HP 5501A Service manual

Errata
Title & Document Type: 5501A Laser Transducer System OP/SRV
Manual Part Number: 05501-90021
Serial Prefixes: 1948A
Revision Date: January 1980
HP References in this Manual
This manual may contain references to HP or Hewlett-Packard. Please note that
Hewlett-Packard's former test and measurement, semiconductor products and
chemical analysis businesses are now part of Agilent Technologies.
Changes to this Manual
No changes have been made to this manual. All pages are scanned at 300 DPI
or greater. About this Manual
This manual is reproduced from scans of an original document and images
OCR’d with Adobe Acrobat. OCR errors may exist and as such the user of this
document should take care and use common sense when referencing this
documentation. Copyright Notice
This documentation is © Copyright 1980 Hewlett Packard and © Copyright 2006,
Jack Hudler, [email protected].
Permission to use and redistribute this documentation for non-commercial and
internal corporate purposes is hereby granted, free of charge.
Any redistribution of this documentation or its derivates must include this
copyright notice.
You may not sell this documentation or its derivations without written consent.
You may modify this documentation as necessary, but you may not sell
derivative works based on it.
You may include this documentation with the equipment/hardware on which it is
used for the purposes of selling the equipment/hardware. If you advertise that a
copy of this documentation is included in the sale, you must state that is for
“Free”.
Meaning if you want to gratuitously toss in a copy of the manual on an eBay sale,
it’s ok with me as long as you state it’s for free. No you can’t sell a digital archive
of manuals and say it includes a free copy of this documentation. You must give
it away with equipment.
I think you get the spirit of the copyright; it takes a lot of hours to scan and
replicate a manual. I just want this used in the spirit in which is it given.
Agilent if you have questions or wish to include this in your archive, please email
me.

Laser Trans~licer Syste~~i
i

This product has beendesignedandtestedaccordingtolnternationalSafetyRequirements. To ensuresafe
operation andto keep the product safe, the information, cautions, and warnings inthis manualmust be
heeded. Refer to Section
7 for general safety considerations applicable to this product.
Hewlett-Packard Company certifies that this product met its publishedspecifications at the time ofship-
ment from the factory. Hewlett-Packard further certifies that its calibration measurements are traceable
to the UnitedStates NationalBureauofStandards, totheextent allowedbytheBureau's calibrationfacility,
andto the calibration facilities of other lnternational Standards Organization members.
WARRANTY
This Hewlett-Packard product is warranted against defects in materials and workmanship for a period of
90 days from date of shipment, except that in the case of certain components listed in Section 1 of this
manual, this warranty shall be for the specified period. Duringthe warranty period, HP will, at itsoption,
either repair or replace products which prove to be defective.
Warranty serviceof this product will beperformedat Buyer's facility at nocharge within HP servicetravel
areas. Outside HP service travel areas, warranty service will be performed at Buyer's facility only upon
HP's prior agreement and Buyer shall pay HPJsround trip travel expenses. Inall other cases, products
must be returned to a service facility designated by HP.
For products returned to HPfor warranty service, Buyer shall prepay shippingcharges to HP and HP shall
pay shipping charges to returnthe producttoBuyer. However, Buyershall payallshippingcharges, duties,
and taxes for products returnedto HP from another country.
LIMITATION OF WARRANTY
The foregoing warranty shall not apply to defects resulting from improper or inadequate maintenance
by Buyer, Buyer-suppliedsoftware or interfacing, unauthorized modification or misuse, operationoutside
of the environmental specifications for the product, or improper site preparation or maintenance.
NO OTHER WARRANTY
IS EXPRESSED OR IMPLIED. HP SPECIFICALLY DISCLAIMS THE IMPLIED
WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.
EXCLUSIVE REMEDIES
THE REMEDIES PROVIDED HEREIN ARE BUYER'S SOLE AND EXCLUSIVE REMEDIES. HP SHALL NOT
BE LIABLE FOR ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES,
WHETHER BASED ONCONTRACT, TORT, OR ANY OTHER LEGAL THEORY.
ASSISTANCE
Product maintenance agreements and other customer assistance agreements are available for Hewlett-
Packardproducts.
For any assistance, contact your nearest Hewlett-PackardSales andServiceOffice. Addresses areprovided
at the back ofthis manual.

