HP HP 4062UX User manual

HP 4062UX Semiconductor Process Control System
HP 4062F Semiconductor Parametric Test System
Installation Manual
ABCDE
HP Part No. 04062-90240
Printed in Japan October 1994
Edition 1
E1094

Product Warranty
This Hewlett-Packard system pro duct is warranted against defects in material and
workmanship for a p erio d of one year from date of installation. During the warranty p erio d,
HP will, at its option, either repair or replace pro ducts which prove to b e defective.
Warranty service of this pro duct will b e p erformed at Buyer's facilityatnocharge within HP
service travel areas. Outside HP service travel areas, warranty service will be performed at
Buyer's facility only up on HP's prior agreement and Buyer shall pay HP's round trip travel
expenses. In all other cases, pro ducts must be returned to a service facilit y designated byHP.
For pro ducts returned to HP for warranty service, Buyer shall prepay shipping charges to HP
and HP shall pay shipping charges to return the pro duct to Buyer. However, Buyer shall pay
all shipping charges, duties, and taxes for pro ducts returned to HP from another country.
HP warrants that its software and rmware designated by HP for use with an instrument
will execute its programming instructions when prop erly installed on that instrumen
t. HP
does not warrant that the op eration of the instrument, or software, or rmware will be
uninterrupted or error free.
Limitation of Warranty
The foregoing warranty shall not apply to defects resulting from improp er or inadequate
maintenance by Buyer, Buyer-supplied software or interfacing, unauthorized mo dications or
misuse, op eration outside of the environment specications for the pro ducts, or improp er site
preparation or maintenance.
No other warranty is expressed or implied. Hewlett-Packard specically disclaims the implied
warranties or merchantability and tness for a particular purpose.
Exclusive Remedies
The remedies provided herein are buyer's sole and exclusive remedies. Hewlett-Packard shall
not be liable for any direct, indirect, special, incidental, or consequential damages, whether
based on contract, tort, or any other legal theory.
Assistance
Pro duct maintenance agreements and other customer assistance agreements are available for
Hewlett-Packard pro ducts.
Certification
Hewlett-Packard Company certies that this pro duct met its published sp ecications at the
time of shipment from the factory. HP further certies that its calibration measurements
are traceable to the National Institute of Standards and T
echnology ( NIST ), to the extent
allowed by the Institute's calibration facility, and to the calibration facilities of other
International Standards Organization members.
Copyright c
 1994 Hewlett-Packard Company.

Printing History
New editions are complete revisions of the manual. Update packages, which are issued
between editions, contain additional and replacement pages to b e merged into the manual by
the customer. The dates on the title page change only when a new edition is published. No
information is incorporated into a reprinting unless it app ears as a prior update; the edition
does not change when an up date is incorp orated.
The software revision co de printed before the date indicates the version level of the software
pro duct at the time the manual or update was issued. Many pro duct updates and xes
do not require manual changes and, conversely, manual corrections may b e done without
accompanying pro duct changes. Therefore, do not exp ect a one to one corresp ondence
between pro duct up dates and manual up dates.
Edition 1 For Rev. X.07.0 x , F.07.0 x , October 1994
iii

Safety Summary
The following general safety precautions must b e observed during all phases of op eration,
service, and repair of this instrument. Failure to comply with these precautions or with
specic warnings elsewhere in this manual may impair the protections provided by the
equipment. In addition, it violates safety standards of design, manufacture, and intended use
of the instrument. Hewlett-Packard Company assumes no liability for customer's failure to
comply with these requirements.
Note
HP 4062UX/F complies with INSTALLATION CATEGORY I I and
POLLUTION DEGREE 2 dened in IEC 1010-1.
HP 4062UX/F is INDOOR USE pro duct.
GROUND THE INSTRUMENT
To minimize sho ck hazard, the instrumentchassis and cabinet must b e connected to
an electrical ground. The power terminal and the p ower cable must meet International
Electrotechnical Commission (IEC) safety standards.
DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not op erate the instrument in the presence of ammable gases or fumes. Operation of an
y
electrical instrument in suchanenvironment constitutes a denite safety hazard.
KEEP AWAYFROM LIVE CIRCUITS
Operation p ersonnel must not remove instrumentcovers. Comp onent replacement and
internal adjustments must b e made by qualied maintenance p ersonnel. Do not replace
components with p ower cable connected. Under certain conditions, dangerous voltages may
exist even with the p ower cable removed. Toavoid injuries, always disconnect power and
discharge circuits b efore touching them.
DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another p erson, capable of rendering
rst aid and resuscitation, is present.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of intro ducing additional hazards, do not install substitute parts
or p erform any unauthorized mo dication to the instrument. Return the instrumentto a
Hewlett-Packard Sales and Service Oce for services and repair to ensure that safet
y features
are maintained.
DANGEROUS PROCEDURE WARNINGS
Warnings, such as example b elow, precede p otentially dangerous pro cedures throughout this
manual. Instructions contained in the warnings must be followed.
Warning
Dangerous voltages, capable of causing death, are present in this instrument.
Use extreme caution when handling, testing, and adjusting.
iv

