Halma ALICAT IM User manual
OPERATING MANUAL
FOR MASS FLOW DEVICES
Models IM and IMC
2 Introduction
device.
If you have any questions, or if something is not working
as expected, please contact us. We are eager to help you in
any way possible.
Contact Information
World Headquarters,
Tucson, Arizona, USA
info@alicat.com
alicat.com
7641 N Business Park Dr.,
Tucson, AZ 85743 USA
+1 888-290-6060
Europe
Geograaf 24
6921 EW Duiven
The Netherlands
+31(0)262.031.651
China & SE Asia
info-cn@alicat.com
alicat.com.cn
3rd Floor, Building 18,
FAMILY Science and
Technology Innovation Park,
No. 155, Yuanke Road
Minhang District
Shanghai, PRC 201109
+86-021-61519020
India
info-in@alicat.com
Pvt. Ltd.
101, Hamilton A Bldg,
Near Hiranandani Hospital,
Hiranandani Estate, Patli
Pada, Ghodbunder Road,
Thane West-400607
Maharashtra, India
+91 022-41248010
Annual calibration is necessary to ensure the continued accuracy of
readings, and to extend the Limited Lifetime Warranty. Fill out the
Service Request Form at alicat.com/service, or contact us
directly when it is time to send in your device for recalibration.
For information about our limited lifetime warranty, visit
alicat.com/warranty.
Serial #:
Next Calibration:
This device comes with a NIST-
This device conforms to the European
Union’s Restriction of Use of Hazardous
Substances in Electrical and Electronic
Equipment (RoHS) Directive 2011/65/EU.
This device complies with the
requirements of the Low Voltage
Directive 2014/35/EU and the EMC
Directive 2014/30/EU and carries
the CE Marking accordingly.
This device complies with the
requirements of the European Union’s
Waste Electrical & Electronic Equipment
(WEEE) Directive 2002/96/EC
DOC-MANUAL-IMC Rev 0, 2023.11.09
IM FLOW METER
IM FLOW CONTROLLER
3 Introduction
Introduction
• High-accuracy performance for all your gases.
30 calibrated gases
• 1000 readings per second guarantees high resolution data
• Monitor live pressure and temperature
• Change your STP to match any standard temperature and pressure reference
•
. Set the closed loop control algorithm to
pressure control
• Log data to your PC with a serial data connection to control the device and capture data
for logging and analysis.
• Totalize and batch dispense
• Monitor valve position to maintain your process and identify failures before they occur.
This manual covers the following instruments:
•
•
For support or questions regarding the use or operation of this device, please contact us
using the information on page 2.
These custom solutions can meet a variety of application challenges brought forth by users
challenging application, contact Alicat for specialized engineering and application support.
This manual covers the general operation of factory OEM devices. Custom setups may not
be covered by this document. If you need further assistance, please contact Alicat support.
4 Table of Contents
Contents
Introduction 3
Getting Started 5
Mounting 5
Filters 5
Gas Connections 6
Maximum Pressure 6
6
6
Control 8
8
Establishing Communication 8
ASCII Serial Communication 9
Establishing Communication 9
Unit ID 9
Taring the Device 9
Collecting Data 9
Data Format 10
Changing the Setpoint 10
Totalizer 11
Batch Dispensing 11
Changing the Gas 11
Control Loop 11
Command Quick Reference 12
Advanced ASCII Commands 12
Modbus-RTU 13
Communicating Via Modbus-RTU 13
Analog Signals 13
Taring the Device (METERS ONLY) 13
Changing the Setpoint 14
Reading the Flow 14
Valve Overrides 14
Alarm Output Option 14
Troubleshooting 15
General Use 15
15
Serial Communications 16
Maintenance 17
Cleaning 17
Recalibration 17
Reference 18
Gas List by Number 18
Engineering Units 19
5 Getting Started
Getting Started
The major device components are shown in the diagram below.
