EBARA EV-A10 User manual
308 (%$5$&25325$7,21
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
&(157/02'(/
93KDVH+
93KDVH+
CAUTION
READ AND UNDERSTAND THIS INSTRUCTION MANUAL THOROUGHLY
BEFORE USING THIS EQUIPMENT.
BE SURE TO KEEP THIS INSTRUCTION MANUAL ON HAND FOR FUTURE
REFERENCE.
To Facility and Tool Manufactures:
%H VXUH WR GLVWULEXWH WKLV ,16758&7,21 0$18$/ WR DOO HQGXVHU SHUVRQDO
DFWXDOO\RSHUDWLRQWKLVHTXLSPHQW
EVA_CN_E_Rev.0
MODEL EV-A10
,668(' %< 35(&,6,21 0$&+,1(5< &203$1<
308 (%$5$&25325$7,21
7KH 3URGXFWV GHVFULEHG KHUHLQ IDOO XQGHU ³WKHJRRGV OLVWHG LQ URZ RI WKH DSSHQGHG
WDEOH RI WKH ([SRUW 7UDGH &RQWURO 2UGHU RI -DSDQ´ VR LQ FDVHV RI H[SRUW RI VXFK
SURGXFWV\RXQHHGWRFRQILUP³XVH´DQG³SXUFKDVHUDQGRUHQGXVHU´DQGDVFDVHPD\
EHREWDLQWKHDSSURYDORIWKH0LQLVWHURI(FRQRP\7UDGHDQG,QGXVWU\3OHDVHFRQILUP
WKHVHFRQGLWLRQVRQ\RXURZQ
)RUPRUHLQIRUPDWLRQSOHDVHFRQWDFWRXUVDOHVRIILFHORFDWHGQHDU\RX㻌
'RQRWUHSURGXFHRUUHSULQWDQ\SRUWLRQRIWKLVPDQXDOZLWKRXWSHUPLVVLRQ
0DQXIDFWXUHUHVHUYHVWKHULJKWWRGLVFRQWLQXHRUFKDQJHDQ\VSHFLILFDWLRQVRUGHVLJQV
ZLWKRXWQRWLFHDQGZLWKRXWLQFXUULQJREOLJDWLRQV
MODEL EV-A10LQWKLVLQVWUXFWLRQPDQXDOLVRXUPRGHOFRGH㻌
$OOULJKWVUHVHUYHGFRS\ULJKW(%$5$&RUSRUDWLRQ㻌
3
308 (%$5$&25325$7,21
Environmental Basic Policies
,WLVRXUUHVSRQVLELOLW\DVSHRSOHRIWKHHDUWKWRSURWHFWQDWXUH¶VLUUHSODFHDEOHWUHDVXUHVDQGWRSDVV
WKHPRQWRIXWXUHJHQHUDWLRQV
$VZHXQGHUWDNHRXUEXVLQHVVDFWLYLWLHVZHZLOOHVWDEOLVKHQYLURQPHQWDOPDQDJHPHQWV\VWHPVDQG
LPSOHPHQW RQJRLQJ LPSURYHPHQWV DQG UHYLHZV ZKLOH VWULYLQJ WR SURPRWH KDUPRQ\ EHWZHHQ
WHFKQRORJ\ DQG QDWXUH SUHYHQW HQYLURQPHQWDO SROOXWLRQ DQG LPSURYH WKH RYHUDOO UHVXOWV RI RXU
HQYLURQPHQWDOPDQDJHPHQWDFWLYLWLHV:HDUHDZDUHWKDWHQYLURQPHQWDOSURWHFWLRQDQGPDQDJHPHQW
DFWLYLWLHVDUHWKHUHVSRQVLELOLW\RIDOOPDQDJHUVDQGHPSOR\HHVRIWKH&RUSRUDWLRQDQGHDFKSHUVRQ
ZLOOGHPRQVWUDWHWKLVDZDUHQHVVZKHQFDUU\LQJRXWKLVRUKHUGXWLHV
:HZLOOZLGHO\SXEOLFL HWKHVHEDVLFSROLFLHVWRUHJLRQDOVRFLHWLHVDQGWKHJHQHUDOSXEOLFDQGZRUNWR
PDNH(EDUD¶VSRVLWLRQRQWKHHQYLURQPHQWFOHDUWRVRFLHW\LQJHQHUDO
3
308 (%$5$&25325$7,21
Foreword
'HVLJQRI(%$5$02'(/(9$'5<9$&8803803LVEDVHGRQVXSHULRUHQJLQHHULQJDQGORQJ
H[SHULHQFH 7R SUHYHQW DQ\ SRVVLEOH WURXEOH DQG SURYLGH VDWLVIDFWRU\ RSHUDWLRQ DQG ORQJ OLIH LW LV
LPSRUWDQWWR WKRURXJKO\XQGHUVWDQG WKLV(%$5$02'(/ (9$'5<9$&8803803E\FDUHIXO
VWXG\RIWKLVPDQXDO,IDQ\TXHVWLRQVDULVHUHJDUGLQJWKLVPDQXDOSOHDVHGLUHFWWKHPWR(%$5$RU
\RXUGHDOHU<RXUTXHVWLRQVZLOOEHSURPSWO\DQVZHUHGDQG\RXUVXJJHVWLRQPD\EHFRQVLGHUHGIRU
LQFRUSRUDWLRQLQWRRXUIXWXUHSURGXFW
WARNING
BEFORE USING THIS EQUIPMENT, READ THIS INSTRUCTION
MANUAL THOROUGHLY. MANUFACTURES WARRANTY WILL BE
VOID, IF THE MODEL EV-A10 DRY VACUUM PUMP HAS BEEN
INCORRECTLY INSTALLED, OPERATED OR MAINTAINED OR IF IT
HAS BEEN MODIFIED OR REPAIRED WITH PARTS NOT SPECIFIED
BY MANUFACTURE.
