Alcatel IPUP A100 User manual

ALCATELVACUUMTECHNOLOGYFRANCE
98,avenuedeBrogny --- BP 2069
74009 ANNECYCedex--- France
TEL.[phone]
FAX :[phone]
IPUPA100 Instruction manual
Edition:10
Date:09/00
ManualP/N107782

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/2
IPUPA100
DearCustomer,
You havejustpurchasedanAlcateldry
pump.Wethankyouandareproudtoinclude
youasoneofourcustomers.
ThisproducthasbenefitedfromAlcatel’s
many yearsofexperienceinsemiconductor
processesand drypumping.
Foroptimumperformanceandto obtain
full satisfactionfromthisequipment,we
recommendthatyoustudythismanual
beforeanyinterventiononyourpump,in
particular,thechapteroninstallationand
startup.
Applications
lP/PIversion:forcorrosive,reactive,flammable,pyrophoric,
oxidizingprocesses.
lL/LIversion:forcleanpumping.
Advantages
lReducedvolumeandfootprint.
lLowoperatingcost.
lHighperformance(pumpingspeedandultimatepressure).
lAdvancedmonitoringfunctions.
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2/2AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100
Specialfeatures
lMulti---stageRootstechnology.
lWater---cooledmotor.
Multi---stage pumpwithroots
technology
lEstablishedtechnology.
Lownoiseandvibration
Genuinedrypump
lTotaltightness withtheenvironment.
Compactfootprint
lReducedsize23.84 inchesx11.02 inchesx11.81 inches.
(605.5mm x280 mm x300 mm).
Reducedcost ofownership
lDesignforreliability.
lReducedpowerconsumption.
lReducedwaterconsumption.
lReducedweight.
Newcontrolinterface
lAmatSPIinterface.
lAmatdevicenetinterface.
lRS232/485 interface.
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Contents
AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/3
IPUPA100 instructionmanual
IntroductionIPUPA100 operatingprincipleA10...............
IPUPA100 descriptionA20.....................
IPUPA100 monitoringsystemA30...............
IPUPA100 technicalcharacteristicsA40..........
TableofIPUPA100 partnumbersA50............
CEmarkingcertificateA60.....................
SEMIS2certificateA70........................
StartupSafetyinstructionsB00........................
Unpacking/Handling/StorageB10.............
PositioningthepumpinthepumpinginstallationB20
ConnectiontothecoolingcircuitB30.............
Inertgaspurgeconnection(N2connection)B40....
ElectricalconnectionB50......................
AmatsmartpumpinterfaceconnectionB60.......
RS232 orRS485 linkwiringB70................
ConnectiontothepumpingcircuitB80...........
OperationOperatingmodeC10..........................
StartupofthemonitoringsystemC20............
Useofthemonitoringsystemforpumping
operationC30...............................
MonitoringsystemparametersC40..............
Monitoringsystemfunctiontable
IPUPA100PversionC50.......................
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2/3AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100 instructionmanual
Operation(cont’d)Monitoringsystemfunctiontable
IPUPA100LversionC51.......................
Gaspurgeandtemperatureaccordingtothe
semiconductorprocessesC60..................
Savingandloadingofpumpconfiguration
(withmonitoringsystem)C70.....................
MonitoringsystemsettingfortransportC80.......
Useoftheserial linkC90.......................
TroubleshootingFirstleveloftroubleshootingD 10..................
DiagnosisandtroubleshootingD 20................
MessagenumbersD 30..........................
Pump doesnotstart.
Handheld displaymoduleisnotilluminatedD 40....
Pump doesnotstart.
IPUPA100 withouthandheld displaymoduleD 50...
Pump doesnotstart.
Handheld displaymoduleisilluminatedD 60.......
Pump doesnotstart.
Displayis showingamessageoranalarmD 70.....
Faultmessagedisplay.
FacilitiesproblemD 80...........................
Faultmessagedisplay.
TemperatureproblemD 90........................
Faultmessagedisplay.
PressureproblemD 100...........................
Faultmessagedisplay.
MaintenanceproblemD 110........................
Pumpisrunning.
NomessageD 120................................
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Contents
AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual3/3
IPUPA100 instructionmanual
MaintenanceinstructionsMaintenancefrequencyE10....................
Shippingprocedureforcontaminated pumpsE20. .
MaintenancecomponentsN2pressurizationkitF10.........................
AppendixIPUPA100 electricalblockdiagramG 10............
SafetydatasheetG 20...........................
AccessorypartnumbersG 30.....................
NOTE
Warningsareusedwhenfailuretoobserveinstructionscould
resultininjuryordeath.
Cautionsareusedwhenfailuretoobserveinstructionscould
resultinsignificantdamagetoequipmentand/orfacilities.
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ChapterA
AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/1
IPUPA100 instructionmanual
IntroductionIPUPA100 operatingprincipleA10...............
IPUPA100 descriptionA20.....................
IPUPA100 monitoringsystemA30...............
IPUPA100 technicalcharacteristicsA40..........
TableofIPUPA100 partnumbersA50............
