BRONKHORST MASS-VIEW series User manual

9.17.051 page 1
Instruction manual
MASS-VIEW®series
Doc. nr.: 9.17.051A Date: 01-09-2008
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.

BRONKHORST HIGH-TECH B.V.
SCOPE OF THIS MANUAL
This manual covers the general part of the MASS-VIEW® series mass flow instruments
for gases. It covers the general instructions needed for the instruments.
More detailed information can be found in documents listed below.
MASS-VIEW®instruments have modular instruction manuals consisting of:
-Instruction manual MASS-VIEW®series (document nr. 9.17.051)
-Short form instruction manual MASS-VIEW®series (document nr. 9.17.054)
-Operation instructions digital instruments (document nr. 9.17.023)
-
Fieldbus/interface description: Manual : Hook-up
diagram :
RS232 Interface with FLOW-BUS
protocol 9.17.027 9.16.044
Modbus interface 9.17.035 9.16.066
-FlowPlot Manual (document nr. 9.17.030)
-Hook-up diagram MASS-VIEW®series (document nr. 9.16.085)
-Dimensional drawing MASS-VIEW®series (document nr. 7.05.697)
These documents can be downloaded from our website: www.massflow-online.com

BRONKHORST HIGH-TECH B.V.
Please check www.massflow-online.com for the latest
version of this manual. The information in this manual
has been reviewed and is believed to be entirely
reliable. No responsibility, however, is assumed for
inaccuracies. The material in this manual is for
information purposes only, and is subject to change
without notice.
Bronkhorst High-Tech B.V.
September 2008
Warranty
The products of Bronkhorst High-Tech B.V. are
warranted against defects in material and
workmanship for a period of three years from the date
of shipment provided they are used in accordance
with the ordering specifications and not subjected to
abuse or physical damage.
Products that do not operate properly during this
period may be repaired or replaced at no charge.
Repairs are normally warranted for one year or the
balance of the original warranty, whichever is longer.
The warranty includes all initial and latent defects,
random failures, and indeterminable internal causes.
It excludes failures and damage caused by the
customer, such as contamination, improper electrical
hook-up, dropping etc. Re-conditioning of products
primarily returned for warranty service that is partly or
wholly judged non-warranty may be charged for.
Mass Flow ONLINE B.V. prepays outgoing freight
charges when any part of the service is performed
under warranty, unless otherwise agreed upon
beforehand, however, if the product has been
returned collect to Mass Flow ONLINE B.V., these
costs are added to the repair invoice. Import and/or
export charges, foreign shipping methods/carriers are
paid for by the customer.

BRONKHORST HIGH-TECH B.V.
Short-Form Operation Instruction
CAUTION: Before installing the MASS-VIEW®it is
important to be sure whether you received the right
model using the packing list and the attached label
on the instrument.
CAUTION: Be sure the piping system is clean. For
absolute cleanliness always install filters to assure a
moisture and oil-free gas stream.
Install the instrument in the line and tighten the
fittings according to the instructions of the supplier of
the fittings.
Be sure the system has no leaks before applying gas
pressure.
CAUTION: Electrical connections must be made with
a standard cable or according to the hook-up
diagram in this manual.
Apply power to the instrument and allow approx. 30
minutes for warm-up and stabilization. This may be
done with or without gas pressure, applied to the
system.
When the instrument is powered up the first time, a
setup menu appears where the pre-installed gas can
be selected and which flow range is to be used.
Navigate to the gas name using the 4-way button (up
and down direction) and press in the centre to make
a selection, then select the range using the up and
down direction and press also in the centre to make
the selection. After selecting the gas and the range,
the communication type can be selected.
After entering the default password (which is ‘abc’) in
the security menu, all menus can be enabled or
disabled. Also a new password can be entered and
saved.
The settings will be stored when “save” is selected
and the button is pressed.
Your instrument is now ready for operation.

