EBARA A70W User manual

Doc. No. 7313-L4602B Rev. 3B
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
A70W (A70W-S, A70W-C)
A30W (A30W-S, A30W-C)
A25S (A25S-S)
A10S (A10S-S)
A07V (A07V-S)
Distribute this Instruction Manual to all end user
personnel operating the equipment.
ISSUED BY PRECISION MACHINERY GROUP

Do not reproduce or reprint any portion of this manual without permission.
Manufacturer reserves the right to discontinue or change any specifications or designs
without notice and without incurring obligations.
All rights reserved, copyright EBARA Corporation.

(i)
Record of Changes
Rev. Date Page Position Contents Reason
0 2-Jun-94 Newly issued
1 13-Jul-94 5
6-10
14
17
21
22
A07V Spec.
Outline Drawing
Fig. 3.4
Fig. 4.2
Fig. 4.6
Table 4.5
Pumping Speed
Water Sup./Rtn
Sys. Flow
Coupler
Ctrl. Wiring
Pin Assign.
Correction
Add NPT
Add Note
Add Drawing
Correction
Add note
2 14-Nov-96
ⅲ,ⅳ
ⅴ,ⅵ,ⅶ
4
21
25
26
33
35,36
37
44,45
Fig. 1,2,3,4,5
Drawing
3.3 List
Dig. 4.4
Table 4.6
Fig. 4.7
Table 6.1
6.3
7 (8)
9
Safety warning
labels
Warning label
Location
Detailed
specifications
Power Sup. Rec
Dipswitch
S.W setting
Typical check
items
Spare Parts
Pump Lifting
Service Net.
Add
Add
Add List
Correction
Design Change
Design Change
Add Table
Add List
Add Note
Add List
A 12-Dec-97 New release
per ECO 2905
3 20-May-99 21
44,45
5,6,18,
27,28,
32
Tab. 4.2
9. Service Network
-----
Suitable wire
Japan, Taiwan
(Add., Phone, Fax)
The Unit was
changed in terms
of Domestic
regulation for
Measurement low.
Correction
Change
-----
3A 27-Apr-01 ETI release of
EC Rev 3 per
ECO 5394.
3B June 2002 20
iv
Thruout
Add UL grounding
note
Add LCD “hot
surface” note
Add appendices
Language Edit
Third-party
marking
Third-party
marking
SEMI S2
ECO 5771
EBARA Corporation

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Safety Information
Anyone operating this pump must have the knowledge to identify and avoid hazardous
conditions associated with the pump.
Rash actions or improper operation may cause dangerous accidents and serious injuries.
Before installation and operation, the operator first should have a thorough knowledge of the
pump’s construction, operating procedures, and hazards.
The operator should read this instruction manual and other documents issued by EBARA.
If you have any questions on pump operation, safety, or maintenance, please do not hesitate
to contact EBARA directly.
Three terms in this manual designate different levels of hazard:
DANGER indicates an imminently hazardous situation that, if not avoided, will
result in death or serious injury.
WARNING indicates a potentially hazardous situation that, if not avoided, could
result in death or serious injury.
CAUTION indicates an imminently hazardous situation that, if not avoided, may
result in minor or moderate injury.
This term may also indicate situations that might damage
equipment.
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Important Precautions
DANGER Keep out from under the pump when it is elevated.
Only qualified personnel should unload and lift the pump.
WARNING Be careful not to overturn the pump when pushing or pulling it
sideways. The pump is narrow in comparison to its height.
WARNING Only a qualified electrician, observing all national and local
regulations, should perform electrical work.
WARNING Cut and lock out electrical power before beginning wiring or
maintenance work.
Do not switch on the power supply to the pump until work is
completed and pump and piping are back in safe operating
condition.
WARNING Supply N2gas to the exhaust piping when necessary to dilute
flammable or toxic gases down to a safe concentration.
WARNING Purge system with sufficient N2gas before removing and cleaning
the vacuum lines and exhaust piping.
Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.
Work only in locations with an emergency escape route.
WARNING Do not convert the pump from one process to another without an
intervening overhaul. Gases or reaction products remaining in
the pump may react and lead to accidents or to the formation of
large amounts of byproduct.
WARNING Check Safety Interlock functions periodically (every 6 months) to
confirm correct operation. See Appendix 2 for a description of
these interlocks.
WARNING Connect exhaust from pumps handling process gases to an
appropriate exhaust abatement system that is equipped with
discharge quality monitors to provide warnings and to shut down
the process gas flow if concentrations exceed allowable limits.
WARNING Check for gas leaks after initial installation of the piping and after
reassembly following maintenance or, at least, annually. Gas
leaks can result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air
into the pump. Replace o-rings as required to correct leaks.
See Appendix 4.
WARNING Do not modify the pump or any of its parts without EBARA's
approval.
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WARNING Do not place the LCD controller on or near a surface with a
temperature exceeding 65ºC.
WARNING The pump casing and exhaust piping become extremely hot
during operation and remain hot for some time after stopping.
Keep pump and exhaust piping away from contact with personnel
and flammable substances.
Do not remove pump enclosure panels during operation.
CAUTION Disposal of process byproducts must be in strict accord with all
local and national environmental and safety regulations.
CAUTION Dispose of printed circuit boards containing lithium batteries in
strict accord with all applicable local and national environmental
regulations.
CAUTION The height of EBARA dry pumps may place the EMO button and
the LCD controller below the heights recommended in SEMI
S8-95. See Appendix 3.
The following safety warning labels appear on the pump covers:
High temperature warning
Hazardous voltage warning
Hazardous materials warning
Electric charge mark
Hazardous weight danger
High temperature warning
Hot surface may burn or cause injury.
Allow the piping and casing to cool before servicing.
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Hazardous voltage warning
Hazardous Voltage may shock, burn, or cause death.
Turn power off and lockout before servicing.
Hazardous materials warning
(Applies only when pumping hazardous materials)
Run the pump only with N2gas purge before servicing.
Take adequate measures against dangerous reaction and contact with human body.
Electric charge mark
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Hazardous weight danger
Heavy weight may cause severe injury or death due to overturning or falling pump.
Keep out from under the lifted pump.
Raise all adjuster feet fully when moving.
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Contents
Record of Changes.........................................................................................................i
Safety Information .........................................................................................................ii
Important Precautions..................................................................................................iii
Contents .........................................................................................................................x
1Foreword..................................................................................................................1
2Introduction .............................................................................................................1
3Product Description................................................................................................2
3.1 Summary ........................................................................................................2
3.1.1 Pump Module....................................................................................2
3.1.2 N2Gas ...............................................................................................2
3.1.3 Cooling Water...................................................................................2
3.1.4 Exhaust .............................................................................................2
3.2 Control System ..............................................................................................2
3.2.1 Warning.............................................................................................3
3.2.2 Operation Status Control.................................................................3
3.3 Moving the Pump...........................................................................................3
3.3.1 Preparation .......................................................................................3
3.3.2 Moving Method.................................................................................4
3.4 Detailed Specifications .................................................................................4
4Installation .............................................................................................................16
4.1 Location ....................................................................................................... 16
4.2 Piping ...........................................................................................................17
4.2.1 Vacuum and Exhaust Piping .........................................................17
4.2.2 Cooling Water Piping ..................................................................... 17
4.2.3 N2Gas Piping..................................................................................19
4.2.4 Ventilation Duct.............................................................................. 19
4.3 Electrical Wiring ..........................................................................................20
4.3.1 Power Supply Wiring ..................................................................... 20
4.3.2 Control Signal Wiring..................................................................... 21