L HEWLETT
PACKARD
Manual Part No. 05501-90021
MicroficheNo. 05501-90022 Printedin
U.SJ
OPERATING AND SERVICE MANUAL
LASER TRANSDUCER SYSTEM
SERIAL PREFIXES
This manual applies to 5501A Laser Transducer Systems with
serial prefix 1948A. For serial prefixes above 1948A, a change
sheet
is included with the manual. For serial prefixes below
1948A, refer to Appendix E, Backdating.
Copyright HEWLETT-PACKARDCOMPANY 1976
5301 STEVENS CREEK BLVD., SANTA CLARA, CALIF. 95050
Printed: JAN1980

TABLE OF CONTENTS
Section Title Page
GENERAL INFORMATION .......................................... 1-1
1.1 What the System Manual Covers ............................. 1-1
1.2 Section I. General Information .............................. 1-3
......................
1.3 Section II. Laser Transducer and Optics 1-3
1.4 Section
Ill. System Electronics ............................... 1-4
1.5 Section IV. Programming
.................................... 1-4
1.6 Section V. Installation and Checkout
......................... 1-5
1.7 Section VI. Troubleshooting
................................. 1-5
1.8 Howto Use All of the Manuals
.............................. 1-6
1.9 5501A Laser Transducer System Specifications
................. 1-8
1 . 10 5501A Laser Transducer System Theory of Operation .......... 1-8
1.11 Typical Applications and Measurements ...................... 1-9
1 . 12 Configuring a 5501A Laser Transducer System
.................
1-10
................................................
LASER ANDOPTICS 2-1
............................................... 2.1 Introduction 2-1
............................... 2.2 Overview of Laser and Optics 2-2
........................
2.3 Fundamental Measurement Concepts 2-2
............................. 2.4 Multiaxis Measurement Systems 2-5
.................................. 2.5 Measurement Components 2-5
2.6 Degrees of Freedom
...................................... 2-6
...............
2.7 General Considerations for MountingOptics 2-6
...................................
2.8 5501A Laser Transducer 2-6
...................
2.9 Splitting and Bending Optics (Figure 2-9) 2-10
2.10 Measurement Optics
..................................... 2-11
............................... 2.19 Typical Mountingof Optics 2-21
2.20 10780A Receiver
........................................... 2-24
.................................... 2.21 Accuracy Considerations 2-24
............................
2.22 Velocity of Light Compensation 2-25
............................. 2.23 Deadpath Error Compensation 2-25
.......................
2.24 Material Temperature Compensation 2-27
2.28 Cosine Error
........................................ 2-29
.......................................... 2.29 System l nstallation 2-31
2.30 MultipleMeasurement Axes
................................ 2-31
2.31 Beam Path Loss Computation
.............................. 2-34
2.32 Installation Examples
...................................... 2-36
.......................
2.33 Mechanical l nstallation Considerations 2-39
........................................... 2.34 General .. 2-39
.......... 2.35 Abbe Error ................................. 2-40
.......................................... 2.36 Deadpath Errors 2-43
2.37 Air Turbulence
........................................... 2-44
.........................
2.38 Laser Beam and Optics Protection 2-44
2.39 Alignment Procedures
...................................... 2-47
2.40 General
.................................................. 2-47
...................................... 2.41 Alignment Techniques 2-49
2.42 Alignment Principles
...................................... 2-49
2.43 Alignment Tips
........................................... 2-50
2.44 Visual Alignment Procedure
............................... 2-51
.......................
2.45 Autoreflection Alignment procedure 2-53
..........
2.46 Plane Mirror Interferometer Alignment Procedure 2-56

