HP HP 4062UX User manual

HP 4062UX Semiconductor Process Control System
HP 4062F Semiconductor Parametric Test System
Installation Manual
ABCDE
HP Part No. 04062-90240
Printed in Japan October 1994
Edition 1
E1094

Product Warranty
This Hewlett-Packard system pro duct is warranted against defects in material and
workmanship for a p erio d of one year from date of installation. During the warranty p erio d,
HP will, at its option, either repair or replace pro ducts which prove to b e defective.
Warranty service of this pro duct will b e p erformed at Buyer's facilityatnocharge within HP
service travel areas. Outside HP service travel areas, warranty service will be performed at
Buyer's facility only up on HP's prior agreement and Buyer shall pay HP's round trip travel
expenses. In all other cases, pro ducts must be returned to a service facilit y designated byHP.
For pro ducts returned to HP for warranty service, Buyer shall prepay shipping charges to HP
and HP shall pay shipping charges to return the pro duct to Buyer. However, Buyer shall pay
all shipping charges, duties, and taxes for pro ducts returned to HP from another country.
HP warrants that its software and rmware designated by HP for use with an instrument
will execute its programming instructions when prop erly installed on that instrumen
t. HP
does not warrant that the op eration of the instrument, or software, or rmware will be
uninterrupted or error free.
Limitation of Warranty
The foregoing warranty shall not apply to defects resulting from improp er or inadequate
maintenance by Buyer, Buyer-supplied software or interfacing, unauthorized mo dications or
misuse, op eration outside of the environment specications for the pro ducts, or improp er site
preparation or maintenance.
No other warranty is expressed or implied. Hewlett-Packard specically disclaims the implied
warranties or merchantability and tness for a particular purpose.
Exclusive Remedies
The remedies provided herein are buyer's sole and exclusive remedies. Hewlett-Packard shall
not be liable for any direct, indirect, special, incidental, or consequential damages, whether
based on contract, tort, or any other legal theory.
Assistance
Pro duct maintenance agreements and other customer assistance agreements are available for
Hewlett-Packard pro ducts.
Certification
Hewlett-Packard Company certies that this pro duct met its published sp ecications at the
time of shipment from the factory. HP further certies that its calibration measurements
are traceable to the National Institute of Standards and T
echnology ( NIST ), to the extent
allowed by the Institute's calibration facility, and to the calibration facilities of other
International Standards Organization members.
Copyright c
 1994 Hewlett-Packard Company.

Printing History
New editions are complete revisions of the manual. Update packages, which are issued
between editions, contain additional and replacement pages to b e merged into the manual by
the customer. The dates on the title page change only when a new edition is published. No
information is incorporated into a reprinting unless it app ears as a prior update; the edition
does not change when an up date is incorp orated.
The software revision co de printed before the date indicates the version level of the software
pro duct at the time the manual or update was issued. Many pro duct updates and xes
do not require manual changes and, conversely, manual corrections may b e done without
accompanying pro duct changes. Therefore, do not exp ect a one to one corresp ondence
between pro duct up dates and manual up dates.
Edition 1 For Rev. X.07.0 x , F.07.0 x , October 1994
iii

Safety Summary
The following general safety precautions must b e observed during all phases of op eration,
service, and repair of this instrument. Failure to comply with these precautions or with
specic warnings elsewhere in this manual may impair the protections provided by the
equipment. In addition, it violates safety standards of design, manufacture, and intended use
of the instrument. Hewlett-Packard Company assumes no liability for customer's failure to
comply with these requirements.
Note
HP 4062UX/F complies with INSTALLATION CATEGORY I I and
POLLUTION DEGREE 2 dened in IEC 1010-1.
HP 4062UX/F is INDOOR USE pro duct.
GROUND THE INSTRUMENT
To minimize sho ck hazard, the instrumentchassis and cabinet must b e connected to
an electrical ground. The power terminal and the p ower cable must meet International
Electrotechnical Commission (IEC) safety standards.
DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not op erate the instrument in the presence of ammable gases or fumes. Operation of an
y
electrical instrument in suchanenvironment constitutes a denite safety hazard.
KEEP AWAYFROM LIVE CIRCUITS
Operation p ersonnel must not remove instrumentcovers. Comp onent replacement and
internal adjustments must b e made by qualied maintenance p ersonnel. Do not replace
components with p ower cable connected. Under certain conditions, dangerous voltages may
exist even with the p ower cable removed. Toavoid injuries, always disconnect power and
discharge circuits b efore touching them.
DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another p erson, capable of rendering
rst aid and resuscitation, is present.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of intro ducing additional hazards, do not install substitute parts
or p erform any unauthorized mo dication to the instrument. Return the instrumentto a
Hewlett-Packard Sales and Service Oce for services and repair to ensure that safet
y features
are maintained.
DANGEROUS PROCEDURE WARNINGS
Warnings, such as example b elow, precede p otentially dangerous pro cedures throughout this
manual. Instructions contained in the warnings must be followed.
Warning
Dangerous voltages, capable of causing death, are present in this instrument.
Use extreme caution when handling, testing, and adjusting.
iv