SINCE THE OPERATIONS OR WORKS THAT ARE NOT DESCRIBED IN
THIS MANUAL COULD RESULT IN SERIOUS OR POSSIBLY EVEN
FATAL INJURY OR DAMAGE TO THE PUMP, DO NOT THESE THAT
ABSOLUTELY.
EBARA IS NOT LIABLE FOR ANY INJURY OR DAMAGE ARISING FROM
AN INDIVIDUAL’S CARELESSNESS, OR MISUSE.
3
308 (%$5$&25325$7,21
(1) Limited Warranty
7KHOLDELOLW\RI(%$5$&25325$7,21XQGHUWKLV:DUUDQW\FRYHUVWKHIROORZLQJ
8QOHVV RWKHUZLVH VSHFLILHG LQ WKH FRQWDFW WKH ZDUUDQW\ SHULRG VKDOO EH HLWKHU RQH \HDU IURP WKH
ILUVWGDWHRIRSHUDWLRQRUPRQWKVDIWHUWKHVKLSPHQWIURP(%$5$ZKLFKHYHUFRPHVILUVW
:KHQWKHSXUFKDVHGSXPSFDXVH IDLOXUH WKDWRZHWRLWV GHVLJQPDQXIDFWXULQJSURFHVVHV RU
RWKHU IDXOWLQHVV WKDW (%$5$ LV UHVSRQVLEOH WR (%$5$ZLOOHLWKHU UHSDLU WKHWURXEOLQJ SDUWV RU
UHSODFHWKHSXPSDWIUHHSIFKDUJH1RH[WHQVLRQRIZDUUDQW\LVDYDLODEOHHYHQZKHQWKHSXPS
ZDVUHSODFHGGXULQJWKHRULJLQDOZDUUDQW\SURJUDP
)HHVZLOOEHFKDUJHGIRUUHSDLULQWKHIROORZLQJFLUFXPVWDQFHVDQGIRUFRQVXPDEOHSDUWV
,IWKHWURXEOHRFFXUVDIWHU:DUUDQW\KDVH[SLUHG
,IWKHWURXEOHLVFDXVHGE\RSHUDWLQJLQWKHPDQQHUQRWGHVFULEHGLQWKHLQVWUXFWLRQPDQXDOV
RUXVLQJXQGHUVSHFLDOFRQGLWLRQ
,I WKH WURXEOH LV FDXVHG E\ UHSDLU RU UHPRGHOLQJ RI WKH SXPS E\ RWKHU WKDQ (%$5$ RU
DXWKRUL DWLRQVXSSOLHUVEH(%$5$
,IWKHWURXEOHLVFDXVHGEHFRUURVLRQRUE\SURGXFWVGXHWRSXPSLQJWKHFRUURVLYHRUUHDFWLYH
VXEVWDQFH
,IWKHWURXEOHLVFDXVHGE\ILUHIORRGHDUWKTXDNHRURWKHUFLUFXPVWDQFHVEH\RQG(%$5$¶V
FRQWURO
(%$5$ZLOOQRWEHOLDEOHIRUDQ\FRPSHQVDWLRQIRUGDPDJHRULQMXU\UHVXOWLQJIURPEUHDNGRZQ
RIWKHSXPS
(2) Repair and Servicing
5HTXHVWVIRUUHSDLURUVHUYLFLQJRIWKHSXPSVKDOOEHPDGHWR\RXUGHDOHURUWR(%$5$
,I DQ\ DEQRUPDO V\PSWRPV RWKHU WKDQ WKRVH GLVSOD\HG RQ WKH RSHUDWLRQDO SDQHO DSSHDU WDNH
DFWLRQLQDFFRUGDQFHZLWKWKHLQVWUXFWLRQRI6HFWLRQ³7URXEOHVKRRWLQJ´
,I WURXEOH RFFXUV WR RUGHU UHSDLUV RU VHUYLFLQJ 3OHDVH FRQWDFW (%$5$ &25325$7,21 RU DQ
DXWKRUL HG $JHQW'LVWULEXWRU DQG SURYLGH WKH LQIRUPDWLRQ RQ WKH QDPHSODWH DQG GHWDLOV RI WKH
SUREOHP
,I\RXKDYHDQ\LQTXLULHVDERXWWKHSXPSSOHDVHFRQWDFW(%$5$
3
308 (%$5$&25325$7,21
(3) Safety Notice
,W LV HVVHQWLDO WKDW WKRVH RSHUDWLQJ WKLV SXPS VKRXOG KDYH WKH NQRZOHGJH WR LGHQWLI\ DQG DYRLG
KD DUGRXV FRQGLWLRQV DVVRFLDWHG ZLWK WKH SXPS ,QDGHTXDWH RU UXVK RSHUDWLRQ PD\ FDXVH
GDQJHURXVDQGVHULRXVDFFLGHQWV%HIRUHLQVWDOODWLRQDQGRSHUDWLRQWKHRSHUDWRUVKRXOGILUVWKDYH
DJRRGNQRZOHGJHRIWKHSXPSFRQVWUXFWLRQRSHUDWLRQSURFHGXUHDQGLWVKD DUGVHJHOHFWULFDO
VWRUHG HOHFWULFDO WKHUPDO 7KH RSHUDWRU VKRXOG UHDG WKURXJK WKLV LQVWUXFWLRQ PDQXDO DQG RWKHU
GRFXPHQWVLVVXHGE\(%$5$LQGHWDLO
7KH IROORZLQJ V\PEROV DUH XVHG WR KLJKOLJKW LPSRUWDQW LQIRUPDWLRQ DQG LQVWUXFWLRQV WKDW PXVW EH
IROORZHGWRSUHYHQWSHUVRQDOLQMXU\RUGDPDJHWRHTXLSPHQW3OHDVHVWXG\WKHV\PEROVFDUHIXOO\VR
WKDWWKHPHDQLQJRIDQ\ZDUQLQJ\RXHQFRXQWHULVLPPHGLDWHO\FOHDU
DANGER LQGLFDWHVDQLPPLQHQWO\KD DUGRXVVLWXDWLRQZKLFKLIQRWDYRLGHGZLOOUHVXOW
LQGHDWKRUVHULRXVLQMXU\
WARNING LQGLFDWHVDSRWHQWLDOO\KD DUGRXVVLWXDWLRQZKLFKLIQRWDYRLGHGFRXOGUHVXOW
LQGHDWKRUVHULRXVVLWXDWLRQ
CAUTION LQGLFDWHVDSRWHQWLDOO\KD DUGRXVVLWXDWLRQZKLFKLIQRWDYRLGHGPD\UHVXOW
LQ PLQRU RU PRGHUDWH LQMXU\ RU SRVVLEOH GDPDJH WR WKH HTXLSPHQW RU
PDFKLQH
NOTE LVXVHGWRFDOODWWHQWLRQRUWRHPSKDVL HHVVHQWLDOLQIRUPDWLRQ
㻌㻌㻌㻌7KHIROORZLQJV\PEROVPD\DSSHDURQWKHPRGHO(9$GU\YDFXXPSXPS
'$1*(5+HDY\2EMHFW
:$51,1*+RW6XUIDFHV
:$51,1*+D DUGRXV9ROWDJH
3
308 (%$5$&25325$7,21
3UHFDXWLRQVQHFHVVDU\IRUVDIHXVHRIWKH(%$5$02'(/(9$'5<9$&8803803DUHGHWDLOHGLQ
WKLVLQVWUXFWLRQPDQXDOZKLOHLPSRUWDQWLWHPVFRQFHUQLQJSUHFDXWLRQVIRUKDQGOLQJ(%$5$02'(/㻌(9
$'5<9$&8803803DUHOLVWHGEHORZ
DANGER