TABLE OF CONTENTS (Continued)
Section Title
Page
SYSTEM ELECTRONICS ..................................... ..... 3-1
...............................................
3.1 Introduction 3-1
..............................
3.2 Simplified Theory of Operation 3-2
.....................................
3.3 Functional Descriptions 3-3
3.4 HP-IB Interface Electronics
................................ 3-3
3.5 Computer Interface Electronics
............................ 3-4
3.8 English/Metric Pulse Output Electronics
.................... 3-10
...................................
3.9 10781A Pulse Converter 3-12
...............................
3.10 Detailed Theory of Operation 3-13
...................................
3.11 5501A Laser Transducer 3-13
..........................................
3.12 10780A Receiver 3-15
3.13 10740A Coupler
.......................................... 3-16
3.14 10745A HP-IB Interface
................................... 3-18
3.15 10746ABinarylnterface
................................... 3-20
..........................................
3.16 10760A Counter 3-21
3.17 1076214 Comparator
....................................... 3-22
3.18 10764A Fast Pulse Converter
................................ 3-24
.........................................
3.19 10761A Multiplier 3-25
3.20 10781A Pulse Converter
................................... 3-26
3.21 10763A English/Metric Pulse Output
....................... 3-27
...........................
3.22 10755A Compensation l nterface 3-29
3.23 10756A Manual Compensator
.............................. 3-31
3.24 5510A Opt010 Automatic Compensator and
....................
10563A MaterialTemperature Sensor 3-31
..................................
3.25 10783A Numeric Display 3-31
..............................
3.26 5501A Power Supply Options 3-32
.................................
PROGRAMMINGAND OPERATION 4-1
...............................................
4.1 Introduction 4-1
.......................
4.2 Programming Objectives and Methods 4-2
.......................
4.3 General System Operating Description 4-3
4.4 Sample Outline for a Three-Axis Counter-Based System ..... 4-3
.....................
4.5 General Coupler Interface Description 4-4
.......................
4.8 Calculator-Based System Programming 4-6
.......................
4.9 Computer-Based System Programming 4-7
...........................................
4.10 Typical Programs 4-13
.........................................
4.11 Data HandlingTips 4-44
4.12 Subtraction of Preset Numbers
............................ 4-44
.......................
4.13 Conversion to Inches or Millimetres 4-44
....................
4.14 Conversion when Deadpath is Included 4-44
4.15 Handshaking Routine Between a Controller and the
.................................
10746A Binary Interface 4-46
Conversion of Destination and Displacement Information
.....................
When Usingthe 107624 Comparator 4-47
107624 Comparator/10764A Fast Pulse Converter
...................................
Input/Output Format 4-48
.........................
Programmingand DebuggingTips 4-48
.................................................
Operation 4-49
..................................
Initial Power Application 4-55
iii

TABLE OF CONTENTS (Continued)
Section Title Page
INSTALLATIONAND CHECKOUT ................................... 5-1
5.1 Introduction
............................................... 5-1
5.2 System Ground Considerations
.............................. 5-2
................. 5.3 RequiredCables and Preliminary Procedures 5-4
5.4 lnstallationand Alignment of Laser Head. Receiver.
and Optics
............................................... 5-8
............... Installationof Electronic InterfaceComponents 5-9
........................ HP-IB InterfaceElectronics Installation 5-9
................. Computer Interface ElectronicsInstallation 5-12
......................... Counter-Based System l nstallation 5-12
...................... Comparator-Based System Installation 5-13
........... English/Metric Pulse Output Electronics Installation 5-19
.............. 10781A Pulse Converter ElectronicsInstallation 5-28
.............................. Interface Electronics Checkout 5-30
HP-IB and/or Binary Controlled Counter-Based
System Checkout
.......................................... 5-30
................................ Comparator-Based Systems 5-31
.............
English/Metric Pulse Output Systems Checkout 5-31
...............
10781A Pulse Converter ElectronicsCheckout 5-33
PreventiveMaintenance
.................................... 5-34
.......................... Cleaningof Optical Components 5-34
TROUBLESHOOTING
............................................... 6.1 Introduction 6-1
6.2 Troubleshooting Assumptions
............................. 6-2
........................
6.3 General Troubleshooting l nformation 6-2
6.4 Laser Head Troubleshooting
............................... 6-3
6.5 Receiver Troubleshooting
................................. 6-3
..........................
6.6 Optical DevicesTroubleshooting 6-3
6.7 System Controller Troubleshooting
........................ 6-3
........
6.8 Coupler and Interface ElectronicsTroubleshooting 6-4
.................
6.17 10781A Pulse Converter Troubleshooting 6-6
.
6.18 Power Supply Troubleshooting ......................... .. 6-6
....... ...............
6.19 DetailedTroubleshooting Procedures .. 6-6
Appendix Title Page
..............................
HP 9820A AND 9830A PROGRAMMING A-I
A.1 Introduction ................................................ A-1
A.2 Programmingwith the HP 9820A ............................ A-I
A.3 Programmingwith the HP 9830A
............................ A-I
....................................
USER APPLICATION PROGRAMS B-I

