Edwards IS16K User manual

D059-14-880
Issue D Original
Instruction Manual
Vacuum Interlock Switch IS16K
Description Item Number
Vacuum Interlock Switch IS16K D059-14-000

This product has been manufactured under a quality system registered to ISO9001
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Vacuum Interlock Switch
IS16K D059-14-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
and fulfils all the relevant provisions of
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Mr L. Marini, Technical Manage
r
Date and Place
P200-03-640 Issue B
9 December 2009

© Edwards Limited 2009. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
D059-14-880 Issue D
Contents
Section Page
1 INTRODUCTION ....................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
2 TECHNICAL DATA .................................................................................2
2.1 Operating conditions .................................................................................................... 2
2.2 Performance .............................................................................................................. 2
2.3 Mechanical data .......................................................................................................... 2
2.4 Electrical data ............................................................................................................ 2
2.5 Product item number ................................................................................................... 3
3 INSTALLATION .....................................................................................4
3.1 Unpacking and inspection .............................................................................................. 4
3.2 General .................................................................................................................... 4
3.3 Connection to the Vacuum System .................................................................................... 4
3.4 Connection to the Electrical Circuit .................................................................................. 4
4 OPERATION ........................................................................................6
4.1 Adjustment ............................................................................................................... 6
5 MAINTENANCE .....................................................................................7
6 STORAGE AND DISPOSAL .........................................................................8
6.1 Storage .................................................................................................................... 8
6.2 Disposal ....................................................................................................................8
Index ................................................................................................9
For return of equipment, complete the HS Forms at the end of this manual.
gea/0049/07/09

D059-14-880 Issue D
Page ii © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Illustrations
Figure Page
1 Vacuum switch plug connections ...................................................................................... 5
2 Dimensions of VS16K vacuum switch .................................................................................. 7
Tables
Table Page
1 Maximum switch ratings ................................................................................................ 2

© Edwards Limited 2009. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
INTRODUCTION
D059-14-880 Issue D
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards IS16K Vacuum Interlock
Switch. Read this manual before attempting to install and operate the IS16K.
This manual contains essential safety information which supplements the safety features of the IS16K. Safety
procedures are highlighted as WARNING and CAUTION instructions. You must obey these instructions. The use of
WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
1.2 General description
The Edwards IS16K Vacuum Interlock Switch is designed for applications where the electrical circuits within the
vacuum chamber must be de-energised when the vacuum system is let up to atmosphere.
Typical applications would be the interlocking of H.T. and R.F. power supplies on vacuum coating systems. The
interlocking switch consists of a positive break microswitch operated by a snap action diaphram to ensure rapid
separation of the microswitch contacts.
The diaphram is enclosed within the vacuum switch housing which is surrounded by atmospheric pressure and is
coupled to the vacuum system by a NW16 flange. The absolute switch point pressure will therefore vary by the same
amount as the atmospheric pressure.
The set-point is non-adjustable and cannot be tampered with.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.

D059-14-880 Issue D
Page 2 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
TECHNICAL DATA
2 TECHNICAL DATA
2.1 Operating conditions
2.2 Performance
2.3 Mechanical data
2.4 Electrical data
Maximum switch ratings for different loads and voltages:
2.5 Product item number
Temperature range - operating -5°C to 40°C
Temperature range - storage -20°C to 70°C
Relative humidity (non condensing) 10 to 90%
Maximum operating altitude 3000 m
Installation category (IEC1010) 2 (IEC664/664A)
Pollution category (IEC1010) 2
Enclosure rating IP40
Set-point Within the range 250 to 500 mbar below
atmospheric pressure
Maximum switch point differential 100 mbar
Leak rate < 1 x 10-9 mbar litre/sec-1
Maximum overpressure 1 bar gauge (2 bar absolute)
Weight (unpacked) 0.5 kg
Weight (packed) 0.6 kg
Vacuum connection NW16 Flange
Volume added to vacuum system 7 cm3
Materials exposed to vacuum system Stainless steel and Armco 17/7PH
Electrical connection mPm 283 plug
Accessory supplied mPm 183 mating electrical socket
Table 1 - Maximum switch ratings
Volts
a.c. 50/60Hz Resistive Load Amps Tungsten Lamp Load Amps Inductive Load Amps
125 10 5.0 10
250 10 5.5 10
Description Item Number
Vacuum Interlock Switch D059-14-000