BRONKHORST HIGH-TECH B.V.
TABLE OF CONTENTS
1. Introduction
1.1 General description.................................................................................................................... page 1
1.2 Housing ..................................................................................................................................... page 1
1.3 Sensor principle.......................................................................................................................... page 1
1.4 Needle valve principle ............................................................................................................... page 2
1.5 Electronics, display and 4-way button........................................................................................ page 2
1.6 Software tools............................................................................................................................. page 2
2. Installation
2.1 Receipt of equipment ................................................................................................................ page 3
2.2 Return shipment ........................................................................................................................ page 3
2.3 Mounting .................................................................................................................................... page 3
2.4 In-line filter ................................................................................................................................. page 3
2.5 Fluid connections ...................................................................................................................... page 3
2.6 Piping ......................................................................................................................................... page 4
2.7 Electrical connections ................................................................................................................ page 4
2.8 Test pressure ............................................................................................................................ page 5
2.9 Supply pressure ......................................................................................................................... page 5
2.10 System purging ......................................................................................................................... page 5
2.11 Seals ......................................................................................................................................... page 5
2.12 Equipment storage .................................................................................................................... page 5
2.13 Electromagnetic compatibility .................................................................................................... page 5
3. Operation
3.1 General ...................................................................................................................................... page 6
3.2 Power and warm-up .................................................................................................................. page 6
3.3 Setting up the instrument .......................................................................................................... page 6
3.4 User interface, menu structure and instrument functions ......................................................... page 7
3.4.1 The readout screen.................................................................................................................... page 7
3.4.2 Changing the readout screen..................................................................................................... page 7
3.4.3 The menu structure.................................................................................................................... page 8
3.4.4 Sleep mode ................................................................................................................................ page 9
3.4.5 Counter....................................................................................................................................... page 9
3.4.6 Alarms........................................................................................................................................ page 9
3.4.7 Alarm outputs............................................................................................................................. page 10
3.4.8 User tag...................................................................................................................................... page 10
3.5 Other gases ............................................................................................................................... page 10
3.6 Zero procedure........................................................................................................................... page 10
4. Maintenance
4.1 General ...................................................................................................................................... page 11
4.2 Needle valves ............................................................................................................................ page 11
5. Troubleshooting
5.1 General ...................................................................................................................................... page 12
5.2 Troubleshooting summary ......................................................................................................... page 12

BRONKHORST HIGH-TECH B.V.
1Introduction
1.1 General description
The MASS-VIEW®series operate on the principle of direct thermal mass flow measurement (no by-pass). An
advantage of using this type of sensor is that the instruments measure direct mass flow, virtually independent
of pressure and temperature changes, and have a low pressure drop. Other advantages compared to
conventional meters are the high accuracy and the large rangeability. The MASS-VIEW® series are supplied
with totaliser and alarm functions. Flow control can be achieved by an optional built-in needle valve. A bright
graphical OLED display, clearly visible over any angle, allows reading of actual flow (value and bar graph),
total flow and fluid type. The display features easy navigation through a user-friendly menu, using a 4-way
button with centre push. Furthermore the instruments have 2 potential free alarm contacts grounded on one
side.
1.2 Housing
The MASS-VIEW®meter has a straight tube with a mass flow sensor.
The fluid connections have a distance of 114 mm and an inner thread of
G1/4” (1/4” BSPP cavity). The connections reside on the back of the
instrument. The bottom fluid connection is the inlet; the upper connection
is the outlet. For electrical connection and power supply, the instrument
has a RJ-45 modular connector on top of the instrument. These
instruments are suited for indoor (dry) applications, like laboratories and
in well protected (OEM) housings. The front part is made of ABS, the
back part of Aluminium.
Some models have a manually operated needle valve on the front side.
1.3 Sensor principle
The MASS-VIEW® operates on the principle of direct thermal mass flow measurement. The
thru-flow design sensor consists of a heater resistor and a temperature sensing resistor.
Both resistors are made of temperature sensitive resistive material that is covered with a
stainless steel tube. The necessary heating power to keep the temperature difference
between the heater resistor and the sensing resistor at a constant level depends on the
mass flow. A different and unique heater current is produced for each value of the flow. The
measurement principle described is called Constant Temperature Anemometry (CTA).
The transfer function between mass flow and output signal can be described by the
equation:
msignal KV Φ⋅=
Vsignal = output signal
K = constant factor (includes λ– heat conductivity, Cp– specific heat, µ– dynamic viscosity and ρ– density of the gas)
Φm= mass flow

BRONKHORST HIGH-TECH B.V.
9.17.051 page 2
1.4 Needle valve principle
The needle valve has an orifice with a long, tapered conical seat. A
needle-shaped plunger, on the end of a screw, exactly fits this seat.
As the screw is turned and the plunger retracted, flow between the
seat and the plunger increases. Since it takes many turns of the fine-
threaded screw to retract the plunger, precise regulation of the flow
rate is possible.
1.5 Electronics, display and 4-way button
The MASS-VIEW® has a bright graphical OLED display, clearly visible
over any angle, which allows reading of actual flow (value and bar
graph), total flow and gas type.
The three display options can be changed using the 4-way button This
button is a navigation joystick which has UP/DOWN/LEFT/RIGHT keys
and a centre push (ENTER) key.
1.6 Software tools
The MASS-VIEW® series have a digital interface which can be connected using RS-232 (or RS-485) to a
computer. For an MS-Windows based PC, we have several freeware tools available for download on our
website.
-FlowDDE, the FLOW-BUS DDE (Dynamic Data Exchange) Server is gathering data from the modules
connected to the FLOW-BUS, and at the same time transferring data to these modules. DDE provides the
user a basic level of inter process communication between MS-Windows applications and is therefore, the
most flexible way to transfer data. By using DDE commands, sent by software, to the DDE Server, data can
be sent or requested from the FLOW-BUS. FlowDDE communicates very easily with Microsoft Excel and
other applications.
-FlowPlot (needs FlowDDE). Flow-Plot is a DDE-client program for service-purposes on Bronkhorst digital
instruments or readout-units. It gives good insight into the dynamic behaviour of digital instruments.
-FlowView (needs FlowDDE). FlowView is a DDE-client program to operate Bronkhorst digital
instruments. Please check our website for the latest updates on our freeware tools.