TABLE OF CONTENTS (Continued)
Page
Appendix Title
C
Table
..............................................
SYSTEM CABLING C-1
................................
C.l System Cable Requirements C-1
........................................
EXPANSIONCOEFFICIENTS D-1
.....................................................
BACKDATING E-1
................................................
E.1 Introduction E-1
....................................
E.2 Previous Option Numbers E-2
.....................
E.3 Calculator Interface Electronics Checkout E-4
............................................
E.4 Cable Fabrication E-I2
.........................
E.5 Hooded Connector Wiring Procedure E-30
LIST OF TABLES
Title Page
........................
5501A Laser Transducer System Specifications 1-8
....................................
Basic Measurement Components 1-11
HP-IB Interface Electronics .......................................... 1-12
.....................................
Computer Interface Electronics 1-13
.............................
English/Metric PulseOutput Electronics 1-14
..................................
10781A Pulse Converter Electronics 1-14
...........................
Power Supplies and Current Requirements 1-15
Compensators
..................................................... 1-16
Calculation of Exact Compensation Factor
............................ 2-29
Calculation of Total Compensation
.................................. 2-30
Angle
8 Versus Cosine Error
........................................ 2-31
...........
Typical Calculator Interface Electronics System Specification 3-4
Typical Counter-Based Computer InterfaceSystem Specifications
...... 3-6
Typical Comparator-Based Computer Interface System Specifications
... 3-8
Typical Specifications for English/Metric Pulse Output System
......... 3-12
Power Supplies Available for 5501A Laser Transducer System
........ 3-32
..........................................
10740A Coupler Bus Lines 4-5
10745A HP-IB Interface lnstruqtions .................................. 4-8
.............................
70746A Binary I/O Interface Instructions 4-9
.....................................
10755A Compensation Interface 4-9
10760A Counter Instructions ........................................ 4-10
10761A Multiplier Instructions ....................................... 4-10
10762A Comparator Instructions ..................................... 4-11
10764A Fast Pulse Converter Instructions ............................. 4-11
10763A Responses to Instructions .................................... 4-12
Possible Instructions by 10763A English/Metric Pulse Output
.......... 4-12
Instruction Set Conversion from Alphanumeric to Decimal
............ 4-13
10745A HP-IB InterfaceTypical Program Using HP 9825A Calculator .... 4-13
10746A Binary InterfaceTypical Program
............................. 4-27
...........................
Binary InterfaceTypical Program Variables 4-29
10762A Comparator/10764A Fast Pulse Converter
In~ut/Out~utFormat ........................................ 4-50

LlST OFTABLES (Continued)
Table
A-I
A-2
E-I
E-2
Title
RecommendedTest Equipment ..................................... 5-2
RequiredCables
................................................... 5-5
.......... Typical Configuration Guide for System Jumpersor Switches 5-20
10763A Control Connector Functions ................................ 5-24
...................
HP-IB Interface ElectronicsSystem Troubleshooting 6-8
Binary Controlled Counter lnterfaceElectronics Systems
Troubleshooting
................................................. 6-14
........ Binary Controlled Comparator-Based Systems Troubleshooting 6-20
English/Metric Pulse Output Electronics System Troubleshooting 6-27
10781A Pulse Converter Troubleshooting ............................. 6-39
Counter-Based System Using HP 9830A (BASIC Language)
.............. A-2
Comparator-Based System Using HP 9830A (BASIC Language)
.......... A-4
Linear Thermal Expansion Coefficients of Metals and Alloys
. .
Descriptionof Optics (for systems purchased prior to Dec . 31. 1979) .... E-2
5501A Special Option Number to Model Number or Part Number
Conversion
....................................................... E-4
10746A Binary lnterfaceA2566B Microcircuit Card Pin Connection ..... E-21
Figure Title
Page
LlST OF FIGURES
.
Page
HP 5501A Laser Transducer System ................................... 1-2
ManualsSuppliedwith Laser Transducer System
...................... 1-7
Typical Laser Transducer System Block Diagram
....................... 1-9
Basic Measurement System
.......................................... 2-3
Basic InterferometerMeasurements
.................................. 2-3
Allowable ComponentMotions
...................................... 2-4
...................................... MultiaxisMeasurement System 2-5
The
Six Degrees of Freedom ......................................... 2-6
5501A Laser Transducer Mounting ................................... 2-7
Beam Polarization
.................................................. 2-8
.................................. 5501A Laser Transducer Dimensions 2-9
.. Splittingand BendingOptics ..................................... i 2-10
...............
10702A Linear l nterferometerand 10703A Retroreflector 2-11
............... 10702A Linear Interferometerwith Option 001 Windows 2-12
Linear Interferometer Laser Beam Path
............................... 2-13
......... 10705A Single Beam Interferometer and 10704A Retroreflector 2-13
......................... Single Beam Interferometer Laser Beam Path 2-14
10706A Plane Mirror Interferometer .................................. 2-14
.........................
Plane Mirror Interferometer Laser Beam Path 2-15
.............................. 10710A and 10711A Adjustable Mounts 2-16
Splittingand BendingOptics (10700A, 10701A and 10707A)
....................................................
Specifications 2-17
..........................
10702A Linear InterferometerSpecifications 2-18
.................................
10703A RetroreflectorSpecifications 2-18
.................... 10705A Single Beam l nterferometerSpecifications 2-19

