HP 5527A User manual

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Note
Title & Document Type: 5527A/B Laser Position Transducer Designers Guide
Version 1.1 (Added missing schematics)
Manual Part Number: 05527-90015
Revision Date: August 1992
HP References in this Manual
This manual may contain references to HP or Hewlett-Packard. Please note that
Hewlett-Packard's former test and measurement, semiconductor products and
chemical analysis businesses are now part of Agilent Technologies.
Changes to this Manual
No changes have been made to this manual.
About this Manual
This manual is reproduced from scans of an original document and images OCR’d
with Adobe Acrobat. OCR errors may exist and as such the user of this document
should take care and use common sense when referencing this documentation.
Copyright Notice
This documentation is © Copyright 1988, 1990, 1992 Hewlett Packard/Agilent.
The scan is © Copyright 2010 by Jack Hudler.
Permission to use and redistribute this documentation for non-commercial and internal
corporate purposes is hereby granted, free of charge.
Any redistribution of this documentation or its derivates must include this copyright
notice.
You may not sell this documentation or its derivations without written consent.
You may modify this documentation as necessary, but you may not sell derivative
works based on it.
You may include this documentation with the equipment/hardware on which it is used
for the purposes of selling the equipment/hardware. If you advertise that a copy of this
documentation is included in the sale, you must state that is for “Free”.
Meaning if you want to gratuitously toss in a copy of the manual on an eBay sale, it’s
ok with me as long as you state it’s for free. No you can’t sell a digital archive of
manuals and say it includes a free copy of this documentation. You must give it away
with equipment.
I think you get the spirit of the copyright; it takes a lot of hours to scan and replicate a
manual. I just want this used in the spirit in which is it given.
Agilent if you have questions or wish to include this in your archive, please email me
[e-mail].
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HEWLETT
PACKARD
HP 5527A/B LASER POSITION TRANSDUCER
DESIGNER'S GUIDE
Including:
Laser Position Transducer Electronics
Laser Head
Laser Head
Laser Head
Laser Head
Dual Beam-Beam Splitter
33% Beam Splitter
Beam Splitter
Linear Interferometer
Retroreflector
Retroreflector
Single Beam Interferometer
Plarie Mirror Interferometer
High Stability Plane Mirror Interferometer
Beam Bender
Adjustable Mount
Adjustable Mount
Differential Interferometer
High Resolution Interferometer
Wavelength Tracker
Plarie ~irrorConverter
High Stability Adapter
Plane Mirror Reflector
Air Sensor
Material Temperature Sensor
Receiver
Receiver Cable
Laser Head Cable
Axis Board
Servo-Axis Board
PrototypingKit
Automatic Compensation Board
All rights reserved. No part of this publication may be reproduced
stored in a retrieval system, or transmitted, in any form or by any
means, electronic, mechanical, photocopying, recording, or otherwise
without prior written perlnission of Hewlett-Packard Company. Printed
inthe United States of America.
O Copyright Hewlett-Packard Company 1988, 1990, 1992
5301
STEVENS CREEK BOULEVARD, SANTA CLARA, CA 95052
PROPRIETARYINFORMATION
This manual contains proprietary information of the Hewlett-Packard
Company. This information may not be used or reproduced without
the express written permission of the Hewlett-PackardCompany.
I MANUAL PART NUMBER: 05527-90015 PRINTED: AUGUST 1992
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CERTIFICATION
Hewlett-PackardCompanycertifiesthat this product met its publishedspecificationsat the time ofshipment
from the factory. Hewlett-Packard further certifies that its calibration measurements are traceable to the
UnitedStates NationalBureauof Standards, to the extent allowedbythe Bureau's calibrationfacility, andto
the calibration facilities of other International Standards Organization members.
WARRANTY
This Hewlett-Packardinstr~~mentproduct is warranted against defects in material and workmanshipfor a
periodof oneyear from dateof shipment. Duringthe warranty period, Hewlett-PackardCompanywill, at its
option, either repair or replace productswhich prove to be defective.
For warranty service or repair,this productmust be returned toaservicefacilitydesignatedbyHP. Buyershall
prepay shipping charges to HP and HP shall pay shippingcharges to returnthe productto Buyer. However,
Buyer shall pay all shipping charges, duties, and taxes for products returned to HP from another country.
HP warrants that its software and firmware designated by HP for use with an instrument will execute its
programming instructions when properly installed on that instrument. HP does not warrant that the
operation of the instrument, or software, or firmware will be uninterrupted or error free.