Most communication with the device is completed through digital communication or analog
signals, as described later in this manual. The LED on the top of device provides the following
feedback:
• Solid Green: Power is applied
• Flashing Green: Power is applied, serial activity is occurring
• Solid Red: Valve override command received
•
Flashing Red: Error state (mass overrange, temperature overrange, pressure overrange,
totalizer overrange, etc.)
Mounting
The dimensions of your device and positions of the mounting holes are detailed in the
alicat.com/imc.
Filters
follows:
• 5 micronsSCCM.
• SCCM and 1 SLPM.
• SLPM.
6 Getting Started
Gas Connections
downstream.
Devices ship with plastic plugs seated in the processing ports. To decrease the chance of
the device.
After removing the plugs, immediately connect the device to upstream and downstream
for connections include NPT, SAE, BSPP, and VCR®
have male connections).
prevent leakage around the port threads, but
Pipe dopes or sealants are not recommended on the process connections.
These compounds can cause permanent damage to the controller should they get into
the ow stream.
Maximum Pressure
The maximum common mode pressure is PSIA. Common mode pressure is the
maximum pressure that may be applied simultaneously to both sides of the instrument
without causing damage.
!
Using the ow controller above the maximum specied common pressure
will permanently damage the internal pressure sensors. If the line pressure is above
these limits, use a pressure regulator upstream of the device to reduce the pressure
below 200 PSIA.
Maximum Flow
Commanding a non-zero setpoint prior to applying the pressure will cause the valve to be
fully open and will expose the sensor to any instantaneous changes in pressure, such as
from a snap-acting solenoid valve. For meters and controllers with downstream valves,
pressure.
Power and Signal Connections
Power is supplied to the controller through the DB9 connector on the top of the device.
The table below indicates how to connect the device to power and communication. If your
found at alicat.com/pinouts.
!
Do not power the device until all necessary pins have been properly
connected.
!
Only connect power to pin 7. Connecting power to other pins can permanently
damage the device.
A mass flow controller with male
VCR®-compatible connections.
7 Getting Started
Power requirements vary based on analog conguration and valve type. Please
reference to the Factory OEM Mass Flow Devices specication sheet at alicat.com/imc for
power requirements.
Pin Function
1Ground to force the valve to close
Ground to force the valve to open
3Rx or B (+): Receives RS-232 (Rx) or RS-485 B (+) signals
4Analog Setpoint Input (meters: Ground to tare)
5Tx or A (-): Sends RS-232 (Tx) or RS-485 A (-) signals
6Analog Signal Output: 0-5 Vdc output signal.
7Power in: Powers the device
8Ground: Common ground for power, digital,
communications, analog signals and alarms
9Ground by default; alarm signal if unit has optional alarm page 14
* The above pinout is applicable to all factory OEM devices with the DB9
connector. The availability of dierent output signals depends on the options
ordered. Optional congurations are noted on the unit’s calibration sheet.
8 Control
Control
IM Series controllers and meters can be operated using digital or analog communication.
Digital communication can be performed using Alicat FlowVision™ 2.0 software, ASCII
serial commands, Modbus-RTU, or analog signals.
• FlowVision 2.0: page 8
• ASCII Serial Communication: page 9
• Modbus RTU: page 13
• Analog Signals: page 13
FlowVision 2.0
FlowVision™ 2.0 is Windows-based software that enables easy collection and analysis
of data from Alicat controllers and meters. FlowVision controls the device, runs scripts,
and logs and charts data. It also provides easy access to select the gas, amount of
applications.
Establishing Communication
To connect your device to FlowVision 2.0:
Download FlowVision 2.0 from alicat.com/owvision and install.
With the device turned on and connected to the computer, start FlowVision 2.0.
Click Devices in the top left corner.
Click the green plus sign to add your controller/meter.
Select Wired for the connection type.
Specify the connection settings. By default, the Device ID is A, and the Baud Rate
is 19200. The Port is dependent on which COM port the device is connected to.
Click Add to complete the process.
Please see the FlowVision 2.0 manual at alicat.com/owvision for detailed instructions
on operating your device through FlowVision.
9 Control
ASCII Serial Communication
DB9 port. Download Serial Terminal for free at alicat.com/drivers.
