Alicat MC Series User manual

1
Precision Gas Mass Flow Controllers
The Fastest Flow Controller Company in the World!
Operating Manual
MC-Series MCS-Series
MCR-Series
WHISPER
MCV-Series

2
Thank you for purchasing an Alicat ow controller.
We know you are going to love your new ow controller. If you have any
questions about operating it, or if something is not working as expected,
please let us know. We are eager to help you in any way possible.
Alicat Scientic, Inc.
[e-mail] • alicat.com
7641 N Business Park Drive, Tucson, AZ 85743 USA
1-888-290-6060
Serial Number: ____________________________
Next Calibration: ___________________________
Recalibrate your ow controller every year.
Your calibration date is labeled on the back of the ow controller. Write that
date in the space above. When it's time for your ow controller's annual
recalibration, contact us by phone, email or live chat to set it up, or ll out the
Service Request Form at alicat.com/service.
07/31/2018 Rev.43 DOC-ALIMAN16C
This Alicat device comes with a NIST traceable calibration
certicate.
This Alicat ow controller conforms to the European
Union’s Restriction of Use of Hazardous Substances in
Electrical and Electronic Equipment (RoHS) Directive
2011/65/EU.
This Alicat ow controller complies with the requirements
of the Low Voltage Directive 2014/35/EU and the
EMC Directive 2014/30/EU and carries the CE Marking
accordingly.
This Alicat ow controller complies with the requirements
of the European Union's Waste Electrical & Electronic
Equipment (WEEE) Directive 2002/96/EC.

3
Welcome to the Alicat way.
You're busy, and the last thing you want to do is waste time wrestling with
your ow controller. We're here to make your life a little easier so you can do
what you do best. It's our pleasure to introduce you to your new Alicat:
• High-accuracy performance for all your gases. Use your ow controller
with any of the 98 or more gases that are part of Gas Select™, page 31.
• Control pressure while monitoring ow rate. Set the closed loop control
algorithm for pressure control, page 26.
• Backlit display with adjustable contrast is easy to read in direct sunlight.
In dimly lit areas, press the Alicat logo to turn on the backlight, page 7.
• Change your STP to match any standard temperature and pressure
reference, page 35.
• Log data to your PC. Talk to the ow controller serially to capture all ow
data for logging and analysis, page 39.
This manual covers the following Alicat Scientic instruments:
• MC and MCR-Series Mass Gas Flow Controllers
• MCD and MCRD-Series Dual Valve Mass Gas Flow Controllers
• MCE-Series Mass Gas Flow Controllers
• MCP-Series Mass Gas Flow Controllers
• MCQ and MCRQ-Series High PressureMass Gas Flow Controllers
• MCS and MCRS-Series Mass Gas Flow Controllers
• MCV-Series Mass Gas Flow Controllers
• MCW (WHISPER) Low Pressure Drop Mass Flow Controllers
This includes Alicat ow controllers labeled as approved for CSA Class 1 Div 2
and ATEX Class 1 Zone 2 hazardous environments. See page 98 for Special
Conditions regarding the use of CSA/ATEX labeled devices.
Please contact Alicat at 1-888-290-6060 or [e-mail] if you have
any questions regarding the use or operation of this device.

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Table of Contents
Quick-Start Guide ________________________________________6
Getting Started__________________________________________7
Getting to KnowYour Alicat.........................................................................................7
Connectorsand Buttons......................................................................................7
TheFlowControllerDisplay.................................................................................8
Status Messages.................................................................................................8
Mounting.....................................................................................................................9
Plumbing.....................................................................................................................9
Filters ..........................................................................................................................9
ConnectingYour Gas Flow Controller..........................................................................10
MCV ControllerOperatingNotes........................................................................11
MCDDual ValveMass FlowControllerOperatingNotes......................................12
Power and Signal Connections...................................................................................14
RS-232 /RS-485 Digital Input/ Output Signal..................................................15
Analog Signals..................................................................................................16
Option: ColorTFT Display ...........................................................................................17
Navigating and Customizing Your Flow Controller__________________ 18
Flow Controller Menu Map.........................................................................................18
Collecting Live Flow Data...........................................................................................19
Choosing Engineering Units.......................................................................................20
Option: CollectingTotalized Flow Data and Batch Dispensing....................................21
Dispensing Gas inBatches ................................................................................22
Menu.........................................................................................................................24
TaringYour FlowController...............................................................................24
Control Menus............................................................................................................25
Commanding anew setpoint............................................................................26
Changingthesetpoint source............................................................................26
Changingthecontrol loopvariable ...................................................................26
Adjustingthe PID controller ..............................................................................27
About.........................................................................................................................29
Diagnostic Information.....................................................................................29
Basic Conguration Menu..........................................................................................30
ChoosingDeviceEngineeringUnitsfrom the Basic Conguration Menu.............30
Gas Select™................................................................................................................31
Gas Select™ Gas List..........................................................................................32