LIMITATION OF WARRANTY
The foregoing warranty shall not apply to defects resultingfrom improper or inadequate maintenanceby
Buyer, Buyer-suppliedsoftwareor interfacing, unauthorizedmodificationor misuse,operation outsideof
the
environmental specifications for the product, or improper site preparationor maintenance.
The design and implementation of any circuit used on this product
is solely the responsibilityof the buyer.
Hewlett-PackardCompany does notwarrantthe Buyer's circuitryor malfunctionsofthe PrototypingKitor HP
10932A Axis Board that result from the Buyers circuitry. Inaddition, HP does notwarrant any damage that
occurs as a result of the Buyer's circuit, including but not limited to the following:
1. HP 5507A Power Supply limitationsare exceeded.
2. Component height/protrusions restrictions are exceeded.
3. Maximum input voltage on the digital lines are exceeded.
NO OTHER WARRANTY
IS EXPRESSED OR IMPLIED. HP SPECIFICALLY DISCLAIMS THE IMPLIED
WARRANTIES OF MERCHANTABILITYAND FITNESS FOR A PARTICULAR PURPOSE.
EXCLUSIVE REMEDIES
THE REMEDIES PROVIDED HEREIN ARE BUYER'S SOLE AND EXCLUSIVE REMEDIES. HP SHALL NOT BE
LIABLE FOR ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES,WHETHER
BASED ONCONTRACT, TORT, OR ANY OTHER LEGAL THEORY.
ASSISTANCE
Product maintenance agreements and other customer assistance agreements are available for Hewlett-
Packardproducts.
Forany assistance, contact your nearest Hewlett-PackardSales andService Office.Addresses areprovidedat
the back of
this manual.
4/81 PGI-8WOC 10/79
.
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ELECTRICAL SAFETY CONSIDERATIONS
GENERAL CAUTION
n
The CAUTION sign denotes a hazard. Itcalls
attentionto an operating procedure, practice,
This productand relateddocumentation mustbereviewedfor or the like,which, if notcorrectlyperformedor
familiarization with safety markings and instructions before adhered to, could result in damage to or
operation. destructionof part oral1of the product.Do not
proceed beyond a
CAUTION sign until the
This product is a Safety Class I instrument
i provided with a indicated conditionsare fully understood and
protective earth terminal
1.
met.
BEFORE APPLYING POWER
Verify that the product is set to match the available line
-1
voltage and the correct fuse is installed. Refer to installation
Any interruption of the protect~ve I grounding) conductor
Section. linside or outside the instrument1 or disconnecting the
protective earth terminal will cause a potential shock hazard
SAFETY EARTH GROUND that could result in personal injury. grounding one
conductor of a two conductor outlet is not sufficient
An uninterruptiblesafetyearth groundmust be providedfrom protection.
the mains power sourcetothe productinputwiringterminals,
power cord, or supplied power cord set. Whenever it
IS likely that the protection has been impaired,
the instrument must be made inoperative and be secured
SAFETY SYMBOLS
agalnst any unintended operation.
If this instrument
IS to be energized via an autotransformer
A
Instruction manual symbol: the product will for voltage reduction1 make sure the common terminal is
be marked with this symbol when it is neces- connected to the neutral
earthed polel of the power source.
sary for the user to refer to the instruction
manual. Servicing instructions are for use by service-trained
personnel only. To avoid dangerous electric shock, do not
perform any servicing unless qualified to do so.
$ Indicates hazardous voltages. Adjustments described in the manual are performed with
power supplied to the instrument while protective covers are
removed. Energy available at many points may,if contacted,
1 Indicates earth igroundi terminal. result in personal injury.
- -
Capacitors inside the instrument may still becharged even if
the instrument has been disconnected from its source of
p&-1
The WARNING sign denotes a hazard. Itcalls supply.
attention to a procedure, practice, or the like,
which, if not correctly performed or adhered
For continued protection against fire hazard, replacethe line
to, could result in personal injury. Do not fuseis only with 250V fuseis)of the samecurrent rating and
proceed beyond a
sign until the type (forexample, normal blow,time delay, etc.1. Do not use
indicated conditions are fully understood and
repalred fuses or short circuited fuseholders.
met. From 1.2kilovolts to 12kilovolts dc is present ontheanode of
the laser tube in the 5517A, 55178, and 5518A. Exercise
extreme caution when working inside the instrument. The
highvoltage could cause seriouspersonal injuryifcontacted.
Any adjustments performed should be by service trained
personnel only.