The section below outlines several common commands. For more detailed information
on using the ASCII interface, please see the Serial Primer manual at alicat.com/manuals.
Establishing Communication
Connect the device to a computer through a COM port or virtual COM port, noting the
COM port number. Up to 26 devices can be connected to a single COM port.
The following are the default connection settings:
• Baud: 19200
• Data bits: 8
• Parity: none
• Stop bits: 1
• Unit ID: A
Unit ID
Each device has a unique, single-letter ID using the standard 26-letter English alphabet
(e.g., A, B, C, etc.). The default ID is “A”. If more than one device on a COM port has the
same ID, data and commands become corrupted and do not report or execute properly.
When connecting multiple devices on the same COM port, connect one device at a time.
Provide a unit ID command for each device before connecting the next device.
To give the most recently connected device an unused ID:
( unit_id @ desired_id )
Taring the Device
provides its most accurate measurements. It is recommended to tare the device:
• After installation
• When changing the device’s orientation
•
•
(unit_id V)
It is possible for the sensor zero to shift with changes in temperature and pressure. This
algorithm will automatically zero the device any time a 0 setpoint is given, after a small
less after receiving a 0 setpoint. See the Serial Primer at alicat.com/manuals for more on
autotare.
Collecting Data
Before collecting ow data, be sure to tare your controller. If autotare is enabled,
this can be accomplished by providing a setpoint of 0 and waiting for the ow readings
to reach zero.
Polling Mode
Polling the device returns a single line of data each time you request it. Your device was
shipped in polling mode with a unit ID of A, unless requested otherwise. To poll your device,
10 Control
simply enter its unit ID (see the Data Format on page 10).
unit_id
a (polls unit A)
You can change the unit ID of a polling device by typing:
current_unit_id @=desired_unit_id
a@=b (changes unit A to unit B)
Streaming Mode
In streaming mode, your device automatically sends a line of live data at regular intervals.
(see the Data Format on page 10).
Only one unit on a given COM port may be in streaming mode at a time. To put your device
into streaming mode, type:
unit_id @=@
a@=@(puts device A into streaming mode)
This is equivalent to changing the unit ID to “@”.
@@=desired_unit_id
@@=a8 (stops and assigns unit ID of A)
while the user is typing. This may make the commands you type unreadable. If the device
does not receive a valid command, it will ignore it. If in doubt, hit and start again.
The default streaming interval is 50 ms. This can be increased by changing Register 91
while the device is in polling mode:
unit_id W91=number_of_ms
aW91=500(streams new data every 500 ms)
Data Format
is not present in streaming mode.
Controller
ID Abs. Pressure Temp. Vol. Flow Mass Flow Setpoint Valve Drive Totalizer Gas
Meter
ID Abs. Pressure Temp. Vol. Flow Mass Flow Totalizer Gas
Single spaces separate each parameter, and each value is displayed in the chosen device
engineering units. You can query the engineering units of the serial data frame by typing:
unit_id ??D*
a??D* (returns the data frame descriptions)
Additional columns may be present to the right of the Gas Label column.
Changing the Setpoint
11 Control
proportionally changing the position of the valve.
Use the setpoint command (unit_idSnew_setpoint_value) with the desired value in the
current engineering units. The data frame returns the new setpoint value when it has
been accepted as a valid setpoint.
selected:
unit_id Sfloating_point_number_setpoint
aS15.44 (setpoint of +15.44 SLPM)
Use the power-up setpoint command (unit_id SPUE setpoint_value) to create a new power-up
setpoint. Use a value of 0 as the setpoint_value to disable the power-up setpoint.
Additional setpoint options are described in the Serial Primer manual (alicat.com/manuals).
Totalizer
device since it was powered on or since it was last reset. Totalizer counts are reset if power
to the device is lost.
To read the totalizer, poll the device (unit_id) using its current unit ID. For information on
reading the data line, see the Data Format on page 10).
To reset the totalizer, use the reset totalizer command (unit_id T).
Additional Totalizer functions and options are available in the Serial Primer manual
(alicat.com/manuals).
