Edwards IS16K User manual

D059-14-880
Issue D Original
Instruction Manual
Vacuum Interlock Switch IS16K
Description Item Number
Vacuum Interlock Switch IS16K D059-14-000

This product has been manufactured under a quality system registered to ISO9001
Declaration of Conformity
We, Edwards,
Innovation Drive,
Burgess Hill,
West Sussex,
RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Vacuum Interlock Switch
IS16K D059-14-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
and fulfils all the relevant provisions of
2014/35/EU Low Voltage Directive
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
11.11.2016, Eastbourne
Mr L. Marini, Senior Technical Manager Date and Place
P200-03-640 Issue D

P200-10-154
IssueA
Material Declaration - China

In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the
Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as
‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical
Products:
Product Product Label Meaning
D059-14-000 Vacuum Interlock Switch IS16K
D059-15-000 Adjustable Vacuum Switch VS16K 2020
This product contains hazardous substances
in at least one of the homogeneous
materials used which are above the limit
requirement in GB/T 26572 as detailed in
the declaration table below.
These parts can safely be used for the
environmental protection use period as
indicated.
材料成分声明
Materials Content Declaration
部件名称
Part name
有害物质
Hazardous Substances
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls (PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
微型开关
Microswitch X O X O O O
电缆/电线/连接器
Cable/wire/connector X O O O O O
机械部件
Mechanical Components X O O O O O
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is
below the limit requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for
this part is above the limit requirement of GB/T26572.
NOTE:These products are EU RoHS compliant, the following Exemptions apply:
6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
6(c) Copper alloy containing up to 4% lead by weight
7(a) Lead in in high melting temperature type solder (i.e lead based alloys containing 85% by weight or more lead)
(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
7(c) II Lead in dielectric ceramic in capacitors for a rated voltage of 125 V AC or 250 V DC or higher
8(b) Cadmium and its compounds in electrical contacts
15 Lead in solders to complete a viable electrical connection between semiconductor die and carrier within
integrated circuit flip chip packages
34 Lead in cermet-based trimmer potentiometer elements

This page has been intentionally left blank.

© Edwards Limited 2009. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
D059-14-880 Issue D
Contents
Section Page
1 INTRODUCTION ....................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
2 TECHNICAL DATA .................................................................................2
2.1 Operating conditions .................................................................................................... 2
2.2 Performance .............................................................................................................. 2
2.3 Mechanical data .......................................................................................................... 2
2.4 Electrical data ............................................................................................................ 2
2.5 Product item number ................................................................................................... 3
3 INSTALLATION .....................................................................................4
3.1 Unpacking and inspection .............................................................................................. 4
3.2 General .................................................................................................................... 4
3.3 Connection to the Vacuum System .................................................................................... 4
3.4 Connection to the Electrical Circuit .................................................................................. 4
4 OPERATION ........................................................................................6
4.1 Adjustment ............................................................................................................... 6
5 MAINTENANCE .....................................................................................7
6 STORAGE AND DISPOSAL .........................................................................8
6.1 Storage .................................................................................................................... 8
6.2 Disposal ....................................................................................................................8
Index ................................................................................................9
For return of equipment, complete the HS Forms at the end of this manual.
gea/0049/07/09

D059-14-880 Issue D
Page ii © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Illustrations
Figure Page
1 Vacuum switch plug connections ...................................................................................... 5
2 Dimensions of VS16K vacuum switch .................................................................................. 7
Tables
Table Page
1 Maximum switch ratings ................................................................................................ 2

© Edwards Limited 2009. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
INTRODUCTION
D059-14-880 Issue D
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards IS16K Vacuum Interlock
Switch. Read this manual before attempting to install and operate the IS16K.
This manual contains essential safety information which supplements the safety features of the IS16K. Safety
procedures are highlighted as WARNING and CAUTION instructions. You must obey these instructions. The use of
WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
1.2 General description
The Edwards IS16K Vacuum Interlock Switch is designed for applications where the electrical circuits within the
vacuum chamber must be de-energised when the vacuum system is let up to atmosphere.
Typical applications would be the interlocking of H.T. and R.F. power supplies on vacuum coating systems. The
interlocking switch consists of a positive break microswitch operated by a snap action diaphram to ensure rapid
separation of the microswitch contacts.
The diaphram is enclosed within the vacuum switch housing which is surrounded by atmospheric pressure and is
coupled to the vacuum system by a NW16 flange. The absolute switch point pressure will therefore vary by the same
amount as the atmospheric pressure.
The set-point is non-adjustable and cannot be tampered with.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.

D059-14-880 Issue D
Page 2 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
TECHNICAL DATA
2 TECHNICAL DATA
2.1 Operating conditions
2.2 Performance
2.3 Mechanical data
2.4 Electrical data
Maximum switch ratings for different loads and voltages:
2.5 Product item number
Temperature range - operating -5°C to 40°C
Temperature range - storage -20°C to 70°C
Relative humidity (non condensing) 10 to 90%
Maximum operating altitude 3000 m
Installation category (IEC1010) 2 (IEC664/664A)
Pollution category (IEC1010) 2
Enclosure rating IP40
Set-point Within the range 250 to 500 mbar below
atmospheric pressure
Maximum switch point differential 100 mbar
Leak rate < 1 x 10-9 mbar litre/sec-1
Maximum overpressure 1 bar gauge (2 bar absolute)
Weight (unpacked) 0.5 kg
Weight (packed) 0.6 kg
Vacuum connection NW16 Flange
Volume added to vacuum system 7 cm3
Materials exposed to vacuum system Stainless steel and Armco 17/7PH
Electrical connection mPm 283 plug
Accessory supplied mPm 183 mating electrical socket
Table 1 - Maximum switch ratings
Volts
a.c. 50/60Hz Resistive Load Amps Tungsten Lamp Load Amps Inductive Load Amps
125 10 5.0 10
250 10 5.5 10
Description Item Number
Vacuum Interlock Switch D059-14-000