LASER HEAD SAFETY CONSIDERATIONS
CAUTION
D
LASER RADIATION IS EMITTED FROM THE APERATURE OF THE 5518A, 5517A, AND 55178 LASER HEADS AS
ILLUSTRATED ON THE FOLLOWING PAGE. DO NOT STARE INTO BEAM. THIS PRODUCT IS A CLASS II LASER
PRODUCT CONFORMING TO FEDERAL BUREAU OF RADIOLOGICAL HEALTH REGULATIONS 21 CRF 1040.10 AND
1040.11 AND TO INTERNATIONAL LASER SAFETY REGULATIONS. THE MAXIMUM RADIANT POWER OUTPUT IS 1
MILLIWATT, THE PULSE SPECIFICATION IS CONTINUOUS WAVE, THE LASER MEDIUM IS HELIUM-NEON, AND THE
WAVEFLENGTH IS 632.991 NANOMETRES.
LASER RADIATION IS ACCESSIBLE WHEN THE 5518A AND 5517A COVER (OR 55178 COVERS) ARE REMOVED AND
THE TEST-NORM SWITCH IS IN THE TEST POSITION.
USE OF CONTROLS OR ADJUSTMENTS OR PERFORMANCE OF PROCEDURES OTHER THAN THOSE SPECIFIED
HEREIN MAY RESULT IN HAZARDOUS RADIATION EXPOSURE.
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LASER HEAD SAFETY LABELS
HP5517A, HP55178, and HP 5518A
LASER RADIATION
(ALSO WHEN OPEN AND INTERLOCK
FAILED OR DEFEATED)
DO NOT STARE INTO BEAM
MAXIMUM OUTPUT
1 mw
PULSE SPEC continuous wave
LASER MEDIUM hellurn neon
CLASS II LASER PRODUCT
A51 P ,I< 111 rutz5 0N Fl
AVOln EXP(
C ill 7t,
Ba"
--
P
I
HP5517A HP5517B HP5518A
-. -
VRlllll x,
I
9
9
0
i
I
m
1 w- -
r
w
- -Alp-
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HP5527NB Designer's Guide
Table of Contents
TABLE OF CONTENTS
Section Description Page No .
Appendix
A
B
C
D
E
F
C
General Information ............................. 1.1
HP Laser Interferometry
........................... 2.1
HP 5507NB Inputsand Outputs for PositionSensinglControl(Hardware)
. . 3.1
SofhvareControl of the HP5527NB Laser PositionTransducer
....... 4-1
Subsection A Introduction
....................... 4A-I
Subsection B HP-IB Interface ..................... 4B-1
Subsection D HP 10932AAxis Board ................. 4D-1
Subsection
E HP 10934A A-Quad-B Axis Board ............ 4E-1
.............. Subsection F HP 10936A ServoAxis Board 4F-1
............. Subsection I HP 10941A Prototyping Board 41-1
Subsection
K HP 10946BAuto Compensation Board ......... 4K-1
Subsection M Operation with HPComputers
............ .4M.l
Important Notes on Installation and Accuracy
................ 5-1
Installation and OpticalAlignment ...................... 6.1
System Theory and Troubleshooting
..................... 7-1
Specifications ................................. 8.1
HP 5507NB Mnemonic Summary
...................... A.1
HP5507NB Error MessageSummary ..................... B-I
Syntax Diagramsand Numeric RepresentationExamples
........... C-I
HP-IB Basics ................................ D-I
Wavelength-of-Light Compensation ..................... E-1
Linear Thermal ExpansionCoefficientsof Metals andAlloys ......... F-I
Angular and StaightnessOptics ........................ G.1
Index ..................................... 1-1
ManualChanges ............................. .MC.l
NOTE
Detailed contents listings are present at the beginning of each Section or
Appendix
.
All HP 10934A index entries are located at the back of the index under
HP 10934A
.
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SECTION I
GENERAL INFORMATION
SECTION I CONTENTS
Manual Description .................................. 1-1
Manual Contents and Organization
.......................... 1-1
HowTo Locate Information
............................. 1-1
System Description
.................................. 1-2
Widespread Applications
.............................. 1-2
High-PrecisionMeasurements ........................... 1-2
OpticsAnd Electronics To MeetMost Requirements
................ 1-3
Key Featuresof HP 5507A Laser PositionTransducer Electronics
..........
