Balzers TPG 300 User manual

Operating manual
BG 800 300 BE / A (0105) 1
Total pressure gauge and controller
TPG 300
Configuration
Installation
Operation
Technical data
Program,pg48

BG 800 300 BE / A (0105) TPG 300 2
Product identification
When communicating with Balzers, the information given on the
product nameplate is required. Transfer therefore that information
to this manual.
Typ:
No:
F-No:
If your unit is supplied with the plug-in boards already installed,
there is an additional nameplate on it. Transfer that information
also to this manual.
Typ:
No:
F-No:
Validity
This manual applies to products with part number
BG 546 900 -T
The part number can be taken from the nameplate.
This manual is based on firmware version
BG 509 780 -F
Proceed according to paragraph 4.7.10 to check that your unit is
equipped with this or a higher firmware version (–F or higher).
Enter the firmware version number of your unit here:
BG 509 780 – .......
The functions described as well as the illustrations and data con-
tained in this manual are subject to change without notice.
Intended use
Depending on which options have been chosen for it, the
TPG 300 can measure total pressure from atmosphere to
10-11 mbar. It can trigger a number of pressure-dependent func-
tions to control and monitor vacuum devices and processes. The
instructions contained in this document must be strictly followed.

BG 800 300 BE / A (0105) TPG 300 3
Contents
Product identification 2
Validity 2
Intended use 2
1 Safety 5
1.1 Safety information 5
1.2 Explanation of symbols 5
1.3 General stipulations 6
2 System overview 7
3 Installation 9
3.1 Mains power connection 9
3.2 Plug-in boards 10
3.2.1 Factory configuration 10
3.2.2 Installing / removing plug-in boards 10
3.3 Connecting plug-in boards 10
3.4 Installation in a 19" rack 10
3.5 Use as bench top unit 11
4 Operation 12
4.1 Measuring with the TPG 300 12
4.1.1 Power on procedure 12
4.1.2 Gas type dependence 12
4.1.3 Validity of displayed data 12
4.1.4 Accuracy of measurement 12
4.1.5 Alignment 12
4.2 Front panel 13
4.3 Operating modes 14
4.4 Overview of key entries 15
4.5 »sensor« mode 16
4.5.1 Switching the measuring circuit on / off 16
4.5.2 Measurement range violation 17
4.5.3 Automatic measuring circuit switchover 18
4.5.4 Self-monitoring 18
4.5.5 Plug-in board identification 19
4.6 »set point« mode 20
4.7 »set up« mode 21
4.7.1 Parameter inquiry / modification 21
4.7.2 Parameter overview 21
4.7.3 Default parameters 24
4.7.4 »Switching functions« group 26
4.7.5 »PE measurement underrange control« group 28
4.7.6 »Measurement unit« group 28
4.7.7 »Filter« group 29
4.7.8 »Interface« group 29
4.7.9 »Parameter storage« group 30
4.7.10 »Test programs« group 32
5 Technical data 34
5.1 Mains power connection 34
5.2 Ambiance conditions 34
5.3 Basic unit 34
5.4 Dimensions and weight 35
5.5 Plug-in boards 35

BG 800 300 BE / A (0105) TPG 300 4
6 Error messages, troubleshooting 36
6.1 Error messages 36
6.1.1 Contact setting of the relays in the event of a fault 38
6.2 Troubleshooting 38
6.2.1 Installation problems 38
6.2.2 Operating and calibration problems 39
6.2.3 Failures 40
6.2.4 Replacing the apparatus fuses 41
7 Maintenance 42
7.1 Aligning the Pirani measurement circuits 42
7.2 Changing the EPROM 43
8 RS-232-C interface 44
8.1 Installation and connection diagram 44
8.2 Data transmission 44
8.2.1 Definitions 44
8.2.2 Flow control 45
8.2.3 Communication protocol 45
8.3 Mnemonics 47
8.3.1 Measured values 48
8.3.2 Switching functions 50
8.3.3 Display 52
8.3.4 Filter time constants 53
8.3.5 Baud rate 54
8.3.6 Storing 54
8.3.7 Auxiliary functions 55
8.3.8 Error messages 56
8.4 Examples of programs 59
9 Accessories, Spare parts 62
9.1 Basic unit TPG 300 62
9.2 Plug-in boards 62
9.3 Mains cables 62
9.4 Gauges 62
9.5 Gauge cables 63
9.6 Accessories for installation in a rack 63
Appendix 64
A: Information main display 64
B: Literature 65
C: Index 66

