Jevatec JEVAmet User manual

BA_IOM_02.2018_EN
Instruction Manual
Active hot chathode ionisation gauge
®
JEVAmet IOM

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3
0. Contents
0. Contents 3
0.1 List of Figures 5
0.2 List of Tables 5
1. Legal Instructions 6
1.1 Validity 6
1.2 Scope of Delivery 6
1.3 Conventional Application 6
1.4 Responsibility and Warrenty 6
1.5 Transport Damages 7
2. Safety 8
2.1 General Information 8
2.2 Signs and Symbols 8
2.3 Basic Safety Regulations 8
3. Technical Product Description 9
3.1 Function 9
3.2 Measuring Principle 9
4. Technical Data 10
4.1 Vacuum Measurement 10
4.2 Sensor 10
4.3 Emission 10
4.4 Degassing 10
4.5 Automatic Overpressure Switch-Off 10
4.6 Power Requirements 10
4.7 Analog Output Signal 11
4.8 Materials 11
4.9 Environment 12
4.10 Dimensions and Weight 12
4.11 Standards 12

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5. Installation 13
5.1 Mechanische Installation 13
5.2 Electrical Installation 14
5.2.1 Rear of the Instrument 14
5.2.2 Input / Output 14
6. Operation 15
6.1 Operating Modes and Error Conditions (LED “Mode”) 15
6.2 Readiness for Operation 15
6.3 Measuring Mode (Emission) 16
6.4 Analog Output 16
6.5 Emission Current 16
6.6 Degas Mode 17
6.7 Selection oft he Filaments 17
6.8 Dependence on the Gas Type 17
7. Maintenance and Service 18
7.1 Maintenance 18
7.1.1 General Maintenance Advices 18
7.1.2 Replacement Parts 18
7.1.3 Sensor Replacement 18
7.2 Troubleshooting 19
7.2.1 Trouble Indication and Help in Case of Malfunctions 19
7.2.2 Repair 19
8. Storage and Waste Disposal 20
8.1 Packaging 20
8.2 Storage 20
8.3 Waste Disposal 20
Annex 1 - Declaration of Contamination (Form for Reconsignment) 21
Safety information for the reconsignment of contaminated
Vacuum devices and components 22
Annex 2 - EU Declaration of Conformity 23

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0.1 List of Figures
Figure 1 –Analog Output 11
Figure 2 –Dimensions JEVAmet®IOM (in mm) 12
Figure 3 –Rear of the Instrument 14
Figure 4 –Connector for Input / Output (D-SUB, 9 pin, male) 14
Figure 5 –Schematic design of the JEVAmet®IOM 19
0.2 List of Tables
Table 1 –Part numbers 6
Table 2 –Scope of Delivery 6
Table 3 –Operating Modes 15
Table 4 –Error Conditions 15
Table 5 –Part numbers of the replacement parts 18

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1. Legal Instructions
1.1 Validity
The document applies to the following products:
Part Number
Product
Version
Serial Number
100030
JEVAmet®IOM-16K
1.00 et seq.
100 et seq.
100031
JEVAmet®IOM-25K
1.00 et seq.
100 et seq.
Table 1 –Part numbers
When communicating with the JEVATEC GmbH, stating the information of article number
and serial number is necessary. This information takes you please from the name plate.
1.2 Scope of Delivery
Description
Number
JEVAmet®IOM
1
Instruction Manual (DE and EN)
1
Table 2 –Scope of Delivery
1.3 Conventional Application
The JEVAmet®IOM is a hot cathode ionisation gauge by Bayard-Alpert. It has been
designed for vacuum measurement of gases in the pressure range of 5·10-10 –5·10-2 mbar.
It must not be used for measuring flammable or combustible gases in mixtures containing
oxidants (e.g. atmospheric oxygen) within the explosion range.
The vacuum gauge has a flange connection DN16KF or DN25KF and can thus to suitable
flange connections be attached.
1.4 Responsibility and Warrenty
We assume the warranty for the faultless function of the device for one year. All in material
and manufacturing defects will be cleared free of charge within this period.
The JEVATEC GmbH will not assume any responsibility or warranty in case the operator or
third persons
•do not observe the information given in this document.
•do not use the product as intended.
•modify the product in any way (conversions, repair work etc).
•operate the product with accessories not listed in the corresponding product
documentation.
The end-user assumes the responsibilityin conjunction with the process media used. Gauge
failures due to contamination or wear and tear are not covered by the warranty.
Subject to technical alterations without prior notice. The figures are not binding.

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1.5 Transport Damages
•Check the packaging for visible damages
•Send an advice of damage to the carrier and to the insurer in case of damage
•Retain the packaging material, because the reconsignment in the original packaging of
the manufacturer is prerequisite for warranty claims
•Check the consignment for completeness
•Check the instrument for visible damages

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2. Safety
2.1 General Information
The JEVAmet®IOM is delivered ready for operation. Even so, we recommend that you
carefully read these Operating Instructions so as to ensure optimum operating conditions
right from the start. This manual contains important information for understanding, installing,
commissioning, operating and troubleshooting the JEVAmet®IOM.
2.2 Signs and Symbols
DANGER or WARNING:
Information on the prevention of injury.
DANGER:
Information on the prevention of injury by electrical impact.

