Bell MF4600 Series User manual

MEMS Mass Flow Meter
MF4600 series
SIARGO LTD.
Direct mass flow measurement with high accuracy
Multiple sensing elements for extended rangeability over 100:1
Easy remote accessible user interface with 485 Modbus and/or linearized analog dataRS
Bright display for instant and accumulated flowrate with on-site access via front buttonsLED
Flowrate profiles with over range indication
Easy for networking
Compatible with traditional rotameter mechanical connections
Flow range and mechanical dimensions can be fully customized
(.1)VA
SIARGO User Manual
Features
MMEMSF4600 series mass flow meters are made with Siargo’s proprietary sensing
technology. It applies for clean and dry gas metering and control. The meter is designed
with the structure of a rotameter but with the full capability of digital gas mass flow
metrology and display. Both instant and accumulated flowrate can be read andLED
displayed. The front keys enable user to access and adjust the parameters as well as data
saved. The standard 485 Modbus enables the remote access and networking.RS
Introduction
ISO 9001
ISO 14001 GB/T 28001
User Manual
Please read this manual for ensuring correct use of
this product. Make the manual available for easy access.
MEMS Mass Flow Meter
MF4600 Series

SIARGOSIARGO
Specifications Dimensions
User Manual
User Manual
Parameters Units
0 ~ 100, 200, 500 sccm
0 ~ 1, 2, 5 SLPM
Turn-down ratio 100:1
Accuracy (2.5+0.5 ) %±FS
Repeatability 0.75 %±
Offset stability 0.1 %FS
Span stability 0.12 %/ C±°
Response time 10 (default, can be changed via button) msec
Power supply 8 24Vdc, 50mA max.~
Output Analog, 232/ 485 (Modbus)RS RS
Display with 2 indicatorsLED
Display units Instant flow: ; Accumulated flow:SLPM SL
Resolution 0.001, 0.01, 0.1, 1 unit, selectable
Pressure loss 100 Pa
Max pressure 0.5 aMP
Temperature -10 +55 C~°
Storage -20 +65 C~°
Humidity <95% , no condensationRH
Mechanical -F 1/8 or customer specifiedNPT
Key board 3 keys
Electrical 5 pins, R-5CD
Calibration Air (20 C, 101.325 KPa)°
Flow Range
125.5
80.5 24
80
2- 1/8NPT
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1 Blue RS485B (TX RS232)
2 Green Analog output
3 Red , Power + (8 24Vdc)VCC ~
4 Black , ground - (power/signal)GND
5 Yellow RS485A (RX RS232)
Pin definition
Pin Color Definition
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User Manual
Please check the items in the package upon opening the box:
1) The package should contain the followings
a) 4600 mass flow meter 1MF
b) Electrical cable 1
c) User manual
d) certificateQC
2) Make sure no mechanical damages or visual damages;
3) Connect the electrical cable according to the pin definition;
4) Connect power supply and warm up for 2 minutes before use.
Installation
Product selection
Gas (A - air; B - N O; C- C ; N - N ; O - O ; R - Ar;
2222
O
for other gases, please contact Siargo)
Max. Flow Rate (Selectable: 100, 200 or 500 sccm;
1
1, 2 or 5 SLPM)
MF4600
Description
Electrical interface
Down key Up key
Flow direction
Function light
Mechanical connector
LED display
Function key
Manual adjustable valve
Output ( V - Analog, BV - Both analog and RS485,
2
CV - Both analog and RS232);
1 Max. flow rate number only, for example, 100 meaning full scale flow rate of 100 sccm.
5 meaning full scale flow rate of 5 SLPM);
2 The sensor shipped with standard analog output. RS232/RS485 is optional.
2
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Display
Sampling
4.001 4.002 4.005 4.010 4.020 4.050 4.100
10ms 20ms 50ms 100ms 200ms 500ms 1000ms
Display
Update
5.025
250ms
5.050
500ms
5.100
1000ms
5.200
2000ms
The Menu Settings will allow the user to execute keyboard lock/unlock, reset accumulated
flowrate, reset offset, set time, response time, instant flow decimal point etc.