㽂.HHSRXWIURPXQGHUWKHSXPSZKHQOLIWHG2QO\TXDOLILHGSHUVRQHOVKDOOXQORDGDQG
OLIWWKHSXPS
WARNING
㽂%HFDUHIXOQRWWRRYHUWXUQWKHSXPSZKHQSXVKLQJDQGSXOOLQJLWVLGHZD\VEHFDXVH
WKHZLGWKRIWKHSXPSLVVPDOOWRLWVKHLJKW
㽂%HVXUHWRWXUQRIIWKHSRZHUDWWKHFLUFXLWSURWHFWRU&3DQGGLVFRQQHFWWKHSRZHU
FDEOH IURP WKH SRZHU FRQQHFWRU ZKHQ WKH SXPS LQVWDOOLQJ WKH ZLULQJ DQG
PDLQWHQDQFH ZRUN 1HYHU VXSSO\ SRZHU WR WKH SXPS 8QWLO \RX KDYH FRPSOHWHG
WKHVHZRUNV
㽂(OHFWULFDOZLULQJVKDOOEHFDUULHGRXWRQO\E\TXDOLILHGHOHFWULFLDQV
㽂%HVXUHWRFRQQHFWWKHJURXQGLQJZLUHRWKHUZLVHDQHOHFWULFVKRFNPD\EHFDXVHG
E\HOHFWULFOHDNDJH
㽂7KH HDUWKLQJ RI WKH SXPS LV UHDOL HG E\ FRQQHFWLQJ WKH FDEOH ZLWK TXDOLILHG
HOHFWULFLDQV7KH TXDOLILHG HOHFWULFLDQV VKRXOG KDYH WKHPVHOYHV D FRQQHFWLRQ WKH
JURXQG
㽂7KHSXPSXQLWLVQRWHTXLSSHGZLWKFLUFXLWEUHDNHU&%3OHDVHLQVWDOO&%EDVHGRQ
WKHODZDQGWKHVWDQGDUGLQWKHLQVWDOODWLRQUHJLRQ
㽂7KH SXPS PXVW EH FRQQHFWHG WR HOHFWULFDO SRZHU VXSSO\ ZLWK D VXLWDEOH FLUFXLW
EHDNHUORFNRXWWDJRXW&%
㽂%H VXUH WR FKHFN IRU OHDNV DIWHU \RX KDYH LQVWDOOHG WKH SXPS :KHQ FKHFNLQJ IRU
JDV OHDNV E\ SUHVVXUL DWLRQ SOHDVH SUHVVXUL H E\ OHVV WKDQ 03D LQWR WKH
H[KDXVWSLSLQJ
㽂7KLV SXPS LV VXLWDEOH IRU XVH RQ FOHDQ DQG QRQFRUURVLYH JDVHV 'R QRW XVH
H[SORVLYHIODPPDEOHWR[LFRUFRUURVLYHVXEVWDQFHV
㽂7KH SXPS DQG H[KDXVW SLSLQJ ZLOO UHPDLQ DW D KLJK WHPSHUDWXUH GXULQJ RSHUDWLRQ
DQGIRUDVKRUWWLPHDIWHUWKHSXPSKDVVWRSSHG%HVXUHWRDYRLGFRQWDFWDQGNHHS
LQIODPPDEOH VXEVWDQFHV RXW RI UHDFK 'R QRW UHPRYH WKH SXPS FRYHU GXULQJ
RSUDWLRQ
㽂'RQRWSHUIRUPDZLWKVWDQGYROWDJHWHVW)DLOXUHWRFRPSO\FRXOGUHVXOWLQGDPDJHWR
WKHVHQVLWLYHGHYLFHV
㽂'RQRWLQVHUWDQ\SDUWRIERG\WRYHQWLODWLRQLQOHW0RYLQJSDUWVRIWKHFRROLQJIDQFDQ
FUDVKDQGFXW
㽂&KHFN VDIHW\ LQWHUORFN IXQFWLRQV SHULRGLFDOO\ HYHU\ PRQWKV WR FRQILUP WKH
LQWHUORFNVZLOOZRUNFRUUHFWO\
㽂'RQRWDOWHUWKHSXPSPHPEHUQRUFKDQJHDQ\SDUWVZLWKRXWWKH(%$5$¶VFRQVHQW
RUDSSURYDO
3
308 (%$5$&25325$7,21
CAUTION
㽂'RQRWVWHSRQWKHSXPSRUSODFHREMHFWRQLW
㽂7KHH[KDXVWSLSLQJPDGHE\SRO\YLQ\OFKORULGHFDXVHVWKHQRLVHWKURXJKWKHSLSH
㽂'RQRWDSSO\WKHSRZHUVXSSO\IURPWKHSXPS¶VSRZHUSDFNWRDQ\RWKHUHTXLSPHQW
DVWKLVZLOOUHVXOWLQPDOIXQFWLRQLQJRIWKHFRQWUROXQLWVDQGLQSXPSIDLOXUH
㽂8VH WKH FRUUHFW ZLULQJ PDWHULDOV DQG VL H WR PDWFK WKH RSHUDWLQJ FRQGLWLRQV LQ
DFFRUGDQFH ZLWK WKH SRZHU FRQVXPSWLRQ UDWLQJ DQG DPELHQW DLU WHPSHUDWXUH RI WKH
SXPS
㽂9HQWVDWERWKHQGVERWKVLGHDQG WRSRI WKHSXPS3ODFHWKHSXPSHQRXJKVSDFH
IURP WKH VWDWLRQDU\ VHFWLRQ ,I WKH FRROLQJ DLU VXSSO\ LV LQVXIILFLHQW WKH SXPS
WHPSHUDWXUHZLOOULVHDQGSUREOHPVVXFKDVURWRUFRQWDFWZLOORFFXU
)URQW5HDU7RS PPRUPRUH
%RWKVLGH PPRUPRUH
㽂,QVWDOOSXPSLQDORFDWLRQDWDQDPELHQWQRWH[FHHGLQJGHJ&3DUWLFXODUFDXWLRQLV
UHTXLUHGZKHQWKHSXPSLVRSHUDWHGLQDQHQFORVHGURRP
㽂1HYHURSHUDWHWKHSXPSZLWKRXWSXPSFRYHUIRUVDIHW\
NOTE
㽂3XPS PXVW EH SODFHG LQ DQ XSULJKW SRVLWLRQ 'R QRW VWDFN DV SDFNLQJ :KHQ WKH
SXPSLVRYHUWXUQHGWKLVZLOOUHVXOWLQDFFLGHQW
㽂7RIL[WKHSXPSWKHKHLJKWDGMXVWPHQWIHHWRIIRXUHDFKDUHDWWDFKHV,IWKHSXPSLV
QRWVWDEOHYLEUDWLRQDQGQRLVHRIWKHSXPSPD\EHLQFUHDVHG
㽂'RQRWZLUHYDFDQWSLQV
㽂$SSO\D9'&SRZHUIRULQSXWVLJQDOVRQWKHSXPSVLGH'RQRWDSSO\WKLVYROWDJH
RQWKHHTXLSPHQWVLGH
㽂%HVXUHWRZLUHDOOVLJQDOVZLWKWKHFRUUHFWSRODULW\
㽂:KHQRXWSXWVLJQDOVDUHXVHGWRHQHUJL HDQLQGXFWLYHORDGVXFKDVDUHOD\EHVXUH
WRLQVHUWDGLRGH9$FODVVLQRUGHUWRDEVRUEWKHEDFNHOHFWURPRWLYHIRUFHGXH
WRVXUJHFXUUHQWV
㽂7KHSXPSFDQQRWVWDUWZKLOHWKHPHDVXULQJLQVWUXPHQWVDUHERRWLQJDIWHUWKH 䠟䠬LV
SODFHGLQWKH21SRVLWLRQ
㽂7KHSXPSZLOOQRWVWDUWZKHQDQ$/$50KDVEHHQJHQHUDWHG$IWHU\RXKDYHWDNHQ
WKHUHPHGLDODFWLRQUHVHWWKHSXPS
3
308 (%$5$&25325$7,21
(4) Safety Warning Labels