1-4
ExpandingCapabilities
............................... 1-5
Easy Installation
................................... 1-5
Proven Reliability
.................................. 1-5
Low Maintenance Requirements
.......................... 1-6
Worldwide RepairService
.............................. 1-6
Equipment Description
................................ 1-6
Laser Heads
..................................... 1-6
HP 5517A Laser Head
.............................. 1-6
HP 551
7B/C Laser Head ............................. 1-7
HP 5518A Laser Head
.............................. 1-7
Electronics
...................................... 1-8
HP 5507NB Laser PositionTransducer Electronics
............... 1-8
HP 10934AA-Quad-B Axis Board (HP 5507NB Option 034)
.......... 1-8a
HP 10932NBAxis Board (HP 5507NB Option 032)
............... 1-9
HP 1
0936NB Servo-Axis Board (HP5507NB Option 036) ........... 1 -10
HP 10941A Prototyping Kit
............................ 1-11
HP 10946BlCAutomatic Compensation Board (HP 5507NB Option 046)
.... 1-12
HP 10780B/C/F Receiver
............................ 1-13
HP 10751
A/B Air Sensor ............................. 1-13
HP 10757NB/CMaterial Temperature Sensor
.................. 1-14
Optics
........................................ 1-14
HP 10702A Linear Interferometer (andOption 001 Windows) and
........................
HP 10703A Retroreflector 1-15
HP 10722A PlaneMirror Converter
....................... 1-15
HP 10705ASingle Beam Interferometer and HP 10704A Retroreflector
..... 1-15
HP 10706A Plane Mirror Interferometer
..................... 1-16
HP 10706B HighStability PlaneMirror Interferometer
.............. 1-16
........................
HP 10723~~ighStability Adapter 1-17
...................
HP 10716A High Resolution Interferometer 1-17
HP 1
0724A PlaneMirror Reflector ........................ 1-18
...................... HP 10715A Differential Interferometer 1-18
HP 10700A 33% Beam Splitter. HP 10701A50°/~Beam Splitter. and
........................ HP 10707A Beam Bender 1-19
...................... HP 10567~~ualBeam Beam-Splitter 1-20
HP 1071
0A and HP 10711A Adjustable Mounts ................. 1-20
.........................
HP 10717A wavelength Tracker 1-21
.......................................
Cables 1-22
.........................
HP 10790A/B/C Receiver cable 1-22
........................ HP 10793A/B/C Laser ~eadCable 1-22
.................................
A-Quad-B Cables 1-23
.................................
Interface Cables 1-23
..............................
Internal JumperCables 1-23
.......................
Configuring a Laser Transducer System 1-23
.................................
Safety Classification 1-26
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HP 5527A
General lnformation
SECTION 1
GENERAL INFORMATION
MANUAL DESCRIPTION
This manual is intended for system designers concerned with designing and installingthe HP 5527A
Laser Position Transducer into precision measuring or positioningequipment. Typical applications are
for equipment used in the integrated circuit, disk drive, and precision machining industries.
MANUAL CONTENTSAND ORGANIZATION
This manual includes information necessary to unpack, prepare, design, and install the equipment
into a variety of applications. The manual
is structured as follows:
SECTION
I, GENERAL INFORMATION. This section explains how to use the manual and
gives the designer a quick overview of the system, its intended use, composition, capabilities,
limitations, and system performance. Major topics covered are: system description, equip-
ment description, configurationguidelines, and safety classification.
SECTION
11, HP LASER INTERFEROMETRY. This section describes the fundamentals of HP
Laser Interferometry including an overview of the HP 5527A Laser Position Transducer, fun-
damental measurement concepts, measurement components, multiaxis measurement sys-
tems, and electronic components. The intent of this section is to provide the background
necessary to understand information in the subsequent sections.
SECTION
Ill, HP 5507A INPUTS AND OUTPUTS FOR POSITION SENSING/CONTROL
(HARDWARE).This section gives an overview of the electronics hardware and describes how
to use the HP 5507A inputs and outputs for position sensing or control. Topics included are
HP-IB, automatic compensation, axis board, servo-axis board, prototyping kit, cabling,
electronics interface, and how to integrate the laser system into the overall servo loop.
SECTION IV, CONTROLLING THE HP 5527A SYSTEM (SOFTWARE). The section covers
how to control the HP 5527A system. Major topics covered include system considerations,
controller interfacing, and programming.
SECTION V, IMPORTANT NOTES ON INSTALLATION AND ACCURACY. This section
provides the information necessary to correctly design the system into an application. Major
topics covered are proper installation of the optical components and accuracy considerations.
