AIT CMT-SR2000N Instruction and safety manual

Operating&Service Manual
CMT-SR2000N
SheetResistance /
ResistivityMeasurementSystem

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Contents
Chapter 1.Specifications------------------------------------------ 4
Chapter 2.Installation ----------------------------------------------- 9
Chapter 3.Hardwaremanual--------------------------------------11
Chapter 4.Softwaremanual-------------------------------------- 16
Chapter 5.Service Manual---------------------------------------- 39
A. Calibration ------------------------------------------39
B. Theoryof4-pointprobe&C.F----------------40
C. Centerposition Calibration Method-------- 43
D. Service -----------------------------------------------44
E. ProbeHeadSelection Guide-----------------45
Please check below 5items inthe package.
1. MainBody-------------------------------------------------1 set
2. PowerCable ----------------------------------------------1 e/a
3. Communication Cable --------------------------------1 e/a
4. OPSoftware (CD-Rom)-----------------------------1 e/a
5. Operation & Service Manual ------------------------1 e/a

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DECLARATIONOF CONFORMITY
Manufacturer sName: AITCo.,LTD.
Manufacturer sAddress : 103-407DigitalEmpire2, 486 Sindong,Yeongtong,
Suwon, Gyeonggi, 16681 Korea.
Declares thattheproduct.
ProductName:Sheet Resistance/ ResistivityMeasurementSystem.
Model Number:CMT-SR2000N
ProductOption :All
SupplementaryInformation:
Theproductwastested& calibratedinatypicalconfigurationwithAIT
Test System.

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Chapter1. Specifications
1.Overview
CMT-SR2000Nisafullautomaticsystemtomeasuresheetresistanceand
Resistivityformax.200mmwaferor140x140mmsquare sample, etc.
Thissystemcanbe operated byitself, furthermore, perfectremote controlis
availablebyusingaPCandexclusivesoftware,anditprovidesavariousdata
analysisfunctions.
2. Feature
ØX-Y-Zaxisfullautomaticsystem.
ØAutomatic&Manualmeasurementrange selection.
ØUpto200mm waferor140x140mm square sample capability.
ØPerfectremotecontrolbyexclusive operating software.
ØDataanalysisfunctions-2D,3Dmap,Data map, etc.
ØASTM, SEMI measurement mode.
3.Component
The systemconsistsof followingcomponents.
Ø4-pointprobe headunit.
ØAutomaticcontactunit.(Z-axis)
ØRotation sample stage (Xaxis) &Straight-line motionarm(Yaxis).
Ø200mm stage.
ØMembrane keyboardpanel.
ØLCDdisplaywindow.
ØRemote controlcommunicationport.(USB port)
ØVacuuminput port (one-touchfittingconnector).
ØOperatingSoftware.
ØStandardaccessories
-Powerconnectioncable.
-Remotecontrolcommunicationcable.(USBcable)
-Operating&Servicemanual.

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4.Specifications
ØSheetresistance measurement.
-Measuring method :Contactedbyfourpointprobe
-Measuring range :1 mohm/sq 2Mohm/sq
ØResistivitymeasurement.
-Measuring method :Contactedbyfourpointprobe
(Inputthickness)
-Measuring range :10.0 ohm·cm 200.0kohm·cm
ØCurrent Source.
-Range : 5nAto 160mA
ØMeasurementAccuracy.
- ±0.5%(Precision Resistor)
ØMeasurementRepeatability.(2σ)
-±0.15%(Precision Resistor)
ØMeasurementtime :Approx.2 ±1 sec/point
ØFourpointprobe (JANDELENG.)
-Pinspacing :25 50milsby5milincrements
Tolerance ±0.01 mm
-PinLoad:10 250 gram/pin
-Pinradius:12.5 500 microns(polished above25μ)
-Needles:Solidtungsten carbide φ0.40 mm
Ref)
-Atype : 40 micron, 100g, 1mm
-Btype : 100 micron, 100g, 1mm
-C type : 200micron, 100g, 1mm
-D type : 500micron, 100g, 1mm
-Etype : 40micron, 200g,1.59mm
5.Specimen
ØMaximum200mmWaferor140x140 squaresample.
6.Outsidedimensions
Ø254mm(W)x562mm(D)x250mm(H)
Note)The outside dimensionstake to change bymakerin caseofneed.