Safety Symbols
The general denitions of safety symbols used on equipment or in manuals are listed below.
Instruction manual symbol: the pro duct will b e marked with this symbol
when it is necessary for the user to refer to the instruction manual in order
to protect against damage to the instrument.
Indicates dangerous voltage (terminals fed from the interior byvoltage
exceeding 1000 volts must be so marked).
Protective conductor terminal. For protection against electrical sho ckin
case of a fault. Used with eld wiring terminals to indicate the terminal
whichmust be connected to ground b efore op erating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the
equipment which normally includes all exposed metal structures.
Alternating current.
Direct current.
ON (Supply).
OFF (Supply).
STANDBY (Supply).
The warning sign denotes a hazard. It calls attention to a pro cedure,
practice, condition or the like, which, if not correctly p erformed or adhered
to, could result in injury or death to personnel.
The caution sign denotes a hazard. It calls atten
tion to an op erating
pro cedure, practice, condition or the like, which, if not correctly p erformed
or adhered to, could result in damage to or destruction of part or all of the
pro duct.
The note sign denotes imp ortant information. It calls atten
tion to a
pro cedure, practice, condition or the like, which is essential to highlight.
v

Preface
Purpose
This manual contains the installation information for b oth HP 4062UX and HP 4062F system.
Refer to the Pre-instal lation Manual for the information ab out the site-preparation of the
customers.
Audience
This manual is intended for the HP Customer Engineers who p erform the installation of the
HP 4062UX/F system. System administrator and maintenance p ersonnel can refer to this
manual when the HP 4062UX/F system is up dated or reinstalled at the new place.
Contents
Chapter 1, General Information, covers the installation sequence, required reference material,
and equipment required to install the HP 4062UX/F.
Chapter 2, System Controller Installation, covers the pro cedures for system controller
installation.
Chapter 3, Switching Matrix Installation, covers the pro cedures for switching matrix
installation.
Chapter 4, System Installation, explains howtointegrate the system controller, switching
matrix, and cabinet-mounted instruments into a system.
Chapter 5, Software Installation, covers the pro cedures for software installation and
customization. This chapter also includes information for the HP IMA softw
are.
Chapter 6, System Verication, provides instructions for verifying prop er system op eration.
vi

Contents
1. General Information
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Installation Sequence . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Required Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Utility Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Abbreviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
2. System Controller Installation
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Line Voltage Switch and Line Fuse . . . . . . . . . . . . . . . . . . . 2-2
HP 9000 Series 300 Hardware Installation . . . . . . . . . . . . . . . . 2-3
Backplane Expander . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Random Access Memory (RAM) . . . . . . . . . . . . . . . . . . . 2-3
HP-IB Interface Cards . . . . . . . . . . . . . . . . . . . . . . . . 2-4
ID Mo dule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Verifying Installed Accessories . . . . . . . . . . . . . . . . . . . . 2-6
HP 9000 Series 700 Hardware Installation . . . . . . . . . . . . . . . . 2-7
HP-IB Interface Cards . . . . . . . . . . . . . . . . . . . . . . . . 2-8
ID Mo dule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Rack Mounting Instructions . . . . . . . . . . . . . . . . . . . . . . 2-10
Installing Controller and Backplane Expander (Option 701, 702, 703, or 704) 2-10
Controller and Backplane Expander Installation Pro cedure (Option 701 or
702): . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Controller and Bus Expander Installation Pro cedure (Option 703 or 704): 2-11
Installing Controller (Option 705 or 706) . . . . . . . . . . . . . . . . 2-13
Mass Storage Unit . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Mass Storage Installation Pro cedure: . . . . . . . . . . . . . . . . 2-14
3. Switching Matrix Installation
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
HP 4085B/F (48-pin) SWM Installation . . . . . . . . . . . . . . . . . 3-1
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Installing Additional Pin Boards . . . . . . . . . . . . . . . . . . . 3-2
Installing the SWM on a Wafer Prob er . . . . . . . . . . . . . . . . 3-4
Automatic Wafer Prob ers . . . . . . . . . . . . . . . . . . . . . 3-4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Manual and Small Automatic Wafer Prob ers . . . . . . . . . . . . . 3-4
Connecting Test Fixtures . . . . . . . . . . . . . . . . . . . . . . 3-6
HP 4089B (96-pin) SWM Installation (HP 4062UX Only) . . . . . . . . . 3-8
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Installing Additional Pin Boards . . . . . . . . . . . . . . . . . . . 3-8
Installing a Port Expander . . . . . . . . . . . . . . . . . . . . . . 3-9
Contents-1

