IWAKI PUMPS FS Series User manual

Safety instructions Overview Installation Operation Maintenance Specication
Iwaki
Pneumatic Drive Bellows Pump
FS series
©2011 IWAKI CO., LTD.
Thank you for choosing our product.
Please read through this instruction manual before use.
This instruction manual describes important precautions and instruc-
tions for the product. Always keep it on hand for quick reference.
Instruction manual
T4 3 4 - 5 '19 /11
http://www.iwakipumps.jp
IWAKI CO.,LTD. 6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 Japan
TEL: [phone] FAX: [phone]
European ofce / IWAKI Europe GmbH
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2
Order conrmation
Open the package and check that the product conforms to your order. If any problem or
inconsistency is found, immediately contact your distributor.
a. Check if the delivery is correct.
Check the nameplate to see if the information such as model codes are as ordered.
*Electrical wiring changes with the controllers.
b. Check if the required number of accessories is provided.
<Attached accessories>
A FDC-1 controller and two quick exhaust valves
c. Check if the delivery is damaged or deformed.
Check for transit damage and loose bolts.
Order conrmation
* The CE marking on our product(s) is for us to market the
product(s) into the European market, however, the CE
marking does not ensure any safety or conformity of the
product(s) outside the European market.
When the pump is incorporated into the equipment
marketed in the European market, such equipment must
meet all the requirements of applicable directives.
In such a case, any person who places the equipment
on the market must carry a CE mark on the equipment
as a manufacturer.

3
Contents
Contents
Order conrmation ..........................................................................................................................................2
Safety instructions.................................................................... 5
Warning..........................................................................................................................................................6
Caution........................................................................................................................................................... 7
Precautions for use ...................................................................................................................................... 9
Overview...................................................................................10
Introduction ................................................................................................................................................. 10
Pump structure & Operating principle ...................................................................................................... 10
Part names................................................................................................................................................... 11
Pump ........................................................................................................................................................ 11
Operating conditions.................................................................................................................................. 12
Pump stroke ............................................................................................................................................. 12
Supply air pressure range ........................................................................................................................ 12
Liquid temperature range ......................................................................................................................... 12
Liquid characteristics ............................................................................................................................... 12
Do not run the pump with the following liquid ..................................................................................... 12
Use care handling the following liquids:.............................................................................................. 12
Operation and Stoppage.......................................................................................................................... 13
During operation ................................................................................................................................. 13
When stopping the pump .................................................................................................................... 13
During stoppage.................................................................................................................................. 13
Air exhaust port ........................................................................................................................................ 13
Leak sensors............................................................................................................................................ 13
Ambient temperature................................................................................................................................ 13
Pump surface temperature....................................................................................................................... 13
Noise from pump...................................................................................................................................... 13
Identication codes.................................................................................................................................... 14
Installation ...............................................................................15
Pump mounting........................................................................................................................................... 15
Liquid line piping ........................................................................................................................................ 17
Suction line............................................................................................................................................... 18
Flooded suction................................................................................................................................... 18
Filtration (suction line end) .................................................................................................................. 18
When installing a valve on the suction line: ........................................................................................ 18
Discharge line .......................................................................................................................................... 19
Pulsation reduction ............................................................................................................................. 19
When installing a valve on the discharge line: .................................................................................... 19
Filtration (circulation) ........................................................................................................................... 19
Filtration (discharge line end).............................................................................................................. 19
Depressurization at pump stop ........................................................................................................... 19
Degassing ................................................................................................................................................20