BG 800 300 BE / A (0105) TPG 300 5
1 Safety
1.1 Safety information
a) Take into account the relevant safety regulations when in-
stalling the product (→ 9).
b) Take into account the relevant safety regulations when in-
stalling the product and putting it into operation.
Pass on the safety information to other users.
1.2 Explanation of symbols
DANGER:
Information on preventing any kind of personal injury or
extensive equipment damage.
CAUTION:
Special information on damage prevention.
NOTE:
Special information on cost-effective use.
Specialists:
This work may only be carried out by persons with suit-
able technical training and the necessary experience.
Press this key briefly.
=Press these keys simultaneously.
<....> Marking
«....» Display, response
»....« Operating mode, effect
→2See page
→&See document
Tip, recommendation
... please contact your nearest Balzers Service
Center.
1.3 General stipulations
Since the individual electronic components are delicate, appropri-
ate measures must be taken to protect them from static electricity.
Store plug-in modules in antistatic bags or containers.
Damage resulting from disregard of the above warning may lead
to a revocation of the warranty.

BG 800 300 BE / A (0105) TPG 300 6
Balzers accepts no responsibility nor warranty if the user or third
parties
• utilize the product not according to the defined use
• make any kind of changes (modifications, alterations, etc.) to
the product
• use the product with accessories not listed in the product
documentation.

BG 800 300 BE / A (0105) TPG 300 7
2 System overview
Information for correct installation of the plug-in boards
→&[3].
A list of all plug-in boards suited for the TPG 300 can be found in
section 5.3. For detailed information on the plug-in boards →&[3].
Interface plug-in boards
Relay and
RS-232-C (RS-422)
interface
e.g.
IF 300A
IF 300C
Relay and
RS-232-C interface
e.g.
IF 300B

BG 800 300 BE / A (0105) TPG 300 8
Measurement plug-in boards
Dual Pirani
e.g.
PI 300D
Cold cathode
e.g.
PE 300C9
PE 300T10
PE 300DC10
Pirani / cold cathode
combined
e.g.
CP 300C9
TPR 010
TPR 017 / TPR 018
IKR 050 / IKR 060
IKR 070
TPR 010
TPR 017 / TPR 018
IKR 050 / IKR 060
IKR 070

BG 800 300 BE / A (0105) TPG 300 9
3 Installation
If for any reason you can assume that the unit it not safe
to operate, shut it down and secure it so that it cannot be
inadvertently turned on again.
You can assume that the unit is not safe to operate when
• it has sustained visible damage
• it no longer functions
• it has been stored for a longer period under unfavor-
able conditions
• it has been subjected to severe transport stress
• when the screws of the plug-in boards are loose or
missing.
3.1 Mains power connection
You can connect the TPG 300 without voltage adaptation to any
conventional supply system (→section 5.1).
The power connector may only be plugged into a socket
with a protective ground. Only three-pin mains cables with
a correctly connected protective ground may be used.
This protection must not be nullified by an extension cable
without ground conductor.
To assure continuous grounding protection, connect the
mains power cable before connecting any other cables. In
the same way, disconnect all other cables before discon-
necting the mains power cable.
If the unit is installed in a rack, the mains voltage should
be supplied by and turned on via a central distributor.

BG 800 300 BE / A (0105) TPG 300 10
3.2 Plug-in boards
3.2.1 Factory configuration
In most cases, the TPG 300 is supplied ready for operation, (with
the plug-in boards already installed). In addition, in units for
combined measurement of medium and high vacuum, the high
vacuum measuring circuit is controlled automatically according to
pressure. This is because switching function A and / or B is
factory assigned to a medium vacuum measuring circuit
(→section 4.7.3).
There are two types of configuration:
• Units with CP 300 measurement plug-in board(s)
The cold cathode measuring circuit is controlled by the Pirani
measuring circuit which is on the same measurement plug-in
board.
• Units with PI 300D and PE 300 measurement plug-in boards
The cold cathode measuring circuit is controlled by the Pirani
measuring circuit <TPR 2>.
The controlling Pirani gauge and the controlled cold cathode
gauge must both be connected to the same vacuum chamber to
guarantee efficient operation.
No measuring circuit assignment is activated by all other factory
configurations.
3.2.2 Installing / removing plug-in boards
For safety reasons, empty slots should always be covered
with blank plates.
Installing / removing plug-in boards →&[3].
3.3 Connecting plug-in boards
→&[3]
3.4 Installation in a 19" rack
If the unit is to be installed in a rack, it must not lower the
protection class of the rack (protection against foreign
objects and water) e.g. DIN VDE 0113 regulations for
switch cabinets when in place.
Take into account the ambiance conditions
(→section 5.2).

