Alcatel ADP One Series User manual

Contents
Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
ADP/ADS
User’s manual
1/3
Edition 04 - May 98
A - Introduction
■ADP/ADS Series One ............................................. A 10
■The various versions of ADP Series One ...................... A 20
■ADP/ADS Serie One Dry pumps
for semi-conductor’s industry ....................................... A 30
■Types of monitoring systems ...................................... A 40
■Dry pump operational principle ................................. A 50
■The accessories ....................................................... A 60
■Technical characteristics............................................. A 70
B - Start-up
■Safety instructions .................................................... B 00
■Unpacking / Storage ............................................... B 10
■Positioning the pump in pumping installation ................. B 20
■Installing anti-vibration pads........................................ B 30
■Modular version - Layout .......................................... B 40
■Filling the pump oil housings ...................................... B 50
■Connection to the cooling circuit ............................... B 60
■Inert gas purge connection (N2 plug) .......................... B 70
■Nitrogen purge flow sensor ....................................... B 80
■Connection to the pumping circuit ............................. B 90
■
Electropneumatic exhaust valve connection (withdrawal) B 100
■Pump power supply ............................................... B 110
■
Water flowrate and gas purge according to processes ... B 120
■Checking the rotational direction .............................. B 130
■Remote control plug connection (M3 monitoring) ......... B 140
■Remote control plug connection (M1 monitoring) ......... B 141
■RS 232 or RS 485 link wiring.................................. B 150
■Use of the Serial link (Service centers)........................ B 160
■Installation of silencer heating kit............................... B 170

Contents
Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
ADP/ADS
User’s manual
2/3
Edition 04 - May 98
C - Operation
D - Maintenance
■Safety instructions related to maintenance ..................... D 00
■First level of maintenance........................................... D 10
■Maintenance frequency............................................. D 20
■Diagnosis and troubleshooting.................................... D 30
■Pump does not start .................................................. D 40
■The pump is running and then is showing
an alert or alarm message (followed by pump stopping) . D 50
■Pump is running - No message .................................. D 60
■«Breaker …» Alarm .................................................. D 70
■«Pressure»/«Purge N2» Alert and alarm ....................... D 80
■«Gas temp.» Alert .................................................. D 90
■«Pump temp.» Alert ................................................. D 91
■«Consumption» Alert and alarm................................ D 100
■«Water flow» Alert ................................................. D 110
■«Motor temp.» Alert or alarm.................................... D 120
■«Analogic input» Alert or alarm................................. D 130
■«E1 logic»/«E2 logic» Alert or alarm ........................ D 140
■«Valve option» Alert and alarm ................................ D 150
■«Variator» Alarm..................................................... D 160
■Start-up of the M3 monitoring system............................ C 10
■Setting the M3 monitoring system parameters ................ C 20
■M3 Monitoring system function table............................ C 30
■Use of the M3 monitoring system ................................ C 40
■Use of the M1 monitoring system ................................ C 50

Contents
Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
ADP/ADS
User’s manual
3/3
Edition 04 - May 98
Safety instructions concerning product installation, operation and
maintenance.
Our ALCATEL products are designed and tested to provide
maximum safety. However, in order to obtain the best level of
safety, the following must be observed:
- the user’s manual during product transport, installation, operation
and maintenance.
- the safety instructions signalled with the following symbol:
Symbol Meaning
Users of this equipment should be alert to level of
hazards identified by this symbol.
Warnings are used when failure to observe instructions
or precautions could result in significant damage to
equipment, and/or in injury to humans.
E - Maintenance
instructions
■Maintenance precautions (Service centers) .................... E 10
■Pump draining ......................................................... E 20
■Silencer maintenance ................................................ E 30
■Electropneumatic valve maintenance (withdrawal)........... E 40
■Freeing up the ADP .................................................. E 50

