IWAKI PUMPS FS Series User manual

Safety instructions Overview Installation Operation Maintenance Specication
Iwaki
Pneumatic Drive Bellows Pump
FS series
©2011 IWAKI CO., LTD.
Thank you for choosing our product.
Please read through this instruction manual before use.
This instruction manual describes important precautions and instruc-
tions for the product. Always keep it on hand for quick reference.
Instruction manual
T4 3 4 - 5 '19 /11
http://www.iwakipumps.jp
IWAKI CO.,LTD. 6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 Japan
TEL: [phone] FAX: [phone]
European ofce / IWAKI Europe GmbH
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Norway / IWAKI Norge AS
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Australia / IWAKI Pumps Australia Pty Ltd.
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Germany / IWAKI Europe GmbH
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Sweden / IWAKI Sverige AB
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China (Hong Kong) / IWAKI Pumps Co., Ltd.
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Holland / IWAKI Europe GmbH (Netherlands Branch)
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U.K. / IWAKI Pumps (U.K.) LTD.
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China (Guangzhou) / GFTZ IWAKI Engineering & Trading Co., Ltd.
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Italy / IWAKI Europe GmbH (Italy Branch)
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U.S.A. / IWAKI America Inc.
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China / IWAKI Pumps (Shanghai) Co., Ltd.
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Spain / IWAKI Europe GmbH (Spain Branch)
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Argentina / IWAKI America Inc. (Argentina Branch)
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Korea / IWAKI Korea Co., Ltd.
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2
Order conrmation
Open the package and check that the product conforms to your order. If any problem or
inconsistency is found, immediately contact your distributor.
a. Check if the delivery is correct.
Check the nameplate to see if the information such as model codes are as ordered.
*Electrical wiring changes with the controllers.
b. Check if the required number of accessories is provided.
<Attached accessories>
A FDC-1 controller and two quick exhaust valves
c. Check if the delivery is damaged or deformed.
Check for transit damage and loose bolts.
Order conrmation
* The CE marking on our product(s) is for us to market the
product(s) into the European market, however, the CE
marking does not ensure any safety or conformity of the
product(s) outside the European market.
When the pump is incorporated into the equipment
marketed in the European market, such equipment must
meet all the requirements of applicable directives.
In such a case, any person who places the equipment
on the market must carry a CE mark on the equipment
as a manufacturer.

3
Contents
Contents
Order conrmation ..........................................................................................................................................2
Safety instructions.................................................................... 5
Warning..........................................................................................................................................................6
Caution........................................................................................................................................................... 7
Precautions for use ...................................................................................................................................... 9
Overview...................................................................................10
Introduction ................................................................................................................................................. 10
Pump structure & Operating principle ...................................................................................................... 10
Part names................................................................................................................................................... 11
Pump ........................................................................................................................................................ 11
Operating conditions.................................................................................................................................. 12
Pump stroke ............................................................................................................................................. 12
Supply air pressure range ........................................................................................................................ 12
Liquid temperature range ......................................................................................................................... 12
Liquid characteristics ............................................................................................................................... 12
Do not run the pump with the following liquid ..................................................................................... 12
Use care handling the following liquids:.............................................................................................. 12
Operation and Stoppage.......................................................................................................................... 13
During operation ................................................................................................................................. 13
When stopping the pump .................................................................................................................... 13
During stoppage.................................................................................................................................. 13
Air exhaust port ........................................................................................................................................ 13
Leak sensors............................................................................................................................................ 13
Ambient temperature................................................................................................................................ 13
Pump surface temperature....................................................................................................................... 13
Noise from pump...................................................................................................................................... 13
Identication codes.................................................................................................................................... 14
Installation ...............................................................................15
Pump mounting........................................................................................................................................... 15
Liquid line piping ........................................................................................................................................ 17
Suction line............................................................................................................................................... 18
Flooded suction................................................................................................................................... 18
Filtration (suction line end) .................................................................................................................. 18
When installing a valve on the suction line: ........................................................................................ 18
Discharge line .......................................................................................................................................... 19
Pulsation reduction ............................................................................................................................. 19
When installing a valve on the discharge line: .................................................................................... 19
Filtration (circulation) ........................................................................................................................... 19
Filtration (discharge line end).............................................................................................................. 19
Depressurization at pump stop ........................................................................................................... 19
Degassing ................................................................................................................................................20