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UsingCOMPOSER™ toPersonalize MixedGas Compositions...............................33
Addinga new mixedgas compositiontoCOMPOSER.........................................34
Dening STP/NTP ReferenceValues...........................................................................35
Advanced Setup.........................................................................................................36
Display Setup.............................................................................................................36
Sensor Setup..............................................................................................................37
ConguringYour Flow Controller for Serial Communications.....................................38
Serial Communications____________________________________39
Establishing Serial Communications..........................................................................39
Serial Streaming vs Polling ........................................................................................40
Taring Serially............................................................................................................41
Collecting Flow Data Serially......................................................................................41
Commanding a New Setpoint Serially........................................................................42
Quick Serial Command Guide.....................................................................................43
Using Gas Select and COMPOSER Serially...................................................................44
Troubleshooting Your Flow Controller __________________________45
Maintenance and Recalibration______________________________48
Gas Properties Data ______________________________________49
Numerical List of Gases____________________________________57
Device Units ___________________________________________60
Accessories____________________________________________62
Accessories.................................................................................................................63
Specication Sheets______________________________________64
Optional Pinouts ________________________________________ 94
Additional Information for Alicat CSA and ATEX Approved Devices _______98
Limited LifetimeWarranty ________________________________ 101

6
Quick-Start Guide
Setup
• Tare your ow controller. After you connect the ow controller, ensure
that no air is owing through the device, power it on and ensure it has a zero
setpoint. After a few seconds, it will auto-tare.
• Choose your engineering units. Press the button above or below any
parameter to enlarge it in the middle of the display. If you select that same
item a second time, you can change the engineering unit for that parameter.
You can chosse units for all of the parameters at once by selecting MENU >
BASIC CONFIG > DEVICE UNITS.
• Connect your ow controller. Ensure that ow through your device will be
in the same direction as the arrow on the ow body (usually left to right).
Operation: Flow Control
• Choose your setpoint. Select SETPT from the Main Display to select your ow
rate. Press SET, and the controller immediately adjusts to the new setpoint.
• Monitor live ow readings. You can monitor live readings of ow, pressure
and temperature by viewing the screen. Readings are updated in real time.
• (Optional) Capture a totalized reading. The totalizer option displays the
total ow that has passed through the device since the last time the totalizer
was reset. Press TOTAL/MENU to access the totalizer.
Operation: Pressure Control with Flow Monitoring
• Switch the closed loop control to pressure. Select MENU > CONTROL > ADV
CONTROL > LOOP SETUP > LOOP VAR, and then choose Absolute Pressure. Your Alicat
will now control absolute pressure while monitoring ow rate.
• Choose your setpoint. Select SETPT from the Main Display to select a pressure
setpoint. Press SET, and the controller immediately adjusts to the new setpoint.
Maintenance and Care
• If your gas is clean, your ow controller will require no periodic cleaning.
• Calibrate your ow controller annually. Request an Alicat factory
calibration at alicat.com/service or by calling Alicat at 1-888-290-6060.

7
Getting to KnowYour Alicat
Getting Started
Connectors and Buttons
The drawings below represent the default conguration of a standard Alicat
mass ow controller (MC series) with an upstream valve. Your ow controller's
appearance and connections may dier, especially if it has been ordered with
a large Rolamite valve or a downstream valve.
DATE
0
MC-20SLPM-D NO DIM
6/7/2018
REV.
DATE
0
MC-20SLPM-D NO DIM
6/7/2018
REV.
DATE
0
MC-20SLPM-D NO DIM
6/7/2018
REV.
Process ports
LCD display
Softkey buttons
Communications/Power
Power Jack
Backlight on/o button
Mounting holes