Safety Symbols
The general denitions of safety symbols used on equipment or in manuals are listed below.
Instruction manual symbol: the pro duct will b e marked with this symbol
when it is necessary for the user to refer to the instruction manual in order
to protect against damage to the instrument.
Indicates dangerous voltage (terminals fed from the interior byvoltage
exceeding 1000 volts must be so marked).
Protective conductor terminal. For protection against electrical sho ckin
case of a fault. Used with eld wiring terminals to indicate the terminal
whichmust be connected to ground b efore op erating equipment.
Frame or chassis terminal. A connection to the frame (chassis) of the
equipment which normally includes all exposed metal structures.
Alternating current.
Direct current.
ON (Supply).
OFF (Supply).
STANDBY (Supply).
The warning sign denotes a hazard. It calls attention to a pro cedure,
practice, condition or the like, which, if not correctly p erformed or adhered
to, could result in injury or death to personnel.
The caution sign denotes a hazard. It calls atten
tion to an op erating
pro cedure, practice, condition or the like, which, if not correctly p erformed
or adhered to, could result in damage to or destruction of part or all of the
pro duct.
The note sign denotes imp ortant information. It calls atten
tion to a
pro cedure, practice, condition or the like, which is essential to highlight.
v

Preface
Purpose
This manual contains the installation information for b oth HP 4062UX and HP 4062F system.
Refer to the Pre-instal lation Manual for the information ab out the site-preparation of the
customers.
Audience
This manual is intended for the HP Customer Engineers who p erform the installation of the
HP 4062UX/F system. System administrator and maintenance p ersonnel can refer to this
manual when the HP 4062UX/F system is up dated or reinstalled at the new place.
Contents
Chapter 1, General Information, covers the installation sequence, required reference material,
and equipment required to install the HP 4062UX/F.
Chapter 2, System Controller Installation, covers the pro cedures for system controller
installation.
Chapter 3, Switching Matrix Installation, covers the pro cedures for switching matrix
installation.
Chapter 4, System Installation, explains howtointegrate the system controller, switching
matrix, and cabinet-mounted instruments into a system.
Chapter 5, Software Installation, covers the pro cedures for software installation and
customization. This chapter also includes information for the HP IMA softw
are.
Chapter 6, System Verication, provides instructions for verifying prop er system op eration.
vi

Contents
1. General Information
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Installation Sequence . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Required Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Utility Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Abbreviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
2. System Controller Installation
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Line Voltage Switch and Line Fuse . . . . . . . . . . . . . . . . . . . 2-2
HP 9000 Series 300 Hardware Installation . . . . . . . . . . . . . . . . 2-3
Backplane Expander . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Random Access Memory (RAM) . . . . . . . . . . . . . . . . . . . 2-3
HP-IB Interface Cards . . . . . . . . . . . . . . . . . . . . . . . . 2-4
ID Mo dule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Verifying Installed Accessories . . . . . . . . . . . . . . . . . . . . 2-6
HP 9000 Series 700 Hardware Installation . . . . . . . . . . . . . . . . 2-7
HP-IB Interface Cards . . . . . . . . . . . . . . . . . . . . . . . . 2-8
ID Mo dule . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Rack Mounting Instructions . . . . . . . . . . . . . . . . . . . . . . 2-10
Installing Controller and Backplane Expander (Option 701, 702, 703, or 704) 2-10
Controller and Backplane Expander Installation Pro cedure (Option 701 or
702): . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Controller and Bus Expander Installation Pro cedure (Option 703 or 704): 2-11
Installing Controller (Option 705 or 706) . . . . . . . . . . . . . . . . 2-13
Mass Storage Unit . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Mass Storage Installation Pro cedure: . . . . . . . . . . . . . . . . 2-14
3. Switching Matrix Installation
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
HP 4085B/F (48-pin) SWM Installation . . . . . . . . . . . . . . . . . 3-1
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Installing Additional Pin Boards . . . . . . . . . . . . . . . . . . . 3-2
Installing the SWM on a Wafer Prob er . . . . . . . . . . . . . . . . 3-4
Automatic Wafer Prob ers . . . . . . . . . . . . . . . . . . . . . 3-4
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Manual and Small Automatic Wafer Prob ers . . . . . . . . . . . . . 3-4
Connecting Test Fixtures . . . . . . . . . . . . . . . . . . . . . . 3-6
HP 4089B (96-pin) SWM Installation (HP 4062UX Only) . . . . . . . . . 3-8
Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Installing Additional Pin Boards . . . . . . . . . . . . . . . . . . . 3-8
Installing a Port Expander . . . . . . . . . . . . . . . . . . . . . . 3-9
Contents-1