4Contents
Air line piping .............................................................................................................................................. 21
Supply air port I.D. .............................................................................................................................. 21
Air line piping diagram..............................................................................................................................22
Composite effective cross-sectional area................................................................................................ 24
Effective cross-sectional area............................................................................................................. 24
Preventive measures against condensation ....................................................................................... 24
Electric wiring .............................................................................................................................................25
Installation ................................................................................................................................................25
Lead wires........................................................................................................................................... 25
Extension of leak sensor wires ........................................................................................................... 25
Installation of proximity switch wires ................................................................................................... 25
Extension of proximity switch wires .................................................................................................... 25
Wiring diagram .........................................................................................................................................26
Operation................................................................................. 27
Before operation ......................................................................................................................................... 27
Pump operation...........................................................................................................................................28
Starting the pump..................................................................................................................................... 28
Flow rate adjustment ................................................................................................................................29
Stoppage..................................................................................................................................................29
Maintenance............................................................................ 30
Troubleshooting ..........................................................................................................................................30
Inspection ....................................................................................................................................................33
Daily inspection ........................................................................................................................................33
Periodic inspection...................................................................................................................................33
Wear part list ............................................................................................................................................34
Specication/Outer dimension..................................................................................................................35
Specication.............................................................................................................................................35
FS-15 H T 1 or 2..................................................................................................................................35
FS-30 H T 1 or 2 .................................................................................................................................36
FS-60 H T 1 or 2 .................................................................................................................................36
Outer dimension....................................................................................................................................... 37
FS-15 H T 1......................................................................................................................................... 37
FS-15 H T 2......................................................................................................................................... 37
FS-30 H T 1 ........................................................................................................................................38
FS-30 H T 2 ........................................................................................................................................38
FS-60 H T 1 ........................................................................................................................................39
FS-60 H T 2 ........................................................................................................................................39
Part names...............................................................................................................................................40
FS-15 H T 1.........................................................................................................................................40
FS-15 H T 2......................................................................................................................................... 41
FS-30 H T 1 ........................................................................................................................................ 42
FS-30 H T 2 ........................................................................................................................................43
FS-60 H T 1 ........................................................................................................................................44
FS-60 H T 2 ........................................................................................................................................45
EC DECLARATION OF CONFORMITY .................................................................................................. 46

5
Safety instructions
Safety instructions
Read through this section before use. This section describes important
information for you to prevent personal injury or property damage.
■ Symbols
In this instruction manual, the degree of risk caused by incorrect use is noted with the follow-
ing symbols. Please pay attention to the information associated with the symbols.
Indicates mishandling could lead to a fatal or serious acci-
dent.
WARNING
A symbol accompanies each precaution, suggesting the use of "Caution", "Prohibited actions"
or specic "Requirement".
Indicates mishandling could lead to personal injury or prop-
erty damage.
CAUTION
Caution marks Prohibited marks Requirement marks
Safety instructions
Prohibited
Electrical
shock
Caution Do not rework
or alter
Requirement Wear
protection
Export Restrictions
Technical information contained in this instruction manual might be treated as controlled tech-
nology in your countries, due to agreements in international regime for export control.
Please be reminded that export license/permission could be required when this manual is
provided, due to export control regulations of your country.
Grounding

6
WARNING
WARNING
Turn off power before work
Risk of electrical shock. Be sure to turn off power to stop the pump and
related devices before service is performed. Let other people know about
the situation by displaying a notice such as "POWER OFF (Maintenance)"
near the power switch.
Conrm safety in your working area
Keep away from the pump when turning on power. The pump doesn't have
an ON-OFF switch. The pump starts as a power cable is plugged in.
Stop operation
If you notice any abnormal or dangerous conditions, suspend operation
immediately and inspect/solve problems.
Do not use the pump in any condition other than its intended purpose
The use of the pump in any conditions other than those clearly specied
may result in failure or injury. Use this product in specied conditions only.
Do not modify the pump
Alterations to the pump carries a high degree of risk. It is not the manufac-
turer's responsibility for any failure or injury resulting from alterations to the
pump.
Wear protective clothing
Always wear protective clothing such as an eye protection, chemical re-
sistant gloves, a mask and a face shield during disassembly, assembly or
maintenance work. The specic solution will dictate the degree of protec-
tion. Refer to MSDS precautions from the solution supplier.
Spill precautions
Ensure protection and containment of solution in the event of plumbing or
pump damage (secondary containment).
Do not touch the pump or pipe with bare bands
Risk of burning. The surface temperature of the pump or pipe rises high
along with liquid temperature in or right after operation.
Do not remove covers
Do not remove any covers including the right-and-left cylinder head covers
during operation in order to reduce the risk of personal injury.
Depressurize piping before disassembly
Release a pressure from both liquid and air lines before dismantling the
pump or removing piping.
Requirement
Do not remodel
Wear
protectors
Requirement
Requirement
Requirement
Caution
Requirement
Prohibited
Prohibited

