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7.Operating software
ØGeneralPersonalcomputer.
ØOperating system:Microsoft WindowsXPSP3/ 7Ver.
ØCommunicationmethod:USB (VirtualSerialportcommunication)
ØMeasurementData management
-Data save&load,export&import
-NFStransferviaLAN
ØVariousMeasurement Mode
-Recipe measurement :Recipe Point designationbyuser.
-Standardmeasurement:ASTM &SEMI Mode.
-Pattern measurement :49,81,121,225point,etc.
-Stepmeasurement :Pointintervaldesignation byuser.
-Manualmeasurement:Randommeasurement withcoordinate values.
ØDataAnalysisfunctions:2D,3D map,Data map, Statistics,etc.
ØUsermanagement :Userregister,selectablesecuritylevelsofuser,Login,
etc.
8.Operating environment
ØTemperaturerange:23℃±1℃
ØRelativehumidity: 30%~70%
ØAvoidplacingthe systemnearasourceofRFI, vibrationandsourcesof gas.
ØAvoidlarge changesintemperature.
9.Utilityrequirements
ØPowerrequirements(1Line)
-Line voltage: AC220Vor110V ±10%
-Electricpower:100 W, 500 mA
-Linefrequency:50/60Hz
ØVacuumrequirements(1Line)
-Vacuum:about200mmHg
-Connectionmethod: Urethanetube φ4mm (outsidediameter)

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10.MeasurementFlowchart
PowerON
Standbymode isdisplayed ontheLCD Panel.
Operating software (runonPC)
Login software
Remote mode on
(Locked keyoperation inmachine)
Setspecimenonstage
Setmeasurement mode
Setpositionto measurewith movekeys.
Pushstart button.
Start measurement.
Start measurement.
Zaxisarmdownforcontact.
Measurement.(onepoint) Full automaticmeasurement.
(Data isdisplayed onthe LCDpanel)
Data isdisplayed onthe window.
Zaxisarmup
Datasaveoranalysis.
Measurementfinish
Remote mode off
(Unlockedkeyoperation inmachine)
PowerOFF
Note)
-Blackcolorisflow forstandaloneoperation.
-Blue colorisflow forremotecontrolsbysoftware.

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11.SystemLayout
12.MeasurementLayout

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Chapter2. Installation
1.Installation &Operation Environment
ØTemperature range : 23°C ±1°C
ØRelativehumidity : 30 ~70%
ØAvoid placing the systemneara sourceofRFI, vibration and sourcesofgas.
ØAvoidlargechangesin temperature.
2.HardwareInstallation
ØPerformthe following procedure toinstallthissystem.
a. Place thissystem(CMT-SR2000N)on aflat sitewithout anyvibration.
b. Connect the powercableto ACpowersource (110Vor220V).
c. InstallCMT-SR2000NH softwareand VirtualComport driverfromCD.
(Ref. 3. SoftwareInstall)
d. Connect the communication cable between the systemand USBportinPC.
e. Connect the tubeofvacuumline to vacuumport in thissystem’srearpanel.
f. Hardware installiscompleted through above steps.

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3.SoftwareInstallation
ØPerformthe following procedure toinstallthissystem’ssoftware.
a. Operate the OS[Microsoft WindowsXPSP3 / 7Ver.] ofPC.
b. Insert the Installationdisk into CD-ROM.
c. InstallVirtualComport DriverfromCD to use USBport ofPC forcommunication.
Note)The installedVirtualComportbyVirtualComportdriverwillbe displayed on ‘Port
(Com&LPT)’in ‘DeviceManager’ofWindows.
d. Run CMT-SR2000NH setup file fromCD and followthe instruction toset up the software.
e. AfterfinishtheinstallationofCMT-SR2000NWOperation Software,agroupofCMT-
SR2000NH8xisgeneratedinthe programgroup and an icon ofCMT-SR2000NH8xisalso
generated.
f.To run the software, clickStart –Program –CMT-SR2000NH8x –SR2000nh8x.exe.
g. Forthefirsttime, log inbySetup EngineerID andPassword,andthen newusercan be
registered.
-Setup EngineerID : “aitco”
-Setup EngineerPassword: “00000000”
SetupEngineerhasthe same authorityasSystemEngineerofUserLevels.
SetupEngineer’sPassword can be changed and thedetail isin2.3ofchapter4.