4.4 Operation Mode ...........................................................................................24
5Operation ...............................................................................................................26
5.1 Before Starting............................................................................................. 26
5.2 Operation ..................................................................................................... 30
5.2.1 Local (Pump side) Operation ........................................................ 31
5.2.2 Remote (Distant) Operation...........................................................31
6Maintenance and Overhaul................................................................................... 32
6.1 Routine Inspection ......................................................................................32
6.2 Piping Maintenance.....................................................................................33
6.3 Lubricant Oil ................................................................................................33
6.4 Spare (Maintenance) Parts List ..................................................................34
6.5 Overhaul.......................................................................................................35
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7Removal and Transportation................................................................................36
8Troubleshooting ....................................................................................................38
8.1 Troubleshooting (1) Basic Trouble ............................................................38
8.2 Troubleshooting (2) ALARM .......................................................................39
8.3 Troubleshooting (3) TRIP............................................................................41
8.4 Troubleshooting (4) TRIP [Options] ...........................................................42
9Inquiries .................................................................................................................43
9.1 North America ..............................................................................................43
9.2 Asia ...............................................................................................................44
9.3 Europe ..........................................................................................................45
Appendices
1. Material Safety Data Sheet – Vacuum Pump Oil.................................................I
2. Safety Interlocks ..............................................................................................III
3. Ebara Dry Pumps and SEMI S2-93A (S2-0200)................................................ V
4. Leak Check Procedure ..................................................................................... VI
5. Returning pumps for Rebuild in U.S. ............................................................... VII
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[Blank page]
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(1)
1 Foreword
We appreciate your selection of an EBARA A Series dry vacuum pump. EBARA has
manufactured this pump with much care and attention to permit safe and satisfactory
operation.
Incorrect operation will result in lack of performance and may cause accidents and injuries to
personnel.
[NOTE] This instruction manual contains necessary information on operation and
maintenance of the pump.
Operate the pump correctly in accordance with these instructions to ensure a long
service life.
Keep this instruction manual in a suitable place for immediate reference whenever
needed.
2 Introduction
Check the following items on receipt of the pump package.
Check the nameplate affixed to the outer cover of the pump to confirm that the pump
supplied agrees with your order.
Check the accessories against the packing list and the previously submitted drawings and
documents to confirm that the all ordered accessories have arrived.
Check for damage and for screws/bolts that have worked loose in transit.
CAUTION Notify EBARA without delay when there is damage or when
components are missing.
Do not use when a leak is present as this may result in an accident.
Store the pump in a dry and clean place until installation.
Temperature : 5 – 40 °C
Humidity : 80 % or less
Do not stack the pump. Place it in an upright position.
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3 Product Description
3.1 Summary
The A Series dry vacuum pump has a compact design and includes various sensors and
controls to enhance reliability and operation.
3.1.1 Pump Module
The pump is a roots-type vacuum pump that rotates a pair of non-contact, multi-stage rotors
synchronized by timing gears. High-capacity units have a Booster Pump (BP) connected in
series with the Main Pump (MP).
A compartment, isolated from the pump casing, encloses the timing gears and bearings,
which require lubrication with Perfluoro-Polyether (PFPE) oil and grease.
The pumps of this series are factory-filled with lubricating oil. Replenish or replace only with
the recommended oil grades shown in Specification Tables 3.1 and 3.2.
3.1.2 N2Gas
Pressurized nitrogen, supplied to the labyrinth seal section, isolates the vapor stream from
the lubricated components, enabling the pump to draw a clean vacuum without admitting
lubricant oil to the pump casing.
Additional N2gas, injected in various pump stages, reduces corrosion due to process gas
and retards the accumulation of reaction byproducts. For processes that do not produce
corrosion or reaction byproducts, the selector valve can stop completely the dilution N2flow.
Adjusting the regulation pressure to the specified value supplies the correct amount of N2
gas for these two types of purge operation.
The pumps of this series are equipped with a dilution N2gas control valve. Consult EBARA
before adjusting the N2gas supply to the appropriate level for specific conditions of use.
(Maximum dilution N2flow rate: 76 Pam3/s.)