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
ADP/ADS Series One dry pumps
1/1
Dear Customer,
you have just purchased an
Alcatel dry pump. We thank
you and are proud to include
you in our customers.
This product has benefited
from Alcatel’s many years of
experience in “semiconductor”
processes and dry pumping.
For optimum performance
and to obtain full satisfaction
from this equipment, we
recommend that you study
this manual before any
intervention on your pump,
in particular, the chapter on
installation and start up.
MANUAL REFERENCE :100 448
EDITION :04 - May 1998
APPLICATIONS :
• ALL “SEMICONDUCTORS” PROCESSES
Stripping, Etching, PECVD, LPCVD, MOCVD, Epitaxy, …
• SCIENTIFIC RESEARCH
ADVANTAGES :
Easily adaptable to processes - Tested design - Vertical pumping -
Clean room compatible - Advanced monitoring system functions -
Low noise level - Low operating cost - Easy maintenance and
repairs - Anti-vibration frame - Compact.
SPECIAL FEATURES :
Multi-stage Roots technology - water-cooled multi-voltage motors -
built-in monitoring system (remote optional) - anti-dust,
sound-proof aesthetic covers, easily removed - incorporated
purge line (N2) - Quick connection - Modular design and
interchangeable parts - Easy to transport - Network compatible.

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 03 - May 97
A 10
ADP/ADS Series One
1/1
Multi-stage pump with
Roots technology
Sealed motor with liquid
cooling
Genuinely dry pump
Vertical pumping
Reliability
Easy maintenance
Pump designed for all
processes
2 versions
- well-known technology
- reliability
- no fan (clean room compatible)
- safe : no gas leak
- quiet
- multi-voltage, bi-frequency 50/60 Hz
- guaranteed by design
- guaranteed by testing
Residual gas spectrum free from hydrocarbon peaks
MTBF > 50 000 hours
- interchangeables parts
- may be performed by user
- Several equipments are available for semi-conductor’s
applications, corrosives, CVD or clean processes
Standard or modular

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 03 - May 97
A 20
The various versions of
ADP/ADS Series One
Standard version
1/3
The Standard Series pumps are fully integrated in a compact and
covered frame which includes: the monitoring system,the flowmeter
panel, the facilities panel, an OEM interface panel and the RS
232/485 serial link.
OUT
IN
Monitoring
system
Inlet port
Flowmeter panel
FRONT VIEW
REAR VIEW
Utilities panel
OEM Interface (option)
Exhaust port
RS 232/485

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 03 - May 97
A 20
The various versions of
ADP/ADS Series One
2/3
Standard version
(continued)
1 - PUMPING SYSTEMS : ADP or ADS*
* In an ADS, a Roots pump is combined with an ADP.
2 - Silencer with check
valve function
3 - Compact frame
May be equipped with
anti-vibration pads.
4 - Utilities panel with
Quick Connectors
for all utilities :
Water, gas purge, power.
5 - Two types of monitoring
system : M1 or M3 integrated
The monitoring system M1
may be remote
(optional).
6 - Flowmeter panel
with water and purge gas
flow rate settings.
1
2
3
4
5
6

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 03 - May 97
3/3
A 20
The various versions of
ADP/ADS Series One
• Footprint and volume minima
• Total flexibility of use due to its
modular possibilities of installation
• No cover for easy integration
• Guaranteed accessibility for
preventive maintenance and
repair.
The “MD” Series is composed
of a pumping unit on its frame
and various modules :
• Flowmeter panel (gas purge
and cooling water)
• Utilities panel (gas purge
and cooling connections)
• Electrical box including
monitoring (M1 or M3)
• OEM interface panel /
Remote control
By design, these modules can
be fitted to the pump frame
in the best suitable position
chosen by the user.
Apart from its mounting in the
different possible positions on the
pump frame, the electrical box
can be set remote to 5 meters
from the pump if necessary.
Modular Version
For specific uses,
Alcatel has developped
a modular version from
the series One
which offers in addition
of standard version
the following characteritics

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - May 98
A 30
ADP/ADS Series One dry pumps
for semi-conductor’s industry
1/3
Clean processes
The ADP / ADS range is designed for three types
of applications :
This concerns all applications for clean pumping (particle-free)
and non-corrosive gases (load lock pumping for example).
No nitrogen purge needed.
ADP 31/ADP 81
ADS 151/301/501
equipment
Water
Anti-suckback valve
Silencer
11
12
10
Inlet
Motor
Motor
Exhaust
13
10 - Water electrovalve 12 - Water flow sensor
11 - Water flowmeter 13 - Isolation valve
(accessory)