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Chapter3. Hardwaremanual
1.HardwareOperating Structure
[2] Rectangle
[1] Circle
Initialize FPP
Config View
Ready [1] Unit [1] Ohm
[2] Ohm/sq
[3] Ohm.cm Thickness
[4] S Thickness
[2] Measure [1] Auto
[2] Manual
[3] Direction [1] Single
[2] Dual
[3] Config [1] Correction Factor [1] Sample Type
[2] Thickness
[3] TCR
[2] ContactError
[3] Probe S
[4] Data View

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2.keyboard Introduction
a. Key1hasitsinherent own number1inputting function and additionallyservesto moveZ-axis
armdownward. IfZ-axisarmisdownsomelittle, X-/Y-axisareunmovableand the
measurement isunavailable.
b. Key2hasitsinherent own number2inputting function and additionallyservesto moveY-axis
armtoward home positiononlyduring being pushed.
c.Key3hasitsinherent own number3inputting function and additionallyservesto moveZ-axis
upward.
d. Key4hasitsinherentown number4inputtingfunction and additionallyservesto rotatethe
sample stage(X-axis) in the right direction onlyduringbeing pushed.
e. Key5hasitsinherent own number5inputting function and additionallyservesto moveY-axis
armand the sample stage(X-axis) toward home position with being one time pushed.
f.Key6hasitsinherentown number6inputtingfunctionandadditionallyservestorotatethe
sample stage(X-axis) in the left direction onlyduringbeing pushed..
g. Key7hasinherentown number7inputting functionand additionallyservesto lowerthe
current sourceat Manualrange mode. Wheneverpushed onetime, the current downsbyone
step.
h. Key8hasitsinherent own number8inputting function and additionallyservesto moveY-axis
armforward onlyduring being pushed.
i.Key9hasitsinherent own number9inputtingfunction andadditionallyservesto heighten the
current source at Manualrange mode. Wheneverpushed one time, the current up byone step.
j. Key0and •hasitsinherent own number0 and •(decimalpoint)inputting function.
k. “Esc”keyisusedto return to the previousmode andcancelthe inputted number.
l. “Mode”keyisused toutilizemenu inwhichavarietyofenvironment can bespecified.Please
referto “Clause4 DefiningMethod ofConfiguration”.
m. “Vacuum”keyservestostickasampleonthesamplestage,inordertoavoidanymovement
ofthe sample.
n. “Enter”keyservestoapplytheinputtednumberto the configuration. Onthe contrary,ifyoudo
not want toapplytheinputted number,press “Esc”keyto remainthepreviousinputted number.
o. “Measure”keyperformsthe measurement.

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3.BriefMeasuring Method
PushthePowerSwitch(inthissystem’srearpanel)to “I”position. When theelectricpowerturns
“ON”, LCD displaysFig. 1 and thissystemperformsthe initialization.
Afterinitializing, LCD displaysall kindsof the defined valuesduring someseconds,asshowninFig.
2. Then, LCD displaysa message indicating that measurement isready,asshown inFig.3.
Fig. 1 Fig. 2 Fig. 3
Placeawaferon the centerofthe stage, fixthe waferto the stage(byusing Vacuum key),then let
probe headtotouchthesurfaceofthe wafer(byusingMeasurekey).Ifso,LCDdisplaysa
message asshowninFig. 4. When completing the measurement, LCD displaysthe measured data
asshownin Fig. 5.
Fig. 4Fig. 5
Tomeasureothersites,youcan use  key.Ifyou moveameasuring position anywhere,
using  keyand press Measure key, thissystemstartsmeasuring a wafer.
<<Contents of MeasuredData >>
a.“457.4 mΩ/sq”: Measured data forSheet Resistance.
b.“STD 586.0 mV”: Voltageapplied to innerStandardResist.
c.“SMP5.926mV”: Voltage applied to Wafer.
d.“Sheet”: Measurement unit.
e.”Single”: Measurement method.
f. “Auto”: Current range mode.
g. “Range 10Ω”: Current range used when measuring
(Range isselected among 10Ω, 100Ω,1KΩ,10KΩ, 100KΩ, 1MΩ,10MΩ, 100MΩ.When Auto
mode, the range isautomaticallyselected. When Manualmode, the rangecan be selected by
user.)
Note)Themanualrangeselectionfunction isnot supportedonoperating software.
Operating Software cansupportAuto range only.
h. “Range not found”:Errormessage incasecorrectcurrent rangeisnot found on Autorange
mode.
Measure ….
Single STD 586.0mV
SheetSMP5.926 mV
AutoRange10Ω
457.4mΩ/口
Single STD 586.0mV
SheetSMP5.926 mV
AutoRange10Ω
InitializeCMT.. Diameter………..50.00mm
Thickness………400.00um
C.F……………………4.515
Temperature.……… 9.9 ℃
Ready ….
Single STD 586.0mV
SheetSMP5.926 mV
AutoRange10Ω