3.1.3 Cooling Water
Compressing gas from vacuum to atmospheric pressure generates heat. Therefore, cool
motors and casings with cooling water.
Quick-connect cooling water couplers make connection and disconnection easy.
3.1.4 Exhaust
The exhaust check valve, a standard accessory, prevents reverse flow of gas from the
exhaust back through the pump to the vacuum chamber when pump stops. A silencer
(optional) reduces exhaust noise.
3.2 Control System
A Series dry vacuum pumps have a built-in sensing unit consisting of an Earth Leakage
Breaker (ELB), an electro-magnetic switch and a control circuit or an overcurrent circuit
breaker (CB). To improve reliability and safety, sensors monitor the condition of each utility
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and pump section.
During pump operation the central processing unit monitors all operating conditions, including
power supply, cooling water flow, N2gas flow, lubrication oil level, casing and motor coil
temperature, motor current and suction pressure.
Pump operation “rides through” a transient power outage up to 500 milliseconds long.
(Two-second ride through is available as an option.)
3.2.1 Warning
To improve the reliability of the vacuum exhaust system, the pump control scheme generates
two levels of trouble warning: ALARM and TRIP.
An ALARM signal draws attention to an operating parameter value that has exceeded the
normal operating range; it does not signify that danger is imminent. The pump will continue to
operate in this condition, which enables the operator to complete the wafer cycle before
checking the pump.
The pump will stop automatically and generate a TRIP signal output if a parameter
approaches a mechanical safety limit.
Contact EBARA Corporation for details on checking the ALARM and TRIP setting conditions.
3.2.2 Operation Status Control
To facilitate operation status control and daily inspection, the LCD controller displays the
sensor data.
The LCD controller displays all ALARM and TRIP signals. For remote operation and
monitoring, the signals are available individually and as collective outputs.
3.3 Moving the Pump
3.3.1 Preparation
Raise all four adjuster feet fully before moving the pump; otherwise, an obstacle on the floor
may cause the moving pump to tip over.
Caster
Adjuster
f
fully
raised
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3.3.2 Moving Method
Move pump slowly by pushing eyebolt along the long axis of the pump (Direction A). Keep
toes and fingers away from moving wheels. If placing the pump in a corner or narrow space
requires moving it along the short axis (Direction B), two persons should “walk” the pump
over by alternately pushing the ends as shown below.
A
B
To move the pump across cracks or joints in the floor, spread a steel plate or similar device,
which can sustain the pump’s weight, over the discontinuity. At least two persons, using
great caution, should move the pump.
Steel Plate
DANGER If, when moving a pump, it loses balance and starts to tip over, do
not attempt to stop it. Get away from the pump immediately and
let it fall.
3.4 Detailed Specifications
Refer to the following tables and figures for detailed specifications, size, and pump
performance.
List of Tables and Figures
Category Contents Page
Table 3.1, 3.2 Specification 5,6
Outline Drawing 1 A70W 7
Outline Drawing 2 A30W 8
Outline Drawing 3 A25S 9
Outline Drawing 4 A10S 10
Outline Drawing 5 A07V 11
Figure 3.1 Performance Curve (A70W, A30W) 12
Figure 3.2 Performance Curve (A25S, A10S) 13
Figure 3.3 Performance Curve (A07V) 14
Figure 3.4 System Flow 15
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Table 3.1 Specification (A70W, A30W)
Model
A
70W
A
30W
Pum
p
in
g
S
p
eed
(
50 / 60Hz
)
7000 / 8400 L/min 3000 / 3600 L/min
Ultimate Pressure (50 / 60Hz) 0.27 / 0.13 Pa 0.4 / 0.27 Pa
Gas Inlet NW50
Connection Gas Outlet NW40
Moto
r
2P 2.2 kW + 3.7 kW 2P 1.5 kW + 2.2 kW
Connection Coupler (Ｒc 3/8)
Pressure
[Gauge Press.]