)ROORZLQJVDIHW\ODEHOVDUHDWWDFKHGWRSXPSFRYHUV
+D DUGRXVZHLJKWGDQJHU
+D DUGRXVYROWDJHZDUQLQJ
+LJKWHPSHUDWXUHZDUQLQJ
(OHFWULFFKDUJHPDUN
+D DUGRXVZHLJKWGDQJHU
+HDY\ REMHFW PD\ FDXVH LQMXU\ RU GHDWK GXH WR RYHUWXUQLQJ RU IDOOLQJ SXPS .HHS RXW IURP
XQGHUWKHOLIWHGSXPS5DLVHDOODGMXVWHUIHHWIXOO\ZKHQPRYLQJ
+D DUGRXVYROWDJHZDUQLQJ
+D DUGRXV YROWDJH PD\ VKRFN EXUQ RU FDXVH GHDWK 7XUQ SRZHU RII DQG ORFNRXW EHIRUH
VHUYLFLQJ
+LJKWHPSHUDWXUHZDUQLQJ
+RWVXUIDFHPD\EXUQRUFDXVHLQMXU\$OORZWKHSLSLQJDQGFDVLQJWRFRROEHIRUHVHUYLFLQJ
(OHFWULFFKDUJHPDUN
WARNING
㆙ ࿌
+RW6XUIDFHV
:LOOEXUQVNLQRQFRQWDFW
$OORZSLSLQJDQGFDVLQJWRFRRO
EHIRUHVHUYLFLQJ
㧗 㒊࠶ࡾࠋ᥋ゐࡍࡿⅆയࢆࡍࡿ༴㝤ࡀ࠶ࡾࡲࡍࠋ
㓄⟶࣭ࢣ࣮ࢩࣥࢢࡀ෭࠼࡚ࡽ࣓ࣥࢸࢼࣥࢫࢆࡋ࡚ୗࡉ࠸ࠋ
&
WARNING
㆙ ࿌
+D DUGRXV9ROWDJH
&RQWDFWZLOOFDXVHLQMXU\RUGHDWKE\
HOHFWULFDOVKRFN'LVFRQQHFW
OLQHSRZHUEHIRUHVHUYLFLQJ
༴㝤㟁ᅽ㒊࠶ࡾࠋ᥋ゐࡍࡿ㔜യࡲࡓࡣṚஸࡢ
༴㝤ᛶࡀ࠶ࡾࡲࡍࠋ㟁※౪⤥ࢆṆࡵ࡚ࣈ࣮ࣞ࢝ࢆษࡗࡓ≧ែ࡛
࣓ࣥࢸࢼࣥࢫࢆࡋ࡚ୗࡉ࠸ࠋ&
DANG ER
༴
㝤
+HDY\2EMHFW
&DQFDXVHLPSDFWLQMXU\WKURXJKIDOOLQJRUWLSSLQJ
8VHDSSURSULDWHSURSHUO\ULJJHGOLIWLQJHTXLSPHQWDQGNHHSIURP
XQGHUVXVSHQGHGSXPS5DLVHDOODGMXVWHUIHHWIXOO\ZKHQPRYLQJ
㔜㔞≀ࠋⴠୗཬࡧ㌿ಽࡼࡾ㔜യࡲࡓࡣṚஸࡢ༴㝤ࡀ࠶ࡾࡲࡍࠋ
ྞࡾୖࡆࡓ࣏ࣥࣉࡢୗධࡽ࡞࠸࡛ୗࡉ࠸ࠋ
⛣ືࡣࢪࣕࢫࢱࣇࢵࢺࢆୖ㝈ࡲ࡛࠶ࡆ࡚ୗࡉ࠸ࠋ
&
3
308 (%$5$&25325$7,21
High temperature warning
㻌
Hazardous voltage warning
Heavy weight danger
Electric charge mark
㻌
Top View
Front View
3
308 (%$5$&25325$7,21
(5) Safety Interlocks
0RWRUWKHUPRVWDWSURWHFWWKHSXPSPRWRUIURPRYHUKHDWLQJGXHWRH[WHQGHGFXUUHQWGUDZVLQH[FHVV
RIWKHPRWRUUDWLQJ8QGHUDSHUVLVWHQWRYHUORDGFRQGLWLRQPRWRUWKHUPRVWDWRSHQVDFRQWDFWZKLFK
LQWHUUXSWVWKHPRWRUUXQFLUFXLW$EULHIFRROGRZQLQWHUYDOSHUPLWVUHVWDUWLQJWKHSXPS
WARNING
&KHFN6DIHW\,QWHUORFNIXQFWLRQVSHULRGLFDOO\HYHU\PRQWKVWRFRQILUPWKHLQWHUORFNV
ZLOOZRUNFRUUHFWO\
P.13
PM10U
EBARA CORPORATION
Contents
Environmental Basic Policies ................................................................................. 3
Foreword ................................................................................................................... 4
(1) Limited Warranty ............................................................................................ 5
(2) Repair and Servicing...................................................................................... 5
(3) Safety Notice ................................................................................................... 6
(4) Safety Warning Labels ................................................................................... 9
(5) Safety Interlocks ........................................................................................... 11
EC DECLARATION OF CONFORMITY.................................................................. 12
Contents .................................................................................................................. 13
1. Introduction ...................................................................................................... 15
1.1 Acceptance Check........................................................................................ 15
1.2 Environmental Concerns............................................................................. 16
2. Product Description ........................................................................................ 17
2.1 Outline............................................................................................................ 17
2.1.1 Pump Module......................................................................................... 17