SECTION VI, INSTALLATION AND OPTICAL ALIGNMENT. This section covers installation
procedures for the electronics, laser head, receiver and optics. Also covered are the align-
ment procedures for the different measurement optics.
SECTION VII, SYSTEM THEORY AND TROUBLESHOOTING. Explains the system theory as a
background to system troubleshooting. The troubleshooting
is designed to isolate trouble to
either HP equipment of other system equipment. The troubleshooting can also determine
which HP module is faulty.
SECTION VI11, SPECIFICATIONS. This section contains the detailed specifications for the sys-
tem and the individualcomponents.
-
HowTo Locate Information
Three methods are used to assist in locatinginformation: a table of contents, a tab system that divides
the manual into sections, and an alphabetical index of subjects.
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HP 5527A
General Information
The table of contents is located in front of Section
I and lists all first, second, and third paragraph
headings, all tables, and all figures used throughout the manual.
The tab system divides the contents of the manual into sections. In addition, a table of contents for
the section
is included on the back of each tab divider.
The index
is located at the back of the manual and includes both alphabetical listings of subjects and
numerical listings of product model numbers.
SYSTEM DESCRIPTION
The HP 5527A Laser Position Transducer (Figure 1-1) is a linear displacement measuring device that
provides laser interferometer accuracy to builders and users of precision positioning equipment.
Designers can select from a variety of optics and electronics using only those componentswhich solve
specific measurementor control problems. With a single laser head, up to six axes of motion and one
Wavelength Tracking Compensator axis may be monitored simultaneously. This flexibility benefits
both end users and original equipment manufacturers (OEM's).
The HP 5527A system consists of a two-frequency laser source, measurement optics, and electronics.
Before the laser beam is emitted from the laser head, a portion of it
is sampled to determine the dif-
ference in frequency between the two optical components. This difference frequency is called the
Reference Frequency. The beam emitted from the laser head
is directed through a configuration of
optics and then to a receiver. The receiver provides a Measurement Frequency, which when com-
pared to the Reference Frequency from the laser head, yields displacement information. In systems
equipped with Wavelength Tracking Compensation, the above comparison yields wavelength infor-
mation which
is used to update the system compensation number. Three laser sources are available:
the HP 5517A, HP 5517B, and HP 5518A Laser Heads. The HP 5527 system uses the HP 107XX
series of optics. The electronics are the HP 109XX series of boards and are housed in the HP 5507A
Laser PositionTransducer Electronics chassis. These boards are also available as HP 5507A options.
WIDESPREAD APPLICATIONS
All machines requiring an accurate positioning feedback system are candidates for the HP 5527A
Laser Position Transducer. Typical applications are:
a. Integratedcircuit manufacturers(wafersteppers, projectionaligners, electron beam machines,
X-ray machines, and reticule/mask inspection equipment).
b. Disk manufacturing (magnetic and optical servo track writers, media checkers, and head
positioningtesters).
c. Precision machining(coordinate measuringmachines).
d.
R & D applications(researchtoolswhere high precisionpositionmeasurementsare required).
HIGH PRECISIONMEASUREMENTS
The wavelength of light from the laser head serves as the length standard for the HP 5527A transducer
system. Usingthe HP 5517A or 5518A, the wavelength accuracy (in a vacuum)
is 0.1 parts per million
(lxl0-') or 0.1 micrometreper metre (0.1 microinch per inch). This accuracy remains in calibration in-
definitely. For non-vacuum applications, the wavelength accuracy depends on how accurately the en-
vironmentalparametersare known. The basic resolutionis onequarterwavelength, or 0.158 micrometres
(6.23 microinches). Using optical and electronic resolution extension, the resolution
is increased to 2.5
nanometre(0.1 microinches).Nominalopticalmeasurement rangefor the system is 40 metres (130feet).
For multiaxis configurations,the sum of upto
6 axes should meet this range specification.
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HP5527NB
General Information
HARDWARECOMPATIBILITY
Except for differences in laser tubes, laser beam difference frequencies, and measurement velocity
capabilities allowed, the HP 5517C Laser Head is identical to the HP 5517B Laser Head. The primary
difference between these two Laser Heads is that the frequency difference betweenthe two laser beam
frequencies of the HP 5517C laser beams is approximately 2.8 MHz, versus the 2.1 MHzdifference in
the HP 5517B. The larger frequency difference allows measurements involving motion to be made at
highervelocities (slewrates). (Velocity is an HP5527NB system Measurement Capability specification.)