Batch Dispensing
must be enabled. Batch functions and options are described in the Serial Primer manual
(alicat.com/manuals).
Changing the Gas
Factory OEM devices are calibrated to measure any of a selection of 30 gases. The gas
device, use the ASCII query gas list command (unit_id ??G*). The query gas list command
also lists their gas number.
To reconfigure your flow controller to flow a different gas, look up its gas number
(page 18). Here are the commands:
unit_id Ggas_number
aG8
Control Loop
The loop can also be tuned to improve performance in some applications. Control loop
functions and options are described in the Serial Primer manual (alicat.com/manuals).
12 Control
Command Quick Reference
General Commands for All Devices
unit_id @desired_id
unit_id V
unit_id P
unit_id PC
unit_id
unit_id @@
@@desired_unit_id
unit_id NCS nu mber_of_ms
unit_id ??D*
unit_id ??M*
unit_id VE
Controller Commands
unit_id Ssetpoint_value
unit_id HP
unit_id HC
unit_id C
unit_id ??G*
unit_id Ggas_number
For more information on our serial communication commands, please see the Serial Primer at alicat.com/manuals.
Advanced ASCII Commands
The command set on IM devices has been reduced for space. The following commands are listed in the Serial Primer
but are not available with IM Series devices:
General commands
E: Exhaust
GRH: Set / query relative humidity
GRHE: Set / query humidity information
L: Lock display
P1: Tare primary pressure sensor
P2: Tare secondary pressure sensor
U: Unlock display
Liquid properties commands
QLD, QLEG, QLEV, QLR, QLV
Omitted parameter values
All barometer statistics
All statistics related to secondary pressure
All statistics related to humidity / dew point / water vapor
The FPC command will not return any values related to the display
Support for a secondary analog output
13 Control
Modbus-RTU
Modbus is an application-layer messaging protocol that formats data for communications
over serial RS-232 or RS-485. The controller/meter supports Modbus-RTU protocol, with
data transmitted through Pin 3 of the DB9 connector.
Modbus-RTU can be used to control:
• taring
• data collection
• setpoint control
• totalizer
• batch dispensing
• changing the gas
• control loop adjustment.
For more information on Modbus-RTU communication commands, please see the the
Modbus FAQ at alicat.com/using-your-alicat/faq-modbus/ and the Modbus RTU manual
at alicat.com/manuals.
Communicating Via Modbus-RTU
The following Modbus commands are supported:
3Read holding register
6Write single register
16 Write multiple registers
Use the device registers to interact with the device.
Modbus commands are written to register addresses 1001 and 1002. The command
arguments are written to 1003 and 1004. The command arguments are variables that
Analog Signals
Alternative to the digital communications described above, the device can be controlled
using analog signals transmitted through the DB9 connector (see page 6).
!
Do not supply power to the device until all necessary pins have been properly
connected.
Power requirements vary based on analog conguration and valve type. Please
reference the Factory OEM Mass Flow Devices specication sheet at alicat.com/imc
for power requirements.
The following section describes some functions that can be completed using analog signals.
Taring the Device (METERS ONLY)
provides the most accurate measurements. It is recommended to tare the meter:
• After installing
•
•
•
• After changing the device’s orientation.
14 Control
To tare the device, ground pin 4 (analog in) of the DB9 connector. This feature is only
available on the IM meter (not the IMC controller). When the connection is closed, the
device tares. Operation resumes when the connection is opened.
done when the device is open to the atmosphere.
Performing a tare interrupts any current measurements.
Changing the Setpoint
Manage the setpoint using the analog Input signal (Pin 4 of the DB9 connector). The voltage
sent to the controller is proportional to the full range of the device. For example, to set
the setpoint to the maximum value for a controller with an input of 0-5 Vdc, apply 5 volts.
To set it at half of the full-scale range, use 2.5 Vdc.
Reading the Flow
The analog output signal (Pin 6 of the DB9 connector) is linear over its entire range. For
power.
!
Do not connect 4–20 mA devices to “loop-powered” systems, as this damages
portions of the circuitry beyond repair and voids the warranty. If the device must work
with existing loop-powered systems, use a signal isolator and a separate power supply.
