EBARA 80?25 Owner's manual

Global Innovators in Technology
Multi-Stage Dry Vacuum Pumps
Installation — Operation — Maintenance
Manual
Pump Model 80x25
EBARA Technologies, Incorporated
51 Main Avenue
Sacramento, CA 95838
[phone]; Fax: [phone]

Copyright @1993 by EBARA Technologies, Inc.

P/N 935003 Rev A
To Our Customers
Ebara Technologies, Inc., and its employees appreciate that you have selected an
Ebara Vacuum Pump for your needs. Our pump is manufactured with a great deal of
care and attention. This is to ensure the best performance, as well as safe and
satisfactorily operation; however, improper handling or operation could affect
performance, and could result in accidents, causing injury to personnel.
This manual has been prepared to illustrate how to properly install, operate, and
maintain the pump. A step-by-step guide is provided to make sure that the vacuum
pump system is put into place in accordance with manufacturer's recommendations.
We take this opportunity to thank you for the purchase of this dry vacuum pump, which
has been build and factory tested to meet the stringent Ebara quality and reliability
standards.

WARRANTY
EBARA Technologies, Incorporated
Products manufactured by Supplier are warranted against defects in materials and
workmanship for 12 months from date of initial operation or 15 months from date of
shipment by Supplier, whichever occur first. Supplier's liability under valid warranty
claims is limited, at the option of Supplier, to repair, replacement, or refund of an
equitable portion of the purchase price of the Product. Items expendable in normal use
are not covered by this warranty. All warranty replacement or repair of parts shall be
limited to equipment malfunctions which, in the sole opinion of Supplier, are due or
traceable to defects in original materials or workmanship. All obligations of Supplier
under this warranty shall cease in the event of abuse or accident. Parts are warranted
only for the remaining unexpected portion of the original warranty period applicable to
the parts repaired or replaced. After expiration of the applicable warranty period,
Customer shall be charged at the then current prices for parts, labor and transportation.
Supplier assumes no responsibilities for damages caused by improper installation or by
operation in violation of the equipment's rated operation condition, internal or otherwise,
or by improper handling or maintenance.
The Supplier is not liable for any special, indirect, incidental, or consequential damage.
Warranties given by vendors of equipment or proprietary components not manufactured
by Supplier but incorporated by Supplier into its Products shall be passed on to
Customer; provided that in no event shall Supplier have any liability for failure of such
vendor to perform on its warranty.
Except as stated herein, Supplier makes no warranty of merchantability or fitness
for purpose, express or implied (either in fact or be operation of law), statutory or
otherwise; and, except as stated herein, Supplier shall have no liability under any
warranty, express or implied (either in fact or by operation of law), statutory or
otherwise. Statements made by any person, including representatives of Supplier,
which are inconsistent or in conflict with the terms of this warranty shall not be binding
upon Supplier unless specified in writing and approved by an officer of Supplier.

WARRANTY (con't)
All claims under warranty must be made promptly after occurrence of circumstances
giving rise thereto, and must be received within the applicable warranty period by
Supplier or its authorized representative. Such claims should include Product serial
number, the date of shipment, and a full description of the circumstances giving rise to
the claim. Before any Products are returned for repair and /or adjustment, written
authorization from Supplier or its authorized representative for the return and
instructions as to how and where these Products should be returned must be obtained.
Any Product returned to Supplier for examination shall be sent prepaid via the
recommended means of transportation. Claims may be denied on items not promptly
reported and on any warranty claim on any item that has been altered or has been
returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in
transit, notwithstanding any defect or nonconformity in the Product. In all cases
Supplier has responsibility for determining the cause and nature of failure, and
Supplier's determination with regard thereto shall be final.
If it is found that Supplier's Product has been returned without cause and is still
serviceable, Customer will be notified and the Product returned at Customer's expense;
in addition, a charge for testing and examination may be made on Products so
returned.
No allowance shall be made for repairs or alterations made by others without the
Supplier's written consent or approval. If repairs or alterations are attempted without
the Supplier's consent, the Supplier's warranty is void.
If in the Supplier's opinion, repairs have to be effected at the Customer's plant site, local
labor shall be placed at the disposal of the Supplier's representative by the Customer,
free of charge to the Supplier. It may also be necessary to supply lifting and hoisting
equipment of sufficient capacity upon request of the Supplier's representative, at no
cost to Supplier.
Defective parts replaced by the Supplier become the property of the Supplier.
Preventive maintenance shall be performed by Customer at regular intervals dependent
on process severity and hours of operation.