4Contents
Air line piping .............................................................................................................................................. 21
Supply air port I.D. .............................................................................................................................. 21
Air line piping diagram..............................................................................................................................22
Composite effective cross-sectional area................................................................................................ 24
Effective cross-sectional area............................................................................................................. 24
Preventive measures against condensation ....................................................................................... 24
Electric wiring .............................................................................................................................................25
Installation ................................................................................................................................................25
Lead wires........................................................................................................................................... 25
Extension of leak sensor wires ........................................................................................................... 25
Installation of proximity switch wires ................................................................................................... 25
Extension of proximity switch wires .................................................................................................... 25
Wiring diagram .........................................................................................................................................26
Operation................................................................................. 27
Before operation ......................................................................................................................................... 27
Pump operation...........................................................................................................................................28
Starting the pump..................................................................................................................................... 28
Flow rate adjustment ................................................................................................................................29
Stoppage..................................................................................................................................................29
Maintenance............................................................................ 30
Troubleshooting ..........................................................................................................................................30
Inspection ....................................................................................................................................................33
Daily inspection ........................................................................................................................................33
Periodic inspection...................................................................................................................................33
Wear part list ............................................................................................................................................34
Specication/Outer dimension..................................................................................................................35
Specication.............................................................................................................................................35
FS-15 H T 1 or 2..................................................................................................................................35
FS-30 H T 1 or 2 .................................................................................................................................36
FS-60 H T 1 or 2 .................................................................................................................................36
Outer dimension....................................................................................................................................... 37
FS-15 H T 1......................................................................................................................................... 37
FS-15 H T 2......................................................................................................................................... 37
FS-30 H T 1 ........................................................................................................................................38
FS-30 H T 2 ........................................................................................................................................38
FS-60 H T 1 ........................................................................................................................................39
FS-60 H T 2 ........................................................................................................................................39
Part names...............................................................................................................................................40
FS-15 H T 1.........................................................................................................................................40
FS-15 H T 2......................................................................................................................................... 41
FS-30 H T 1 ........................................................................................................................................ 42
FS-30 H T 2 ........................................................................................................................................43
FS-60 H T 1 ........................................................................................................................................44
FS-60 H T 2 ........................................................................................................................................45
EC DECLARATION OF CONFORMITY .................................................................................................. 46

5
Safety instructions
Safety instructions
Read through this section before use. This section describes important
information for you to prevent personal injury or property damage.
■ Symbols
In this instruction manual, the degree of risk caused by incorrect use is noted with the follow-
ing symbols. Please pay attention to the information associated with the symbols.
Indicates mishandling could lead to a fatal or serious acci-
dent.
WARNING
A symbol accompanies each precaution, suggesting the use of "Caution", "Prohibited actions"
or specic "Requirement".
Indicates mishandling could lead to personal injury or prop-
erty damage.
CAUTION
Caution marks Prohibited marks Requirement marks
Safety instructions
Prohibited
Electrical
shock
Caution Do not rework
or alter
Requirement Wear
protection
Export Restrictions
Technical information contained in this instruction manual might be treated as controlled tech-
nology in your countries, due to agreements in international regime for export control.
Please be reminded that export license/permission could be required when this manual is
provided, due to export control regulations of your country.
Grounding

6
WARNING
WARNING
Turn off power before work
Risk of electrical shock. Be sure to turn off power to stop the pump and
related devices before service is performed. Let other people know about
the situation by displaying a notice such as "POWER OFF (Maintenance)"
near the power switch.
Conrm safety in your working area
Keep away from the pump when turning on power. The pump doesn't have
an ON-OFF switch. The pump starts as a power cable is plugged in.
Stop operation
If you notice any abnormal or dangerous conditions, suspend operation
immediately and inspect/solve problems.
Do not use the pump in any condition other than its intended purpose
The use of the pump in any conditions other than those clearly specied
may result in failure or injury. Use this product in specied conditions only.
Do not modify the pump
Alterations to the pump carries a high degree of risk. It is not the manufac-
turer's responsibility for any failure or injury resulting from alterations to the
pump.
Wear protective clothing
Always wear protective clothing such as an eye protection, chemical re-
sistant gloves, a mask and a face shield during disassembly, assembly or
maintenance work. The specic solution will dictate the degree of protec-
tion. Refer to MSDS precautions from the solution supplier.
Spill precautions
Ensure protection and containment of solution in the event of plumbing or
pump damage (secondary containment).
Do not touch the pump or pipe with bare bands
Risk of burning. The surface temperature of the pump or pipe rises high
along with liquid temperature in or right after operation.
Do not remove covers
Do not remove any covers including the right-and-left cylinder head covers
during operation in order to reduce the risk of personal injury.
Depressurize piping before disassembly
Release a pressure from both liquid and air lines before dismantling the
pump or removing piping.
Requirement
Do not remodel
Wear
protectors
Requirement
Requirement
Requirement
Caution
Requirement
Prohibited
Prohibited