CEmarkingcertificateA60.....................
SEMIS2certificateA70........................
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AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100 operatingprinciple
DESIGNTOMINIMIZE
POTENTIELRESIDUES
The equipmentwasdesignedtominimizepotentielresiduedeposits:
lbylimitingtheinternalvolumesthatcontaingas,
lbyinjectingN2purgeoneachpumpstagetodilutetheprocess
gas(Pversiononly),
lbyregulatingthepumptemperatureandadjustingittoeach
process inordertolimitgascondensation(Pversiononly),
lbyintegratingthesilencerinsidethepumptoreduceby---product
deposition.
MULTI---STAGEPUMPWITH
ROOTSTECHNOLOGY
IPUPA100 pumpconsistsof5Rootstypestages.
Thetworotorsrotatewithout touchingeachother.
EXHAUST
INLET
Stage5
Highpressurestage
(exhauststage)
Stage4
Transferstage
Stage3
Transferstage
Stage2
Transferstage
Stage1
Lowpressurestage
(inletstage)
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IPUPA100 operatingprinciple
TIGHTNESS WITH ENVIRONMENT
Tightness atlowpressuresideThepumpisfittedwithball bearingslubricatedwithfluorinatedgrease.
Anoverpressurezoneiscreatedaroundthebearingbyinjectinga
neutralgas.
Thepressurizationandthesealspreventpumpedgasesand powders
from migratingtowardsthebearings.
Neutralgaspurgingforthebearingsisimperativeforcorrosive
processes.
Tightness athighpressuresideThebearingsarelubricated bysplashingoil.
Theoiltrapis sealedfromstage5byatrapandadeflector.
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IPUPA100 operatingprinciple
TIGHTNESS WITH ENVIRONMENT
(CONT’D)
Tightness atmotorside
(shaftpassage) Thevacuumtightness isensured bythemotordesignwithbuilt---in
jacket(hermeticallysealed).
This systemprovidestotalsafetyregardingleaksoutsidethepump
andrequiresnomaintenance.
Motorcasing
Electrical liner
Incorporatedliner
Tightness atshutdownThepumpisfittedwithanantisuckbackvalveinthe exhaust tube
whichpreventsthe exhaustfrombeingsucked back.
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AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100 description
IPUP A100 DESCRIPTION
TheIPUPA100 pumpincludesanintelligentmonitoringsystem.
Thispumpisfullyintegratedinacompactandenclosedframewhich
includes:
lthecontrolpanellocatedonthefrontpanel,
lthefacilitiespanellocatedontherearpanel,
AnAmatSPIconnectorlocatedontherearfacilitiespanelallowspump
controlandcommunicationwiththeprocess tool.
Ahandheld displaymodulecanbeconnectedtothefrontpanelto
displayand programthepump parameters.
EXHAUST
RearfacilitiespanelFrontpanel
AmatSPIinterfaceconnector
INLET
Handheld displaymodule
Pressureregulator
N2IN
WaterIN
WaterOUT
Mainpower
Manometer
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IPUPA100 description
INTERNALEQUIPMENTOFTHE
IPUP A100 PUMPS
IPUP A100P/PI equipmentTheIPUPA100P/PIisdesignedforcorrosiveprocesses,soitis
equippedwith:
lnitrogeninjectionandwatercoolingcircuitoptimizedtoavoid
depositionandcondensation,
ltemperatureregulationdevice.
TheIPUPA100PIpumpisequippedwithanadditionalintermediateport
forspecificapplicationswhereapermanentpumpingflowofabout
35 m3/hisrequired(example: dynamicsealpumping).
P
IPUPA100P/PIEQUIPMENT
Pump
¡Lowpressurestage
©¢£ Transferstages
¤Highpressurestage
INLET
EXHAUST
Tc
M
21 3 4 5
6
9
9
7
Monitoring
Pump
Motor
Frequencyconverter
Antisuckbackvalve
Inertgas
WaterIN
SILENCER
Supplyblock
Gascircuit
¥Gas solenoidvalve
¦Pressureregulator
§Inertgaspurgenozzles
Coolingcircuit
¨WatersolenoidvalveSensors
TcTemperaturesensor
P Pressuresensor
M Motorsensor
WaterOUT88
IntermediateportforIPUPA100PI versiononly
Tc
8 8 8
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IPUPA100 description
IPUP A100L/LIequipmentTheIPUPA100L/LIisdesignedforcleanapplications suchasloadlock
pumping,cryopumpregenerationand backingofturbopumpson
non---corrosiveprocesses.
lonlyawatercoolingcircuitisinstalled,
lnonitrogenpurgeisneeded.
TheIPUPA100LIpumpisequippedwithanadditionalintermediateport
forspecificapplicationswhereapermanentpumpingflowofabout
35 m3/hmbarisrequired(example: dynamicsealpumping).