The higher difference frequency of an HP 5517C Laser Head does not allow its use with HP 5527A
electronics in making a measurement.
HP5527B versus HP5527A
Inorder to handlethe larger frequencydifferenceof the HP 5517C, changeswere madeinthe HP5527A,
and its Model Number was changed to HP 5527B. An HP 5527B can replace an HP 5527A, but the
reverse is notalways true.
For makinga measurement, an HP 5517B (lower frequency) Laser Head can be usedwith an HP5527A
or an HP55278.
For makinga measurement, an HP5517C (higherfrequency) Laser Head can be used with an HP5527B,
but notwith an HP 5527A.
TEST, ADJUSTMENT,AND TROUBLESHOOTING PROCEDURES
When an HP 5517B is used with an HP 5527B, installation, operation, and indications for procedures
described inthis manual are the same as with an HP5527A.
If an HP 5527B is notavailable (for use as a power source for an HP5517C), an HP5527A can be used.
The test, adjustment, and troubleshooting procedures in this manual do not depend on or require a
particular laser frequency difference. Inthese procedures, test points, adjustment points, and expected
test results for an HP 5517C arethe same as those for an HP 5517B, except where noted.
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HP 5527NB
General Information
Optics And ElectronicsTo Meet Most Requirements
TheHP 5527NB Systemprovides five optical techniqilesfor making linear measurements:
a) The HP 10702A Linearinterferometerfor standard configurations.
b) The HP 10705A Single Beam interferometerfor low mass and space-limited applications (also
useful for non-contactapplications).
c) Plane mirror interferometers for monitoringthe motion of
X-Y stages. HP offers 3 plane mirror
interferometers; HP 10706A for non-critical applications, HP 10706B for high-stability, and
HP 10716A for increased resolutionand high-stability.
d) The HP 10715A and HP 10719A Differential interferometersfor high-stability, minimum dead-
path measurementsand X-Y stages.
e) The HP 10721A, HP 10735A, and HP 10736A Multi-Axis interferometers for measuring linear
position and angular information si~nultaneously(see the Laser and Optics Users' Manual for
detaiIs).
The HP 5527A/B System provides three commclnication options in addition to the standard HP-IB
interface:
a) Two RS-232C serial interfaces are available when the HP 10934A A-Quad-B Axis board
is
installed.These interfacessupport baudrates up to 19.2 kHz.
b) An 8-bitparallel interface
is availablewhenthe HP 10934AA-Quad-B Axis board is installed. It
can transfer 2000 bytes per second.
c) A 16-bitbinary interface
is availablewhenthe HP 10936NBServo-Axisboard is installed. It can
output position data at rates upto 10 kHz.
TheHP 5507NB provides four electronic output options in addition to theposition output capability
included in all systems (environmentally compensated position data in mm, inches or fraaional-
wavelengthcounts):
a) The HP 10936NBServo-Axisboardprovidesservo outputsfor closed-loopsystemcontrol. Motor
drive outputs include + 1OV analog, pulse-width modulation, or 16-bit digital.
b) The HP 10934A A-Quad-B Axis board provides change in position information as either
A-Quad-B signals or UpIDown pulses. These outputs are useful in CNCINC machine-tool
applications.
c) The HP 10932NBAxis boardprovidesposition-errorinformation(currentpositionminusdesired
position) as a 32-bit word. This output is useful for custom servo electronics and high data rate
data collection. The boardalso generates an analogvelocity signal.
d) The HP 10941A Prototyping Kit provides a platform for integrating custom circuits into the
HP 5507NB. An included cable connectsthe outputs from the HP 10932NB Axis boardto the
prototypingboard. Usethe special cableC46 59995 to obtain the position error signal from the
HP 10934AA-Quad-B Axis board and the HP 10936NB Servo-Axis board.
The HP 5527NB System provides two environmental compensation techniques to maintain high
accuracyduringchangingatmosphericconditions:
a) The HP 10751NBAir Sensor, which measuresatmospherictemperature, pressureand humidity,
providesabsolutecompensationinformation.
b) The HP 10717AWavelengthTracker, which optically measuresany changes inlaserwavelength
caused by atmospheric conditions, provides high accuracy differential (relative)compensation
information.