Valve Overrides
To force the valve to remain closed, ground Pin 1.
To force the valve to remain open, ground Pin 2.
Only one of the two pins should be grounded at a time.
Alarm Output Option
Some devices include an optional alarm output (5VDC, 12VDC, 24VDC) that can output a
signal on Pin 9 when certain parameters are reached. The voltage of the alarm is determined
alarm tutorial at alicat.com/using-your-alicat/alarm-function-ale-command-tutorial/.
15 Troubleshooting
Troubleshooting
If you run into trouble with installation or operation, get in touch with support (page 2).
General Use
My device does not turn on or has trouble staying on.
Check power and ground connections (page 6). Please reference the technical
The analog output signal indicates values lower than expected.
by using wires with a heavier gauge, especially in the ground wire.
How often do I need to calibrate my device?
Annual recalibration is recommended. Check your device’s last calibration date. If it
is time to recalibrate, request a recalibration from customer support (page 2).
I dropped my device. Is it OK? Do I need to recalibrate?
If the device powers up and appears to respond normally, then it is likely OK.
It may or may not need a recalibration. Tare the device, and compare it against
about the drop at your next annual recalibration so we can check it out for you.
Flow Readings
The live ow readings won’t settle down.
unnoticed by your other devices. This sensitivity can help detect problems with
averaging. Controllers use PD or PD²I control loop algorithms to reach the setpoint
My controller won’t reach its setpoint.
Action
to help avoid this issue.
My ow readings are negative.
Does the controller work if it is laying down? Will it be accurate?
Action
orientation and can be used sideways, on its back, or upside-down.
Can I put the ow controller on top of a vibrating device? Will it be accurate?
My controller does not agree with another mass ow meter I have in line.
Check the STP or NTP settings to ensure that your standardized temperature and
correct gas is selected (page 18).
16 Troubleshooting
My ow readings won’t change when ow changes.
be damaged. Please contact support to troubleshoot (page 2).
Can I use the controller with other gases?
Action
gases and gas mixes. If your desired gas is not listed on page 18, please contact
support to ensure compatibility (page 2).
Serial Communications
I can’t communicate with the device when it is connected to my PC.
Action: 1. Make sure the baud rate your software and COM port required is the one
with your serial commands.
3. Check the pinout (see page 6).
4.Make sure the COM number matches the one your software is using to
5. On the external serial communications device (computer, PLC, etc.), be sure
Still experiencing issues? Please contact support. See "Contact Information" on
page 2.
17 Maintenance
Maintenance
Cleaning
gas. If necessary, the outside of the device can be cleaned with a soft dry cloth.
If you suspect that debris or other foreign material has entered your device,do
not take apart the ow body to clean it, as this will negate its NIST-traceable calibration.
Please contact support for cleaning (page 2).
Recalibration
The recommended period for recalibration is once every year. A label located on the back
of the device lists the most recent calibration date.
When it is time for your device’s annual recalibration, contact support (page 2) with
your device’s serial number and your contact information.
18 Reference
Reference
Gas List by Number
If you change the gas species
page 12) to update the device's
calibration to that gas, to keep your readings accurate.
#Short Name Long Name
Air Air (Clean Dry)
1Ar Argon
CH4 Methane
3CO Carbon Monoxide
4CO2 Carbon Dioxide
5C2H6 Ethane
6H2 Hydrogen
7He Helium
8N2 Nitrogen
9N2O Nitrous Oxide
Ne Neon
11 O2 Oxygen
C3H8 Propane
13 nC4H10 Normal Butane
14 C2H2 Acetylene
15 C2H4 Ethylene (Ethene)
16 iC4H10 Isobutane
17 Kr Krypton
18 Xe Xenon
19 SF6 ¹
C-25 25% CO, 75% Ar
C-10 10% CO, 90% Ar
C-8 8% CO, 92% Ar
C-2 2% CO, 98% Ar
C-75 75% CO, 25% Ar
He-25 25% He, 75% Ar
He-75 75% He, 25% Ar
A1025 90% He, 7.5% Ar, 2.5% CO
Star29 Stargon CS (90% Ar, 8% CO,
2% O)
P-5 5% CH, 95% Ar
1 Sulfur hexauoride is a highly potent greenhouse
gas monitored under the Kyoto Protocol.