Installing the SWM on a Wafer Prob er . . . . . . . . . . . . . . . . 3-9
Automatic Wafer Prob ers . . . . . . . . . . . . . . . . . . . . . 3-10
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Manual and Small Automatic Wafer Prob ers . . . . . . . . . . . . . 3-10
Connecting Test Fixtures . . . . . . . . . . . . . . . . . . . . . . 3-11
4. System Installation
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Installing the System Cabinet . . . . . . . . . . . . . . . . . . . . . 4-1
Stabilizing the System Cabinet . . . . . . . . . . . . . . . . . . . . 4-2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Installing Power Cables . . . . . . . . . . . . . . . . . . . . . . . . 4-2
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
When an Emergency O Unit is Furnished . . . . . . . . . . . . . . . 4-3
When an Emergency O Unit is NOT Furnished . . . . . . . . . . . . 4-5
Installing Power Cables for Each Instrument . . . . . . . . . . . . . . 4-7
Changing the Line Voltage . . . . . . . . . . . . . . . . . . . . . . . 4-8
Fuse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Installation of HP 4142B DC Subsystem (DCS) . . . . . . . . . . . . . . 4-9
Installing the Customer's HP 4142B . . . . . . . . . . . . . . . . . . 4-9
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-9
Installing the HP 4142B . . . . . . . . . . . . . . . . . . . . . . 4-10
HP 4142B DCS Settings . . . . . . . . . . . . . . . . . . . . . . . 4-11
Installation of HP 4280A Capacitance Measurement Subsystem (CMU) . . . 4-12
Installing the Customer's HP 4280A . . . . . . . . . . . . . . . . . . 4-12
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-12
Installing the HP 4280A . . . . . . . . . . . . . . . . . . . . . . 4-13
HP 4280A CMU Settings . . . . . . . . . . . . . . . . . . . . . . 4-15
Installation of HP 4284A Capacitance Measurement Subsystem (CMU84) . . 4-16
Installing the Customer's HP 4284A . . . . . . . . . . . . . . . . . . 4-16
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-16
Installing the HP 4284A . . . . . . . . . . . . . . . . . . . . . . 4-18
HP 4284A CMU84 Settings . . . . . . . . . . . . . . . . . . . . . 4-18
Installation of HP 8110A Pulse Source Subsystem (PSS) (HP 4062F Only) . . 4-19
Installing the Customer's HP 8110A . . . . . . . . . . . . . . . . . . 4-19
Installation Preparation . . . . . . . . . . . . . . . . . . . . . . 4-20
Installing the HP 8110A . . . . . . . . . . . . . . . . . . . . . . 4-21
HP-IB Cables and Addresses . . . . . . . . . . . . . . . . . . . . . . 4-26
HP-IB Addresses and Connections of the Rack Mounted Instruments . . . 4-26
HP-IB Address and Connection of the Wafer Prob er . . . . . . . . . . . 4-30
Installing Signal Cables . . . . . . . . . . . . . . . . . . . . . . . . 4-31
When Your System is HP 4062UX . . . . . . . . . . . . . . . . . . 4-31
When Your System is HP 4062F . . . . . . . . . . . . . . . . . . . 4-36
Removing System Instruments . . . . . . . . . . . . . . . . . . . . . 4-43
Testing Each Instrument. . . . . . . . . . . . . . . . . . . . . . . . 4-44
Testing Emergency O Unit and Power Distribution Unit (PDU) . . . . . 4-44
Testing Power Distribution Unit (PDU) (HP 4062UX Only) . . . . . . . 4-45
Testing Each System Instrument . . . . . . . . . . . . . . . . . . . 4-46
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-46
Contents-2