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HP 5527NB
General Information
Key Featuresof the HP 5507AlB Laser PositionTransducer Electronics
The HP 5507NB offershighperformanceand reliability,ease-of-use,and specificationswhich exceed
most requirementsfor precisioncontrolsystems. Majorfeatures are:
CLOSED-LOOPSERVO ELECTRONICS. The Servo-Axis board (HP 10936NB or HP 5507AJB
Option 036) provides hardware and software to implementacompleteclosed-looppositioning
system upto the amplifier and motor.Two servo algorithms are available, plusthe capabilityto
downloadyour own custom algorithm.A key feature
is the ability to changevarious parameters
by computer, and quickly determinethe servo response, thus speedingsystem optimization.
SIMPLE INTERFACE TOCUSTOMSERVO. The Axis Board(HP10932NBor HP 5507NB Option
032) has many features that simplifythe interfaceto custom servo electronics. Amongthese are
a data valid line, avariable-width, high-speed, position error word, an adjustable null setting,
and an analogvelocity output.
SIMPLE INTERFACE TO A-QUAD-B SERVO. The A-Quad-B Axis Board (HP 10934A or HP
5507NB Option 034) has features similar to the HP 10932NB and also provides A-Quad-B or
UpIDown pulse output signals for use with CNCINC machine-toolapplications.
POSITION INFORMATION. English, Metric or fractional-wavelength position information for
distance monitoringapplications
is availablefromthe Axis Board, theA-Quad-BAxis Board, and
the Servo-Axis Board.
RESOLUTION. The HP 5507NB gives high resolution measurements of either 2.5, 5, or 10
nanometers(dependson optics).
SLEW RATE. The HP 5507NBaccommodatesvelocitiesupto 700mmlseconddependingonthe
optics and laser headused.
HP-IB CONTROLLABLE. All configurationsof the HP 5507NB use HP-IBto greatly simplifythe
task of data transfer and controllingthe electronics.
BINARY INTERFACE. Systems equippedwith the HP 10936NBcan be controlledthroughahigh
speed 16-bitbinary interface.
SERIAL INTERFACE. Systems equipped with the HP 10934A can be controlled through an
RS-232Cserial interface.
PARALLEL INTERFACE. Systems equipped with the HP 10934A can be controlled through an
addressable 8-bit parallel interface.
INTEGRAL POWER SUPPLIES. The HP 5507NB has abuilt-in power supply to powerthe Laser
Head (HP 5517NB/C), the 10780C/F Receivers, and the HP 5507NB electronics. Additional
power
is availablefor non-HPservo electronics.
SELF-CONFIGURATION. The HP 5507NB performs aself-configurationduring power-up. The
HP-IBBoardrecognizeswhichcompensationandfunctionboardsareinplace,thusaccommodat-
ingany system configuration.
AUTOMATIC COMPENSATION. The HP 10946BlC receives atmospheric data from the
HP 10751
NB Air Sensor (which yields absolute wavelength-of-light information) andlor the
HP 10717A Wavelength Tracker (whichyields relativewavelength-of-lightinformation), and/or
materialtemperaturefrom HP 10757NBlCMaterialTemperatureSensors. Usingthese inputs, the
HP 10946BlCprovides a correction factor to the controllerto compensatefor changingatmos-
pheric conditionsand thermal expansion or contraction of machineor workpiece.
REAR PANEL CONNECTORS. All connectionsto the HP 5507NB are through connectorsonthe
rear panel of the instrument. This simplifies connections to the instrument and improves the
reliability ofthe connections.
NUMBER OF FUNCTION BOARDS. The HP 5507NB accommodatesup to six function boards
inadditionto the HP-IB boardand the Automatic Compensationboard.
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HP 5527NB
Generalinformation
SELF-TESTING. The HP 5507NB has been designed with extensivesystem level self-tests.
FAN COOLING. The HP 5507NB package includes an integral cooling fan to help minimize
internal temperature rise, thus increasingreliability.
EM1 COMPLIANCE. The design of the HP 5507NB packagekeeps EM1 problemsto a minimum.
UPGRADEABILITY. The HP 5507NB design allows for easy addon or upgradeof new functions.
EXPANDINGCAPABILITIES
HP is engaged in an ongoing development program to increase the capabilities of the Laser Position
Transducersystem. Forthe latestinformation onavailableaccessoriesandoptions, consultyour nearest
HP sales office. A list of HP Sales and Service Offices is locatedat the back of the manual.
EASY INSTALLATION
The Laser PositionTransducer system is specifically designed for ease of installation by the OEM or
end-user. It is modular and simple in concept. Optical and electronic modulesare small in size and
ruggedly constructed for easy machinemounting.