Installing the SWM on a Wafer Prob er . . . . . . . . . . . . . . . . 3-9
Automatic Wafer Prob ers . . . . . . . . . . . . . . . . . . . . . 3-10
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Manual and Small Automatic Wafer Prob ers . . . . . . . . . . . . . 3-10
Connecting Test Fixtures . . . . . . . . . . . . . . . . . . . . . . 3-11
4. System Installation
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Installing the System Cabinet . . . . . . . . . . . . . . . . . . . . . 4-1
Stabilizing the System Cabinet . . . . . . . . . . . . . . . . . . . . 4-2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Installing Power Cables . . . . . . . . . . . . . . . . . . . . . . . . 4-2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
When an Emergency O Unit is Furnished . . . . . . . . . . . . . . . 4-3
When an Emergency O Unit is NOT Furnished . . . . . . . . . . . . 4-5
Installing Power Cables for Each Instrument . . . . . . . . . . . . . . 4-7
Changing the Line Voltage . . . . . . . . . . . . . . . . . . . . . . . 4-8
Fuse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Installation of HP 4142B DC Subsystem (DCS) . . . . . . . . . . . . . . 4-9
Installing the Customer's HP 4142B . . . . . . . . . . . . . . . . . . 4-9
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-9
Installing the HP 4142B . . . . . . . . . . . . . . . . . . . . . . 4-10
HP 4142B DCS Settings . . . . . . . . . . . . . . . . . . . . . . . 4-11
Installation of HP 4280A Capacitance Measurement Subsystem (CMU) . . . 4-12
Installing the Customer's HP 4280A . . . . . . . . . . . . . . . . . . 4-12
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-12
Installing the HP 4280A . . . . . . . . . . . . . . . . . . . . . . 4-13
HP 4280A CMU Settings . . . . . . . . . . . . . . . . . . . . . . 4-15
Installation of HP 4284A Capacitance Measurement Subsystem (CMU84) . . 4-16
Installing the Customer's HP 4284A . . . . . . . . . . . . . . . . . . 4-16
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-16
Installing the HP 4284A . . . . . . . . . . . . . . . . . . . . . . 4-18
HP 4284A CMU84 Settings . . . . . . . . . . . . . . . . . . . . . 4-18
Installation of HP 8110A Pulse Source Subsystem (PSS) (HP 4062F Only) . . 4-19
Installing the Customer's HP 8110A . . . . . . . . . . . . . . . . . . 4-19
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-20
Installing the HP 8110A . . . . . . . . . . . . . . . . . . . . . . 4-21
HP-IB Cables and Addresses . . . . . . . . . . . . . . . . . . . . . . 4-26
HP-IB Addresses and Connections of the Rack Mounted Instruments . . . 4-26
HP-IB Address and Connection of the Wafer Prob er . . . . . . . . . . . 4-30
Installing Signal Cables . . . . . . . . . . . . . . . . . . . . . . . . 4-31
When Your System is HP 4062UX . . . . . . . . . . . . . . . . . . 4-31
When Your System is HP 4062F . . . . . . . . . . . . . . . . . . . 4-36
Removing System Instruments . . . . . . . . . . . . . . . . . . . . . 4-43
Testing Each Instrument. . . . . . . . . . . . . . . . . . . . . . . . 4-44
Testing Emergency O Unit and Power Distribution Unit (PDU) . . . . . 4-44
Testing Power Distribution Unit (PDU) (HP 4062UX Only) . . . . . . . 4-45
Testing Each System Instrument . . . . . . . . . . . . . . . . . . . 4-46
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46
Contents-2