2.1.2 Cooling Fan............................................................................................ 17
2.1.3 Exhaust................................................................................................... 17
2.2 Control System ............................................................................................. 17
2.2.1 Alarm Control System........................................................................... 17
2.3 The Way of Pump Moving............................................................................ 18
2.3.1 Preparation ............................................................................................ 18
2.3.2 Moving Method...................................................................................... 18
2.4 Release and shut off residual internal energy .......................................... 19
2.4.1 Electrical Power – Lockout and Tagout ............................................. 19
2.4.2 Returning to Service ............................................................................. 19
2.5 Detailed Specification .................................................................................. 20
2.5.1 Model Description ................................................................................. 20
2.5.2 Specifications ........................................................................................ 21
2.5.3 Outline Drawing..................................................................................... 22
2.5.4 Performance Curve ............................................................................... 24
2.5.5 System Flow .......................................................................................... 25
3. Installation ........................................................................................................ 26
3.1 Movement and Fixation................................................................................ 26
3.1.1 Location.................................................................................................. 26
3.1.2 Caster and adjustment foot ................................................................. 26
3.1.3 Pump Fixation (Option) ........................................................................ 27
3.2 Piping ............................................................................................................. 30
3
308 (%$5$&25325$7,21
3.2 Piping ............................................................................................................. 30
3.2.1 Vacuum and Exhaust Piping................................................................ 30
3.3 Electrical Wiring............................................................................................ 31
3.3.1 Power Supply Wiring ............................................................................ 31
3.3.2 Control Signal Wiring ........................................................................... 35
4. Operation Panel ............................................................................................... 38
4.1 Operation Panel Outline............................................................................... 38
4.2 Operation Panel Display .............................................................................. 41
5. Operation .......................................................................................................... 43
