Inficom SQM-160 User manual

OPERATING MANUAL
SQM-160
™
Multi-Film Rate/Thickness Monitor
PN 074-511-P1E
C
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www.inficon.com [email protected]
©2015 INFICON
®
OPERATING MANUAL
PN 074-511-P1E
Titl
e
P
age
SQM-160
™
Multi-Film Rate/Thickness Monitor

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that produce them.
INFICON® is a trademark of INFICON Inc.
SQM-160™ and INFICON® are trademarks of INFICON GmbH.
Visual Basic®, Windows®, and Excel® are registered trademarks of Microsoft Corporation.
Java® is a registered trademarks of Oracle and/or its affiliates.
Inconel® is a registered trademark of Inco Alloys International, Huntington, WV.
All other brand and product names are trademarks or registered trademarks of their respective companies.
Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.
Copyright
©2015 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, free
from defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in the
respective Seller instruction manuals for those products but shall not be less than
two (2) years from the date of shipment thereof by Seller. Seller's liability under
this warranty is limited to such of the above products or parts thereof as are
returned, transportation prepaid, to Seller's plant, not later than thirty (30) days
after the expiration of the period of warranty coverage in respect thereof and are
found by Seller's examination to have failed to function properly because of
defective workmanship or materials and not because of improper installation or
misuse and is limited to, at Seller's election, either (a) repairing and returning the
product or part thereof, or (b) furnishing a replacement product or part thereof,
transportation prepaid by Seller in either case. In the event Buyer discovers or
learns that a product does not conform to warranty, Buyer shall immediately notify
Seller in writing of such non-conformity, specifying in reasonable detail the nature
of such non-conformity. If Seller is not provided with such written notification,
Seller shall not be liable for any further damages which could have been avoided if
Seller had been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER
WARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD
HEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct or
indirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus return
transportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered by
anyone other than Seller or which has been used in a manner or for a purpose for
which the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise in
connection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.
Warranty
www.inficon.com [email protected]

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PN 074-511-P1E
SQM-160 Operating Manual
Table Of Contents
Cover Page
Title Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty
Chapter 1
Introduction and Specifications
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
1.1.1 Related Manuals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2 Instrument Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
1.2.1 Definition of Notes, Cautions, and Warnings . . . . . . . . . . . . . . . . . . . . . . . .1-2
1.2.2 General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
1.2.3 Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.3 How To Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
1.3.1 Returning SQM-160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.1 Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
1.4.2 Film Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
1.4.3 System Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
1.4.4 Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
1.4.5 General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
1.6 Configurations and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.6.1 SQM-160 Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
1.6.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
1.6.2.1 Oscillator Kits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.2.2 Rack Mounting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
1.6.2.3 Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Chapter 2
Installation
2.1 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
2.1.1 Parts Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

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2.1.2 Ground Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
2.1.3 Establishing Earth Ground . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2 Rack Mounting Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1 Full Rack Extender . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1.1 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
2.2.1.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
2.2.2 Rack Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.2.2.1 Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.2.2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
2.3 Rear Panel Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
2.4 System Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-12
2.4.1 Sensor Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
2.5 I/O Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Chapter 3
Operation
3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.2 Front Panel Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
3.3 Menu Selection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
3.4 Film Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
3.5 System Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.6 Sensor Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.7 Sensor Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
3.8 Sensor Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
3.9 Display Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.10 Crystal Life . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
3.11 Zero Thickness. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.12 Shutter Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.13 Dual Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
3.14 Rate Sampling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
3.15 Time Setpoint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
3.16 Thickness Setpoint. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
3.17 Simulate Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.18 Defaulting the Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
3.19 Relay Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.20 Analog Output Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
3.21 Depositing a Film . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19

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SQM-160 Operating Manual
Chapter 4
SQM-160 Comm Software
4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-1
4.2.1 Update of an Older Version of SQM-160 Comm . . . . . . . . . . . . . . . . . . . . .4-2
4.3 Start the SQM-160 V2 Comm software. . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
4.4 Main Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
4.4.1 Menu Bar Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
4.4.1.1 File Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
4.4.1.2 Edit Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
4.4.1.3 View Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
4.4.1.4 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
4.4.2 Main Window Control Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
4.5 Data Log Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-9
4.5.1 Log File Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10
4.5.2 Duration Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11
4.5.3 Time Range Pane. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11
4.5.4 Sampling Interval Pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
4.6 Films Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11
4.7 System Parameters Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15
4.8 Communications Setup Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
4.8.1 Establishing Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-18
4.8.2 Command Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-20
4.9 Configure Graph(s) Window. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21
4.10 Help Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23
Chapter 5
Communications
5.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.1.1 RS-232 Serial Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
5.1.2 USB Port. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
5.1.3 Ethernet Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
5.1.3.1 How to Set Up the Network Protocol on the Computer . . . . . . . . . . . . . . . .5-2
5.1.3.1.1 Accessing Network Settings in Windows XP . . . . . . . . . . . . . . . . . . . . . . . .5-3
5.1.3.1.2 Accessing Network Settings in Windows 7 and Windows 8. . . . . . . . . . . . . 5-6
5.1.3.2 How to change the SQM-160 IP address. . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
5.2 SQM-160 Comm Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
5.3 SQM-160 Communications Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
5.3.1 Command Packet (Host to SQM-160 Message) . . . . . . . . . . . . . . . . . . . . . 5-9
5.3.2 Response Packet (SQM-160 to Host Message). . . . . . . . . . . . . . . . . . . . . 5-10