Record of changes
Rev. Date Pag
ePosition Contents Reason
A 12/12/97 New Release per
ECO 2905

EBARA Multi-Stage Dry Vacuum Pumps Table of Contents
930601-P i
1.0 Safety...................................................................................................................1
1.1 User Obligations to Safety.........................................................................1
1.1.1 Electrical Grounding........................................................................1
1.1.2 Exhaust Venting..............................................................................1
1.2 Safety Labels.............................................................................................1
1.3 Hazard Icons.............................................................................................. 2
2.0 Product Overview.................................................................................................4
2.1 Summary of Requirements........................................................................4
2.1.1 Nitrogen Flow.................................................................................. 4
2.1.2 Cooling Water................................................................................. 4
2.1.3 Lubricating Fluid..............................................................................4
2.1.4 Pump Overhaul...............................................................................5
2.2 80X25 ........................................................................................................7
2.2.1 80x25 Specifications....................................................................... 7
2.2.2 80x25, Side View............................................................................8
2.2.3 80x25, Gear End.............................................................................9
2.2.4 80x25, Motor End..........................................................................10
2.2.5 80x25, Top View........................................................................... 11
3.0 Installation..........................................................................................................12
3.1 Unpacking and Initial Positioning.............................................................12
3.1.1 Pump Location..............................................................................12
3.1.2 Leveling Pads ...............................................................................12
3.1.3 Shipping Hardware........................................................................12
3.1.4 Lubricating Fluid Reservoirs.......................................................... 12
3.2 Vacuum Piping.........................................................................................13
3.3 Water Piping............................................................................................13
3.3.1 Cooling Water Requirements:.......................................................14
3.4 Nitrogen Purge Piping.............................................................................. 14
3.4.1 Nitrogen Supply Requirements..................................................... 14
3.5 Electrical Connections.............................................................................15
3.5.1 Control Panel................................................................................ 15
3.6 Initial Check.............................................................................................16
4.0 Operation............................................................................................................17
4.1 Safety Issues...........................................................................................17
4.2 Pre-Start Check.......................................................................................17
4.2.1 Initial Positioning........................................................................... 17
4.2.2 Lubricating Fluid Reservoirs.......................................................... 17
4.2.3 Vacuum Piping..............................................................................17
4.2.4 Cooling Water............................................................................... 18
4.2.5 Nitrogen Purge..............................................................................18
4.3 Start-Up & Trial Run ................................................................................ 18
4.4 Auto Mode ...............................................................................................19
4.5 Manual Operation....................................................................................19
5.0 Pump Maintenance ............................................................................................20
5.1 Safety Issues...........................................................................................20

EBARA Multi-Stage Dry Vacuum Pumps Table of Contents
930601-P
ii
5.2 Weekly Maintenance...............................................................................20
5.3 Other Periodic Maintenance.................................................................... 21
5.3.1 Lubricating Fluid Change..............................................................21
5.3.2 Complete Pump Overhaul............................................................. 21
5.4 Lubricating Fluid Level............................................................................. 21
5.4.1 Checking the Lubricating Fluid Level............................................22
5.4.2 Sight Glass Locations...................................................................22
5.4.3 Checking for Discoloration............................................................ 22
5.4.4 Refilling or Replacing the Lubricating Fluid................................... 23
5.4.5 Changing the Lubricating Fluid ..................................................... 23
5.4.6 Replenishing the Lubricating Fluid................................................24
5.4.7 Cleaning the Sight Glass...............................................................25
5.5 Vibrations and Noise................................................................................26
5.6 Motor Current...........................................................................................26
5.7 Nitrogen Purge Flow................................................................................27
5.7.1 Nitrogen Supply Requirements..................................................... 27
5.8 Cooling Water Flow Rate.........................................................................27
5.8.1 Cooling Water Requirements........................................................ 27
5.9 Ultimate Pressure....................................................................................28
5.10 Cooler Inspection and Cleaning............................................................... 28
5.10.1Overview.......................................................................................29
5.10.2Single Pass Cooler Inspection Procedure.....................................31
5.10.3Single Pass Cooler Cleaning Procedure.......................................32
5.10.4U-Tube Cooler Cleaning Procedure..............................................35
5.10.5Cooler Cleaning and Inspection Form...........................................39
5.11 Leak-Checking the Pump ........................................................................39
5.12 Sublimator Cleaning ................................................................................40
5.12.1Removing the Sublimator..............................................................40
5.12.2Reinstalling the Sublimator ...........................................................40
5.13 Consumables and Spares List................................................................. 41
6.0 Troubleshooting..................................................................................................42
6.1 Possible Problems / Suggested Solutions...............................................42
6.2 Service Centers.......................................................................................45
6.2.1 USA 45
6.2.2 EUROPE....................................................................................... 46
6.2.3 ASIA/PACIFIC RIM.......................................................................46
7.0 Attachments .......................................................................................................48

