Dektak XT User manual

DektakXTStylusProfilometerUserInstructions(MMRC)
GLAs:EmilyWarren([e-mail])andHeatherAudesirk([e-mail])
DocumentUpdated:4/16/2012
ThesebasicinstructionsareforgeneraluseoftheDektakXTprofilometer.Thefulluser
guidecanbefoundonthedesktopofthecontrolcomputer.
Howthesystemworks:
TheDektakXTsystemtakesmeasurementselectromechanicallybymovinga
diamondtippedstylusoverthesamplesurfaceaccordingtoauserprogrammedscan
length,speed,andstylusforce.ThestylusislinkedtoaLinearVariableDifferential
Transformer(LDVT),whichproducesandprocesseselectricalsignalsthatcorrespondto
surfacevariationsofthesample.
Oursystemisonlyconfiguredin2Dmode,whichmeans:
ManualXYtranslation:101.6x101.6mm(4x4inches)ofXYtranslation,
manualleveling
manualthetarotation
Maximumsamplethickness:50mm(1.9inches)thick
Maximumscanlength:55mm(2.16inches)
StylusTipDiameter:2microns
Whenyouarrive,theinstrumentshouldbeoff,andthecovertotheisolationchambershouldbe
closed.
Thebottomofyoursamplemustbeclean(noHgorGa/Incontaminatedsamplesallowed!)
StartUp:
1.Turnonpowersupply(Blackboxonright)
2.Press(I)buttononwhitepowercontrolbox
3.StartVision64Software.Thefollowingshouldhappen:
Thetowerassemblywillmovetoitsupperlimit.Thesystemstopswiththestylus
intheTowerUpposition.
Thescanstageinitializes.
TheVision64Welcomescreenappears,followedbytheVision64“Instrument”
tab,whichincludestheDektakXTLiveVideoDisplay
4.Afterthesysteminitializes,itissafetoloadyoursampleontothestage(Brukerrecommends
lettingthesystemwarmupfor15minutes,butwehaven’tseenthatitmakesadifferencein
measurementquality).
*Putonglovesbeforetouchinganythinginsideofthelid*
5.Checkthattheflatglassblockisfreeofdust(thisflatsurfaceiswhatallowsustomeasure
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accuratelyoverlongerdistances.Itshouldbekeptcleanatalltimes!)Ifyouseeanydust,
pleaseblowitoffwithcompressedairorN2.
Loadingyoursample:
1. Inthe“LiveVideo”Window,hit“UnloadSample”thestageshouldmovetowardyou(if
not,itwasalreadyinunload).
2. Youcannowpositionyoursampleonthechuck(vacuumcapabilitiesarecurrentlynot
installed,sojustcenteritcarefully)
3. Inthe“LiveVideo”Window,hit“LoadSample”
Note:Duringascan,themachinewillpullthestylustowardsthebackofthemachine,soyou
wanttomoveyoursamplesothatyouareatthefrontedgeofyourdesiredscanarea.
Adjustingsampleposition:
1.Topositionasampleusingthemanualsamplepositioningstagecontrols:
Ensurethestylusisnottouchingthesamplesurface.Ifitis,clicktheTowerUp
buttononthetoolbar.
PositionthescanstartsitebyusingtheXYpositioninglevers.
•PulltheleverbelowthefrontoftheplatformforcoarseXmovement.Pushthe
leverbackuptosecurecoarseposition
•PulltheleverbelowtheleftsideoftheplatformforcoarseYmovement.
Pushtheleverbackuptosecurecoarseposition
•Turntherespectiveknobstofinelypositionthesample.
2.Hit“TowerDown”tolowerthestylus.Thestyluswillhitthesample,andthenretractto~1mm
abovethesurface.Besurenottobumptheinstrumentduringthisprocess.
Calibration:
1.Ifdesired,youcanusethecalibrationstandards(inDektakXtdrawerorbyoldprofilometer)to
calibratetheinstrumentpriortousetocheckthatthesystemisworkingproperly.Todoso,
followtheinstructionsaboveforloadingandrunningascan,andensurethatthemeasurements
correspondtothecalibrationstandardspecs.Ifthestandardsareoffsignificantly,contactthe
GLA.
SoftwareScanParameters:
The“MeasurementSetup”windowallowsyoutocontrolscanparameters.Seteachofthe
following:
1.ScanType:StandardScan
2.Range:SetstheZrangeoftheinstrument.Setthistoarangeslightlylargerthanthefeature
youwanttomeasure.NoteifusingHillsandValleysmode,youcanonlymeasurehalfofthe
rangeabovethestartingpoint,andhalfbelow.