IPUPA100L/LIEQUIPMENT
Pump
¡Lowpressurestage
©¢£ Transferstage
¤Highpressurestage
EXHAUST
M
21 3 4 5
Monitoring
Motor
Frequencyconverter
Antisuckbackvalve
WaterIN
Coolingcircuit
¥nozzleTcTemperaturesensor
M Motorsensor
WaterOUT
Pump
IntermediateportforIPUPA100LIversiononly
INLET
SILENCER
6
Tc
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AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual
IPUPA100 monitoringsystem
GENERAL
EachIPUPA100 pumpincludesanintelligentmonitoringsystem.
DESCRIPTION
Electricalcabinet
Thisislocatedat thetopofthemachine.Itislinkedwiththemain
powersupply,pumpmotorandelectronic cabinet.
Electronic cabinet
Thishandlespumpconfigurationand displaysthesensorparameters.
Itislinkedtotheindicatorlightslocatedonthefrontpanel.
Itallowsdatatobe exchangedwiththehandheld displaymodule.
Handheld displaymodule
Thisallowsuserstoreviewoperatingparameters.
Itallowsuserstoaccess andmodifyconfigured parameters.
Itallowsuserstostartandstopthepump(see C10) (ifconfigured).
Electrical/electronic cabinet
Handheld
displaymodule
ONWARNINGHAZARDKEYBOARD
Handheld display
moduleconnection
redLED
yellowLED
greenLED
Frontpanelsilkscreenprinting
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IPUPA100 monitoringsystem
MONITORING SYSTEM
CHARACTERISTICS
lMicroprocessorcontrolled.
lParametersandmessagesaredisplayedonthehand-heldremote
control.
lMemorizationofthelasttenwarningsandhazards.
lRS232 ---RS485 ---Networklinks.
Note : themonitoringsystemcanbeinterfacedwiththeprocess tool
viatheAmatSPIconnectorortheRS232 /485 connector.
Electrical/electronic cabinet
Sensors
Actuators
(valves)
Indicatorlights
Handheld
displaymodule
AmatSPIconnector
Mains
Converter
RS232 /485 connector
MAINFUNCTIONS
lMotorprotection.
lPumptemperaturemonitoringandcontrol.
lExhaustpressuremonitoring(Pversiononly).
lMaintenancetimecontrol.
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IPUPA100 technicalcharacteristics
CharacteristicsUNITSA100L(1)A100LI(1)A100P(1)A100PI(1)
v RotationspeedHz
rpm100 6000 100 6000 100 6000 100 6000
v PeakPumpingspeedm3/h
l/min
cfm
95
1583
63
95
1583
63
95
1593
63
95
1593
63
v Ultimatepressure(withoutN
2
purge)
v Ultimatepressure(with30 slm
N2purge)
mbar
mTorr
mbar
mTorr
1.2.10---2
91.2.10---2 91.2.10---2 9
6.10 ---2
50
1.2.10---2
9
6.10 ---2
50
v Max.continuousinletpressureTorr 50 50 50 50
v Supplyvoltage3PHV200 -- 208 V-- 3phase-- 50/60Hz(3)
v Maximumcontinuouspower
(at max.pressure)kW2.5
v Powerconsumptionatultimate
pressurekW1.8 1.8 2.05 2.05
v Averagesoundlevelatfull
speed
d
b
A
55 50 55 50
s
p
e
e
d
v Guarantedsoundlevelatfull
speed
d
b
A
58 --- 58 ---
v N
2
Flowraterangeslm
-
-
m
i
n
.
2
0
/
m
a
x
.
5
0
v Ambienttemperature°C15 to50 15 to50
v Waterflowl/hmin.100
v Watertemperature°Cmin.10 / max.25
v Gearboxfluidcapacity
(2)cm3
cc 150
v Weight(withouthandheld
displaymodule)lbs/Kg220.4 / 100
v InletflangeDN50 isoKF
v ExhaustflangeDN25 isoKF
v SecondaryexhaustportDN25 isoKF
v InterstageflangeDN25 isoKF
v Maxexhaustflowcfm13 --- 13 ---
Vibrationlevelat the enclosure
baseplatesidehole(4to400 Hz
Spectrum)
v Acceleration
v Displacement
v Speed
G
µm
mm/s
<0.1
<1.5
<1
(1)Variablespeedcontrol,min.20 Hz/max.100 Hz.
(2)Oilchargeisfilledatfactory.Donotmodifytheoil level.
(3)AccordingtoCEregulations,IPUPA100 canwithstandasupplyvoltagevariationof¦10%.
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IPUPA100 technicalcharacteristics
IPUP A100 DIMENSIONSAND INTERFACING(1/2)
Frontview
Bottomview
Rightview
Leftview
Handheld displaymoduleconnector
See detail S
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IPUPA100 technicalcharacteristics
IPUP A100 DIMENSIONSAND INTERFACING(2/2)
FrontviewRightview
ipupA100
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IPUPA100 technicalcharacteristics
IPUP A100 STACKING DIMENSIONSAND INTERFACING(1/2)
LeftviewFrontviewRightview
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IPUPA100 technicalcharacteristics
IPUP A100 STACKING DIMENSIONSAND INTERFACING(2/2)
RightviewFrontview
A100 STACKINGCG&WEIGHTDISTRIBUTION
ipupA100
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