19 Reference
Pressure Units
Absolute or
Barometric Gauge Notes
PaA PaG Pascal
hPaA hPaG Hectopascal
kPaA kPaG Kilopascal
MPaA MPaG Megapascal
mbarA mbarG Millibar
barA barG Bar
g∕cm2Ag∕cm2GGram force per square
centimeter†
kg∕cm2Akg∕cm2GKilogram force per
square centimeter*
PSIA PSIG Pound force per
square inch
PSFA PSFG Pound force per
square foot
mTorrA mTorrG Millitorr
torrA torrG Torr
mmHgA mmHgG Millimeter of
mercury at 0°C
inHgA inHgG Inch of mercury at 0°C
mmH₂OA mmH₂OG Millimeter of water at 4°C
(NIST conventional)†
mmH₂OA mmH₂OG Millimeter of
water at 60°C†
cmH₂OA cmH₂OG Centimeter of water at
4°C (NIST conventional)†
cmH₂OA cmH₂OG Centimeter of
water at 60°C†
inH₂OA inH₂OG Inch of water at 4°C
(NIST conventional)†
inH₂OA inH₂OG Inch of water at 60°C†
atm Atmosphere
m asl Meter above sea level
ft asl Foot above sea level
VVolt
count count Setpoint count, 0–64000
% % Percent of full scale
Flow Units
Standard
Normal
Notes
µL∕m SµL∕m NµL∕m Microliter per minute‡
mL∕s SmL∕s NmL∕s Milliliter per second
mL∕m SmL∕m NmL∕m Milliliter per minute
mL∕h SmL∕h NmL∕h Milliliter per hour
L∕s SL∕s NL∕s Liter per second
LPM SLPM NLPM Liter per minute
L∕h SL∕h NL∕h Liter per hour
US GPM US gallon per minute
US GPH US gallon per hour
CCS SCCS NCCS Cubic centimeter per second
CCM SCCM NCCM Cubic centimeter per minute
cm3∕h Scm3∕h Ncm3∕h Cubic centimeter per hour†
m3∕m Sm3∕m Nm3∕m Cubic meter per minute†
m3∕h Sm3∕h Nm3∕h Cubic meter per hour†
m3∕d Sm³∕d Nm3∕d Cubic meter per day†
in3∕m Sin³∕m Cubic inch per minute†
CFM SCFM Cubic foot per minute
CFH SCFH Cubic foot per hour
CFD SCFD Cubic foot per day
kSCFM 1000 cubic feet per minute
count count count Setpoint count, 0–64000
% % % Percent of full scale
Temperature Units
°C Degrees Celsius
°F Degrees Farenheit
KKelvin
°R Degrees Rankine
Time Units
h:m:s
Hours:Minutes:Seconds
ms Milliseconds
sSeconds
mMinutes
hour Hours
day Days
True Mass Flow Units
mg∕s Milligram per second
mg∕m Milligram per minute
g∕s Gram per second
g∕m Gram per minute
g∕h Gram per hour
kg∕m Kilogram per minute
kg∕h Kilogram per hour
oz∕s Ounce per second
oz∕m Ounce per minute
lb∕m Pound per minute
lb∕h Pound per hour
Total Units
μL MicroLiter‡
mL MilliLiter
LLiter
US GAL US gallon
cm³ Cubic centimeter†
m³ Cubic meter†
in³ Cubic inch†
ft³ Cubic foot†
µP Micropoise, a measure
of viscosity*
mg Milligrams
gGrams
kg Kilograms
oz US ounces
lb US pounds
* Displayed as kg/cmA and kg/cmG.
†Superscript and subscript numerals are
displayed as lining (normal) numerals.
‡Instances of µ are displayed as a lower-case u.
Engineering Units
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