5. Software Installation
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Installing the HP 4062UX/F System Software . . . . . . . . . . . . . . 5-2
Installing HP-UX and Other Application Software . . . . . . . . . . . 5-4
Installing and Customizing Your System . . . . . . . . . . . . . . . . 5-6
Installing and Customizing HP IMA . . . . . . . . . . . . . . . . . . 5-14
Installing HP IMA/UX . . . . . . . . . . . . . . . . . . . . . . 5-14
Customizing for HP IMA/UX . . . . . . . . . . . . . . . . . . . 5-14
/usr/lib/rmbrc or $HOME/.rmbrc . . . . . . . . . . . . . . . . 5-14
/usr/p cs/etc/xinitcolor . . . . . . . . . . . . . . . . . . . . . 5-15
/usr/p cs/etc/CODEWORD . . . . . . . . . . . . . . . . . . . 5-15
/usr/p cs/etc/PERCONFIG . . . . . . . . . . . . . . . . . . . 5-15
Creating a New User Account . . . . . . . . . . . . . . . . . . . . 5-16
Customizing the Wafer Prob er . . . . . . . . . . . . . . . . . . . . . 5-19
6. System Verication
System Conguration Verication for HP 4062UX . . . . . . . . . . . . . 6-2
Verifying the System Conguration with START Program . . . . . . . . 6-2
System Conguration Verication for HP 4062F . . . . . . . . . . . . . 6-4
Verifying the System Conguration with START.F Program . . . . . . . 6-4
System Performance Verication for HP 4062UX . . . . . . . . . . . . . 6-5
Running the PV4062 . . . . . . . . . . . . . . . . . . . . . . . . 6-7
The 4062UX W/O DVM . . . . . . . . . . . . . . . . . . . . . . . 6-8
Pro cedure: . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Displaying and Printing Test Results . . . . . . . . . . . . . . . . . 6-21
Displaying PV test results: . . . . . . . . . . . . . . . . . . . . . 6-21
Printing PV test results: . . . . . . . . . . . . . . . . . . . . . . 6-21
System Performance Verication for HP 4062F . . . . . . . . . . . . . . 6-24
Running PV4062.F . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-26
\4062F DC W/O DVM" Test . . . . . . . . . . . . . . . . . . . . 6-27
Required Equipment . . . . . . . . . . . . . . . . . . . . . . . 6-27
Test Pro cedure . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28
\4062F AC" Test . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
Required Equipment . . . . . . . . . . . . . . . . . . . . . . . 6-40
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40
Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-41
Test Pro cedure . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42
Displaying and Printing Test Results . . . . . . . . . . . . . . . . . 6-45
Displaying PV Test Results: . . . . . . . . . . . . . . . . . . . . 6-45
Printing PV Test Results: . . . . . . . . . . . . . . . . . . . . . 6-46
Contents-3

A. Up dating the System Software
Intro duction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Updating for HP 4062UX/F . . . . . . . . . . . . . . . . . . . . . . A-1
B. Conguring the System Printer for PV4062/PV4062.F
Conguring the System Printer . . . . . . . . . . . . . . . . . . . . . B-2
C. Installation Problems You May Encounter
Errors during the START/START.F Program . . . . . . . . . . . . . . C-1
For HP 4062UX/F System . . . . . . . . . . . . . . . . . . . . . . C-1
START ERROR 0 : Not authorized to use the software. . . . . . . . . C-1
START ERROR 90 : SYSCONFIG le not found. . . . . . . . . . . C-1
START ERROR 300 : PCS SESSION ID not dened. . . . . . . . . C-2
START ERROR 310 : Group 'p cs' not registered. . . . . . . . . . . . C-2
START ERROR 330 : Device le /dev/p cs/hpib xx not found. . . . . . C-2
START ERROR 450 : Fatal error in p csstart command. . . . . . . . . C-3
pcsstart:Error in SYSCONFIG: Invalid select co de 29 . . . . . . . . . C-3
System Conguration Error . . . . . . . . . . . . . . . . . . . . C-4
Errors during the PV4062/PV4062.F Program . . . . . . . . . . . . . . C-4
Error o ccurs while Test Infomation of File is being Stored . . . . . . . . C-4
Index
Contents-4