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4.Defining Method ofConfiguration
Pressing Mode keydisplaysthe Menu asshowninFig6.
Fig. 6
[1]Unit
UnitModeinFig.6canchangeameasuringunitintoadesiredunitandconsistsof4modesas
shownin Fig. 7.To select adesiredunit, press the corresponding number.
In caseof[3]ohm.cmand [4]S,Thickness menu isdisplayedasshowninFig.8.Youcan enter
the film thickness ofsampleinto themenu. “Unit:[㎛]”meansthe settingunitis ㎛. “Def.:400.0”
meansthe defaultvalue is400 ㎛. “[400.00]”meansa currentlyenteredvalue.
Fig. 7Fig. 8
[2]Measure
Measurehas3 modes(See Fig.9).
-Auto :Automaticallyselectsan appropriate current value.
(Displaying “Auto”at the lowerleft-hand cornerofLCD)
-Manual:Allowsuserto select an appropriate current value.
To change a current value,use key7 and9.
(Displaying “Manual”at the lowerleft-hand cornerofLCD)
-Direction :Thismode selectsMeasurement method.It hasSingleandDualasFig. 10.User
can selectoneofthe both mode.
Fig. 9 Fig. 10
Set Measure ….[1]
1.Auto
2. Manual
3. Direction
Set Direction…[1]
[1] Single
[2] Dual
Thickness
Unit : [um]
Def. : 400.0[400.00]
>
Set Unit …[2]
[1] Ohm[2]ohm/sq
[3] Ohm.cm[4] S
Set Menu
1. Unit2.Measure
3. Config 4. DataView
5. V +/-

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[3]Config
Consistsof3 modes(See Fig. 11).
Fig. 11
1)CorrectionFactor: UserinputsSample type, Thickness, TCR(Temperature Coefficient)as
Fig.12tosetcorrection factor.TheCorrectionFactorisgeneratedby
inputtedvaluesautomatically.GeneratedCorrectionFactorisappliedto
measuring.
Fig. 12
a. SampleType : Userselectsshape ofsample asFig. 13 and diameterorsizeofthe sample.
Fig. 13
-Circle : In caseofCircle, userinputsa diameterofsample asFig. 14.
Fig. 14
-Rectangle : In caseofRectangle, userinputsa sizeofsample asFig. 15, 16, 17.
Fig. 15 Fig. 16 Fig. 17
b. Thickness: Userinputsthethickness offilmon sample. (SeeFig.8)
Rectangle…
[1] SampleX
[2] Sample Y
SampleX …
Unit : [mm]
Def.: 10.0[30.000]
>
SampleY…
Unit : [mm]
Def. : 10.0[30.000]
>
Diameter…
Unit : [mm]
Def.: 50.0[76.000]
>
Set Sample Type…[1]
[1] Circle
[2] Rectangle
Correction Factor…………
1. Sample Type
2.Thickness
3.TCR
Config…
1. CorrectionFactor
2. ProbeS

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c.TCR : UserinputsTemperature Coefficient ofsample. The defaultis0.
Fig. 18
2)ProbeS:Thisisa function to inputspace ofprobe tip. The defaultis1.0mm. (See Fig. 20)
Fig. 20
[4]Data View
Measured datacan be savedto innermemoryautomatically.Itdisplaysthe saved datawith
temperature. The maximumis28 data.
Fig. 21
[5]MotorSet(Enter+Esc).
Thisisa function toset acceleration and velocityofthree axis(X-Y-Z). The currentsettingvalues
are best that testedbymanufacturer. Pleasedon’t modifythecurrent setting value byyourself.
Note)In caseusermodifythe setting value bythemselves,ifthe machine hassomeproblem,
manufacturerisnot responsibleforthat.
DataDisplay …
1. 457.4mΩ/口9.895℃
2. 45.27 mΩ/口9.895℃
3. 45.19 mΩ/口9.895℃
Probe S…
Unit : [mm]
Def.: 1.0[1.000]
>
TCR…
Def.: 0.0[0.0000]