7
Safety instructions
CAUTION
Qualied personnel only
The pump should be handled or operated by qualied personnel with a
full understanding of the pump. Any person not familiar with the product
should not take part in the operation or maintenance of the pump.
Use specied power only
Do not apply any power other than that specied on the nameplate. Other-
wise, failure or re may result. Ensure the pump is properly grounded.
Ventilation
Fumes or vapours can be hazardous with certain solutions. Ensure proper
ventilation at the operation site.
Do not install or store the pump:
• In a ammable atmosphere.
• In a dusty/humid environment.
• In a corrosive atmosphere.
Do not stand on the pump
Do not use the pump as a platform. Injury or damage may result when the
pump turns over.
Flushing before operation
Flush the inside of the pump and piping with pure water or the liquid to be
delivered before the start of operation.
Do not run the pump with the following liquid:
• Liquid that easily crystallizes
• Slurry
• Low conductivity hydrocarbon liquid
Use care handling the following liquid:
• Stripper (the pump must be in explosion proof.)
• Solvent
• Hydrazine
• Fuming sulfuric acid
Static electricity
When low electric conductivity liquids such as ultra-pure water and fluor
inactive liquid (e.g. FluorinertTM) are handled, the static electricity may be
generated in the pump and may cause static discharge. Take counter-
measures to remove the static electricity.
CAUTION
Requirement
Requirement
Requirement
Requirement
Requirement
Prohibited
Prohibited
Prohibited
Requirement

8
CAUTION
Wear part replacement
Follow instructions in this manual for wear part replacement. Do not dis-
mantle the pump beyond the extent of the instructions.
Before returning product
Be sure to drain chemicals and clean the inside of the pump before return
so that a harmful chemical does not spill out in transit.
Observe the maximum stroke rate
Operation above the max stroke rate may reduce the life of bellows. See
the "Specification" section on page 35 for detail. Set the FDC-1 controller
not to run the pump over the limits even under dry running.
Disposal of a used pump
Dispose of any used or damaged pump in accordance with local rules
and regulations. If necessary, consult a licensed industrial waste disposal
company.
Requirement
Requirement
Requirement
Requirement
CAUTION

9
Safety instructions
Precautions for use
Precautions for use
• During transit:
–Do not hit/wet the package.
–Do not place the package lateral/up side down.
– Keep the package dry.
– Do not stack the package on top of another.
• Electrical work should be performed by a qualied electrician. Otherwise,
personal injury or property damage could result.
• Do not install the pump:
–In a ammable atmosphere.
–In a dusty/humid place.
– In a corrosive atmosphere.
• Allow sufficient space around the pump for easy access and maintenance.
• Use care handling the pump. Do not drop. An impact may affect pump
performance. Do not use a pump that has been damaged to avoid the risk
of electrical damage or shock.
• The pump and controller are not waterproof. Do not operate the pump and
controller while wet with solution or water. Failure or injury may result. Im-
mediately dry off the pump and controller if they get wet.
• Do not close discharge line during operation. Solution may leak or piping
may break.
• Solution in the discharge line may be under pressure. Release the pres-
sure from the discharge line before disconnecting plumbing or disassembly
of the pump to avoid solution spray.
• Wear protective clothing when handling or working with pumps. Consult
solution MSDS for appropriate precautions. Do not come into contact with
residual solution.
• Do not leave the pump with any chemical in the bellows for a long period.
Some chemical gas can penetrate the bellows and corrode metal parts.
Run the pump for ten minutes a day for replacing gas when the pump is
going to be suspended two or three days.
Caution
Caution
Caution
Caution
Caution
Caution
Requirement
Requirement
Caution

10
Overview
Introduction
Pump characteristics, features and part names are described in this sec-
tion.
Introduction
Pump structure & Operating principle
An Iwaki FS series pneumatic drive bellows pump has uoric wet ends and is designed for semiconductor
manufacturing processes.
Principle of operation
The pump unit has two air chambers and a pair of bellows. The reciprocating motion of the bellows in the air
chambers introduces/delivers solution.
Suction process
Either bellows takes in solution via the inlet as it expands.
Discharge process
The bellows lets out solution via the inlet as it contracts.
: Liquid flow
: Supply air
Air OUT
Air chamber
Pump head
Air IN
Bellows OUT
IN
OUT
IN
Air IN Air OUT