EBARA Multi-Stage Dry Vacuum Pumps Safety
930601-P 1
1.0 Safety
General safety guidelines:
•Always comply with all safety labels and hazard icons.
•Never disable any interlocks.
•Never take short-cuts.
•Only qualified personnel should be allowed to operate or perform maintenance
on this equipment.
1.1 User Obligations to Safety
This equipment is designed with safety features to protect operators and service
personnel from harm and to protect the equipment from damage. It is important that
the customer ensure that all safety procedures are followed and that all safety features
are maintained in proper operating condition. It is the user’s responsibility to operate all
equipment according to the recommended procedures, and to maintain safe operating
conditions at all times. Ebara Technologies, Inc., assumes no liability for personal
injury or for damage to equipment resulting from the improper operation or service of
the equipment.
1.1.1 Electrical Grounding
All electrical connections must be properly grounded in accordance with equipment
specifications and in compliance with all applicable codes and ordinances.
1.1.2 Exhaust Venting
The customer is responsible for the proper venting of equipment exhaust systems in
compliance with all applicable codes and ordinances.
1.2 Safety Labels
Safety labels and hazard icons appear throughout this manual and on the equipment
itself. Their purpose is to alert personnel to areas requiring specific attention. The
information contained in the following sections is a summary of the related safety labels
and hazard icons.
Personnel should be alert to four safety labels. They are identified by the following
symbols:
Danger Label
!DANGER
Danger labels signify potentially lethal situations. They are generally used when failure
to observe instructions or precautions could result in death. Potential exposure to high
electrical current or to poisonous gases are examples of where a Danger label would
appear.
Warning Label

EBARA Multi-Stage Dry Vacuum Pumps Safety
930601-P 2
!WARNING
Warning notices signify situations involving potential bodily injury. They are generally
used when failure to observe instructions or precautions could result in severe injury or,
possibly, death. Potential exposure to extreme heat or cold, or mechanical dangers are
examples of where a Warning label would appear.
Caution Label
!CAUTION
Caution notices signify situations where failure to observe instructions or precautions
could result in significant damage to equipment or facilities. Potential damage due to
failure to maintain proper oil level is an example of where a Caution label would appear.
Safety Instructions
SAFETY
INSTRUCTIONS
Safety Instruction notices provide specific instructions about avoiding or preventing a
hazardous situation. They give information about safety precautions to be taken, or
special equipment needed, to accomplish the task safely. Safety Instructions are
normally preceded with a Danger, Warning, or Caution label.
1.3 Hazard Icons
The following are examples of the hazard icons used throughout this manual.
Electric Shock
!DANGER
This icon indicates potential electrical shock. Danger indicates that potential loss of life
could occur.
High Pressure
!WARNING
This icon indicates potential harm from a release of high pressure. Warning indicates
that severe injury could occur.