BG 800 300 BE / A (0105) TPG 300 11
The TPG 300 can be installed in a 19" rack mount adapter ac-
cording to DIN 41 494 . However, it cannot be installed in the old
rack frames constructed according to the Balzers standard.
Older units (Balzers standard) are to be installed in the same rack
frame as the TPG 300 (DIN), a special adapter must be used
(→section 9.6).
3.5 Use as bench top unit
Take into account the ambiance conditions
(→section 5.2).
The ventilation must not be obstructed.
Use the cover and the hinged feet (→262).

BG 800 300 BE / A (0105) TPG 300 12
4 Operation
4.1 Measuring with the TPG 300
4.1.1 Power on procedure
Before switching the unit on, check that all plug-in boards,
connection cables, and gauges are installed correctly
(→29) and that the technical requirements are satisfied
(→234).
If a break in the protective ground occurs inside or outside
the unit or if the protective ground connection is detached,
the unit will become dangerous. Intentional interruption is
not admissible.
The mains power switch is located on the back panel of the unit.
To switch the unit on, operate the mains power switch (or the
centrally switched mains power distributor in case of installation
into a rack).
After the power has been switched on,
• the unit performs a self-test
• it reactivates the parameters in effect before the unit was
switched off
• all measuring circuits with activated immediate start-up
(→section 4.7.9) and all operational Pirani gauges are
switched on
• the measurement value of the first measuring circuit in opera-
tion is displayed.
4.1.2 Gas type dependence
The measured pressure depends on the gas type present. It is
referenced to nitrogen (N2). For other gases please refer to the
characteristic curves shown in the appendix of &[3].
4.1.3 Validity of displayed data
If you intend to use the measurement results for control functions,
allow for the time constants of the gauges, possible ignition de-
lays etc., until valid measurements are displayed (→&[3];
[7] ... [10]).
4.1.4 Accuracy of measurement
A generally applicable statement on the accuracy of the meas-
urement cannot be made. The type of gas being measured is a
major factor affecting the accuracy, and so is the current condition
of the gauge.
The accuracy of the gauge at any particular moment can only be
assessed by comparing the results with a reference unit. Calibra-
tion pumping systems are available for reliable measurements,
particularly for pressures under 10-4 mbar.
4.1.5 Alignment
Cold cathode measuring circuits are factory aligned and require
no recalibration.
Pirani measuring circuits are factory prealigned. For accurate
measurement →&[3].

BG 800 300 BE / A (0105) TPG 300 13
4.2 Front panel
Operation prompt for combined keys Bar graph for mantissa (linear indication)
sensor set point
sensor off
sensor on
set up
step funct group
TPG 300
1234AB
mbar
A1
PE
Err 010
Unit of measurement
Selected sensor display
Error signal
Select sensor for display
of measured data
Status of switching function,
lights if status = "ON"
Change to SET POINT mode
Measured value display
Overange/underrange
Identification of plug-in board
Status display lights
of cold cathode gauge
Change to SET UP mode
Mantissa Exponent

BG 800 300 BE / A (0105) TPG 300 14
4.3 Operating modes
The TPG 300 has three operating modes:
»sensor«
• Pressure measurement
• Selection of the measuring circuit
• Switching gauges on / off
»set point«
• Display of the switching function parameters
»set up«
• Display of the unit parameters
• Modification of the unit parameters
»se n so r «
»se t p o in t «
»se t u p «
Optional
code input
after approx. 1 minute
= =
Po w e r » on«

BG 800 300 BE / A (0105) TPG 300 15
4.4 Overview of key entries
»sensor« mode
(Pressure measurement)
»set point« mode
(Switching function parameter inquiry)
»set up« mode
(Parameter inquiry, parameter selection)
Select measuring circuit
Switch on selected gauge
= =
Switch off selected sensor
Change to »set point« mode
= =
Change to »set up« mode
Select next switching function in
»set point«
Change to »sensor« mode
= =
Change to »set up« mode
Select next group in »set up«
Select next function in »set up« if existing
Modify the selected parameter
Change to »sensor« mode
=In order to avoid unintentional entries, certain operations require combined
key activation (→operating information on front panel). It is important, how-
ever, that <sensor> or <set point> are not pushed before the other keys,
otherwise the basic function will be executed.