5.1 Before Starting.............................................................................................. 43
5.2 START / STOP ............................................................................................... 44
5.3 Operation when momentarily power failure happens .............................. 46
5.4 Gas Ballast .................................................................................................... 47
6. Maintenance and Inspection .......................................................................... 48
6.1 Routine Inspection ....................................................................................... 48
6.2 Vacuum and Exhaust Piping ....................................................................... 48
6.3 Lubrication Oil .............................................................................................. 49
6.4 Maintenance Parts List ................................................................................ 52
6.5 List of Wastes During Maintenance ........................................................... 52
6.6 Repair and Service ....................................................................................... 53
6.7 Overhaul ........................................................................................................ 53
7. Storage / Disposal ........................................................................................... 53
7.1 Storage........................................................................................................... 53
7.2 Disposal ......................................................................................................... 53
8. Disconnection and Transportation................................................................ 54
9. Troubleshooting .............................................................................................. 56
9.1 Troubleshooting (1) : Basic trouble ........................................................... 57
9.2 Troubleshooting (2) : ALARM ..................................................................... 57
---------------------------------------------------------------------------------------------------------------------
[Attachment Data]
Appendix 1 : Material Safety Data Sheet of Lubricant oil (JPN)
Appendix 2 : Material Safety Data Sheet of Lubricant oil (ENG)
Appendix 3 : Overhaul / Repair Request form (JPN)
Appendix 4 : Overhaul / Repair Request form (ENG)
Appendix 5 : Leak Check procedure
Information of Global Network
3
308 (%$5$&25325$7,21
1. Introduction
1.1 Acceptance Check
&KHFNWKHIROORZLQJLWHPVRQUHFHLSWRIWKHSXPSSDFNDJH
&KHFN WKDW WKH QDPHSODWH DIIL[HG WR WKH RXWHU FRYHU RI WKH SXPS WR FRQILUP WKDW WKH SXPS
VXSSOLHG DJUHHV ZLWK \RXU RUGHU &KHFN WKH DFFHVVRULHV DJDLQVW WKH SDFNLQJ OLVW DQG WKH
SUHYLRXVO\VXEPLWWHGGUDZLQJVDQGGRFXPHQWVWRFRQILUPWKDWWKHDOORUGHUHGDFFHVVRULHVKDYH
EHHQVXSSOLHG
&KHFNWKDWQRGDPDJHIRUWKHSXPSKDVRFFXUUHGLQWUDQVLW
6WRUHWKHSXPSLQDGU\DQGFOHDQSODFHLILWLVQRWLQVWDOOHGDWRQFHDIWHUGHOLYHU\
7HPSHUDWXUH WRGHJ&
+XPLGLW\ RUOHVVFRQGHQVDWLRQPXVWQRWH[VLVW
7KHSXPSPXVWEHSODFHGLQDQXSULJKWSRVLWLRQ
NOTE
'R QRW VWDFN WKH SXPS 7KH SXPS PXVW EH SODFHG LQ DQ XSULJKW SRVLWLRQ :KHQ WKH
SXPSLVRYHUWXQHGOXEULFDWLQJRLOLQVLGHDSXPSPD\OHDNWRDURWRUURRPDQGLWPD\
FDXVHWURXEOHWRRSHUDWLRQ
CAUTION
1RWLI\ (%$5$ ZLWKRXW GHOD\ ZKHQ GDPDJH LV GLVFRYHUHG RU ZKHQ FRPSRQHQWV DUH
