CXI MFC User manual

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Manifold Gas Flow Controller/meter
Operating Instructions

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1. product description
1.1 Uses and features
Mass Flow Controller(MFC)Used to accurately measure and control the mass flow of gas.
They play an important role in scientific research and production in various fields such as
semiconductors and integrated circuit industries, special materials disciplines, chemical industry,
and industrial, pharmaceutical, environmental protection, and vacuum lamps. Typical applications
include: electronic process equipment such as diffusion, epitaxy, CVD, oxidation, plasma etching,
sputtering, and ion implantation; and coating equipment, optical fiber smelting, microreaction
devices, mixed gas distribution systems, capillary measurement, Gas chromatographs and other
analytical instruments
1.2 Main Specifications
1 Flow range: （0~5，10,20,30,50,100,200,300,500...）SCCM
（0~1,2,3,5,10,50,100,200,500...）SLM
2 Accuracy ±1%F.S ±0.5%F.S
3 Linearity ±0.5~1.5%F.S
4 Repeatability ±0.2%F.S
5 Responding time Electrical characteristics:10sec gas characteristics ：
（1~4）sec
6 Differential pressure range 0.1~0.5MPa
7 Max pressure 3MPa
8 Working temperature 0~70℃
9 Digital value RS485 MODBUS
10 Analog value DC 0~5V ，4~20mA
11 Power supply DC +15V/24V，flow meter＜400mA，flow controller＜
600mA
12 Electrical connection DB15
13 Leakage rate 1×10-8SCCSHe
14 Material of base 316L Stainless steel
15 Seal material FKM，nitrile butadiene rubber，chloroprene rubber
16 Glad hand Φ3，Φ6，Φ10，1/8〞,1/4〞，3/8〞
note:
The mass flow meter and mass flow controller are usually calibrated with nitrogen (N2).
The unit of mass flow is stipulated as: SCCM (Standard ml/min); SLM(Standard l/min)
Standard state stipulates: temperature -----273.15K (0℃);
Pressure -----101325 Pa(760mm Hg）
F.S (Full Scale); Full-scale value

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1.3 Working principle
The excellent accuracy, robustness and reliability of the CX series gas mass
flow controllers stem from our unique sensor probes. The sealed probe consists of
two sensing elements - speed sensor and temperature sensor, which can
automatically correct the influence caused by the change of temperature and pressure.
The meter circuit heats the speed sensor to a constant value higher than the gas
temperature, and then measures the cooling effect of the gas flow. The flow is
calculated under the principle that measuring electric power consumed which used to
maintain a constant temperature difference, which is proportional to the mass flow of
the gas. Both sensors are standard platinum resistance temperature detectors (RTD).
Platinum RTD wire is wrapped around a solid ceramic core, firm and reliable. The
entire sensor is sealed in a 316 stainless steel packing case.
Picture(3)Working principle diagram

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2. Quick installation guidance
2.1 Shape and installation dimensions
图三、CX Dimensions of mass flow controller
2.2 Form of gladhand
Picture(4)Installation diagram of double ferrule splice
As shown in picture 4, when installing the splice, after installing the front ferrule, back ferrule, and
nut, tighten the nut and the splice by hand, then tighten with a wrench (The imported Swagelok
splice requires a 1.25-turn wrench to tighten.) to ensure air tightness. Note that double wrench
should be used, with one wrench stuck in the joint and the other to turn the nut. Especially when
removing the nozzle, double wrench must be used, otherwise it will cause loosening of the joint
and affect the sealing.
nut Back Ferrule Front ferrule splice
stack

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2.3 Cable connection plug
Picture(5) ±15VDC Power supply diagram
Picture(6) 24VDC Power supply diagram

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3. Functional operation details
3.1 Review
The CX series flow meter uses a backlight lattice liquid crystal display, which clearly displays a
variety of useful flow data, including instantaneous flow, accumulative flow, temperature, etc. CX
has different display screen, it depends on the type of the order, such as flow meter or controller,
current output or voltage output. The entire CX series has a unified main display screen, gas
selection screen (which may be invalid when certain gases are present), calibration screen, device
information, etc.
In the state of the main screen condition, press the [MENU] button on the lower right corner of the
flow meter to switch the display screen to the menu screen.
3.2 Common operation
Interface specification
picture 1 Monitoring value display status.
Picture 2 Valve control setting status
Picture 3 Menu display status

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Picture 4 Parameter input dialog box
Picture 5 Storage inquiry dialog box
The function of the keys in different display situations:
[Monitoring value display status]：
Press [Left] key to switch current display parameters in sequence: instantaneous flow,
current, medium temperature, accumulated flow, etc.
Press the [Right] key to reverse the current display parameters in order: cumulative
flow, medium temperature, current, instantaneous flow, etc.
Press [MENU/OK] to enter the MENU display status.
[Menu display status]：
Press the [Right] key to switch the menu items of the current menu in sequence.
Press [left] key to return to the previous menu.
Press the [MENU/OK ]key to enter the next menu or the parameter input dialog box].
[Parameter input dialog box]：
Press 【Up】key to increase the number by 1
Press the [Down] key , the number to decrease by 1.
Press [Right] the cursor move one digit to the right.
Press [Left] the cursor move one digit to left.