7
Safety instructions
CAUTION
Qualied personnel only
The pump should be handled or operated by qualied personnel with a
full understanding of the pump. Any person not familiar with the product
should not take part in the operation or maintenance of the pump.
Use specied power only
Do not apply any power other than that specied on the nameplate. Other-
wise, failure or re may result. Ensure the pump is properly grounded.
Ventilation
Fumes or vapours can be hazardous with certain solutions. Ensure proper
ventilation at the operation site.
Do not install or store the pump:
• In a ammable atmosphere.
• In a dusty/humid environment.
• In a corrosive atmosphere.
Do not stand on the pump
Do not use the pump as a platform. Injury or damage may result when the
pump turns over.
Flushing before operation
Flush the inside of the pump and piping with pure water or the liquid to be
delivered before the start of operation.
Do not run the pump with the following liquid:
• Liquid that easily crystallizes
• Slurry
• Low conductivity hydrocarbon liquid
Use care handling the following liquid:
• Stripper (the pump must be in explosion proof.)
• Solvent
• Hydrazine
• Fuming sulfuric acid
Static electricity
When low electric conductivity liquids such as ultra-pure water and fluor
inactive liquid (e.g. FluorinertTM) are handled, the static electricity may be
generated in the pump and may cause static discharge. Take counter-
measures to remove the static electricity.
CAUTION
Requirement
Requirement
Requirement
Requirement
Requirement
Prohibited
Prohibited
Prohibited
Requirement

8
CAUTION
Wear part replacement
Follow instructions in this manual for wear part replacement. Do not dis-
mantle the pump beyond the extent of the instructions.
Before returning product
Be sure to drain chemicals and clean the inside of the pump before return
so that a harmful chemical does not spill out in transit.
Observe the maximum stroke rate
Operation above the max stroke rate may reduce the life of bellows. See
the "Specification" section on page 35 for detail. Set the FDC-1 controller
not to run the pump over the limits even under dry running.
Disposal of a used pump
Dispose of any used or damaged pump in accordance with local rules
and regulations. If necessary, consult a licensed industrial waste disposal
company.
Requirement
Requirement
Requirement
Requirement
CAUTION

9
Safety instructions
Precautions for use
Precautions for use
• During transit:
–Do not hit/wet the package.
–Do not place the package lateral/up side down.
– Keep the package dry.
– Do not stack the package on top of another.
• Electrical work should be performed by a qualied electrician. Otherwise,
personal injury or property damage could result.
• Do not install the pump:
–In a ammable atmosphere.
–In a dusty/humid place.
– In a corrosive atmosphere.
• Allow sufficient space around the pump for easy access and maintenance.
• Use care handling the pump. Do not drop. An impact may affect pump
performance. Do not use a pump that has been damaged to avoid the risk
of electrical damage or shock.
• The pump and controller are not waterproof. Do not operate the pump and
controller while wet with solution or water. Failure or injury may result. Im-
mediately dry off the pump and controller if they get wet.
• Do not close discharge line during operation. Solution may leak or piping
may break.
• Solution in the discharge line may be under pressure. Release the pres-
sure from the discharge line before disconnecting plumbing or disassembly
of the pump to avoid solution spray.
• Wear protective clothing when handling or working with pumps. Consult
solution MSDS for appropriate precautions. Do not come into contact with
residual solution.
• Do not leave the pump with any chemical in the bellows for a long period.
Some chemical gas can penetrate the bellows and corrode metal parts.
Run the pump for ten minutes a day for replacing gas when the pump is
going to be suspended two or three days.
Caution
Caution
Caution
Caution
Caution
Caution
Requirement
Requirement
Caution

10
Overview
Introduction
Pump characteristics, features and part names are described in this sec-
tion.
Introduction
Pump structure & Operating principle
An Iwaki FS series pneumatic drive bellows pump has uoric wet ends and is designed for semiconductor
manufacturing processes.
Principle of operation
The pump unit has two air chambers and a pair of bellows. The reciprocating motion of the bellows in the air
chambers introduces/delivers solution.
Suction process
Either bellows takes in solution via the inlet as it expands.
Discharge process
The bellows lets out solution via the inlet as it contracts.
: Liquid flow
: Supply air
Air OUT
Air chamber
Pump head
Air IN
Bellows OUT
IN
OUT
IN
Air IN Air OUT