© Edwards Limited 2009. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
INSTALLATION
D059-14-880 Issue D
3 INSTALLATION
3.1 Unpacking and inspection
Remove all packing materials and protective covers and check the IS16K for damage. If the IS16K is damaged, notify
your supplier and the carrier in writing within three days; state the Item Number of the IS16K together with your
order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the IS16K.
3.2 General
The vacuum switch should be mounted as close as possible to the point at which the pressure is to be measured. Use
a short branch tube with an internal diameter no less than that of the switch vacuum connection. Long, narrow and
angled connections can cause significant errors.
This equipment is not protected from dripping water from above, unless mounted with the vacuum flange pointing
downwards.
3.3 Connection to the Vacuum System
The vacuum switch may be mounted in any orientation but mounting with the vacuum switch vertical will prevent
the possibility of debris falling into the vacuum port and affecting the performance of the switch.
3.4 Connection to the Electrical Circuit
CAUTION
Ensure that the circuit connected to the vacuum switch is suitably fused to prevent the switch contact rating
being exceeded. The fuse rating must not exceed 10 amps.
WARNING
Do not allow the internal pressure to be higher than 1 bar gauge (2 bar absolute). If the pressure
in your system can be higher than 1 bar gauge, you must fit a suitable pressure relief valve.
Overpressure of the switch could cause injury to persons.
WARNING
Ensure that the electrical installation of the Vacuum Switch conforms with your local and national
safety requirements. It must be connected to a suitably fused and protected electrical supply and
a suitable earth point.
WARNING
If, in your application, failure of this switch could lead to a safety hazard, it is recommended that
the switch should be wired in series with another interlocking device, for example chamber lid
microswitch, to provide a double level of protection.

D059-14-880 Issue D
Page 4 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
INSTALLATION
Connect the vacuum switch to the equipment using the four pole mPm connector supplied. The contacts on this
connector are internally wired as follows:-
Figure 1 - Vacuum switch plug connections
CAUTION
To ensure that the socket cable gland strain relief is effective a cable with a minimum diameter of 6 mm must
be used.
Select a three or four core cable of a rating suitable for the power supply to be switched. One core should be
coloured green/yellow for the earth connection.
Thread the cable through the cable gland on the mPm socket cover and connect to the appropriate terminals as
shown on the diagram.
Tighten the cable gland and connect the socket to the switch using the sealing gasket and locking screw provided.
Earth connection.
Com Common
Lo Contact made when system
pressure is lower than set-
point.

© Edwards Limited 2009. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
OPERATION
D059-14-880 Issue D
4OPERATION
4.1 Adjustment
The IS16K Vacuum interlock switch is pre-set to operate in the range of 250 to 500 mbar below atmospheric pressure.
No user adjustment is available.
Figure 2 - Dimensions of IS16K vacuum switch

D059-14-880 Issue D
Page 6 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
MAINTENANCE
5 MAINTENANCE
To ensure correct operation this vacuum switch should be tested once per year or every 10 000 cycles whichever is
sooner.
To test for correct operation proceed as follows:
1. Disconnect the electrical supply from the vacuum switch.
2. Connect an electrical continuity meter between the pin marked 'com' and the pin marked 'Lo'. Refer to Figure 1
for pin connections.
3. With the IS16K at atmosphere verify that the meter reads open circuit.
4. Reduce the pressure to below 500 mbar (as measured on a vacuum gauge) and check that the meter reads short
circuit.
5. Raise the pressue to above 500 mbar and check that the meter reads open circuit again.
The outer surfaces of the switch may be cleaned by wiping with a dry cloth. Avoid the use ofsolvents that may attack
the moulded cover.
This product contains no user serviceable parts.
WARNING
Ensure that maintenance is done by a suitably trained and supervised technician. Obey your local
and national safety requirements.

© Edwards Limited 2009. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
STORAGE AND DISPOSAL
D059-14-880 Issue D
6 STORAGE AND DISPOSAL
6.1 Storage
Store in a cool dry place. Do not exceed the limits specified in Section 2.
6.2 Disposal
Dispose of the IS16K in accordance with any local or national safety requirements.
Particular care must be taken if the switch has been used in a hazardous environment.

D059-14-880 Issue D
Page 8 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.

Return the equipment or components for service
Before you send your equipment to us for service or for any other reason, you must send us a
completed Declaration of Contamination of Vacuum Equipment and Components – Form HS2. The
HS2 form tells us if any substances found in the equipment are hazardous, which is important for
the safety of our employees and all other people involved in the service of your equipment. The
hazard information also lets us select the correct procedures to service your equipment.
We provide instructions for completing the form in the Declaration of Contamination of Vacuum
equipment and Components – Procedure HS1.
If you are returning a vacuum pump, note the following:
 If a pump is configured to suit the application, make a record of the configuration before
returning the pump. All replacement pumps will be supplied with default factory settings.
 Do not return a pump with accessories fitted. Remove all accessories and retain them for
future use.
 The instruction in the returns procedure to drain all fluids does not apply to the lubricant in
pump oil reservoirs.
Download the latest documents from www.edwardsvacuum.com/HSForms/, follow the procedure in
HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to Edwards.
Note: If we do not receive a completed HS2 form, we will not accept the return of the
equipment.
P80081000, Issue A

P800‐80‐000IssueT
edwardsvacuum.com