Figures
1-1. System Installation Flow Diagram . . . . . . . . . . . . . . . . . . 1-1
1-2. Arranged Installation Sequences for HP 4062UX/F . . . . . . . . . . . 1-2
2-1. HP-IB Interface Card Switch Settings . . . . . . . . . . . . . . . . . 2-5
2-2. Connecting the ID Mo dule in the HP-HIL Interface . . . . . . . . . . . 2-6
2-3. HP E2071B HP-IB Interface Card Switches . . . . . . . . . . . . . . 2-8
2-4. Connecting the ID Mo dule in the HP-HIL Interface . . . . . . . . . . . 2-9
2-5. Rack Mounting the Controller and Backplane Expander . . . . . . . . . 2-12
2-6. Rack Mounting the Controller (Option 705 and 706) . . . . . . . . . . . 2-13
2-7. Rack Mounting the Mass Storage Unit . . . . . . . . . . . . . . . . . 2-15
3-1. Accessing Pin Boards . . . . . . . . . . . . . . . . . . . . . . . . 3-2
3-2. Handling Pin Boards . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3-3. HP 16077A/F Extension Cable Fixture . . . . . . . . . . . . . . . . 3-5
3-4. Mounting Test Fixtures . . . . . . . . . . . . . . . . . . . . . . . 3-6
3-5. Installing a Port Expander . . . . . . . . . . . . . . . . . . . . . 3-9
4-1. Attaching Rack Flanges to the HP 4142B . . . . . . . . . . . . . . . 4-10
4-2. Installing the HP 4142B . . . . . . . . . . . . . . . . . . . . . . . 4-10
4-3. HP 4142B Settings . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4-4. Attaching Rack Flanges to the HP 4280A . . . . . . . . . . . . . . . 4-13
4-5. Installing the HP 4280A . . . . . . . . . . . . . . . . . . . . . . . 4-14
4-6. HP 4280A Settings on the Front and Rear Panels . . . . . . . . . . . . 4-15
4-7. Attaching Rack Flanges for HP 4284A . . . . . . . . . . . . . . . . . 4-17
4-8. Installing the HP 4284A . . . . . . . . . . . . . . . . . . . . . . . 4-18
4-9. Attaching Rack Flanges to HP 8110A . . . . . . . . . . . . . . . . . 4-21
4-10. Installing the HP 8110A . . . . . . . . . . . . . . . . . . . . . . . 4-21
4-11. Trigger Cable Connections of One HP 8110A . . . . . . . . . . . . . . 4-22
4-12. Installing the BNC-to-SMA cable assembly . . . . . . . . . . . . . . . 4-24
4-13. Pulse Adder/Splitters Fixed on the Support Rail . . . . . . . . . . . . 4-25
4-14. Connections of the HP-IB Cables . . . . . . . . . . . . . . . . . . . 4-28
4-15. Connections of the HP-IB Cables with Controller . . . . . . . . . . . . 4-28
4-16. Connecting the SWC to the SWM . . . . . . . . . . . . . . . . . . 4-31
4-17. Connecting the DCS to the SWM . . . . . . . . . . . . . . . . . . . 4-32
4-18. Connecting the CMU to the SWM . . . . . . . . . . . . . . . . . . 4-33
4-19. Connecting the CMU84 to the SWM . . . . . . . . . . . . . . . . . 4-34
4-20. Connecting Signal Cables to the Port Expander . . . . . . . . . . . . 4-35
4-21. Fastening the Interconnection Cables with Cable Ties . . . . . . . . . . 4-36
4-22. Connecting the HP 4084B SWC to the HP 4085F SWM . . . . . . . . . 4-37
4-23. Connecting the HP 4142B DCS to the HP 4085F SWM . . . . . . . . . 4-38
4-24. Connecting the HP 4280A CMU to the HP 4085F SWM . . . . . . . . . 4-39
4-25. Connecting the HP 4284A CMU84 to the HP 4085F SWM . . . . . . . . 4-40
4-26. Fastening the Interconnection Cables with Cable Ties . . . . . . . . . . 4-41
4-27. Connecting the HP 8110A PGs to the HP 4085F SWM . . . . . . . . . 4-42
4-28. Removing HP 4142B's Plug-in Mo dules . . . . . . . . . . . . . . . . 4-43
Contents-5