Keyboard lock
This function shall prevent unintended changes of the parameters by press the keyboard.
When keyboard is locked, the menu function is disabled.
Accumulated flowrate reset
This function shall reset the accumulated flowrate, and the meter will re-start from null.
Offset reset
This function shall reset the offset which may be due to drift after a certain period of
performance. It shall help for improving accuracy. : When performing offset reset,Note
make sure there is no flow in the meter otherwise it will have impact to the accuracy.
Sampling time
This function allows user to set the sampling time between analog output and digital
output via the serial port. Once the setting is done, it will be immediately effective but the
settings will only be saved into the after switch to another function.EEPROM
Display update time
This function allows the user to set the display update time of the meter. Once the setting
is done, it will be immediately effective but the settings will only be saved into the EEPROM
after switch to another function.
Peak-valley values reset
This function allows user to reset the peak value to null.
Menu settings
The meter shall display instant, accumulated and
peak-valley flowerate. The indication light shall be
lighted accordingly. Please see the detailed
description below.
Operation
Instant flowrate display
1. Instant flowrate is a default display mode, both (I and ) will be off.LED II
2. Instant flowrate is displayed by 4 digit with a decimal, the unit isLED SLPM
3. When the instant flowrate is over the allowed range, I- (over max) or - (belowLED II LED
min) will be flashing.
4. If I- and - flash at the same time, it indicates that the actual flowrate is over theLED II LED
calibrated range or the display value is incorrect.
Accumulated flowrate display
1. The accumulated flowrate is displayed by 8 digits that is separated with two 4 digit
display where I- indicates the first 4 digits and - indicates the last 4 digits. TheLED II LED
units is .SL
2. The accumulated flowrate can be reset via the keyboard.
:NOTE The flow accumulation will be saved every 3 minutes. For instance:
The flow accumulation will not be saved if power off @ 2 minutes.
The flow accumulation will be the value of 33 minutes if power off @ 34 minutes.
Peak-Valley flowrate retrieval
1. The data of the last registered peak-valley flowrate can be retrieved via the keyboard.
2. When the peak flowrate value is displayed and flashed, the I- will light.LED
3. When the valley flowrate value is displayed and flashed, the - will light.II LED
Acc. Flowrate
last 4digits
(LED on)
Instant Flow
Rate
Acc. Flowrate
1st 4digits
(LED on)
Auto switch
Peak flowrate
(LED flashing)
Valley flowrate
(LED flashing)
I-LED on II-LED on
Push and keep for
more than 2sec
Push
/
/
Push
Fn
I-LED on II-LED on
Operation Mode
Power
on
Push
3
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RS R232/ 485 communicationS
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Reset to factory default value
This function allows user to reset all parameters to factory default values.
Decimal setting for instant flowrate
This function allows user to set the decimal point of instant flowrate.
Note: when full scale flowrate is 100, 200 or 500 sccm, 1 decimal can be set, e.g. 123.4
sccm, when full scale flowrate is 1, 2 or 5 , 1, 2 or 3 decimals can be set, e.g. 1.2SLPM
SLPM SLPM SLPM, 1.23 or 1.234 .
For purposes of computer control and networking, the 232/ 485 is used forRS RS
communication with the following settings:
Baud rate (Bits per second): 9600
Date bits: 8;
Stop bits: 1;
Parity: None;
Flow control: None.
The protocol is based on the standard Modbus communication protocol. 232RS
model supports single meter communication, and 485 model supports eitherRS
single meter communication or multi-meter networking. For detailed information,
please contact the manufacturer.