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Chapter4. Softwaremanual
1.Mainwindow
1.1Title Bar
Showsthe name(CMT-SR2000NH)ofcurrent operating software,andcontainsWindowControl
buttons-Min button, Closebutton.
1.2Menu Bar
Eachmenu isactivated/non-activated dependingonExcess Authorityofuser’slevel.The
function ofeachmenu issame to belowFunction Buttons.
1.3Function Buttons
1.3.1Login(SystemEng., Config. Eng., Operator)
1)UserID : Inputting User’sID.
2)Password: Inputting User’sPassword.
3)Login button : Clickafterinputting ID &Password.
1.3.2Measurement (SystemEng., Config. Eng.,Operator)
It isa mode formeasuring samples.
1.3.3Data Management (SystemEng., Config.Eng., Operator)
1)LoadData: Searching and analyzing the saved Measurement data.
2)Trend chart : Searching and analyzing the saved Trend data.

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1.3.4Remote Controls(SystemEng., Config.Eng., Operator)
1)Remote ON : On/Offcommunication connection tocontrollingtheinstrument.
Under ‘Remote On’mode, sub menusin ‘Controls’sectionisavailable.
2)Controls
①Zero Position : X&Yrobotsmove onto the centerofstage.
②Home Position : Moving parts(X,Y, Zaxis) are initialized.
③VacuumON : ON/OFF vacuumFunction.
1.3.5Configuration (SystemEng., Config. Eng.)
1)Set SampleSize :Set sample size formeasuring.
2)Edit Recipe :Creating &editing Recipe.
3)Config : Setting configurationsrelated with measurement.
1.3.6SystemEnvironment (SystemEng.)
1)Environment : Setting environment factors related withoperation.
2)UserManagement : Managing users.
1.3.7Status Bar
StatusBarshowspresentcondition and setting like Unit, AutoRetry,Errorcontrol, etc.
2.Mainmenu
2.1Login
LoginwithregisteredUserID andPassword,then see
user’sinformation includingthelevel.According tothe
level, some functionsare limited.
1)UserID : ID ofloginuser.
2)Level: leveloflogin user.
3)Name : name ofloginuser.
2.2Login/Logout
Performing login orlogout function.

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2.3Detail information
Detailedinformation ofuserisdisplayed asshowninbelow.Andusercanchangethepassword
whichwasset bySystemEngineerbeforehand.
2.4Exit
Usershould logout, and then can exit the CMT-SR2000NH software.
3.Measurementmenu
Select Measurement method and proceed.
Note)It isdisplayed a rectangularshape in case ofsoftware forrectangularsample.

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3.1Command menu
3.1.1Measure (Ctrl+M)
Performing measurement byselected measurement method. (Recipe mode, Extend measure
mode)
3.1.2ClearData(Ctrl+D)
Deleting all measured dataonlyfrom ‘Result Sheet’aftermeasurement.
3.1.3ClearAll (Ctrl+A)
Deleting all measured dataand site aftermeasurement.
3.1.4Save Data (Ctrl+S)
Savingthe measured dataaftermeasurement. Accordingtoselectionin ‘DataSaveOption’,
saving method isdistinguished asfollows.
uAsDataSave Option is ‘Default
Afterfinishingthe measurement, user
can savethe measured values.User
selectsafolderand input filenameto
save.
1)Save
The default folderisa ‘data’inprogram
folder. Usercan select otherto save.
①The nameofselected folderwillbe
recorded to Lot ID iteminside saved datafile.
②In caseuserselects ‘Autocreate savefolderwithLotID generateddateformat’functionin
‘SavefolderOption at defaultlocation’itemof ‘Envrionment’menu(See 6.1.3 Savefolder
Optionatdefaultlocation),the measured datawillbesaved infoldernamed byselected
date format(ex.YYYYMMDD)automatically.The foldernamewillberecordedtoLot ID item
inside saved datafile.
③Ifthe foldernamed byselected date format isalreadyexisted,thefolderwillbeselected.If
not, itwillcreatenew folder.
2)Cancel
Cancelto save.