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5.3.3 Calculating the CRC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
5.4 Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12
5.4.1 Command: @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.4.2 Command: A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13
5.4.3 Command: B . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15
5.4.4 Command: C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-16
5.4.5 Command: D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.4.6 Command: J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.4.7 Command: L. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17
5.4.8 Command: M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.9 Command: N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.10 Command: O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18
5.4.11 Command: P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.12 Command: R . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.13 Command: S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19
5.4.14 Command: T. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.4.15 Command: U . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.4.16 Command: W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20
5.4.17 Command: Y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
5.4.18 Command: Z. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21
5.5 CRC Examples. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
5.5.1 Visual Basic® 5/6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22
5.5.2 Java® . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24
5.5.3 C++. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25
Chapter 6
Troubleshooting and Maintenance
6.1 Troubleshooting Guide. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
6.2 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
6.3 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12
6.4 Persistent Crystal Fail Indication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13
Chapter 7
Calibration Procedures
7.1 Importance of Density, Tooling and Z-Ratio. . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.2 Determining Density. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
7.3 Determining Tooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
7.4 Laboratory Determination of Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3

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Chapter 8
Measurement and Theory
8.1 Basics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-1
8.1.1 Monitor Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
8.1.2 Period Measurement Technique . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
8.1.3 Z-match Technique. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8-6
Appendix A
Material Table
A.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .A-1

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Chapter 1
Introduction and Specifications
1.1 Introduction
Figure 1-1 SQM-160 multi-film rate/thickness monitor
SQM-160™uses proven INFICON®quartz crystal sensor technology to measure
rate and thickness in a thin film deposition process. Two sensor inputs are standard
and four additional sensor inputs are optional. Two recorder outputs provide both
analog rate and thickness signals.
Sensor inputs are assigned to different materials, averaged for accurate deposition
control in large systems or configured for a dual sensor. The rate sampling mode
allows a shuttered sensor to extend sensor life in high rate processes. Rate
displays of 0.1 Å/s or 0.01 Å/s are user-selectable. In addition, frequency or mass
displays can be selected. Four relay outputs allow SQM-160 to control source or
sensor shutters, signal time and thickness setpoints, and signal crystal failure.
Digital inputs allow external signals to start/stop and zero readings.
SQM-160 comes with an RS-232 port and Windows®software that allows
instrument setup from a computer. The software can be used to set and store all
parameters, operate SQM-160, and save process data in a .txt file that can be
imported into Excel®. Universal Serial Bus (USB) or Ethernet options add to the
communications flexibility.

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1.1.1 Related Manuals
Quartz crystal sensors are covered in separate manuals. The following manuals
are available on the Thin Film Instrument and Sensor Manuals CD
(PN 074-5000-G1), part of the ship kit:
PN 074-154 - UHV Bakeable Sensor
PN 074-156 - Front Load Single and Dual Sensors
PN 074-157 - Sputtering Sensor
PN 074-643 - ALD Sensor
PN 147-800 - Cool Drawer Single and Dual Sensors
1.2 Instrument Safety
1.2.1 Definition of Notes, Cautions, and Warnings
When using this manual, please pay attention to notes, cautions,
and warnings found throughout. For the purposes of this manual they are defined
as follows:
NOTE: Pertinent information that when followed is useful in achieving maximum
SQM-160 efficiency.
CAUTION
Failure to heed these messages could result in damage
to SQM-160.
WARNING
Failure to heed these messages could result in
personal injury.
WARNING - Risk Of Electric Shock
Dangerous voltages which could result in personal injury
are present.

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1.2.2 General Safety Information
WARNING
Do not open the SQM-160 case. Refer all maintenance to
qualified personnel.
There are no user-serviceable components within the
SQM-160 case. Dangerous voltages may be present
whenever the power cable or external input/relay
connectors are present.
WARNING
SQM-160 contains delicate circuitry, susceptible to
transient power line voltages. Disconnect the power
cable whenever making any interface connections.
Refer all maintenance to qualified personnel.