5-1. Installation Flowchart for HP 4062UX/F System Software . . . . . . . . 5-3
6-1. Example of Conguration Page (HP 4062UX) . . . . . . . . . . . . . 6-3
6-2. Example of Conguration Page for Port Expander . . . . . . . . . . . 6-3
6-3. Example of Conguration Page . . . . . . . . . . . . . . . . . . . . 6-4
6-4. PV4062 MenuPage (HP 4062UX) . . . . . . . . . . . . . . . . . . 6-7
6-5. 4062UX W/O DVM Test Startup Page . . . . . . . . . . . . . . . . 6-9
6-6. Calibration Mo dule MenuPage for 48-pin SWM System . . . . . . . . . 6-10
6-7. An Example of Calibration Data Entry Page: HP 16346C . . . . . . . . 6-11
6-8. Test Lead Connections for OPEN Correction . . . . . . . . . . . . . . 6-11
6-9. Test Lead Connections for SHORT Correction . . . . . . . . . . . . . 6-12
6-10. 4062UX W/O DVM MenuPage . . . . . . . . . . . . . . . . . . . 6-12
6-11. PV Test Results Data Entry Page . . . . . . . . . . . . . . . . . . . 6-13
6-12. Example PV Test Results Data Entry Page . . . . . . . . . . . . . . 6-14
6-13. RelayTest Results Page for 48-pin SWM . . . . . . . . . . . . . . . 6-15
6-14. RelayTest Results Page for 96-pin SWM . . . . . . . . . . . . . . . 6-15
6-15. SMU Test Results Page . . . . . . . . . . . . . . . . . . . . . . . 6-16
6-16. VS Test Results Page . . . . . . . . . . . . . . . . . . . . . . . . 6-16
6-17. VM Test Results Page . . . . . . . . . . . . . . . . . . . . . . . . 6-17
6-18. AFU Test Results Page . . . . . . . . . . . . . . . . . . . . . . . 6-17
6-19. CMS C-G Test Results Page for 48-pin SWM . . . . . . . . . . . . . . 6-18
6-20. CMS C-G Test Results Page for 96-pin SWM . . . . . . . . . . . . . . 6-18
6-21. CMS Bias Test Results Page for HP 4280A . . . . . . . . . . . . . . . 6-19
6-22. CMU84 C-G Test Results page for HP 4284A . . . . . . . . . . . . . . 6-19
6-23. CMU84 Bias Test Results Page for HP 4284A . . . . . . . . . . . . . 6-20
6-24. DC Leak Test Results Page . . . . . . . . . . . . . . . . . . . . . 6-20
6-25. An Example Page of View Result (CRT) . . . . . . . . . . . . . . . . 6-21
6-26. An Example of Printer Conguration Page . . . . . . . . . . . . . . . 6-22
6-27. An Example Page of View Result (Printer) . . . . . . . . . . . . . . . 6-23
6-28. PV4062.F MenuPage (HP 4062F) . . . . . . . . . . . . . . . . . . 6-26
6-29. 4062F DC W/O DVM Test Startup Page . . . . . . . . . . . . . . . 6-28
6-30. Calibration Mo dule MenuPage . . . . . . . . . . . . . . . . . . . . 6-29
6-31. Example of Calibration Data Entry Page: HP 16346C . . . . . . . . . . 6-30
6-32. 4062F DC W/O DVM MenuPage . . . . . . . . . . . . . . . . . . 6-31
6-33. PV Test Results Data Entry Page . . . . . . . . . . . . . . . . . . . 6-32
6-34. RelayTest Results Page . . . . . . . . . . . . . . . . . . . . . . . 6-33
6-35. SMU Test Results Page . . . . . . . . . . . . . . . . . . . . . . . 6-34
6-36. VS Test Results Page . . . . . . . . . . . . . . . . . . . . . . . . 6-35
6-37. VM Test Results Page . . . . . . . . . . . . . . . . . . . . . . . . 6-35
6-38. AFU Test Results Page . . . . . . . . . . . . . . . . . . . . . . . 6-36
6-39. CMS C-G Test Results Page for HP 4280A . . . . . . . . . . . . . . . 6-37
6-40. CMS Bias Test Results Page for HP 4280A . . . . . . . . . . . . . . . 6-37
6-41. CMU84 C-G Test Results Page for HP 4284A . . . . . . . . . . . . . 6-38
6-42. CMU84 Bias Test Results Page for HP 4284A . . . . . . . . . . . . . 6-38
6-43. DC Leak Test Results Page . . . . . . . . . . . . . . . . . . . . . 6-39
6-44. Preparation Page for 4062F AC. . . . . . . . . . . . . . . . . . . . 6-42
6-45. HF Port Conguration Page . . . . . . . . . . . . . . . . . . . . . 6-43
6-46. 4062F ACTest Startup MenuPage . . . . . . . . . . . . . . . . . . 6-43
6-47. Example Page of View Result (CRT) . . . . . . . . . . . . . . . . . 6-45
6-48. Example of Printer Conguration Page . . . . . . . . . . . . . . . . 6-46
6-49. An Example Page of View Result (Printer) . . . . . . . . . . . . . . . 6-47
B-1. An Example of the Printer Conguration Page . . . . . . . . . . . . . B-1
Contents-6