EBARA Multi-Stage Dry Vacuum Pumps Safety
930601-P 3
Toxic Fumes
!DANGER
This icon indicates the possible presence of toxic fumes, gasses, or particles. Danger
indicates that potential loss of life could occur.
Explosion
!WARNING
This icon indicates potential harm from explosion. Warning indicates that severe injury
could occur.
Extreme Heat
!WARNING
This icon indicates potential harm due to extreme heat. Warning indicates that severe
injury could occur.
Mechanical Damage
!CAUTION
This icon indicates potential mechanical damage. Caution indicates that damage to
equipment or facilities could occur.
Flying Particles
!WARNING
This icon indicates potential hazard from flying particles and that safety glasses should
be worn. Warning indicates that severe injury could occur.
Caustic Chemicals
!WARNING
This icon indicates potential hazard caustic chemicals. Warning indicates that severe
injury could occur.

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 4
2.0 Product Overview
!NOTICE
The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of the manual.
Please refer to the Attachments section for installation-specific information
before attempting to operate this system.
!NOTICE
The entire manual should be reviewed thoroughly before operating the pump.
This section is presented as an overview only. This section is not meant as a
substitute for the other sections of this manual.
2.1 Summary of Requirements
2.1.1 Nitrogen Flow
Nitrogen flow serves two purposes: (1) sealing and (2) dilution. Needle valves are
preset at the factory and should not be adjusted.
General Settings: Flow meter wide open. Flow will stabilize around 5-8 lpm.
2.1.2 Cooling Water
The purpose of the cooling water is to cool motors, gears, and gas coolers (interstage
coolers). Pressure must be less than 4 kgf/cm2(60 psi). The required differential
pressure across the cooling water inlet-to-outlet is 1-2 kgf/cm2(14-28 psi). The required
flow rate is 5-8 lpm. Only 1 lpm of the total 5-8 lpm flow is diverted to the intercoolers.
The reason for this is to prevent chemical build-up in the coolers due to excessive
cooling.
If the cooling water is restricted for any length of time with the pump(s) running, the rear
pumps could overheat and seize. All pumps are designed to shut down if the cooling
water flow drops below 3-4 lpm (after a 3-minute time delay). Normal operating
temperature is process and pump condition dependent.
2.1.3 Lubricating Fluid
Ebara dry pumps use only perfluorinated polyether (PFPE) fluid to lubricate the pump's
bearings and gears. This fluid is non-flammable and inert. This is the lubricating fluid
referred to throughout the manual.

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 5
!CAUTION
It is very important that the lubricating fluid is maintained at the proper level.
Failure to do so could result in severe damage to the pump.
!CAUTION
When changing or replenishing lubricating fluid, be sure to stop the pump and
allow the pump to return to atmospheric pressure. Because the lubricating fluid
reservoir is under vacuum, the pump can be severely damaged if the lubricating
fluid port is removed while the pump is in operation, or not at atmosphere.
!CAUTION
Before attempting to add any lubricating fluid into the pump, it is imperative that
the secondary reservoirs are drained first. Failure to do so could result in
lubricating fluid being forced into the vacuum area of the pump.
!NOTICE
Use Krytox 1525, Fomblin Y-LVAC 25/6, Barrierta J100.
Previously specified Krytox 1514, Fomblin Y-LVAC 16/6, Barrierta J60 may be
used if supplied with pump.
There are four lubricating fluid reservoirs on each pump module: Two primary, and two
secondary reservoirs. A secondary lubricating fluid reservoir is provided for each pump
for each primary lubricating fluid reservoir. Over a period of time, a small amount of
lubricating fluid may migrate from the primary to the secondary reservoirs.
All primary reservoirs must be filled to the upper limit line in the sight glass. Do not
overfill. All secondary reservoirs should always be drained before lubricating fluid is
added or changed in the primary reservoirs. The pump must be off and at
atmosphere before lubricating fluid can be added or changed. If lubricating fluid is
not drained from the secondary reservoirs, lubricating fluid could eventually be forced
into the vacuum chamber of the pump.
Occasionally process gasses may discolor the lubricating fluid sight glass, making it
difficult to read lubricating fluid levels. The sight glass can be removed and cleaned
whenever the lubricating fluid is being changed.
2.1.4 Pump Overhaul

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 6
Depending on the process, a complete pump overhaul is recommended every 1-2 years
as a means of ensuring trouble-free performance. During overhaul service, all
bearings, labyrinth seal rings, and O-rings are replaced; coolers are cleaned or
exchanged, and the pump internals area cleaned, wet bead finished and vacuum
baked. The overhaul requires 1-2 weeks to complete, not including shipping to and
from the service center. Exchange pumps are available upon request. Contact your
Ebara representative for further details.