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Press [MENU/OK] key to confirm
[Storage inquiry dialog box]：
Press [right] key, do not store data or options, go back to the menu item previous
[Storage inquiry dialog box].
Press the [left] key to store data or options, go back to the menu item previous
[Storage inquiry dialog box].
3.3 Functional operation details
3.3.1 flow setting ：
Press [VALVE] key to enter the flow setting interface
Press [Up]key to increase flow setting, press [Down]key to decrease flow setting,
press [Left] key to set flow to 0, press [Right] key to set the flow to full scale. Press the
[VALVE] key to save and return monitor status.
3.3.2 Start/stop flow accumulation：
（1）Under [Monitoring value display status] Status, press [MENU/OK] to enter
[Menu display status]
（2）Press the [MENU/OK] key shows that enter submenu of Usage Flow Setting
If the cumulative function is stopped, the following screen is displayed.

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If the cumulative flow meter has been started, the following screen is displayed
At present, press the [MENU/OK] key to enter the [Storage inquiry dialog box]
At this point, press the [Left] key to modify and store. Press the [right] key to
exit to the previous menu.
3.3.3 Clear flow accumulative value
（1）Under [Monitoring value display status] Status, press [MENU/OK]key to enter
[Menu display status]

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（2）Press [MENU/OK]key to enter the flow setting submenu, press [right] key to make
the menu item “1 Reset Total” in focus;
（3）Press the [MENU/OK] key to display that into the [Storage inquiry dialog box]
（4）Press [Left] key to modify and store. Press [Right] to exit to the previous menu
3.3.4 Small flow signal removal
（1）Under [Monitoring value display status] Status, press [MENU/OK] to enter
[Menu display status]
（2）Press [MENU/OK]key to enter the flow setting submenu, press [right] to make the
menu item “2 Flow Cut Off” in focus;
（3）Press [MENU/OK] key to enter the [Parameter input dialog box], then input the
required data
（4）After modifying the last character, press the [MENU/OK] key to enter the
[Menu display status]

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At this point, press the [Left] key to store the data and press the [Right] key to give
up storage and return to the previous menu.
3.3.5 flow coefficient:
（1）Under [Monitoring value display status]Status, press [MENU/OK]key to enter
[Menu Display Status].
（2）Press the [MENU/OK] key to display that enter the flow settings submenu, press
the [Left] key to make the "3 Coefficient" in the focus state
（3）Press [MENU/OK] key to enter the [Parameter input dialog box], then input the
required data

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（4）After modifying the last character, press the [MENU/OK] key to enter the
[Storage inquiry dialog box]
At this point, press the [Left] key to store the data and press the [Right] key to give up
storage and return to the previous menu.
3.3.6 Zero setting of flow
（1）Under [Monitoring value display status]Status, press [MENU/OK]key to enter
[Menu Display Status].
（2）Press [Right]key to make the menu item “2 Zero Offset” in focus;

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2 Zero Offset 0
3 Sensor Trim
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
1 Set Zero 0
2 Clear Zero
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
Save Changes ?0
Y N 0
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
2 Clear Zero 0
1 Set Zero
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
（3）Press [MENU/OK] key to display the zero setting submenu of the installation
position; make the menu item “1 Set Zero” in focus; press the [MENU/OK] key to
perform (5) operation to set up the zero point of the flow;
（4）Press the [Right] key to make the menu item “2 Clear Zero” in focus; this is the
operation to cancel set zero of flow;
（5）Press [MENU/OK] to display enter the [Storage inquiry dialog box]

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0 Flow Config 0
1 User Range
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
1 Polling Add 0
0
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
1 Polling Add 0
+0000.000 kPa
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
+
6 Hart Address0
7 Loop Test
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
At this point, press the [Left] key to store the zero value, and press the [Right] key to
give up storage and return to the previous menu.
3.3.7 Device polling address setting:
（1））Under [Monitoring value display status]Status, press [MENU/OK] to enter
[Menu Display Status].
（2）Press [right]key to make the menu item "6 Hart Address" in the focus state
（3）Press [MENU/OK] key to enter the Hart address setting submenu. The third line
shows the current polling address.
（4）Press [MENU/OK] key to enter the [Parameter input dialog box] and enter the
expected value (address range 0~31).