LIST OFFIGURES (Continued)
Figure Title Page
..................................
10704A Retroreflector Specifications 2-18
....................
10706A Plane Mirror Interferometer Specifications 2-19
..................
10710A and 10711A Adjustable Mounts Specifications 2-20
Horizontal and Vertical Plane MountingUsing the
.........................................
10710A Adjustable Mount 2-21
2-26 Horizontal Plane Mounting Using the 10711A Adjustable Mount
....... 2-23
..........
2-27 Vertical Plane MountingUsingthe 10711A Adjustable Mount 2-23
........................................
2-28 10780A Receiver Dimensions 2-24
.......................................
2-29 DeadpathError Compensation 2-26
2-30 Relative Effect of Errors inAtmospheric and Material
..............................................
Temperature Factors 2-27
.......................................................
2-31 Cosine Error 2-30
...........................................
2-32 Three-Axis Configuration 2-31
.............................................
2-33 Four-Axis Configuration 2-32
................
2-34 Two-Axis Plane Mirror Interferometer Configuration 2-33
............................
2-35 X-Y Stage Installed in a Vacuum Chamber 2-33
2-36 Two-Axis Measurement System with Unequal Measurement Paths
...... 2-34
.................................
2-37 Three-Axis Machine Tool Installation 2-36
...........................
2-38 Three-Axis Measuring Machine Installation 2-37
..............................................
2-39 Laser Head Installation 2-38
..................................................
2-40 Y-Axis Installation 2-38
..................................................
2-41 X-Axis Installation 2-39
..................................................
2-42 Abbe Offset Error 2-40
.............
2-43 Positioningof MeasurementAxis to MinimizeAbbe Error 2-41
2-44
X-Y Stage Measurement with 10706A Plane Mirror l nterferometer ...... 2-42
..........................................
2-45 X-Y Stage Geometric Errors 2-42
.........................
2-46 Installation of Optics for Minimum Deadpath 2-43
.........................
2-47 ProtectiveCovers for Optics and Laser Beam 2-45
...................
2-48 Collapsible Spiral Cover for Movable Retroreflector 2-46
................................................
2-49 Optimum Alignment 2-47
.......................................
2-50 Effect of Optics Measurement 2-48
.............
2-51 Effects of Angular Misalignment to the Direction of Travel 2-48
.....................................................
2-52 Alignment Tips 2-50
...................................................
2-53 Visual Alignment 2-52
...........................................
2-54 Autoreflection Alignment 2-54
..............................
2-55 Plane Mirror Interferometer Alignment 2-57
\
...........................................
Simplified Block Diagram 3-2
........................
Calculator Interface Electronics Block Diagram 3-3
Counter-BasedComputer Interface Electronics Block Diagram
......... 3-5
Comparator-Based(Closed-Loop)System Simplified Block Diagram
..... 3-7
Comparator-BasedComputer Interface Electronics Block Diagram
...... 3-8
................
English/Metric Pulse Output Electronics Block Diagram 3-11
....................
10781A Pulse Converter Electronics Block Diagram 3-13
...............................
5501A Laser Transducer Block Diagram 3-14
......................................
10780A Receiver Block Diagram 3-15
...................................
10740A Coupler BackplaneSignals 3-16
...............................
10745A HP-IB l nterface Block Diagram 3-18
...............................
10746A Binary Interface Block Diagram 3-20
......................................
10760A Counter Block Diagram 3-21
..................................
1076214 Comparator Block Diagram 3-23
...........................
10764A Fast Pulse Converter Block Diagram 3-24
vii