Alcatel IPUP A100 User manual

ALCATELVACUUMTECHNOLOGYFRANCE
98,avenuedeBrogny --- BP 2069
74009 ANNECYCedex--- France
TEL.[phone]
FAX :[phone]
IPUPA100 Instruction manual
Edition:10
Date:09/00
ManualP/N107782

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/2
IPUPA100
DearCustomer,
You havejustpurchasedanAlcateldry
pump.Wethankyouandareproudtoinclude
youasoneofourcustomers.
ThisproducthasbenefitedfromAlcatel’s
many yearsofexperienceinsemiconductor
processesand drypumping.
Foroptimumperformanceandto obtain
full satisfactionfromthisequipment,we
recommendthatyoustudythismanual
beforeanyinterventiononyourpump,in
particular,thechapteroninstallationand
startup.
Applications
lP/PIversion:forcorrosive,reactive,flammable,pyrophoric,
oxidizingprocesses.
lL/LIversion:forcleanpumping.
Advantages
lReducedvolumeandfootprint.
lLowoperatingcost.
lHighperformance(pumpingspeedandultimatepressure).
lAdvancedmonitoringfunctions.
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2/2AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100
Specialfeatures
lMulti---stageRootstechnology.
lWater---cooledmotor.
Multi---stage pumpwithroots
technology
lEstablishedtechnology.
Lownoiseandvibration
Genuinedrypump
lTotaltightness withtheenvironment.
Compactfootprint
lReducedsize23.84 inchesx11.02 inchesx11.81 inches.
(605.5mm x280 mm x300 mm).
Reducedcost ofownership
lDesignforreliability.
lReducedpowerconsumption.
lReducedwaterconsumption.
lReducedweight.
Newcontrolinterface
lAmatSPIinterface.
lAmatdevicenetinterface.
lRS232/485 interface.
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Contents
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IPUPA100 instructionmanual
IntroductionIPUPA100 operatingprincipleA10...............
IPUPA100 descriptionA20.....................
IPUPA100 monitoringsystemA30...............
IPUPA100 technicalcharacteristicsA40..........
TableofIPUPA100 partnumbersA50............
CEmarkingcertificateA60.....................
SEMIS2certificateA70........................
StartupSafetyinstructionsB00........................
Unpacking/Handling/StorageB10.............
PositioningthepumpinthepumpinginstallationB20
ConnectiontothecoolingcircuitB30.............
Inertgaspurgeconnection(N2connection)B40....
ElectricalconnectionB50......................
AmatsmartpumpinterfaceconnectionB60.......
RS232 orRS485 linkwiringB70................
ConnectiontothepumpingcircuitB80...........
OperationOperatingmodeC10..........................
StartupofthemonitoringsystemC20............
Useofthemonitoringsystemforpumping
operationC30...............................
MonitoringsystemparametersC40..............
Monitoringsystemfunctiontable
IPUPA100PversionC50.......................
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IPUPA100 instructionmanual
Operation(cont’d)Monitoringsystemfunctiontable
IPUPA100LversionC51.......................
Gaspurgeandtemperatureaccordingtothe
semiconductorprocessesC60..................
Savingandloadingofpumpconfiguration
(withmonitoringsystem)C70.....................
MonitoringsystemsettingfortransportC80.......
Useoftheserial linkC90.......................
TroubleshootingFirstleveloftroubleshootingD 10..................
DiagnosisandtroubleshootingD 20................
MessagenumbersD 30..........................
Pump doesnotstart.
Handheld displaymoduleisnotilluminatedD 40....
Pump doesnotstart.
IPUPA100 withouthandheld displaymoduleD 50...
Pump doesnotstart.
Handheld displaymoduleisilluminatedD 60.......
Pump doesnotstart.
Displayis showingamessageoranalarmD 70.....
Faultmessagedisplay.
FacilitiesproblemD 80...........................
Faultmessagedisplay.
TemperatureproblemD 90........................
Faultmessagedisplay.
PressureproblemD 100...........................
Faultmessagedisplay.
MaintenanceproblemD 110........................
Pumpisrunning.
NomessageD 120................................
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Contents
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IPUPA100 instructionmanual
MaintenanceinstructionsMaintenancefrequencyE10....................
Shippingprocedureforcontaminated pumpsE20. .
MaintenancecomponentsN2pressurizationkitF10.........................
AppendixIPUPA100 electricalblockdiagramG 10............
SafetydatasheetG 20...........................
AccessorypartnumbersG 30.....................
NOTE
Warningsareusedwhenfailuretoobserveinstructionscould
resultininjuryordeath.
Cautionsareusedwhenfailuretoobserveinstructionscould
resultinsignificantdamagetoequipmentand/orfacilities.
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ChapterA
AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/1
IPUPA100 instructionmanual
IntroductionIPUPA100 operatingprincipleA10...............
IPUPA100 descriptionA20.....................
IPUPA100 monitoringsystemA30...............
IPUPA100 technicalcharacteristicsA40..........
TableofIPUPA100 partnumbersA50............
CEmarkingcertificateA60.....................
SEMIS2certificateA70........................
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AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100 operatingprinciple
DESIGNTOMINIMIZE
POTENTIELRESIDUES
The equipmentwasdesignedtominimizepotentielresiduedeposits:
lbylimitingtheinternalvolumesthatcontaingas,
lbyinjectingN2purgeoneachpumpstagetodilutetheprocess
gas(Pversiononly),
lbyregulatingthepumptemperatureandadjustingittoeach
process inordertolimitgascondensation(Pversiononly),
lbyintegratingthesilencerinsidethepumptoreduceby---product
deposition.
MULTI---STAGEPUMPWITH
ROOTSTECHNOLOGY
IPUPA100 pumpconsistsof5Rootstypestages.
Thetworotorsrotatewithout touchingeachother.
EXHAUST
INLET
Stage5
Highpressurestage
(exhauststage)
Stage4
Transferstage
Stage3
Transferstage
Stage2
Transferstage
Stage1
Lowpressurestage
(inletstage)
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IPUPA100 operatingprinciple
TIGHTNESS WITH ENVIRONMENT
Tightness atlowpressuresideThepumpisfittedwithball bearingslubricatedwithfluorinatedgrease.
Anoverpressurezoneiscreatedaroundthebearingbyinjectinga
neutralgas.
Thepressurizationandthesealspreventpumpedgasesand powders
from migratingtowardsthebearings.
Neutralgaspurgingforthebearingsisimperativeforcorrosive
processes.
Tightness athighpressuresideThebearingsarelubricated bysplashingoil.
Theoiltrapis sealedfromstage5byatrapandadeflector.
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AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100 operatingprinciple
TIGHTNESS WITH ENVIRONMENT
(CONT’D)
Tightness atmotorside
(shaftpassage) Thevacuumtightness isensured bythemotordesignwithbuilt---in
jacket(hermeticallysealed).
This systemprovidestotalsafetyregardingleaksoutsidethepump
andrequiresnomaintenance.
Motorcasing
Electrical liner
Incorporatedliner
Tightness atshutdownThepumpisfittedwithanantisuckbackvalveinthe exhaust tube
whichpreventsthe exhaustfrombeingsucked back.
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