B-2. Printer Conguration Softkey Map . . . . . . . . . . . . . . . . . . B-3
Contents-7

Tables
2-1. HP-IB Interface Settings . . . . . . . . . . . . . . . . . . . . . . . 2-4
2-2. HP-IB Interface Card Switch Settings . . . . . . . . . . . . . . . . . 2-4
2-3. HP-IB Interface Supported for Series 700 Computers . . . . . . . . . . 2-8
2-4. Option 701, 702, 703, and 704 Rack Mount Kit Contents . . . . . . . . . 2-10
2-5. Options 720, and 740 Rack Mount Kit Contents . . . . . . . . . . . . 2-14
4-1. Allowable Diameter Range of the Power Cable . . . . . . . . . . . . . 4-3
4-2. Maximum Current for PDU with Emergency O Unit . . . . . . . . . . 4-3
4-3. Maximum Current for PDU . . . . . . . . . . . . . . . . . . . . . 4-6
4-4. Fuse Rating for System Instruments . . . . . . . . . . . . . . . . . . 4-8
4-5. Contents of Rack Mount Kit for the HP 4142B . . . . . . . . . . . . . 4-9
4-6. Contents of Rack Mount Kit for the HP 4280A . . . . . . . . . . . . . 4-12
4-7. Contents of Rack Mount Kit for the HP 4284A . . . . . . . . . . . . . 4-16
4-8. Requirements of HP 8110A for the HP 4062F . . . . . . . . . . . . . . 4-19
4-9. Contents of Rack Mount Kit for the HP 8110A . . . . . . . . . . . . . 4-20
4-10. HP-IB Address Settings . . . . . . . . . . . . . . . . . . . . . . . 4-26
4-11. Connections b etween the Controller and the System Instruments (For series
300 computers) . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4-12. Connections b etween the Controller and the System Instruments (For Series
700 Computers) . . . . . . . . . . . . . . . . . . . . . . . . . 4-27
4-13. Connections Between Output Terminals of the HP 8110A and HF Ports . . 4-42
5-1. Required Swap Size and Memory for Series 300 Computers (Run
time
Environment) . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5-2. Required Swap Size and Memory for Series 700 Computers (Run
time
Environment) . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
5-3. File Sets for HP 4062UX/F System . . . . . . . . . . . . . . . . . . 5-7
6-1. Required Equipment for Performance Verication . . . . . . . . . . . . 6-5
6-2. Subtests of the 4062UX W/O DVM . . . . . . . . . . . . . . . . . . 6-8
6-3. Required Equipment for Performance Verication . . . . . . . . . . . . 6-25
B-1. Default Printer Conguration Settings . . . . . . . . . . . . . . . . . B-2
Contents-8

1
General Information
Introduction
This manual provides the pro cedures and information necessary to install and verify both
the HP 4062UX Semiconductor Pro cess Control System and the HP 4062F Semiconductor
Parametric Test System.
This chapter covers the installation sequence, required reference material, and equipment
required to install the HP 4062UX/F. Chapter 2 covers system controller installation. Chapter
3covers switching matrix installation. Chapter 4 explains howto integrate the system
controller, switching matrix, and cabinet-mounted instruments into a system. Chapter 5
covers software installation and customization. Finally,chapter 6 provides instructions for
verifying proper system op eration.
Use this manual after the Pre-instal lation Manual , which contains site preparation
information for Hewlett-Packard Customer Engineers who p erform the installation. Figure 1-1
shows a ow diagram of the installation sequence.
Figure 1-1. System Installation Flow Diagram
General Information 1-1