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - May 98
A 30
ADP/ADS Series One dry pumps
for semi-conductor’s industry
2/3
Corrosive processes This concerns all applications for pumping chlorinated,
fluorinated, crystallizable or condensable gases,
(for example : ion implantation, etching, epitaxy...).
This version contains a nitrogen injection system in all
the pump’s stages.
It is used to help evacuate pollutants produced by the process,
dilute the harmful gases present in the compression stages and
protect the mechanical parts of the pump.
Gas injection at the different stages of the pump :
The neutral gas (usually nitrogen) injection system is used
to decrease the concentration of process gases and the
condensation of gases in the pump.
The nitrogen injection
system
ADP 31/ADP 81
ADS 151/301/501
equipment
Water
Neutral gas
Anti-suckback valve
Silencer
6
9
5
10
43 2 1
78
12
11
Inlet
Exhaust
13
1 - LP1 2 - LP2 3 - LP3 4 - HP4 5 - HP5 :
Gas injection (calibrated jets with valves)
6 - Gas electrovalve 7 - Gas flowmeter
8 - N2flow sensor (optional) 9 - Pressure regulator
Cooling system:
10 - Water electrovalve 11 - Water flowmeter
12 - Water flow sensor
Accessories:
13 - Isolation valve

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - May 98
A 30
ADP/ADS Series One dry pumps
for semi-conductor’s industry
Very corrosives processes
“TC“ CVD type
3/3
Several models are available for the CVD processes which are
generating lots of quantities of particles and condensable gases
(BPSG, TEOS, LPCVD nitride…). Compared to the previous
version, the main differences are the following:
- nitrogen injection and cooling circuit are optimized to avoid
deposition and condensation.
- ADP temperature controlled device.
- extra protections of ball bearings against process particulates
are used in ADP and Roots.
ADP 81/ ADS 151/
301/501/801/1001
equipment
N2flow sensor
(optional)
6
9
5
10 43 2 1
78
10
11
12
Inlet
Water
Neutral gas
Exhaust
Anti-suckback valve
Silencer
1 - LP1 2 - LP2 3 - LP3 4 - HP4 5 - HP5 :
Neutral gas injection
6 - Shut-off valve 7 - Gas flowmeter
8 - N2 flow sensor (option) 9 - Pressure regulator
Cooling system:
10 - Water electrovalve 11 - Water flowmeter
Accessories:
12 - Isolation valve
This sensor (8) is used to warn the user when the N2flow comes
under a preset value during harsch processes
(SiH4for example).
Note : The ”TC” version (Temperature Controlled) includes an
optimized cooling circuit and a temperature regulation on the
ADP. These functions can be installed on equipment for corrosive
processes without CVD option.

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - May 98
M1 Solid-state monitoring without neutral gas control,
M3 monitoring driven by a microprocessor .
Parameters monitored :
• Water flow failure
• Electrical overloading
Monitoring system M1 can
be remote controlled.
This is a unit separated
from the frame (5 or
10 meters cable) for the
remote control and
monitoring of the pump.
A 40
Types of monitoring systems
1/1
2 types of monitoring
system
Monitoring system M1
M1 Remote monitoring
system
5 or 10 meters
Monitoring system M3 • Monitoring system controlled
by microprocessor
• LCD display of parameters
and messages
• Memorization of the 10
latest alerts and alarms
• RS 232 - RS 485 -
NETWORK links
This monitoring system can
directly be interfaced with most of the production equipments.
Parameters monitored :
• Water flow failure
• Purge flow failure
• Electrical overloading
• Purge flow and exhaust pressure
• Exhaust gas temperature
• ADP motor power
• Water flow rate
• Maintenance Time

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 03 - May 97
A 50
Dry pump
operational principle
Multi-stage Roots
principle
1/3
The ADP pump consists of 5 Roots type stages.
The two rotors rotate without touching each other.
Water
Inlet
Stage 1
(LP1) Stage 2 (LP2) Stage 3 (LP3) Stage 4 (HP4) Stage 5 (HP5)
Silencer
The three stages on the low pressure side are called “LP stages”
and the two stages on the high pressure side are called
“HP stages”.
Exhaust

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 03 - May 97
A 50
Dry pump
operational principle
Tightness
with environment
Tightness at low
pressure side
Tightness at high
pressure side
2/3
The pump bearings on the low pressure side are fitted with
ceramic ball bearings lubricated with fluorinated grease which
resists high temperatures and the possible corrosion due to
the application.
An overpressure zone is created around the bearing by
injecting a neutral gas (Purge LP1). The grease works in a
less severe vacuum and thus lasts longer.
This pressurization also prevents pumped gases from migrating
towards the bearings.
Neutral gas purging for the bearings is imperative for corrosive
processes.
The bearings are lubricated by
oil splashing.
The oil sump is sealed from
stage HP5by a trap and a
deflector.
This trap is also used :
- as a heat barrier
- as a pumped gas barrier
- to recover fluid 1- Stage HP5
2- Trap
3- Water cooling
4- HP5 purge
5- Dynamic seal
6- Lubrication disk
7- Gear casing
1
3
2
5
7
6
4