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 7
2.2 80X25
This pump consists of two pump modules. Process Flow: Three stages in the fore
pump, and three stages, with intercoolers, in the rear pump.
Ultimate pressure: 4x10-3 Torr.
2.2.1 80x25 Specifications
Typical Configuration –Refer to Attachments for Specific Information
MODEL: 80X25 60 Hz 50 Hz
PUMP SPEED:
ULTIMATE PRESSURE:
8,400 lpm / 297 cfm 7,000 lpm / 247 cfm
3 X10-3 Torr
M
O
T
O
R
POWER:
CURRENT
FULL LOAD:
VOLTAGE:
RPM:
INLET:
OUTLET:
Flanging
INLET:
EXHAUST:
PRESSURE:
QUANTITY:
C
O
O
L
I
N
G
INLET:
PRESSURE
PRIMARY:
SECONDARY:
QUANTITY:
LUBRICATING FLUID:
WEIGHT (APPROX.):
REMARKS:
N2
P
U
R
G
E
2.2 kW
11.0 Amps.
208 VAC 200 VAC
3460
ISO 80
NW 40
3/8” NPT Female
3/8” NPT Female
< 4 kgf/cm2(60 psi) Differential: 1-2 kgf/cm2(14-28 psi)
5 to 8 lpm (1.3 - 2.1 gpm)
1/4" Tube Connection
1-7 kgf/cm2(14-100 psi)
1 kgf/cm2(14 psi)
5 to 8 slpm (0.2 - 0.3 cfm) W/O Exhaust Gas Dilution
0.4 L (13.5 oz.)
450 kg (990 lbs)
EBARA TECHNOLOGIES, INC.
W
A
T
E
R
PUMPS: FOREPUMP FOREPUMPREARPUMP REARPUMP
3 X10-3 Torr
2.2 kW 3.7 kW3.7 kW
17.7 Amps. 12.2 Amps. 19.4 Amps.
3430 2880 2880

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 8
2.2.2 80x25, Side View
Typical Configuration – Refer to Attachments for Specific Information.

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 9
2.2.3 80x25, Gear End
Typical Configuration – Refer to Attachments for Specific Information.

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 10
2.2.4 80x25, Motor End
Typical Configuration – Refer to Attachments for Specific Information.

EBARA Multi-Stage Dry Vacuum Pumps Overview
930601-P 11
2.2.5 80x25, Top View
Typical Configuration – Refer to Attachments for Specific Information.

EBARA Multi-Stage Dry Vacuum Pumps Installation
930601-P 12
3.0 Installation
!NOTICE
The descriptions and instructions included in this manual are for a typical pump
installation. Documentation specific to this pump installation has been included
in the Attachments section. This section is located at the back of this manual.
Please refer to the Attachments section for installation-specific information.
3.1 Unpacking and Initial Positioning
•Carefully unpack the pump.
•Check for signs of possible damage in shipment.
•Notify the Ebara representative immediately if there are any signs of damage.
3.1.1 Pump Location
Locate the pump in an area that is:
•Free from excessive dust and moisture.
•Easily accessible to allow the pump to be serviced.
•Less than 40°C/104°F ambient temperature
3.1.2 Leveling Pads
•Extend the leveling pads and level the pump.
Each castor includes an adjustable pad that extends, making the pump immobile.
Adjust the pads to level the pump.
The pump must level. The castor provides an adjustment range of about 15 mm.
3.1.3 Shipping Hardware
On 6-stage pump packages, the upper pump (fore pump) is secured with four yellow
shipping brackets. These are used to prevent the rubber cushions from tearing away
during shipment. The brackets need to be disconnected from the pump and rotated
away from the pump.
For each bracket:
1. Remove the bolt securing the bracket to the pump (upper bolt).
2. Loosen the bolt securing the bracket to the frame.
3. Rotate the bracket away from the pump.
4. Tighten the bolt securing the bracket to the frame.
5. Reinstall the upper bolt into the pump housing.
If the pump is to be shipped for any reason, these brackets should be reconnected
before moving the pump.
3.1.4 Lubricating Fluid Reservoirs