Contents
Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
ADP/ADS
User’s manual
1/3
Edition 04 - May 98
A - Introduction
■ADP/ADS Series One ............................................. A 10
■The various versions of ADP Series One ...................... A 20
■ADP/ADS Serie One Dry pumps
for semi-conductor’s industry ....................................... A 30
■Types of monitoring systems ...................................... A 40
■Dry pump operational principle ................................. A 50
■The accessories ....................................................... A 60
■Technical characteristics............................................. A 70
B - Start-up
■Safety instructions .................................................... B 00
■Unpacking / Storage ............................................... B 10
■Positioning the pump in pumping installation ................. B 20
■Installing anti-vibration pads........................................ B 30
■Modular version - Layout .......................................... B 40
■Filling the pump oil housings ...................................... B 50
■Connection to the cooling circuit ............................... B 60
■Inert gas purge connection (N2 plug) .......................... B 70
■Nitrogen purge flow sensor ....................................... B 80
■Connection to the pumping circuit ............................. B 90
■
Electropneumatic exhaust valve connection (withdrawal)
B 100
■Pump power supply ............................................... B 110
■
Water flowrate and gas purge according to processes
... B 120
■Checking the rotational direction .............................. B 130
■Remote control plug connection (M3 monitoring) ......... B 140
■Remote control plug connection (M1 monitoring) ......... B 141
■RS 232 or RS 485 link wiring.................................. B 150
■Use of the Serial link (Service centers)........................ B 160
■Installation of silencer heating kit............................... B 170