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7.Operating software
ØGeneralPersonalcomputer.
ØOperating system:Microsoft WindowsXPSP3/ 7Ver.
ØCommunicationmethod:USB (VirtualSerialportcommunication)
ØMeasurementData management
-Data save&load,export&import
-NFStransferviaLAN
ØVariousMeasurement Mode
-Recipe measurement :Recipe Point designationbyuser.
-Standardmeasurement:ASTM &SEMI Mode.
-Pattern measurement :49,81,121,225point,etc.
-Stepmeasurement :Pointintervaldesignation byuser.
-Manualmeasurement:Randommeasurement withcoordinate values.
ØDataAnalysisfunctions:2D,3D map,Data map, Statistics,etc.
ØUsermanagement :Userregister,selectablesecuritylevelsofuser,Login,
etc.
8.Operating environment
ØTemperaturerange:23℃±1℃
ØRelativehumidity: 30%~70%
ØAvoidplacingthe systemnearasourceofRFI, vibrationandsourcesof gas.
ØAvoidlarge changesintemperature.
9.Utilityrequirements
ØPowerrequirements(1Line)
-Line voltage: AC220Vor110V ±10%
-Electricpower:100 W, 500 mA
-Linefrequency:50/60Hz
ØVacuumrequirements(1Line)
-Vacuum:about200mmHg
-Connectionmethod: Urethanetube φ4mm (outsidediameter)

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10.MeasurementFlowchart
PowerON
Standbymode isdisplayed ontheLCD Panel.
Operating software (runonPC)
Login software
Remote mode on
(Locked keyoperation inmachine)
Setspecimenonstage
Setmeasurement mode
Setpositionto measurewith movekeys.
Pushstart button.
Start measurement.
Start measurement.
Zaxisarmdownforcontact.
Measurement.(onepoint) Full automaticmeasurement.
(Data isdisplayed onthe LCDpanel)
Data isdisplayed onthe window.
Zaxisarmup
Datasaveoranalysis.
Measurementfinish
Remote mode off
(Unlockedkeyoperation inmachine)
PowerOFF
Note)
-Blackcolorisflow forstandaloneoperation.
-Blue colorisflow forremotecontrolsbysoftware.

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11.SystemLayout
12.MeasurementLayout

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Chapter2. Installation
1.Installation &Operation Environment
ØTemperature range : 23°C ±1°C
ØRelativehumidity : 30 ~70%
ØAvoid placing the systemneara sourceofRFI, vibration and sourcesofgas.
ØAvoidlargechangesin temperature.
2.HardwareInstallation
ØPerformthe following procedure toinstallthissystem.
a. Place thissystem(CMT-SR2000N)on aflat sitewithout anyvibration.
b. Connect the powercableto ACpowersource (110Vor220V).
c. InstallCMT-SR2000NH softwareand VirtualComport driverfromCD.
(Ref. 3. SoftwareInstall)
d. Connect the communication cable between the systemand USBportinPC.
e. Connect the tubeofvacuumline to vacuumport in thissystem’srearpanel.
f. Hardware installiscompleted through above steps.

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3.SoftwareInstallation
ØPerformthe following procedure toinstallthissystem’ssoftware.
a. Operate the OS[Microsoft WindowsXPSP3 / 7Ver.] ofPC.
b. Insert the Installationdisk into CD-ROM.
c. InstallVirtualComport DriverfromCD to use USBport ofPC forcommunication.
Note)The installedVirtualComportbyVirtualComportdriverwillbe displayed on ‘Port
(Com&LPT)’in ‘DeviceManager’ofWindows.
d. Run CMT-SR2000NH setup file fromCD and followthe instruction toset up the software.
e. AfterfinishtheinstallationofCMT-SR2000NWOperation Software,agroupofCMT-
SR2000NH8xisgeneratedinthe programgroup and an icon ofCMT-SR2000NH8xisalso
generated.
f.To run the software, clickStart –Program –CMT-SR2000NH8x –SR2000nh8x.exe.
g. Forthefirsttime, log inbySetup EngineerID andPassword,andthen newusercan be
registered.
-Setup EngineerID : “aitco”
-Setup EngineerPassword: “00000000”
SetupEngineerhasthe same authorityasSystemEngineerofUserLevels.
SetupEngineer’sPassword can be changed and thedetail isin2.3ofchapter4.