BRONKHORST HIGH-TECH B.V.
9.17.051 page 3
2 Installation
2.1 Receipt of equipments
Check the outside packing box for damage incurred during shipment. Should the packing box be damaged,
then the local carrier must be notified at once regarding his liability, if so required. At the same time a report
should be submitted to your supplier. Remove the envelope containing the packing list; carefully remove the
equipment from the packing box. Inspect the contents for damaged or missing parts.
2.2 Return shipment
When returning material, arrange a return material authorisation at www.massflow-online.com and
completely fill in the RMA request.
It is absolutely essential that you notify your supplier if toxic or dangerous fluids have been in
contact with the instrument!
This is to enable us to take sufficient precautionary measures to safeguard our staff.
Take proper care of packing, if possible use the original packing box; seal instrument in plastic etc.
Contaminated instruments must be dispatched with a fully completed 'declaration on contamination
form', found in the RMA-form on the website. Contaminated instruments without this declaration will
not be accepted.
Note:
If the instruments have been used with toxic or dangerous fluids the customer should pre-clean the
instrument.
2.3 Mounting
The mounting position of the MASS-VIEW® is vertical, although it is possible to turn the device 180° and
change the display setting. Avoid installation in close proximity of mechanic vibration and/or heat sources.
2.4 In-line filter
Although the gases to be measured should be absolutely free of dirt, oil, moisture and other particles, it is
recommended to install an in-line filter upstream of the flow meter / controller, and if backflow can occur, a
downstream filter is recommended too. Be aware of the pressure drop caused by the filter.
2.5 Fluid connections
The MASS-VIEW®can be equipped with (compression) fittings. Tighten the nut finger tight; while holding the
instrument, then tighten the nut 1 turn. If applicable follow the guidelines of the manufacturer of the fittings.
While tightening fittings, do not apply excessive force, in order to avoid damaging in/output thread or other
sensitive parts of your instruments.
Please be aware when using Oxygen (O2) that the fittings mounted to the body should be absolutely oxygen
clean.
* Note: Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or
other dangerous fluids are used.

BRONKHORST HIGH-TECH B.V.
9.17.051 page 4
2.6 Piping
BE SURE THAT PIPING IS ABSOLUTELY CLEAN!
CAUTION - DO NOT install small diameter piping on high flow rates, because the inlet jet flow will affect the
accuracy.
CAUTION - DO NOT mount abrupt angles directly to the inlet or outlet, especially for high flow rates.
CAUTION - DO NOT mount pressure regulators directly to the inlet of gas flow meters/controllers, but allow
some distance of piping (at least 25 D). Special attention should be taken at high flow rates with flow
controllers.
2.7 Electrical connections
We recommend using our standard cables. These cables have the right connectors and if loose ends are
used, these are coloured and marked to prevent improper connection. All cabling options can be purchased
online at massflow-online.com.
Please study carefully the hook-up diagram which is shown here
Depending on the mode of the digital output (which can be
changed through the user interface) the function of Pin 1 and 6
are:
Pin 1 = RS232 TXD or RS485B (MODBUS D0)
Pin 6 = RS232 RXD or RS485A (MODBUS D1)
Pin 2 = analog output
Pin 3 = alarm contact 1
Pin 5 = alarm contact 2
Pin 4 = 0V shared alarm contact for alarm 1/2
To use both the power supply and an analog or digital
connection, you should use the optional shielded RJ-45 Y-
adapter.
Available cabling options on massflow-online.com

BRONKHORST HIGH-TECH B.V.
9.17.051 page 5
2.8 Test pressure
Each instrument is pressure tested at 21 bar (a)
The tested pressure is stated on the instrument sticker. The absolute maximum line pressure is 10 bar (g).
Check test pressure before installing in the line. If the sticker is not available or the test pressure is incorrect,
the instrument should not be mounted in the process line. Each instrument is helium leak tested to at least
1x10E-9 mbar l/s Helium.
2.9 Supply pressure
Do not apply pressure until electrical connections are made. When applying pressure to the system, take
care to avoid pressure shocks in the system and increase pressure gradually.
2.10 System purging
If explosive gases are to be used, purge the process with inert dry gas like Nitrogen, Argon etc. for at least 30
minutes. Complete purging is also required to remove such gases from the system before exposing the
system to air.
2.11 Seals
The seals fitted are compatible with the published list of gases, at the stated conditions.
2.12 Equipment storage
The equipment should be stored in its original packing in a cupboard, warehouse or similar. Care should be
taken to not subject the equipment to excessive temperatures or humidity.
2.13 Electromagnetic compatibility
The MASS-VIEW® series carries the CE-mark.
Therefore it has to comply with the EMC requirements as are valid for these instruments.
However compliance with the EMC requirements is not possible without the use of proper cables and
connector assemblies. Do not use unshielded wire terminals.