TheselectedscanrangeisscaledacrosstheLVDToutputofthestylushead
sensoranddigitized.Thegreatertheselectedscanrange,thelowerthevertical
resolutionofthemeasurement.The6.5umrangewillprovideaverticalbitresolutionof
approximately0.1nm.The65.5umrangehasaresolutionof1nm,the524umrangehasa
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resolutionof8nm,andthe1mmrangehasaverticalresolutionof15nm.Sowhilethe
65.5um,524um,and1mmscanrangeswouldallworkfora10umstep,the65.5umisthe
best.
3.Profile:Willdeterminewhetheryoustartatbottom,middle,ortopofdesignatedrange.
Valleys:Provides90%ofthemeasurementrangebelowthezerohorizontalgrid
line.Thisoptionisusedprimarilyformeasuringetchdepths.
HillsandValleys:Provides50%ofthemeasurementrangeabovethezero
horizontalgridlineand50%below.Thisoptionisusedinmostapplications,
especiallyifthesurfacecharacteristicsofthesamplearenotwellknown,orifthesample
isoutoflevel.
Hills:Provides90%ofthemeasurementrangeabovethehorizontalgridline.This
optionisusedprimarilyformeasuringstepheights.
.
4.StylusTip:2microns(needtobesuretoresetthiseverytimeyoustarttheprogram!)
5.StylusForce:Standardrangeisbetween1and15mg.Defaultis3mg,butuselessforcefor
soft/fragilesamples.(*CanuseNLitemodeforverylowforce(downto0.03mg),butyouneed
toselectthebox...thislimitsyourscanlengthaswell)
6.Length:Ylengthofscan(canmeasureupto55000um(5.5cm))
7.Duration:Timeofscan(LengthandDurationdeterminetheresolutionofyourscan)
SavingData:
1.Underthe“AdvancedOptions”tab(in“MeasurementSetup),youcanselectwhetheryou
wantthesoftwaretoautosaveyourdata.
RunningaScan:
1.Youcanrunasinglescanormultiplescans.Torunasinglescan,clickthe“Single
Acquisition”button,andthescanwillbeginautomatically.
2.Torunmultipleidenticalscans,underthemeasurementsetupmenu,clickthe“Advanced
Options”tabandchangethenumberofmeasurements.Press“Measurement”tobegin
scanning.
ManualLeveling:
Note:Ifyounoticeasignificantslopetoyourdataduringthescan,youcanadjustthestagetilt
byturningthesilverknobinthefrontoftheinstrument.Turntheknobtocounteracttheslopein
yourdata.Youshouldnothavetoadjustthissignificantly(youcanfurtherlevelthedataduring
thedataanalysisstep).Ifsomethingseemswrong,contactaGLA.
3.Afterthescaniscomplete,the“DataAnalysis”windowshouldautomaticallyopen.Ifnot,you
canclickonit.Toexportyourdata,youcanrightclickontheplotandselect“ExportData”.
Tozero/leveldataoncomputer:
1.Under“DataAnalyzer”window,select“TermsRemoval(FOperator)”.Youshouldnowbe
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abletorightclickonyourdatatosetyourreferencecursortozeroandlevelyourdata.
Analysis:
1.Selectthe“DataAnalysis”Screen(ifyou’renotalreadythere).Youshouldseeatraceof
yourdatainthe“DataAnalysis”box.
2.Rightclickinsidethe“AnalyticalResults”boxandselect“Append”.
Youcanthenselectwhateveritisthatyouwanttomeasure,andselectalocationforR
andMcursors.Whenyouhit“Calculate”youwillseeallofthosevalueslistedinthe
AnalyticalResultsbox.
UnloadingSample:
1.Hit“TowerUp”.
2.Hit“Unloadsample”.
3.Eitherloadanewsampleorpowerthesystemdown.
TopowerdowntheDektakXTsystem:
1.ClosetheVison64software.
2.PresstheblackOFFbuttonontheEMOBox.
3.Turnoffthepowerswitchontheblackpowersupplybox.
Calibrationnotes
4/16/2012:ELWmanuallyresetverticalcalibrationusing8.48kAstandard(measured704.105,
3x),Brukershouldbesendingthecorrectcalibrationprofilesometimesoon.
Forreference:BrukerCustomerService:8008739750.
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