Supply ：Max 0.4 MPa
Differential Press. ：0.1 MPa
Flow Rate Min. 3.5 L/min
Cooling
Water
Temperature Max. 30 deg C
Connection 1/4” Tube Fitting (Same as Swagelok®)
Pressure
[Gauge Press.] Supply ：0.1-0.7 MPa
Setting ：0.04-0.07 MPa
N2Gas
Approx. Flow
Rate
[
Dilution 0 Mode
]
24-27 Pa m3/s
[3.4 Pa m3/s]
17-22 Pa m3/s
[3.4 Pa m3/s]
Connection d50 mm×L50 mm
Pressure -196 Pa
Duct
Ventilation Approx. Flow
Rate
0.5 m3/min
Brand
FOMBLIN Y-L VAC 25/6
BARRIERTA J100
DEMNUM S-65
KRYTOX VPF 1525
Lubrication
Oil
Quantity 0.8 L
Approximate Weight 380 kg 330 kg
Phase/Volt/Freq. 3 Phase, 200V (50 Hz), 200-220 V (60Hz)
Current Rating
(50 / 60 Hz) 29.5 / 28.1 A 19.7 / 18.5 A
Power
Supply
Connection MS Series 22-22
(Japan Aviation Electronics Industry)
Control Signal 57 Series 50 (DDK. Ltd)
[Note] Approximate flow rate of N2gas shows a necessary total amount for seal N2and
dilution N2.
LCD controller displays only the flow rate of dilution N2.
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Table 3.2 Specification (A25S, A10S, A07V)
Model
A
25S
A
10S
A
07V
Pum
p
in
g
S
p
eed
(
50 / 60 Hz
)
2500 / 3000 L/min 1000 / 1200 L/min 700 / 840 L/min
Ultimate Pressure (50 / 60 Hz) 5.3 / 4.0Pa 5.3 / 4.0Pa 1.1 / 1.0 Pa
Gas Inlet NW50 NW40 NW40
Connection Gas Outlet NW40
Moto
r
2P 3.7 kW 2P 2.2 kW 2P 1.5 kW
Connection Coupler (Ｒc 3/8)
Pressure
[Gauge Press.]
Supply ：Ｍax．0.4MPa
Differential Press.：Min．0.1MPa
Flow Rate Min. 3.5 L/min
Cooling
Water
Temperature Max. 30 deg C
Connection 1/4” Tube Fitting (Same as Swagelok®)
Pressure
[Gauge Press.] Supply：0.1-0.7 MPa
［Setting：0.04-0.07 MPa］
N2Gas
Approx.
Flow Rate**
17-20 Pa m3/s
[
3.4 Pa m3
/
s
]
17-20 Pa m3/s
[
3.4 Pa m3
/
s
]
15-19 Pa m3/s
[
3.4 Pa m3
/
s
]
Connection d50 mm×L50 mm d50 mm×L60 mm
Pressure -196 Pa
Duct
Ventilation Approx. Flow
Rate 0.5 m3/min
Brand
FOMBLIN Y-L VAC 25/6
BARRIERTA J100
DEMNUM S-65
KRYTOX VPF 1525
Lubrication
Oil
Quantit
y
0.4 L 0.4 L 0.5 L
Approx. Weight 240 kg 220 kg 150 kg
Phase/Volt/Fre
q
. 3 Phase, 200V
(
50 Hz
)
, 200-220 V
(
60Hz
)
Current Rating
(
50 / 60 Hz
)
18.3 / 17.5 A 11.7 / 11.1 A 8.4 / 8.6 A
MS Series 22-22 MS Series 20-4
Power
Supply
Connection
(
Ja
p
an Aviation Electronics Industr
y)
Control Signal 57 Series 50 (DDK. Ltd)
** Numerals in brackets [ ] are flow rate in dilution-0 mode.
[Note] Approximate flow rate of N2gas shows a necessary total amount for seal N2and
dilution N2.
LCD controller displays only the flow rate of dilution N2.
EBARA Corporation