PLVVLQJ'RQRWXVHZKHQDOHDNLVSUHVHQWDVWKLVZLOOUHVXOWLQDFFLGHQW
3
308 (%$5$&25325$7,21
1.2 Environmental Concerns
+DQGOLQJRURSHUDWLQJWKHXQLWRWKHUWKDQVSHFLILHGPD\LQGXFHDGYHUVHLPSDFWVRQWKHHQYLURQPHQW
)ROORZWKHGHVFULSWLRQVEHORZWRKDQGOHRSHUDWHDQGPDLQWDLQWKHXQLW
$VN DQ DXWKRUL HG ZDVWHGLVSRVDO FRPSDQ\ WR GLVSRVH SDFNLQJ PDWHULDOV IURP XQFUDWLQJ
DFFRUGLQJWRODZVDQGRUGLQDQFHVDSSOLFDEOHWRWKHZDVWH
)DLOXUHWRGRWKHXQLWPDLQWHQDQFH LQFOXGLQJRYHUKDXOPD\WULJJHUDFFLGHQWV FDXVLQJ LQMXU\RU
GHDWKXQLWWURXEOHVRUHQYLURQPHQWDOSROOXWLRQ3ODQWKHPDLQWHQDQFHDQGSHUIRUPLWSHULRGLFDOO\
WRRSHUDWHWKHXQLWHIILFLHQWO\
7RGLVSRVHWKHXQLWIROORZHIIHFWLYHODZVDQGRUGLQDQFHVDSSOLFDEOHLQWKHDUHDZKHUHWKHXQLWLV
LQVWDOOHG
,I\RXKDYHDQ\LQTXLULHVDERXWWKHSXPSSOHDVHFRQWDFW(%$5$
7RGLVSRVHWKHOXEULFDQWRLODQGFKHPLFDOVIROORZHIIHFWLYHODZVDQGRUGLQDQFHVDSSOLFDEOHLQWKH
DUHDZKHUHWKHXQLWLVLQVWDOOHG
3
308 (%$5$&25325$7,21
2. Product Description
2.1 Outline
7KLVSXPSKDVDFRPSDFWGHVLJQDQGLQFOXGHVFRQWUROVWRHQKDQFHUHOLDELOLW\DQGRSHUDWLRQ
7KLV SXPSLVVXLWDEOHIRUXVHRQFOHDQDQGQRQFRUURVLYHJDVHV'RQRW XVH H[SORVLYH IODPPDEOH
WR[LFRUFRUURVLYHVXEVWDQFHV
2.1.1 Pump Module
7KH SXPS LV 5RRWV W\SH'U\ YDFXXP SXPS ZKLFK URWDWHV D SDLU RI QRQFRQWDFW PXOWLVWDJH URWRUV
V\QFKURQL HGE\WLPLQJJHDUV
7KHWLPLQJJHDUVDQGEHDULQJVDUHHQFORVHGLQDFRPSDUWPHQWWKDWLVLQGHSHQGHQWRIWKHFDVLQJ)RU
OXEULFDWLRQ 3HUIOXRUR3RO\HWKHU 3)3( RLO DQG JUHDVH DUH XVHG 7KH SXPS LV IDFWRU\ ILOOHG ZLWK
OXEULFDWLRQRLO
8VHRQO\WKHUHFRPPHQGHGOXEULFDWLRQRLOJUDGHVVKRZQLQVSHFLILFDWLRQWDEOHIRUUHSOHQLVKLQJRU
UHSODFLQJ
2.1.2 Cooling Fan
%HFDXVH WKH SXPS FRPSUHVVHV JDV IURP D YDFXXP WR DWPRVSKHULF SUHVVXUH FRPSUHVVLRQ KHDW LV
JHQHUDWHG7KHUHIRUHFRROWKHSXPSZLWKFRROLQJIDQ
3ODFHWKHSXPSHQRXJKVSDFHVIURPWKHVWDWLRQDU\VHFWLRQ
)52175($5723 PPRUPRUH
%RWKVLGH PPRUPRUH
2.1.3 Exhaust
$FKHFNYDOYHLVSURYLGHGDVDVWDQGDUGDFFHVVRU\WRSUHYHQWUHYHUVHIORZRIJDVIURPWKHH[KDXVW
WKURXJKWKHSXPSWRWKHYDFXXPFKDPEDUZKHQSXPSLVVWRSSHG
2.2 Control System
7KLV SXPS KDV D EXLOWLQ XQLWFRQVLVWLQJ RI D &LUFXLW 3URWHFWRU &3 1RLVH )LOWHU 1) DQG ,QYHUWHU
'XULQJ SXPS RSHUDWLRQ VRPH FRQGLWLRQV DUH PRQLWRUHG LQFOXGLQJ HOHFWULFDO SRZHU DQG FXUUHQW IRU
PRWRU&RQWLQXRXVRSHUDWLRQLVSRVVLEOHZKHQWKHUHLVDPRPHQWDULO\SRZHUIDLOXUH9RUOHVVRI
VHFRUOHVV
2.2.1 Alarm Control System
7R DVVXUH WKH UHOLDELOLW\ RI WKH SXPS DV D YDFXXP H[KDXVW V\VWHP WKH SXPS SURWHFWLRQ V\VWHP
JHQHUDWHV DQ $/$50 VLJQDO 7KLV VLJQDO RXWSXW LV JHQHUDWHG DQG WKH SXPS ZLOO VWRS DXWRPDWLFDOO\
ZKHQWKHXSSHUPHFKDQLFDOVDIHW\OLPLWLVUHDFKHGGXULQJSXPSRSHUDWLRQ
%HVXUHWRFRQWDFW(%$5$IRUGHWDLOVRQFKHFNLQJWKH$/$50VHWWLQJFRQGLWLRQ
$OO$/$50VLJQDODUHGLVSOD\HGRQWKHIURQWSDQHO)RUUHPRWHRSHUDWLRQDQGPRQLWRULQJWKHVLJQDOLV
3
308 (%$5$&25325$7,21
DYDLODEOHDVJURXSRXWSXW
2.3 The Way of Pump Moving
2.3.1 Preparation
%HIRUHSXPSPRYLQJDOODGMXVWHUIHHWVKDOOEHUDLVHGIXOO\DWIRXUSODFHV
,QFDVHRIEHLQJQRWUDLVHGIXOO\SXPSPD\EHWULSSHGRYHUE\REVWDFOHRQIORRU
2.3.2 Moving Method
0RYHSXPSVORZO\E\SXVKLQJH\HEROWWRZDUGGLUHFWLRQ$EHVXUHQRWWREHFDXJKWE\WRHV,ISXPS
QHHGVWRPRYHGWRZDUGGLUHFWLRQ%LQRUGHUWREHVHWDWDFRUQHURUQDUURZVSDFHVWZRSHUVRQVVKDOO
PRYHWKHSXPSE\SXVKLQJLWVWHUPLQDOSRUWLRQDOWHUQDWHO\DVGLUHFWHGEHORZ
,ISXPSQHHGVWREHPRYHGRQVWHSVRUGLWFKHVVSUHDGVWHHOSODWHRUWKHOLNHZKLFKFDQVXVWDLQWKH
SXPSZHLJKWRYHUWKHVWHSVGLWFKHVDQGSXPSVKDOOEHPRYHGRQLWE\WZRSHUVRQVZLWKFDUH
,ISXPSVKRXOGORVHLWVEDODQFHZKHQPRYLQJDQGVWDUWWULSSLQJRYHUQHYHUWU\WRVXVWDLQWKHSXPS
JHWDZD\IURPWKHSXPSLPPHGLDWHO\
$
%
&DVWHU $GMXVWHU
6WHHO3ODWH
3
308 (%$5$&25325$7,21
2.4 Release and shut off residual internal energy