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Save Changes ?0
Y N 0
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
0 Flow Config 0
1 User Range
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
1 LoopTst 04mA0
2 LoopTst 08mA
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
7 Loop Test 0
8 Set Damping
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
（5）After modifying the last character, press the [MENU/OK] key to enter the
[Storage inquiry dialog box]
At this point, press the [Left] key to store the data and press the [Right] key to give
up storage and return to the previous menu.
3.3.8 Loop output test:
（1）Under [Monitoring value display status]Status, press [MENU/OK] key to enter
[Menu Display Status]
（2）Press [Right]key to make the menu item "7 Loop Test" in focus;
（3）Press [MENU/OK] key to enter the loop test submenu；

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0 Flow Config 0
1 User Range
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
4 Caculate Mode
5 Designed T
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
Auto Mode 0
Water Steam
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
4 LoopTst 16mA0
5 Looptst 20mA
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
Note: at this time the instrument output current is locked at 4mA.
（4）Press [Right] key, scroll menu item, can make the output current of the instrument
locked to the corresponding value; (for example, the lock value is 16, as shown below)
Under the loop test menu status, press the [Left] key to exit the loop test and
return to the previous menu, and the meter current returns to automatic.
3.3.9 Control mode conversion:
（1）Under [Monitoring value display status]Status, press [MENU/OK] key to enter
[Menu Display Status]；
（2）Press [MENU/OK]key ,enter flow setting sub-menu, press [right]key to make "4
Caculate Mode" in the focus state
（3）Press [MENU/OK] key to enter the submenu of operation mode selection；

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Save Changes ?0
Y N 0
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
Water Steam 0
General Gas
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
8 Set Damping 0
9 About
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
0 Flow Config 0
1 User Range
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
（4）Press [Right] key to scroll through the options. When “Analog Input” is selected, it
is the external analog signal control mode; when “Local/RS485” is selected, it is local
key operation control or RS485 communication control;
（5）At this point, press the [MENU/OK] key to enter the [Storage inquiry dialog box].
Press [left] key to store data, press [right] key, give up storage, and return to the
previous menu. if stored, and the box before the selected item is filled with dot.
3.3.10 Set the output damping value:
（1）Under [Monitoring value display status]Status, press [MENU/OK] key to enter
[Menu Display Status]；
（2）Press the [right]key to make the menu item "8 Set Damping" in focus.；

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1 Current Damp0
0.000 s
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
Save Changes ?0
Y N 0
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
1 Current Damp0
+0000.000 s
/ OA=16.00mA 75%
0 50 100
>>AccuFlow
+
（3）Press [MENU/OK] key, will enter the damping setting submenu, and the third line
shows the current damping value；
（4）Press [MENU/OK] key to enter the [Parameter input dialog box], then enter the
expected value (0~254)；
（5）After modifying the last character, press the [MENU/OK] key to enter the
[Storage inquiry dialog box]；
At this point, press [left]key to store data, press [right] key, give up storage, and
return to the previous menu.

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4.Attention
4.1 Adding filter
The use of gas must be purified, avoid dust, liquids and oil. If necessary, install a
filter. If a liquid source bottle is connected to the outlet of the flowmeter, install a
one-way valve at the outlet of the flowmeter to prevent the liquid from flowing back
and damaging the flowmeter.
4.2 Use for corrosive gases
The materials used for the flowmeter channel are: SUS 316L (00Cr17Ni14Mo2),
SUS 417J1 (00Cr30Mo2), fluorine rubber and other corrosion resistant materials.
It can be used to control general corrosiveness when other users use corrosive
gas and organic solvent gas under the condition that the user's system has no
soda, low leakage, diligence, and good use. It should be stated at the time of
ordering. With special corrosive gases, all sealing materials must be changed
accordingly
4.3 Installation position
The controller is best installed to maintain the level of the installation surface,
but not particularly sensitive to the location, can be installed at any position, if
the zero offset is found when installing in non-horizontal position, you can
adjust the zero point after work.

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4.4 Valve sealing
The valve of the mass flow controller is a regulating valve, not a shut-off valve, and
cannot be used as a shut-off valve. The user should be equipped with a shut-off valve.
In particular, when users use corrosive gases, a shut-off valve should normally be
added to the inlet and outlet ports of the mass flow controller to ensure work safety.
After long-term work, if the leakage rate of the controller valve port is within 2%F.S, it
is normal. If the leak is greater than 2% of full scale, service should be performed.
4.5 Calibration and conversion of different gases
The flow meter is usually calibrated by nitrogen (N2). If other gas calibration is
required, special orders should be made with the salesperson when ordering.
When users of flow controllers calibrated with nitrogen use other gases, they
can be converted by the conversion factor of the appendix.
5.General anomaly judgment and treatment
Phenomenon Possible reasons treatment methods
No air flow after
power on
The air source is not open
and the air is not accessible Connect the gas source and open the gas path
Didn’t set the target flow Reference detailed operation 3.4
Filter clogging Change the filter
Control valve failure Check the valve
Circuit failure Repair circuit
Zero deviation Reference detailed operation 3.4
Flow control
unstable
Sensor failure Change sensor
Circuit failure Repair circuit
Valve pollution Clean the valve,change the seal
The pressure of the gas
source is too low or unstable. Improve gas source pressure and stabilize gas source pressure
When the valve is
closed, there is
still a larger flow.
Control valve failure Check the valve
High inlet pressure Reduce inlet pressure
Channel clogging Clean MFC channel
Display can’t
reach full scale
Set target flow below full
scale Check the set target flow
Other circuit faults Repair circuit
Zero instability at
no flow Circuit faults Repair circuit
Sensor failure Change sensor