8
Getting Started
The Flow Controller Display
The gure below identies the various features of the ow controller display.
Press the large button with the Alicat logo to toggle the backlight on and o.
For more details, see the Menu Map on page 18 and the menu-by-menu
descriptions that follow it.
Main Display
Flow Temp
+24.38
#C
SLPM
Air
MassFlow
+15.44
TOTAL/
MENU
+15.44
SLPM
+16.67
LPM
SETPT
0.000
#C
+24.38
PSIA
+13.60
TOTAL Accesses the optional
ow totalizer (page 21).
MENU Enters the Menu system
(page 24).
SETPT Sets the ow or pressure
control setpoint (page 26).
Engineering unit for the
highlighted parameter.
Status messages will display
here (below).
Selected gas calibration
(page 31).
Mass Flow
+15.44
SLPM
Highlights mass ow rate
in the center:
Volu Flow
+16.67
LPM
Highlights volumetric (actual)
ow rate in the center:
Highlights temperature in
the center:
Highlights pressure in
the center. Push a second
time to choose pressure
parameter:
Abs Press
+13.60
PSIA
Internal absolute pressure:
Gage Press
-0.12
PSIG
Internal gauge pressure:
(optional):
Baro Press
+13.72
PSIA
Barometric pressure
(optional):
Status Messages
Analog-digital converter error: ADC
Valve exhaust is active: EXH
Valve hold is active: HLD
Front display is locked: LCK
Mass ow over range of device: MOV
Overpressure limit exceeded (optional): OPL
Totalizer rolled over to 0: OVR
Pressure over range of device: POV
Totalizer missed out of range ow: TMF
Temperature over range of device: TOV
Volumetric ow over range of device: VOV

9
Getting Started
Mounting
No straight runs of pipe are required upstream or downstream of the ow
controller. Most Alicat ow controllers can be mounted in any position,
including upside-down. (MCS/MCRS series ow controllers use media-isolated
sensors that must be tared after changing orientation.)
Caution: Flow controllers that use large Rolamite valves (MCR/MCRW/
MCRQ/MCRS) should be mounted with their valve oriented vertically
(right-side up). If another orientation is desired, please contact Alicat.
Plumbing
Your controller has been shipped with plastic plugs tted into its ports. To
lessen the chance of contaminating the ow stream, do not remove these
plugs until you are ready to install the device.
Standard Alicat Gas Flow controllers have female inlet and outlet ports.
Welded VCR and other specialty ttings may have male connections.
» If you are using a tting that does not have a face seal, use thread-sealing
Teon tape to prevent leakage around the port threads, but do not wrap
the rst two threads. This will minimize the possibility of getting tape into
the ow stream and clogging the laminar ow elements (LFE).
» If you are using a tting that has a face seal, there is no need to apply
Teon tape to the threads.
Warning: Do not use pipe dopes or sealants on the process connections
as these compounds can cause permanent damage to the controller
should they get into the ow stream.
Filters
When pressure drop is not an issue, use in-line sintered lters to prevent
large particulates from entering the ow controller. Suggested maximum
particulate sizes are as follows:
» 5 microns for units with ow ranges of 1 sccm or less.
» 20 microns for units with ow ranges between 2 sccm and 1 slpm.
» 50 microns for units with ow ranges of 1 slpm or more.

10
Getting Started
Connecting Your Gas Flow Controller
Inlet Connection Port
Outlet Connection Port
Flow Direction Arrow
Control Valve
(upstream valve shown)
Warning: Using the ow controller above the maximum specied
internal line pressure, or above the maximum recommended
dierential pressure between the inlet and outlet, will result in
permanent damage to the internal pressure sensors.
A common cause of this problem is the instantaneous application
of high-pressure gas, as from a snap-acting solenoid valve either
upstream or downstream of the ow controller. If you suspect that
your pressure sensor is damaged, please discontinue use of the device
and contact Alicat.
See the chart below for pressure limits.
Model Max Pressure at Sensor Max Dierential Pressure
MC//MCR/MCS 145 psig 75 psid
MCW/MCRW 45 psig 15 psid
MCQ/MCRQ 305 psig 100 psid
Your Alicat ow controller can measure and control ow generated by
positive pressure and/or suction. Connect the controller so that the ow
travels in the same direction as the ow arrow, usually from left to right as you
look at the front of the device.