11
Overview
Part names
Part names
Pump
*Do not clean the pump or spec label with a solvent such as benzine or thinner.
*Two or more personnel must be required to lift and move this pump.
IN label
Supply air port
Base
Base to anchor the pump
Proximity switch and leak
sensor wires. Connect
them to the controller.
Spec label
Outlet
OUT label
Handle

12 Operating conditions
Operating conditions
Pump stroke
Observe the maximum stroke rate of each pump, or the pump can take in a large amount of air, resulting dry
running.
* Use the FDC-1 controller and set the maximum allowable speed.
Supply air pressure range
Observe the allowable supply air pressure range at each liquid temperature below.
Liquid temperature Supply air pressure
5-50ºC 0.15-0.5MPa
51-100ºC 0.15-0.3MPa
101-180ºC 0.15-0.2MPa
* Try to use the minimum allowable supply air pressure to protect the lter and bellows and reduce the risk of solution spray.
* A ow rate changes with supply air pressure. Use a regulator to keep the pressure constant.
Liquid temperature range
Observe the allowable liquid temperature range of 5-180ºC. Note sharp temperature uctuation (heat shock)
may reduce the life of the pump. Contact us for detail.
Liquid characteristics
■ Do not run the pump with the following liquid
•Liquid that easily crystallizes
•Slurry
•Low conductivity hydrocarbon liquid
* Crystallization or the delivery of slurry remarkably shorten the lives of valves and bellows.
* Delivery of low conductivity hydrocarbon liquid can cause ESD damage.
■ Use care handling the following liquid:
•Stripper
•Solvent
•Hydrazine
•Fuming sulfuric acid
* Some strippers cause cracks on the PFA bellows and piping, and therefore a warranty period is shortened. Contact us for
detail.
* An explosion-proof construction is required for the delivery of solvents. Contact us for detail.

13
Overview
Operating conditions
Operation and Stoppage
■ During operation
Make sure a suction and a discharge line are fully opened.
■ When stopping the pump
• Before stopping the pump, release discharge line pressure. Otherwise, the bellows may deform.
• Do not close a discharge valve as stopping the pump, or an impact pressure may deform the bellows or con-
necting plate.
■ During stoppage
• Do not pressurize both the right and left air chambers at the same time, or the bellows may deform.
• Always check the specication of the double solenoid valve before installation. Some types (pressure centre
types) are designed to pressurize both the right and left air chambers at the same time.
• Do not leave the pump with any chemical in the bellows for a long period. Some chemical gas can penetrate
the bellows and corrode metal parts.
Air exhaust port
Do not narrow an air exhaust line (for example by reducing the tube I.D.). Or the residual pressure in the pump
may deform the bellows.
* Always observe the minimum composite effective cross-sectional area. Do not extend the air exhaust port too far away
from the solenoid valve (SV) or the quick exhaust valve (QEV). Otherwise, increased pipe resistance may break the limit.
Leak sensors
The sensors occasionally fails to detect leakage depending on operating conditions. Contact us for detail.
Ambient temperature
Observe the allowable operating ambient temperature range of 0-40ºC.
Pump surface temperature
Risk of burning. The surface temperature of the pump or pipe rises high along with liquid temperature in or
right after operation. With the FS-15, for example, a cylinder head surface temperature rises up to 60ºC when
liquid temperature is 190ºC and ambient temperature is 24ºC.
Model Liquid temperature Cylinder head surface
temperature Ambient temperature
FS-15 190ºC 60ºC 24ºC
FS-30 190ºC 64ºC 24ºC
FS-60 190ºC 53ºC 20ºC
Noise from pump
Exhaust noise accompanies pump operation. Provide noise insulation as necessary. With the FS-15, for exam-
ple, a noise level rises up to 67.5dB (A) at 240spm and 0.3MPa (supply air pressure).
Model Supply air pressure Stroke rate Noise level
FS-15 0.3MPa 240spm 67. 5 d B(A)
0.5MPa 180spm 69.2dB(A)
FS-30 0.3MPa 220spm 70.5dB(A)
0.5MPa 180spm 70.5dB(A)
FS-60 0.3MPa 200spm 73.0dB(A)
0.5MPa 180spm 72.0dB(A)
* The noise level above includes the operating noise from the pump and the SV.