Installation Sequence
This section can help you arrange the installation pro cess of the HP 4062UX/F to get the
eective use of your time. For example, Figure 1-2 shows examples of ecient installation
sequences.
To install the HP 4062UX/F system on a new hard disk, you must install the HP-UX
system les, which need ab out 200 megabytes. It takes ab out two or three hours to load the
HP-UX system les from the cartridge tap e or digital audio tap e (DAT). Meanwhile, you
can install system hardware, such as the switching matrix, system instruments, and so forth.
If the HP-UX system software is already installed on the hard disk, you can save hard disk
initialization time and HP-UX software installation time.
Figure 1-2. Arranged Installation Sequences for HP 4062UX/F
1-2 General Information

Required Equipment
The equipment needed to install the HP 4062 follows:
Standard Screwdriver (one large, one small)
Phillips Screwdriver
Wire Stripp ers
Slip-joint Pliers
Battery-p owered Voltmeter
Utility Software
The system software contains the following utilities for checking the installation pro cess:
PROBER program Checks your prober op erations after installing the HP 4062UX/F system.
For details, see the following les:
/usr/pcs/etc/prober_check/READ_ME
check62ux A shell pro cedure that checks the system software installation of the HP
4062UX/F.
Abbreviations
Throughout the HP 4062UX/F do cumentation, the follo wing abbreviations are used to
identify the subsystems and instruments in the HP 4062UX/F system.
Abbreviation Term
SMS Switching Matrix Subsystem: consists of SWC and SWM
SWC HP 4084B Switching Matrix Controller
SWM HP 4085B, HP 4089B, or HP 4085F Switching Matrix
DCS DC Measurement Subsystem: HP 4142B Mo dular DC Source/Monitor
CMS Capacitance Measurement Subsystem
CMU Capacitance Measurement Subsystem: HP 4280A 1 MHz C Meter/C-V Plotter
CMU84 Capacitance Measurement Subsystem: HP 4284A 20 Hz{1 MHz Precision LCR
Meter
PCS Pro cess Control System
PDU Power Distribution Unit
BASIC/UX BASIC on HP-UX: the HP BASIC co ordinated to execute on HP-UX system
General Information 1-3

2
System Controller Installation
This chapter provides system controller and accessories installation information for the HP
4062UX/F system. The HP 4062UX/F system includes a system controller as follows:
HP 9000 Series 300 Mo del 360, 370, 375, 380, 382, or R/382; Model 340, or 345 for diskless
cluster conguration.
HP 9000 Series 700 Mo del 745i, 747i, and 725.
For more information on each computer or supported computer, contact your nearest HP
Sales Oce.
The following accessories are installed in your system controller, dep ending on the system
conguration:
Series 300 computers
HP 98568A, HP 98568A option 132, or HP 98570A Bac
kplane Expander.
1
HP A2246A DIO-I Bus Expander
HP 98267A/B/C, 98264A/B, 98258A/B/C, 98257A, or 98256A RAM Card(s).
1
HP 98624A HP-IB Interface Card.
2
1
Specic combinations of these items may b e included, dep ending on the HP 4062UX/F
software conguration and memory requirements.
2
Additional accessories cannot b e installed into model 340 or 345 computers because
these computer mo dels do not contain enough mechanical or electrical provisions for
additional device I/O (DIO) or DIO I I interfaces.
Series 700 computers
For instrument control
Series 745i/747i Internal HP-IB Interface Card
HP E2071B High Performance HP-IB Interface Card
For peripheral control
HP 25560A EISA HP-IB Interface Card
For complete controller and accessory installation information, refer to the Instal lation
Reference and Notes for each item.
The HP 4062UX/F system requires an HP 46084A ID Mo dule for system software security.
Installing the HP 46084A is described in this chapter.
You can install your system controller in standard system cabinet (1600 mm heigh
t) with rack
mount kits. Installing the system controller in the system cabinet is described in this c
hapter.
System Controller Installation 2-1

Unpacking
Remove the computer from its carton and check the computer accessories against the packing
list of the carton. Accessory items (add-on RAM cards, interface cards, etc.) are shipp ed
separately. Do not remove these accessories from their antistatic envelopes until you are ready
to install them into the computer.
Line Voltage Switch and Line Fuse
The computer is shipped from the factory with its line voltage selector switch set to the line
voltage in your area, and the correct line fuse installed. Before you plug the computer in,
however, check the switch setting and line fuse (b oth are lo cated at the rear of the computer)
to ensure that they are correct. For more complete line voltage selector switch and line fuse
information, refer to the Instal lation Reference manual of the computer.
2-2 System Controller Installation