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 03 - May 97
A 50
Dry pump
operational principle
3/3
The pump in a pumping
installation
Tightness at motor side
(shaft passage)
Tightness at shutdown
The vacuum tightness is
ensured by the motor design
with built-in jacket.
This system provides total
safety regarding leaks
outside the pump and
requires no maintenance.
1- Built-in jacket
2- Motor housing
3- Electrical rotor
1
2
3
The pump is fitted with a antisuckback valve in the silencer,
preventing the exhaust being sucked back.
Process
chamber
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
Secondary
pumping
ADP
pump
SECONDARY
VACUUM
PRIMARY
VACUUM
ATMOSPHERE

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - January 98
A 60
The accessories
Isolation valve
at pump inlet
Anti-vibration pads
1/1
Principle : This valve avoids a reverse flow of particles to
the chamber and increases tightness when the
pump is switched off. It allows also to isolate
the running pump from the process.
Part Number : Several models are available in Alcatel catalog
(Manual valve, electropneumatic...).
Consult us.
Fitting : See section B 90
Principle : This device significantly reduces the vibration rate
transmitted to the floor.
Vibration force to the floor by pad: < 0,5N -
Available till 150Hz.
Part Number : ADP . . . . . . . . . . . . . .101838
ADP MD . . . . . . . . . . .101942
ADS 151/301/501 . . .101840
ADS 151/301/501 MD 101941
ADS 801/1001 . . . . . .102136
Fitting : See section B 30
Principle : This device is to be installed on the silencer in order
to avoid the gases condensation, particularly in
processes such as Aluminum etching, Polysilicon
etching, LPCVD or PECVD Nitrid.
Part Number : 110/115 V . . . . . . . . .105038
220/240 V . . . . . . . . .105037
Fitting : See section B 170
Silencer heating kit

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - May 98
A 70
Technical characteristics
1/3
* Without nitrogen supply
** According to processes (see B120)
See pumping curves at the chapter G
ADS 1001
950/1000
15835/16670
560/589
2.10-3
1.5 x 10-3
6.10-4
4.5 x 10-4
5/4
5.2
3.1
620/1377
-
160/40
ADP31
25/30
418/501
15/18
4.10-2
3.10-2
1.10-2
7 x 10-3
1000/750
1,5
0.35
160/353
130/287
40/40
3000/3600
1200/900
200/480
0 to 90000
0 to 90
< 70
30 to 100 40 to 60
ADS 801
680/750
11356/12525
400/442
2.10-3
1.5 x 10-3
6.10-4
4.5 x 10-4
10/7,5
5.2
3.10
550/1212
-
100/40
ADS 501
460/510
7682/8517
271/300
3.10-3
2.2 x 10-3
8.10-4
6 x 10-4
20/15
3
1.1
380/844
340/748
100/40
ADS 301
270/310
4509/5177
160/182
3.10-3
2.2 x 10-3
8.10-4
6 x 10-4
30/23
3
1.1
365/805
310/683
63/40
ADS 151
140/165
2338/2756
82/97
4.10-3
3.10-3
9.10-4
6.7 x 10-4
40/30
3
0.75
340/748
280/622
63/40
ADP 81
68/80
1136/1336
40/47
4.10-2
3.10-2
9.10-3
6.7 x 10-3
50/38
1,5
0.35
240/529
210/463
40/40
Units
m3/h
l/mn
cfm
rpm
mbar
torr
mbar
torr
mbar/torr
mbar/torr
volt
kW
sccm
Nl/mn
l/h
l
kg/lb
kg/lb
DN
dBA
Characteristics
Nominal flow-rate
(50/60 Hz)
Rotation speed
Ultim. pressure * (50 Hz)
maximale
Ultim. pressure * (60Hz)
maximale
Max. cont. inlet pressure
Max. exhaust pressure
Supply voltage 3Ph.
Motor power (total)
N2flow rate range
Water flow **
Gear box fluid capac.
Weight std version
Weight mod. version
Ø Inlet/Exhaust portt
Average noise level
( Modifications reserved )