14 Identication codes
Identication codes
Each code represents the following information.
FS - 15 H T 1 - 01
a b c d e f
a. Series name
FS : Medium & High liquid temperature
b. Maximum ow rate
15 : 15L/min
30 : 30L/min
60 : 55L/min
c. Allowable liquid temperature range
H : 5-180°C
d. Pump connection (Inlet/Outlet)
T : Tube (standard)
e. Pump head-bellows connection
1 : Mechanical
2 : Welded
f. Special specications
No symbol : Standard
01 : Special specications (01, 02…)

15
Installation
Installation
Pump mounting
Flooded
suction
*
Suction lift
This section describes the installation of the pump, piping and wiring. Read through
this section before work. To operate this pump, a 5-port solenoid valve and FDC-1
controller is needed. Always install QEVs (quick exhaust valves) to secure system
safety. Purchase separately.
Points to be observed
Observe the following points when installing the pump.
• Be sure to turn off power to stop the pump and related devices before service is per-
formed.
• Be careful for the power not to be turned on during work.
• If you notice any abnormal or dangerous conditions, suspend operation immediately and
inspect/solve problems.
• Do not install the pump in a ammable atmosphere.
Pump mounting
Mount the pump in ooded suction or suction lift application.
In flooded suction application:
Place the pump as close to the supply tank as possible.
*Flooded suction is recommended for hot liquid transfer or for
looped system.
In suction lift application:
Observe the maximum suction lift* at each model (see
below). Place the pump as close to the supply tank as
possible.
Model Suction lift
FS-15 1m
FS-30 2m
FS-60
*The suction lift is based on pumping clean water at ambient
temperature and the maximum stroke rate, and varies with
liquid characteristics, liquid temperature or suction line length.
Contact us for detailed information.

16 Pump mounting
Select a location
Select a level location, free from vibration, that won't hold liquid. Anchor the pump so it doesn't vibrate.
See page 9 as well.
* Flooded suction application is recommended.
* Observe the maximum suction lift (1m for the FS-15, 2m for the FS-30/-60) in suction lift application.
Anchor the pump so it doesn't vibrate
Position the pump upright with the outlet upward and inlet sideways.
Provide four holes for pump anchoring (M8 or M10 hex anchoring bolts and plate washers) by the follow-
ing pitch, width and depth.
* Use spring washer as necessary.
Model Pitch Width Depth Hole I.D.
FS-15 213+2
0 mm 10mm 96±1mm M8
FS-30 272+2
0 mm 115±1mm
FS-60 317+2
0 mm 12mm 152±1mm M10
Retighten the stud bolts
Tighten the stud bolts that are xing the cylinder heads to the rated torques as below.
Model Tightening torque Model Tightening torque
FS-15HT1 9.8N•m FS-15HT2 5.4N•m
FS-30HT1 15.7N•m FS-30HT2 6.4N•m
FS-60HT1 21.6N•m FS-60HT2 8.3N•m
NOTE
A leak results in operation if the stud bolts are loose.
2
1
3
Pitch
Width
Depth

17
Installation
Liquid line piping
Pump head tube
Pump head tube
Tube fitting
Tube fitting
Piping
Piping
1
Liquid line piping
The pump has different sizes of the inlet/outlet PFA tube at each model. See the table below.
Use applicable tube ttings for the connection with your piping system.
Model PFA tube sizes
FS-15 1/2" (I.D. 9.52mm × O.D. 12.7mm)
FS-30 I.D. 16mm × O.D. 19mm
FS-60 I.D. 22mm × O.D. 25mm
*Select an appropriate tube fitting size. Both discharge- and suction-line I.D. should be larger than the pump outlet & inlet O.D.
* General joints can be used, however, no leakage is allowed under hot liquid transfer or heat cycle.
* Use measures to keep the pump connections free from stress.
Points to be observed
Air blow or ush a suction and a discharge tube to get rid of debris prior to connecting
with the pump.
Connect a suction and a discharge tube to the pump inlet and outlet via the tube ttings.
Use measures to keep the pump connections free from stress such as weight and thermal expansion/
contraction.
NOTE
Be sure to secure each connection to prevent leakage and air ingress.