2.4.1 Electrical Power – Lockout and Tagout
/RFNWKHEUDQFKFLUFXLWLQWKH2))SRVLWLRQDQGWDJLWRXWWRSHUIRUPPDLQWHQDQFHRUWURXEOHVKRRWLQJ
7KH/RFNRXW7DJRXWSURFHGXUHVPXVWFRPSO\ZLWK26+$&)5DQG
7XUQRIIWKHSXPSFLUFXLWSURWHFWRU
7XUQWKHEUDQFKFLUFXLWGLVFRQQHFWRII&KHFNZLWKDYROWPHWHUWKDWWKHSRZHULVVKXWRIIWKH
SXPS
,QVHUW SDGORFN WKURXJK KROHV SURYLGHG RQ ORFNLQJ GHYLFH &ORVH SDGORFN DQG DWWDFK WDJ
.HHSWKHNH\ZLWK\RXZKLOHZDUNLQJ
&KHFNWKDWWKHGLVSOD\SDQHOLVRII
2.4.2 Returning to Service
5HPRYHKDQGOHVWRSEUDFNHWDQGVZLWFKFLUFXLWEUHDNHURQ
5HVWDUW SXPS DQG RSHQ IRUHOLQH YDOYH RQO\ DIWHU DSSURSULDWH OHDN FKHFNV DQG VDIHW\
YHULILFDWLRQV
WARNING
㽂7R DYRLG GDQJHUV SRWHQWLDOO\ HQFRXQWHUHG GXULQJ PDLQWHQDQFH WUDQVSRUWDWLRQ RU
VWRUDJHIROORZLQVWUXFWLRQVEHORZWRVKXWRIISRZHU
㽂&DSDFLWRUV ZLWKLQWKHFRQWUROSDQHOUHWDLQUHVLGXDOHQHUJ\DIWHU LQWHUUXSWLRQ RI SRZHU
VXSSO\ :DLW ILYH PLQXWHV DIWHU VKXWWLQJ RII EUHDNHU EHIRUH RSHQLQJ WKH FRQWURO
SDQHO&DUHIXOO\FKHFNWKDWEOHHGFLUFXLWVKDYHGLVFKDUJHGWKHUHVLGXDOHQHUJ\EHIRUH
VHUYLFLQJWKHFRQWUROSDQHO
3
308 (%$5$&25325$7,21
2.5 Detailed Specification
7KH IROORZLQJ WDEOHV DQG ILJXUHV VKRXOG EH FRQVXOWHG IRU SXPS VSHFLILFDWLRQ GLPHQVLRQ DQG
SHUIRUPDQFHGHWDLOV
2.5.1 Model Description
EV-A10-䕕䕕
䐟
Power Supply
Specification
21Phase 200V
33Phase 200V
䐠
Position of
Exhaust Remarks
UTOP STANDARD
SSIDE For the exhaust of
condensable gas
䐟㻌 䐠㻌
Other manuals for EV-A10
1
Table of contents
Other EBARA Water Pump manuals
EBARA
EBARA thebe 3BPS ci User manual
EBARA
EBARA Ego B Operating instructions
EBARA
EBARA FSA User manual
EBARA
EBARA ESA500W User manual
EBARA
EBARA 1 EPBH 9.2-11 T-AVS Operating and maintenance manual
EBARA
EBARA VERSATYLE SG 1000 Instructions for use
EBARA
EBARA 80?25 Owner's manual
EBARA
EBARA GSD Series User manual
EBARA
EBARA MR Operating instructions
EBARA
EBARA ETM Operating instructions
EBARA
EBARA ESA200W User manual
EBARA
EBARA OPTIMA Series Operating instructions
EBARA
EBARA Ego B slim Operating instructions
EBARA
EBARA Dumper 1 series Operating instructions
EBARA
EBARA DAR Series User manual
EBARA
EBARA Ego 40 Operating instructions
EBARA
EBARA DML User manual
EBARA
EBARA Ego Operating instructions
EBARA
EBARA SF6 Operating instructions
EBARA
EBARA COMPACT Operating instructions
Popular Water Pump manuals by other brands
WAGNER
WAGNER PM500 operating manual
General Pump
General Pump EP1506G8 Instructions for the installation and use
Bühler technologies
Bühler technologies P2.3 Brief instructions
Pentair
Pentair Berkeley BVM Series Installation and operation manual
Wilo
Wilo Comfort-Vario COR-1***-GE Series Installation and operating instructions
Liberty Pumps
Liberty Pumps LowPro41LP installation manual
Aquatech Pressmain
Aquatech Pressmain Aquamatic AMV Series instructions
GM8 Group
GM8 Group DR-DWS-1000 manual
Pentair Jung Pumpen
Pentair Jung Pumpen MULTIDRAIN Series instruction manual
sauermann
sauermann Si-82 manual
salmson
salmson MULTI-H Series Installation and starting instructions
Zuwa
Zuwa UNISTAR 2001-A operating instructions
Kessel
Kessel Pumpfix F Instructions for installation, operation and maintenance
Alfalaval
Alfalaval LKHevap-10 instruction manual
CRANE PUMPS & SYSTEMS
CRANE PUMPS & SYSTEMS BARNES 3SHV Series Installation and operation manual
AMT
AMT 4294-251 Specifications information and repair parts manual
Vortex
Vortex HZ 401 Instruction for installation and maintenance
GORMAN-RUPP
GORMAN-RUPP PA Series Installation, operation and maintenance manual