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1.2.3 Earth Ground
SQM-160 is connected to earth ground through a sealed three-core
(three-conductor) power cable, which must be plugged into a socket outlet with
a protective earth terminal. Extension cables must always have three conductors
including a protective earth terminal.
WARNING
Never interrupt the protective earth circuit.
This symbol indicates where the protective earth ground
is connected inside SQM-160.
Never unscrew or loosen this connection.
Disconnecting the protective earth terminal or
interrupting the protective earth circuit, whether inside or
outside of SQM-160, may render SQM-160 dangerous.
1.3 How To Contact INFICON
Worldwide customer support information is available under Support >> Support
Worldwide at www.inficon.com.
Sales and Customer Service
Technical Support
Repair Service
When experiencing a problem with SQM-160, please have the following
information readily available:
The Sales Order or Purchase Order number of the SQM-160 purchase
The version of SQM-160 firmware
The version of Windows operating system
A description of the problem
An explanation of any corrective action that may have already been attempted
The exact wording of any error messages that may have been received

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1.3.1 Returning SQM-160
Do not return any component of SQM-160 to INFICON before speaking with a
Customer Support Representative and obtaining a Return Material Authorization
(RMA) number. SQM-160 will not be serviced without an RMA number.
Packages delivered to INFICON without an RMA number will be held until the
customer is contacted. This will result in delays in servicing SQM-160.
If returning SQM-160 with a crystal sensor or another component potentially
exposed to process materials, prior to being given an RMA number, a completed
Declaration Of Contamination (DOC) form will be required. DOC forms must be
approved by INFICON before an RMA number is issued. INFICON may require
that the component be sent to a designated decontamination facility, not to the
factory.
1.4 Specifications
1.4.1 Measurement
Sensor Inputs . . . . . . . . . . . . . . . . . . Two standard, Four additional (optional)
Measurement Frequency Range . . . 6.5 to 1.0 MHz (adjustable)
Reference Frequency Accuracy . . . . 0.002%
Reference Frequency Stability . . . . . ±2 ppm (total, 0 to 50°C)
Thickness Display Resolution . . . . . 1 Å
Frequency Resolution1. . . . . . . . . . . Standard: ±0.30 Hz @ 6 MHz
High Resolution option: ±0.03 Hz @ 6 MHz
Thickness and Rate
Resolution/Measurement2. . . . . . . . Standard: ±0.37 Å
High Resolution option: ±0.037 Å
Measurement Interval. . . . . . . . . . . . 0.10 to 2.0 s (adjustable)
1Resolution given for 0.10 s measurement interval
2Tooling/Density = 100/1, fundamental frequency = 6 MHz, 0.10 s
measurement interval

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1.4.2 Film Parameters
Stored Films . . . . . . . . . . . . . . . . . . . 99
Density . . . . . . . . . . . . . . . . . . . . . . . 0.50 to 99.99 g/cm3
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10 to 399%
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.10 to 10.00
Final Thickness . . . . . . . . . . . . . . . . 0.000 to 9999 kÅ
Thickness Setpoint. . . . . . . . . . . . . . 0.000 to 9999 kÅ
Time Setpoint . . . . . . . . . . . . . . . . . . 0:00 to 99:59 mm:ss
Sample/Hold. . . . . . . . . . . . . . . . . . . 0 to 5999 s
Sensor Average . . . . . . . . . . . . . . . . 1 to 6, depending on sensors installed
1.4.3 System Parameters
Measurement Period . . . . . . . . . . . . 0.10 to 2.00 s
Simulate Mode . . . . . . . . . . . . . . . . . On/Off
Display Mode . . . . . . . . . . . . . . . . . . Thickness in kÅ (THCK)
Thickness in µm (NANM)
Frequency in Hz (FREQ)
Mass in µg/cm2(MASS)
Rate Resolution . . . . . . . . . . . . . . . . 0.01 Å/s (HI)
0.1 Å/s (LO)
Measurement Filter . . . . . . . . . . . . . 1 to 20 readings
Relay 2 Mode . . . . . . . . . . . . . . . . . . Time Setpoint (TIME)
Dual Sensor Shutter (DUAL)
Sensor 2 Shutter (SNS2)
Relay (1 to 4) . . . . . . . . . . . . . . . . . . Normally Open (nO)/Normally Closed (nC)
Rate Sampling . . . . . . . . . . . . . . . . . On/Off
RS-232 Baud Rate . . . . . . . . . . . . . . 2.4, 4.8, 9.6, 19.2, 38.4, 57.6, 115.2 kbps
Etch Mode . . . . . . . . . . . . . . . . . . . . On/Off
Crystal Tooling (1 to 6) . . . . . . . . . . . 10 to 399%
Frequency Min/Max . . . . . . . . . . . . . 1.0 to 6.4 MHz/1.1 to 6.5 MHz
Analog Output Bounds
Rate Min/Max . . . . . . . . . . . . . . . -99 to 999 Å/s
Thickness Min/Max. . . . . . . . . . . 0.0 to -9999 kÅ