18
Suction line
■ Flooded suction
Have the suction line wide and shortest in flooded suction application. In suction lift application, observe the
maximum suction lift.
* The suction lift differs with the liquid’s characteristics, temperature and suction line length. For detailed information, con-
tact us.
■ Filtration (suction line end)
Install a filter or strainer at the suction line end to prevent particles from entering the bellows. The filter or
strainer should not increase piping resistance too much (observe the minimum composite effective cross-sec-
tional diameter.).
NOTE
If wafer fragments enter the pump, they may get stuck in the bellows and eventually cause failure. If they clog
the pump head valves, the discharge volume may reduce and the pumping operation may become unbal-
anced.
■ When installing a valve on the suction line:
Select a valve with an orifice equal to or larger than pipe I.D. A valve with a small orifice may increase the pipe
resistance or easily be clogged with crystals. Always open valves during operation.
NOTE
Operating the pump with a suction side valve close, negative pressure increases in the bellows and deforms
the bellows inwardly.
Liquid line piping

19
Installation
Liquid line piping
Discharge line
■ Pulsation reduction
The pipe resistance increases as a discharge line becomes longer or the number of bends increases. In
order to decrease pipe resistance, install a dampener and minimizes pulsation.
* When sending a liquid up via a riser pipe, install a check valve as well as a dampener.
■ When installing a valve on the discharge line:
Select a valve with an orifice equal to or larger than pipe I.D. A valve with a small orifice may increase the pipe
resistance or easily be clogged with crystals. Always open valves during operation. Do not close the valve until
the discharge pressure reaches "0" after the pump is stopped.
NOTE
Do not close a discharge valve right after stopping the pump. Impact pressure may deform the bellows.
■ Filtration (circulation)
Check a filtering area, filtering performance and effects on the flow before selecting a cycle filter. A desired
flow may not be obtained if selection is wrong.
NOTE
Wet the filter before use. A desired flow may not be obtained if the filter is dry. Filter dries up if it is unused for
a long period. Read the instruction manual of the filter for details.
■ Filtration (discharge line end)
Install a filter or strainer in a discharge line not to release foreign matters or wafer fragments. The filter or
strainer should not increase piping resistance too much (observe the minimum composite effective cross-sec-
tional diameter.).
■ Depressurization at pump stop
When stopping the pump, be sure to release discharge pressure by opening the filter, the air vent valve or
through a return circuit.
NOTE
Stopping the pump without releasing discharge pressure may deform the bellows.

20
Degassing
Gas bubbles are generated when a strong acid is fed into the reaction tank or liquid is transferred through a
narrow tube. If such bubbles enter the bellows, the pump runs dry, increasing stroke rate or disturbing liquid
transfer. Take a proper step for degassing.
Plan A (Install a baffle to remove gas bubbles)
In flooded suction application
Install a baffle in a overflow tank to separate air
from the liquid.
In suction lift application
Install a baffle to the bottom of the reaction tank.
And then place the end of suction line under the baf-
fle to suck liquid only.
Plan B (Install an automatic valve)
Periodic degassing
Program an automatic valve to open periodically
regardless of dry running. For example, the valve
opens for ten seconds every two minutes.
* Some filtering area may be too small to release air.
Select a suitable filter size.
* Program an open time according to the system perform-
ance.
Pinpoint degassing
Install an air detector at the pump inlet and set the
auto valve to open timely.
Another detector at the pump outlet will help detect
bellows rupture.
Bubbles go up.
Baffle
Overflow
tank
P
Reaction tank
Reaction
tank Bubbles are
sucked.
Baffle
Prevents bubbles.
P P
H 2 O 2 ,O 3 ,H 2 O
Air vent line
Auto valve
Filter
Pump
Overflow tank
Heater
Reaction
tank
P
Liquid line piping