MEN SETTING MODEU
Keyboard
Unlock
0.unL(Blink)
Instant lowf rate
Push and keep for
more than 2 sec
Fn
Keyboard
Lock
0.Loc(Blink)
/
Fn
Keep .acc flowrate
1.oFF(Blink)
Fn
1.on(Blink)
Flow
accumulation
Zeroing
/Fn
Don't perform
offset calibration
2.oFF(Blink)
Fn
Perform ffseto
calibration
2.on(Blink)
Automatic offset
calibration
/Fn
Fn
Response
time=10ms
4.001(Blink)
Response
time=20ms
4.002(Blink)
Response
time=50ms
4.005(Blink)
Response
time=100ms
4.010(Blink)
Response
time=200ms
4.020(Blink)
/ / / /
Display update
time =250ms
5.025(Blink)
Fn
Display update
time =500ms
5.050(Blink)
/
Display update
time =1s
5.100(Blink)
/
Display update
time =2s
5.200(Blink)
/
/
Keep -peak valley.
flow ate
r
6.oFF(Blink)
Fn
Clear peak valley- .
flow ate
r
6.on(Blink)
/
Fn
.
flow ate
r
Fn
Keep current
setting
7.oFF(Blink)
System default
retrieval
7.on(Blink)
/
Fn
S ystem default
retrieval
Fn
No decimal
digits
8. 0(Blink)
Decimal digits=1
8. 1(Blink)
/
Decimal digits=2
8. 2(Blink)
/
Decimal digits=3
8. 3(Blink)
/
/
Fn
Fn
Fn
Fn
Fn
Fn Fn Fn Fn
Push
Push
Push
Push Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
Push
PushPushPush
Push Push
PushPush
Push
Push
PushPush
Push
Push
Push Push Push
Push
Push
Push
Push
Push
Response
time=1000ms
4.100(Blink) /
/
Push
Push
Push
/
Response
time=500ms
4.050(Blink)
Clear peak valley-
Clear acc flowrate.
4
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Wetted Materials and Compatibility
The meter body is made of aluminum alloy and optional with stainless steel.
Sensors comprise of silicon, silicon nitride and silicon dioxide and the sensor
surfaces are passivated with silicon nitride and silicon dioxide. The electronic
sealing is provided by (room temperature vulcanizing) silicone sealant -704RTV WR
composed of (SiO) H.HOCH CH
3n3
Safety Precautions
The product is designed for use with general purpose gases such as air and
nitrogen. It is advised that the products are best used for non-explosive clean
gases. The meters cannot be used for gas metrology of fluoride or fluoride
containing gases. For updates of the product certification information, please
contact manufacturer or visit www.Siargo.com Use for other gases such as.
extreme corrosive and toxic may cause the product malfunctioning or even severe
damages. The product sealing is ensured to work under working pressure of 60 psi
and is leakage proof before the shipment. But cautions and further leakage test are
important at installation as well since any leakage could cause severe safety issue.
The power supply for this product requires a voltage supply of 8-24 Vdc, all
precautions and measures for electrical voltage handling must apply.
Attention:Any alternation and/or improper use of the product without the
permission of the manufacturer can cause unpredicted damages and even injuries
or other severe situations. Siargo Ltd or any of its employees, subsidiaries shall.
not be hold and indemnified against such consequences due to such circumstances
via improper use of the product.
All maintenance of the product should be done by trained and certified personnel
by Siargo Ltd.
For further information, please contact the manufacturer.
Safety and Warranty
SIARGOSIARGO
Siargo shall guarantee its product quality and ensure the quality assurance in its
entire manufacture process. For any questions or technical support, please contact
at the following address and we shall response timely.
Headquarters
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210,
Santa Clara, California 95054,USA
Phone: [phone]
Email: inf[email protected]
Customer service and Contact
Siargo commits to be in compliance with the environmental regulations. This
includes all package materials. Please dispose the corresponding materials by it
categories, such as wood, paper, plastics. For the disposal of the entire product,
please follow the electronics disposal regulations and laws.
Environmental compliance
User Manual
User Manual