5. Software Installation
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Installing the HP 4062UX/F System Software . . . . . . . . . . . . . . 5-2
Installing HP-UX and Other Application Software . . . . . . . . . . . 5-4
Installing and Customizing Your System . . . . . . . . . . . . . . . . 5-6
Installing and Customizing HP IMA . . . . . . . . . . . . . . . . . . 5-14
Installing HP IMA/UX . . . . . . . . . . . . . . . . . . . . . . 5-14
Customizing for HP IMA/UX . . . . . . . . . . . . . . . . . . . 5-14
/usr/lib/rmbrc or $HOME/.rmbrc . . . . . . . . . . . . . . . . 5-14
/usr/p cs/etc/xinitcolor . . . . . . . . . . . . . . . . . . . . . 5-15
/usr/p cs/etc/CODEWORD . . . . . . . . . . . . . . . . . . . 5-15
/usr/p cs/etc/PERCONFIG . . . . . . . . . . . . . . . . . . . 5-15
Creating a New User Account . . . . . . . . . . . . . . . . . . . . 5-16
Customizing the Wafer Prob er . . . . . . . . . . . . . . . . . . . . . 5-19
6. System Verication
System Conguration Verication for HP 4062UX . . . . . . . . . . . . . 6-2
Verifying the System Conguration with START Program . . . . . . . . 6-2
System Conguration Verication for HP 4062F . . . . . . . . . . . . . 6-4
Verifying the System Conguration with START.F Program . . . . . . . 6-4
System Performance Verication for HP 4062UX . . . . . . . . . . . . . 6-5
Running the PV4062 . . . . . . . . . . . . . . . . . . . . . . . . 6-7
The 4062UX W/O DVM . . . . . . . . . . . . . . . . . . . . . . . 6-8
Pro cedure: . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Displaying and Printing Test Results . . . . . . . . . . . . . . . . . 6-21
Displaying PV test results: . . . . . . . . . . . . . . . . . . . . . 6-21
Printing PV test results: . . . . . . . . . . . . . . . . . . . . . . 6-21
System Performance Verication for HP 4062F . . . . . . . . . . . . . . 6-24
Running PV4062.F . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
\4062F DC W/O DVM" Test . . . . . . . . . . . . . . . . . . . . 6-27
Required Equipment . . . . . . . . . . . . . . . . . . . . . . . 6-27
Test Pro cedure . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
\4062F AC" Test . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
Required Equipment . . . . . . . . . . . . . . . . . . . . . . . 6-40
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-41
Test Pro cedure . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42
Displaying and Printing Test Results . . . . . . . . . . . . . . . . . 6-45
Displaying PV Test Results: . . . . . . . . . . . . . . . . . . . . 6-45
Printing PV Test Results: . . . . . . . . . . . . . . . . . . . . . 6-46
Contents-3

A. Up dating the System Software
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Updating for HP 4062UX/F . . . . . . . . . . . . . . . . . . . . . . A-1
B. Conguring the System Printer for PV4062/PV4062.F
Conguring the System Printer . . . . . . . . . . . . . . . . . . . . . B-2
C. Installation Problems You May Encounter
Errors during the START/START.F Program . . . . . . . . . . . . . . C-1
For HP 4062UX/F System . . . . . . . . . . . . . . . . . . . . . . C-1
START ERROR 0 : Not authorized to use the software. . . . . . . . . C-1
START ERROR 90 : SYSCONFIG le not found. . . . . . . . . . . C-1
START ERROR 300 : PCS SESSION ID not dened. . . . . . . . . C-2
START ERROR 310 : Group 'p cs' not registered. . . . . . . . . . . . C-2
START ERROR 330 : Device le /dev/p cs/hpib xx not found. . . . . . C-2
START ERROR 450 : Fatal error in p csstart command. . . . . . . . . C-3
pcsstart:Error in SYSCONFIG: Invalid select co de 29 . . . . . . . . . C-3
System Conguration Error . . . . . . . . . . . . . . . . . . . . C-4
Errors during the PV4062/PV4062.F Program . . . . . . . . . . . . . . C-4
Error o ccurs while Test Infomation of File is being Stored . . . . . . . . C-4
Index
Contents-4