© Edwards Limited 2009. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
INSTALLATION
D059-14-880 Issue D
3 INSTALLATION
3.1 Unpacking and inspection
Remove all packing materials and protective covers and check the IS16K for damage. If the IS16K is damaged, notify
your supplier and the carrier in writing within three days; state the Item Number of the IS16K together with your
order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the IS16K.
3.2 General
The vacuum switch should be mounted as close as possible to the point at which the pressure is to be measured. Use
a short branch tube with an internal diameter no less than that of the switch vacuum connection. Long, narrow and
angled connections can cause significant errors.
This equipment is not protected from dripping water from above, unless mounted with the vacuum flange pointing
downwards.
3.3 Connection to the Vacuum System
The vacuum switch may be mounted in any orientation but mounting with the vacuum switch vertical will prevent
the possibility of debris falling into the vacuum port and affecting the performance of the switch.
3.4 Connection to the Electrical Circuit
CAUTION
Ensure that the circuit connected to the vacuum switch is suitably fused to prevent the switch contact rating
being exceeded. The fuse rating must not exceed 10 amps.
WARNING
Do not allow the internal pressure to be higher than 1 bar gauge (2 bar absolute). If the pressure
in your system can be higher than 1 bar gauge, you must fit a suitable pressure relief valve.
Overpressure of the switch could cause injury to persons.
WARNING
Ensure that the electrical installation of the Vacuum Switch conforms with your local and national
safety requirements. It must be connected to a suitably fused and protected electrical supply and
a suitable earth point.
WARNING
If, in your application, failure of this switch could lead to a safety hazard, it is recommended that
the switch should be wired in series with another interlocking device, for example chamber lid
microswitch, to provide a double level of protection.

D059-14-880 Issue D
Page 4 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
INSTALLATION
Connect the vacuum switch to the equipment using the four pole mPm connector supplied. The contacts on this
connector are internally wired as follows:-
Figure 1 - Vacuum switch plug connections
CAUTION
To ensure that the socket cable gland strain relief is effective a cable with a minimum diameter of 6 mm must
be used.
Select a three or four core cable of a rating suitable for the power supply to be switched. One core should be
coloured green/yellow for the earth connection.
Thread the cable through the cable gland on the mPm socket cover and connect to the appropriate terminals as
shown on the diagram.
Tighten the cable gland and connect the socket to the switch using the sealing gasket and locking screw provided.
Earth connection.
Com Common
Lo Contact made when system
pressure is lower than set-
point.

© Edwards Limited 2009. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
OPERATION
D059-14-880 Issue D
4OPERATION
4.1 Adjustment
The IS16K Vacuum interlock switch is pre-set to operate in the range of 250 to 500 mbar below atmospheric pressure.
No user adjustment is available.
Figure 2 - Dimensions of IS16K vacuum switch

D059-14-880 Issue D
Page 6 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
MAINTENANCE
5 MAINTENANCE
To ensure correct operation this vacuum switch should be tested once per year or every 10 000 cycles whichever is
sooner.
To test for correct operation proceed as follows:
1. Disconnect the electrical supply from the vacuum switch.
2. Connect an electrical continuity meter between the pin marked 'com' and the pin marked 'Lo'. Refer to Figure 1
for pin connections.
3. With the IS16K at atmosphere verify that the meter reads open circuit.
4. Reduce the pressure to below 500 mbar (as measured on a vacuum gauge) and check that the meter reads short
circuit.
5. Raise the pressue to above 500 mbar and check that the meter reads open circuit again.
The outer surfaces of the switch may be cleaned by wiping with a dry cloth. Avoid the use of solvents that may attack
the moulded cover.
This product contains no user serviceable parts.
WARNING
Ensure that maintenance is done by a suitably trained and supervised technician. Obey your local
and national safety requirements.

