EBARA EV-A10 User manual
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INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
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CAUTION
READ AND UNDERSTAND THIS INSTRUCTION MANUAL THOROUGHLY
BEFORE USING THIS EQUIPMENT.
BE SURE TO KEEP THIS INSTRUCTION MANUAL ON HAND FOR FUTURE
REFERENCE.
To Facility and Tool Manufactures:
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Foreword
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WARNING
BEFORE USING THIS EQUIPMENT, READ THIS INSTRUCTION
MANUAL THOROUGHLY. MANUFACTURES WARRANTY WILL BE
VOID, IF THE MODEL EV-A10 DRY VACUUM PUMP HAS BEEN
INCORRECTLY INSTALLED, OPERATED OR MAINTAINED OR IF IT
HAS BEEN MODIFIED OR REPAIRED WITH PARTS NOT SPECIFIED
BY MANUFACTURE.
SINCE THE OPERATIONS OR WORKS THAT ARE NOT DESCRIBED IN
THIS MANUAL COULD RESULT IN SERIOUS OR POSSIBLY EVEN
FATAL INJURY OR DAMAGE TO THE PUMP, DO NOT THESE THAT
ABSOLUTELY.
EBARA IS NOT LIABLE FOR ANY INJURY OR DAMAGE ARISING FROM
AN INDIVIDUAL’S CARELESSNESS, OR MISUSE.
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EBARA CORPORATION
Contents
Environmental Basic Policies ................................................................................. 3
Foreword ................................................................................................................... 4
(1) Limited Warranty ............................................................................................ 5
(2) Repair and Servicing...................................................................................... 5
(3) Safety Notice ................................................................................................... 6
(4) Safety Warning Labels ................................................................................... 9
(5) Safety Interlocks ........................................................................................... 11
EC DECLARATION OF CONFORMITY.................................................................. 12
Contents .................................................................................................................. 13
1. Introduction ...................................................................................................... 15
1.1 Acceptance Check........................................................................................ 15
1.2 Environmental Concerns............................................................................. 16
2. Product Description ........................................................................................ 17
2.1 Outline............................................................................................................ 17
2.1.1 Pump Module......................................................................................... 17
2.1.2 Cooling Fan............................................................................................ 17
2.1.3 Exhaust................................................................................................... 17
2.2 Control System ............................................................................................. 17
2.2.1 Alarm Control System........................................................................... 17
2.3 The Way of Pump Moving............................................................................ 18
2.3.1 Preparation ............................................................................................ 18
2.3.2 Moving Method...................................................................................... 18
2.4 Release and shut off residual internal energy .......................................... 19
2.4.1 Electrical Power – Lockout and Tagout ............................................. 19
2.4.2 Returning to Service ............................................................................. 19
2.5 Detailed Specification .................................................................................. 20
2.5.1 Model Description ................................................................................. 20
2.5.2 Specifications ........................................................................................ 21
2.5.3 Outline Drawing..................................................................................... 22
2.5.4 Performance Curve ............................................................................... 24
2.5.5 System Flow .......................................................................................... 25
3. Installation ........................................................................................................ 26
3.1 Movement and Fixation................................................................................ 26
3.1.1 Location.................................................................................................. 26
3.1.2 Caster and adjustment foot ................................................................. 26
3.1.3 Pump Fixation (Option) ........................................................................ 27
3.2 Piping ............................................................................................................. 30
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3.2 Piping ............................................................................................................. 30
3.2.1 Vacuum and Exhaust Piping................................................................ 30
3.3 Electrical Wiring............................................................................................ 31
3.3.1 Power Supply Wiring ............................................................................ 31
3.3.2 Control Signal Wiring ........................................................................... 35
4. Operation Panel ............................................................................................... 38
4.1 Operation Panel Outline............................................................................... 38
4.2 Operation Panel Display .............................................................................. 41
5. Operation .......................................................................................................... 43
5.1 Before Starting.............................................................................................. 43
5.2 START / STOP ............................................................................................... 44
5.3 Operation when momentarily power failure happens .............................. 46
5.4 Gas Ballast .................................................................................................... 47
6. Maintenance and Inspection .......................................................................... 48
6.1 Routine Inspection ....................................................................................... 48
6.2 Vacuum and Exhaust Piping ....................................................................... 48
6.3 Lubrication Oil .............................................................................................. 49
6.4 Maintenance Parts List ................................................................................ 52
6.5 List of Wastes During Maintenance ........................................................... 52
6.6 Repair and Service ....................................................................................... 53
6.7 Overhaul ........................................................................................................ 53
7. Storage / Disposal ........................................................................................... 53
7.1 Storage........................................................................................................... 53
7.2 Disposal ......................................................................................................... 53
8. Disconnection and Transportation................................................................ 54
9. Troubleshooting .............................................................................................. 56
9.1 Troubleshooting (1) : Basic trouble ........................................................... 57
9.2 Troubleshooting (2) : ALARM ..................................................................... 57
---------------------------------------------------------------------------------------------------------------------
[Attachment Data]
Appendix 1 : Material Safety Data Sheet of Lubricant oil (JPN)
Appendix 2 : Material Safety Data Sheet of Lubricant oil (ENG)
Appendix 3 : Overhaul / Repair Request form (JPN)
Appendix 4 : Overhaul / Repair Request form (ENG)
Appendix 5 : Leak Check procedure
Information of Global Network
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1. Introduction
1.1 Acceptance Check
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2. Product Description
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2.5 Detailed Specification
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2.5.1 Model Description
EV-A10-䕕䕕
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Power Supply
Specification
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condensable gas
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