Although the laser source generates some heat, it can be located well away from the measurement
area. This isolation preventsdistortion of thermally sensitive components. A small beam of light is all
that connectsthe laserto the measurement area.
PROVEN RELIABILITY
Many of the components of the HP 5527NB Laser Position Transducer are the same reliable designs
used in previous HP laser systems, which have logged many thousands of instrument hours of
demanding usage.
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HP 5527NB
General Information
LOW MAINTENANCE REQUIREMENTS
Since there are no moving parts, the Laser Position Transducer requires very little maintenance. All
machine-mounted partsare ruggedlydesignedto ensure longlife. The laser head has excellent reliability,
and remains in calibration indefinitely. When used in conjunction withone another, the air and material
temperature sensors, and the HP 109468 require periodic (yearly)calibration. The HP10946B requires
nocalibration when its only input
is from the HP 10717A.
The major components of the Laser Position Trnasducer system are easy to replace. When repairs are
required, the modular design of the laser head and the electronics allows for rapid replacement of the
defective module, thus minimizing down-time.
Worldwide Repair Service
When purchasing a Hewlett-Packard Laser Position Transducer you receive assurance of continued
performancetothe publishedspecifictions. To assure prompt responsefor service assistance, we maintain
aworldwide network of HPservicecenters. You are never far from qualified service assistance.
Equipment Description
Laser Heads
The wavelength of lightfrom the laser head is used as the length standardfor the HP5527A transducer
system. The head generatesacoherent collimated light consistingof two orthogonally polarizedfrequency
components.
HP offers four models of laser heads (HP 5517A, HP 5517B/C, and HP 5518A) to fill a variety of
requirements. The HP 5517B/C is a smaller package than the larger HP 5517A or the HP 5518A. The
HP5518A is similar to the HP551
7A except that an internal receiver is included.
HP 551 7A LASER HEAD
The HP5517A Laser Head (Figure 7-2) is supplied with 3 MountingScrews, M8 x1.25 x25 rnm, HPPart
Number 0515-0798. Laser Head Cable HP 10793A/B/C is availableas an accessory.
Figure 7-2.
HP 55 7 7A Laser Head
1-6
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HP5527AlB
General Information
HP 551 7BlC LASER HEAD
The HP5517B/C Laser Head (Figure 7-3) is supplied witha Test Polarizer(HP Part Number 1000-0616).
Two cables are available as accessories: the HP 10791A/B/C Power Supply/Reference Cable, which
connectsthe laser headtothe HP 5501A system electronics, and the HP 10793NB/C Laser HeadCable,
which connectsthe laser headtothe HP5527NB system electronics (i.e., HP5507NB). The HP5517C,
HP 5517B, and HP 5517A are similar with respect to their laser beam polarizations and current
requirements. The HP 5517C has the highest reference frequency of the laser heads, allowing fastest
measurement velocities (slew rates). The HP 551
78 reference frequency is lower than that of the HP
5517C, buthigher than that of the HP5517A or the HP5518A.
Figure 7 -3. HP 55 7 7BIC Laser Head
HP 551M LASER HEAD
The HP5518A Laser Head (Figure 7-4) is supplied with 2 MountingScrews, M8 x 1.25 x 25mm, HPPart
Number 0515-0798 and a Leveling Foot and Locking Nut, HP Part Numbers 05518-20316 and
05518-20317. Laser Head Cable HP 10793NB/C is available as an accessory. The HP 5518A is similar
tothe HP5517A except that an internal receiver is included.
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HP 5527NB
General Information
1
Figure 7-4. HP5578A Laser Head
Electronics
The electronicsavailableincludethe HP 5507NB Laser PositionTransducer Electronics, HP 10932AAxis
Board (Option032), HP 10936AServo-Axis Board (Option036), HP 10780BReceiver, HP10751NBAir
Sensor, and the HP 10757NBlCMaterialTemperature Sensor.
HP 5507AIB IASER POSITIONTRANSDUCER ELECTRONICS
The HP 5507NB Laser PositionTransducer Electronics(Figure 7-5)consists of a mainchassis, power supply,
an HP-IB board, and plug-in slots for up to six function boards plus the HP 109468 Automatic
Compensation board.
The HP-IB board is the primary data channel between HP 5507NB function boards and an external
controller. It is designed to meet IEEE-488, IEEE-728, and IEEE-P754 standards for general purpose
instrument programming.
Functionboards can befactory installedby orderingthe HP 5507NB with the desired number of options.
I I
1
I
Figure 7-5. HP5507AIBLaser PositionTransducer Electronics
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