© Edwards Limited 2009. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
STORAGE AND DISPOSAL
D059-14-880 Issue D
6 STORAGE AND DISPOSAL
6.1 Storage
Store in a cool dry place. Do not exceed the limits specified in Section 2.
6.2 Disposal
Dispose of the IS16K in accordance with any local or national safety requirements.
Particular care must be taken if the switch has been used in a hazardous environment.

D059-14-880 Issue D
Page 8 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.

Index
D059-14-880IssueD
© Edwards Limited 2009. All rights reserved. Page 9
Edwards and the Edwards logo are trademarks of Edwards Limited.
A
Adjustment .................................................5
C
Connection to the Electrical Circuit ....................3
Connection to the Vacuum System .....................3
E
Electrical data .............................................2
G
General .....................................................3
General description .......................................1
I
INSTALLATION ..............................................3
Introduction ................................................1
M
MAINTENANCE ..............................................6
Mechanical data ...........................................2
O
Operating conditions ......................................2
OPERATION .................................................5
P
Performance ...............................................2
Product item number .....................................2
S
Scope and definitions .....................................1
STORAGE AND DISPOSAL ..................................7
T
TECHNICAL DATA ..........................................2
U
Unpacking and inspection ................................3
Index

D059-14-880 Issue D
Page 10 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Index

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Return of Edwards Equipment - Procedure
Form HS1
INTRODUCTION
Before returning your equipment, you must warn Edwards if substances you used (and
produced) in the equipment can be hazardous. This information is fundamental to the safety
of our Service Centre employees and will determine the procedures employed to service your
equipment.
Complete the Declaration (HS2) and send it to Edwards before you dispatch the
equipment. It is important to note that this declaration is for Edwards internal use only,
and has no relationship to local, national or international transportation safety or
environmental requirements. As the person offering the equipment for shipment, it is your
responsibility to ensure compliance with applicable laws.
GUIDELINES
• Equipment is 'uncontaminated' if it has not been used, or if it has only been used with
substances that are not hazardous. Your equipment is 'contaminated' if it has been used
with any substances classified as hazardous under EU Directive 67/548/EEC (as amended)
or OSHA Occupational Safety (29 CFR 1910).
• If your equipment has been used with radioactive substances, biological or infectious
agents, mercury, polychlorinated biphenyls (PCB’s), dioxins or sodium azide, you must
decontaminate it before you return it to Edwards. You must send independent proof of
decontamination (for example a certificate of analysis) to Edwards with the Declaration
(HS2). Phone Edwards for advice.
• If your equipment is contaminated, you must either:
• Remove all traces of contamination (to the satisfaction of laws governing the
transportation of dangerous/hazardous substances).
• Or, properly classify the hazard, mark, manifest and ship the equipment in accordance
with applicable laws governing the shipment of hazardous materials.
Note: Some contaminated equipment may not be suitable for airfreight.
PROCEDURE
1. Contact Edwards and obtain a Return Authorisation Number for your equipment.
2. Complete the Return of Edwards Equipment - Declaration (HS2).
3. If the equipment is contaminated, you must contact your transporter to ensure that you
properly classify the hazard, mark, manifest and ship the equipment, in accordance with
applicable laws governing the shipment of contaminated/hazardous materials. As the
person offering the equipment for shipment, it is your responsibility to ensure compliance
with applicable law. Note: Equipment contaminated with some hazardous materials,
such as semiconductor by-products, may not be suitable for airfreight - contact your
transporter for advice.
4. Remove all traces of hazardous gases: pass an inert gas through the equipment and any
accessories that will be returned to Edwards. Where possible, drain all fluids and
lubricants from the equipment and its accessories.
5. Seal up all of the equipment's inlets and outlets (including those where accessories were
attached) with blanking flanges or, for uncontaminated product, with heavy gauge tape.
6. Seal equipment in a thick polythene/polyethylene bag or sheet.
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If
the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.
8. E-mail via scan, fax or post a copy of the original with signature of the Declaration (HS2)
to Edwards. The Declaration must arrive before the equipment.
9. Give a copy of the Declaration (HS2) to the transporter. You must tell your transporter
if the
equipment is contaminated.
10. Seal the original Declaration in a suitable envelope: attach the envelope securely to the
outside of the equipment package, in a clear weatherproof bag.
WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE OUTSIDE OF THE
ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.
P900-70-000 Issue L