BG 800 300 BE / A (0105) TPG 300 16
4.5 »sensor« mode
The TPG 300 is in »sensor« mode
• after being switched on
• after the <sensor> key has been pushed
• one minute after the last keystroke in »set point« mode
4.5.1 Switching the measuring circuit on / off
Measuring circuit on Measuring circuit off
Each individual measuring circuit can be
manually switched on or off (after entering
the code with <step> and <funct>)
Manual on/off-switching has priority over the
automatic control.
Measured value
1234AB
mbar
A1
010
Plug-in board identification
1234ABA1
010
Switch on cold cathode gauges at
pressures <10-3 mbar only, in order
to prevent excessive contamination
of the gauges.
When the cold cathode measuring circuit is
switched on, the LED «PE» on the front
panel lights up.
Pirani gauges are not deactivated by switching them off, only their measuring results and
the error message are suppressed.
Switching off the cold cathode gauge helps to prevent it from becoming contaminated.

BG 800 300 BE / A (0105) TPG 300 17
4.5.2 Measurement range violation
Measuring circuit on Measuring circuit off
If the measured value is outside the meas-
uring range of the measuring circuit, this will
be indicated if the corresponding measuring
circuit is selected.
If the cold cathode measuring circuit is con-
trolled by another measuring circuit, the dis-
play changes over automatically.
Overrange
1234AB
mbar
B1 PE
010
Underrange
1234AB
mbar
B1 PE
010
If the upper measuring range limit is
exceeded, the cold cathode gauge
can become contaminated if it re-
mains switched on.
If the under range control is switched off (→
section 4.7.5) the system cannot distinguish
between a gauge failure, cable interruption
and underrange of a cold cathode measur-
ing circuit. «ur» is displayed in all cases.
Overrange: «or» and exponent indicating
the range limit
Underrange: «ur» and exponent indicating
the range limit

BG 800 300 BE / A (0105) TPG 300 18
4.5.3 Automatic measuring circuit switchover
If a measuring circuit is controlled by an-
other measuring circuit and either one is
selected, the display automatically changes
over
• when the measured value drops below
the lower threshold
• when the measured value exceeds the
upper threshold.
Measured value or e.g.
1234AB
B1
010
Automatic control: «Au», cold cathode measuring circuit waits for the fulfillment of the
power on condition by the Pirani measuring circuit.
4.5.4 Self-monitoring
If the cold cathode measuring circuit is self-
monitored, it automatically switches off
• when the measured value exceeds the
upper threshold.
The measuring circuit must be restarted
manually. Restarting can be prevented by
another measuring circuit (e.g. Pirani).
Measured value or e.g.
1234AB
B1
010

BG 800 300 BE / A (0105) TPG 300 19
4.5.5 Plug-in board identification
When the measuring circuit is switched off, its identification is displayed (→section 4.5.1).
Main display Meaning
«Au 9»
«Au 10»
«Au 11»
Cold cathode measuring circuit 5×10-9 mbar
automatic operation
Cold cathode measuring circuit 1×10-10 mbar
automatic operation
Cold cathode measuring circuit 10-11 mbar
automatic operation
«PE 9»
«PE 10»
«PE 11»
Cold cathode measuring circuit 5×10-9 mbar
Cold cathode measuring circuit 1×10-10 mbar
Cold cathode measuring circuit 10-11 mbar
«PI »
«PI l »
«PI n»
«PI ln»
Pirani measuring circuit
Pirani measuring circuit for long cables
Pirani measuring circuit for nickel filament
Pirani measuring circuit for long cables and nickel
filament

BG 800 300 BE / A (0105) TPG 300 20
4.6 »set point« mode
Selecting the »set point« mode
• Push the <set point> key (only possible in »sensor« mode
• The bar graph display extinguishes
Quitting the »set point« mode
• Select another mode or
• Wait a minute after the last key was pushed. The TPG 300 then
switches automatically back to »sensor« mode (measuring
mode)
Assignment of switching function to meas-
uring circuit
With <set point> you can read cyclically the
threshold values and assignments of the
switching functions. 1234AB
mbar
A1
010
The function of the measuring circuits is not influenced.
The current status of the switching functions is not displayed, but they work nevertheless.
With <set up> you can go directly to the »select threshold« function of the »set up« mode
to change the displayed threshold value.
Threshold
l