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - May 98
A 70
Technical characteristics
2/3
Dimensions
Standard version
B
F H
E
A
G
95
REFOULEMENT
ASPIRATION
D
I
C
J
Inlet
Exhaust
DIMENSIONS IN MILLIMETERS
PUMP AB CD E F GH I J
ADP 31 1027 975 340 170 680 650 350 711 250 884
ADP 81 1177 1125 340 170 680 650 375 711 250 1034
ADS 151 1177 1125 398 199 875 830 520 909 278 1040
ADS 301 1177 1125 398 199 875 830 520 909 278 1040
ADS 501 1177 1125 398 199 875 830 520 909 278 1040
ADS 801 1368 1331 398 199 960 913 650 995 278 1230
ADS 1001 1510 1445 398 199 1050 945 720 1050 278 1360
DIMENSIONS IN INCHES
PUMP AB CD E F GH I J
ADP 31 40.4 38.4 13.4 6.7 26.8 25.6 13.8 28.0 9.8 22.5
ADP 81 46.3 44.3 13.4 6.7 26.8 25.6 14.8 28.0 9.8 26.0
ADS 151 46.3 44.3 15.7 7.8 34.4 32.7 20.5 35.8 10.9 26.0
ADS 301 46.3 44.3 15.7 7.8 34.4 32.7 20.5 35.8 10.9 26.0
ADS 501 46.3 44.3 15.7 7.8 34.4 32.7 20.5 35.8 10.9 26.0
ADS 801 53.8 52.4 15.7 7.8 37.8 35.9 25.6 39.2 10.9 31.2
ADS 1001 59.4 56.8 15.7 7.8 41.3 37.2 28.3 41.3 10.9 34.5

Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Edition 04 - May 98
A 70
Technical characteristics
3/3
Dimensions
Modular version
H I 15
45
GF
ED
C
J
B
A
200
EXHAUST
INLETINLET
DIMENSIONS IN MILLIMETERS
PUMP ABCDEFGHIJ
ADP 31MD 557 - 290 160 320 710 400 135 730 223
ADP 81MD 557 - 290 160 320 710 400 135 840 223
ADS 151MD 733 794 290 160 320 710 400 135 840 223
ADS 301MD 805 861 290 160 320 710 400 135 840 223
ADS 501MD 805 861 290 160 320 710 400 135 840 223
DIMENSIONS IN INCHES
PUMP ABCDEFGHIJ
ADP 31MD 21.9 - 11.4 6.3 12.6 27.9 15.7 5.3 28.7 8.8
ADP 81MD 21.9 - 11.4 6.3 12.6 27.9 15.7 5.3 33.1 8.8
ADS 151MD 28.8 31.2 11.4 6.3 12.6 27.9 15.7 5.3 33.1 8.8
ADS 301MD 31.7 33.9 11.4 6.3 12.6 27.9 15.7 5.3 33.1 8.8
ADS 501MD 31.7 33.9 11.4 6.3 12.6 27.9 15.7 5.3 33.1 8.8

B 00
Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
Safety instructions
1/2
Edition 03 - May 97
• The machines must be connected to an electrical installation in
compliance with the decree 88-1056 dated 14 Novembre 1988.
• Our products are designed to comply with current EEC
regulations. Any modification of the product made by the user is
liable to lead non-compliance with the regulations, or even to put
into doubt the EMC (ElectroMagnetic Compatibility) performance
and the safety of the product. ALCATEL declines any
responsability for such operations.
• Before any maintenance operation is perfomed by a
maintenance technician who has not received safety training
(EMC, electrical safety, chemical pollution, etc.), isolate the
product from the various energy sources (electricity, compressed
air, etc.).
• The EMC perfomance of the product is obtained on the
condition that the installation complies with the EMC rules.
In particular, in disturbed environments, it is essential to:
- use shielded cables and connections for interfaces,
- stabilize the power supply line with meshing from the
power supply source to a distance of 3m from the product inlet.
• When the main switch is set to “0“, a part of the equipment
remains energized. Live circuits are exposed and accidental
contact is possible (Energized electrical Work “Hot Work“ in
compliance with SEMI S2-93 Type 4). Before any maintenance
operation, disconnect the main electrical cable.
Risk of electrical shock Switch off the pump and
disconnect the main cable.
Do not operate inside if your
are not trained and
authorized