Return of Edwards Equipment – Declaration
Form HS2
You must:
•Knowaboutallof the substances which have been used and produced in the equipment before you complete this Declaration
• Read the Return of Edwards Equipment – Procedure (HS1) before you complete this Declaration
• Contact Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions
• Send this form to Edwards before you return your equipment as per the procedure in HS1
Return Authorisation Number:
Manufacturer's Product Name ________________________
Manufacturer's Part Number _________________________
Manufacturer's Serial Number ________________________
Has the equipment been used, tested or operated?
YES
R Go to Section 2 NO R Go to Section 4
IF APPLICABLE:
Tool Reference Number _____________________
Process _______________________________________
Failure Date _______________________________
Serial Number of
Replacement Equipment ______________________
Are any substances used or produced in the equipment:
• Radioactive, biological or infectious agents, mercury,
poly chlorinated biphenyls (PCBs), dioxins or
sodium azide? (if YES, see Note 1) YES
R NO R
• Hazardous to human
health and safety? YES R NO R
Note 1: Edwards will not accept delivery of any equipment
that is contaminated with radioactive substances, biological/
infectious agents, mercury, PCB’s, dioxins or sodium azide,
unless you:
• Decontaminate the equipment
• Provide proof of decontamination
YOU MUST CONTACT EDWARDS FOR ADVICE BEFORE YOU RETURN
SUCH EQUIPMENT
Print your name: _________________________________ Print your job title: ____________________________________
Print your organisation: ____________________________________________________________________________________
Print your address: _____________________________________________________________________________________
_____________________________________________________________________________________________________
Telephone number: ___________________________ Date of equipment delivery: ____________________________________
I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any
information, and I have followed the Return ofEdwards Equipment – Procedure (HS1).
Signed: _____________________________________ Date: ______________
• who did you buy the equipment from? ______________________________ ____
• give the supplier’s invoice number ____________________________ ______
If you have a warranty claim:
Substance name Chemical
Symbol Precautions required (for example, use protective gloves, etc.) Action required after a spill, leak or exposure
Note: Please print out this
form, sign it and return the
signed form as hard copy.
SECTION 1: EQUIPMENT
SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT
SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT
SECTION 4: RETURN INFORMATION
SECTION 5: DECLARATION
P900-71-000 Issue M
Reason for return and symptoms of malfunction: ____________________________________________________________
______________________________________________________________________________________________________

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EUROPE/UNITED
KINGDOM
Manor Royal
Crawley
West Sussex, RH10 9LW
Tel:
Office [phone]
Sales & Service 08459 21 22 23
Fax:
Office [phone]
Sales & Service
[phone]
AMERICAS
One Edwards Park
301 Ballardvale Street
Wilmington, MA 01887
Tel [phone]
Fax [phone]
Toll Free (USA only):
Tel [phone]
CANADA
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Mississauga, Ontario
Canada, L5R 0A2
Tel [phone]
Fax [phone]
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Rua Bernado Wrona 222
02710 São Paulo-SP
Brazil
Tel [phone]
Fax [phone]
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Ammerthalstraße 36
85551 Kirchheim
Munich
Tel:
Sales 0 800 000 14 56
Service 0 800 000 14 57
Fax:
Office [phone]
Sales & Service
[phone]
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Via Carpaccio 35
20090 Trezzano sul Navigilo
Milan
Office [phone]
Sales [phone]
Service [phone]
Fax [phone]
FRANCE
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Paris
Tel:
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Sales [phone]
Service [phone]
Fax:
Office [phone]
Sales & Service
[phone]
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200131, China
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Tel [phone]
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351 Taiwan
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Tel [phone]
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Australia
Tel [phone]
Fax [phone]
www.edwardsvacuum.com
[email protected]
PLEASE CONTACT ANY OF THE ABOVE FOR DETAILS OF OTHER SALES AND SERVICE CENTERS IN YOUR AREA.
© Edwards Limited 2007. All rights reserved
Edwards and the Edwards logo are trade marks of Edwards Limited.
DJD 031007 P800-80-000 Issue M 01A09-010
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