REFERENCE:
General lead on further information and articles respectively.
2.3 Basic Safety Regulations
•Adhere to the applicable regulations and take the necessary precautions for the process
media used. Consider possible reactions between the materials and the process media.
Consider possible reactions (e.g. explosion) of the process media due to the heat
generated by the product.
•Adhere to the applicable regulations and take the necessary precautions forall work you
are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are contaminated.
Adhere to the relevant regulations and take the necessary precautions when handling
contaminated parts.
DANGER: High Voltage
Coming into contact with components inside the instrument carrying the high
voltage can, when introducing objects or liquids, cause danger to life.
WARNING: Improper usage
Improper usage can damage the instrument. Use the instrument only in
accordance to the manufacturer’s instructions.
WARNING: Incorrect connection and operation data
Incorrect connection and operation data can damage the instrument. Comply
with all prescribed connection and operation data.

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3. Technical Product Description
3.1 Function
The JEVAmet®IOM is a hot cathode ionisation gauge by Bayard-Alpert. It has been
designed for vacuum measurement of gases in the pressure range of 5·10-10 –5·10-2 mbar.
The vacuum gauge has a flange connection DN16KF or DN25KF and can thus to suitable
flange connections be attached.
NOTE: Field of Application
On the basisof the following information, please check whether the instrument
is appropriate for your application.
3.2 Measuring Principle
The Bayard-Alpert ionisation gauge utilizes the ionisation by electronimpact of gas particles.
The electrons are emitted from a heated cathode (filament), are then accelerated to the
anode grid, ionizing the gas on their way. The ions which are being created inside the grid
are accelerated to the collector and are generating the measurement current. The collector
current is proportional to the gas pressure over a wide pressure range, in addition being
dependent on the ionisation probability of the gas. At lower pressures the measurement
range is primarily limited by the geometry of the sensor. For the JEVAmet®IOM sensor the
low-pressure limit is in the range of < 5∙10-10 mbar whereas the high-pressure limit is in the
range of 10-1 mbar.
Increase and fluctuations of the pressure reading of the Bayard-Alpert ionisation vacuum
gauge are being produced by contaminations (increased outgassing inside the tube). In this
case it is advisable to clean the sensor by degassing at pressures 1∙10-4 mbar during
which the sensor is heated by means of electron bombardment. During the degassing the
pressure reading serves as an orientation about the cleaning procedure but is beyond the
accuracy specifications of the JEVAmet®IOM. By degassing of the sensor, the
contaminations are removed to a large extent.
Considerable falsifications of the measured value can occur if electrons or ions are emitted
from the vacuum system. This effect is being reduced by the application of a protective
adapter (baffle).
Strong magnetic fields (e.g. from ion getter pumps) cause the deflection of electron
trajectories and therefore possibly induce measurement errors. In this case an increase of
the distance between the JEVAmet®IOM and the magnet is advisable.

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4. Technical Data
4.1 Vacuum Measurement
Measuring Range:
5∙10-10 –5∙10-2 mbar
Measuring Principle:
Hot Cathode Ionization (Bayard-Alpert)
Sensitivity for N2:
ca. 16 mbar-1
Accuracy:
typically ± 20% of reading
Reproducibility:
± 5% of reading
4.2 Sensor
Mounting Position:
Arbitrary
Filaments (Cathodes):
Ir coated with Y2O3
Number of Filaments:
2
Filament Operation Modes:
Manual Switching via Toggle Switch
Overpressure Stability:
minimum 1.5 bar (abs.)
4.3 Emission
Activation:
by Digital Input Signal
Emission Current:
20 µA (Low Emission Current)
2 mA (High Emission Current)
Emission Current Switch-Over:
by Digital Input Signal
4.4 Degassing
Activation:
by Digital Input Signal
Start Pressure:
< 1∙10-4 mbar
Duration:
2 min
4.5 Automatic Overpressure Switch-Off
Switching Threshold
for Low Emission Current:
5∙10-2 mbar
for High Emission Current:
1.5∙10-3 mbar
for Degassing:
5∙10-4 mbar
4.6 Power Requirements
Operational Voltage:
24 VDC (SELV-E according to EN 61010)
Power Consumption:
12 W max.
Fuse Protection:
Self-resetting
Connection:
9 pin D-SUB, male
DANGER:
The vacuum gauge may only be connected to power supplies, instruments or
control devices that conform to the requirements of a grounded protective
extra-low voltage (SELV-E according EN 61010).

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4.7 Analog Output Signal
Output Voltage:
0 –10.5 V DC
Error Signal:
> 9 V: Emission Off
Measuring Range:
0 V = 1∙10-10 mbar; 8.7 V = 5∙10-2 mbar
Relation Between Voltage
and Pressure:
logarithmic, 1 V / Decade
p = 10(U-10) [mbar]
U = 1∙lg(p/10-10) [V]
Figure 1 –Analog Output
A Overpressure Switch-Off at Low Emission Current: 5.0∙10-2 mbar
B Overpressure Switch-Off at High Emission Current: 1.5∙10-3 mbar
C Overpressure Switch-Off at Degassing: 5.0∙10-4 mbar
4.8 Materials
Materials in Vacuum:
St. Steel 304 and 316L, NiFe, Glass, W, Y2O3on Ir
Housing:
Electronics: Aluminium
Gauge Head: Stainless Steel

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4.9 Environment
Temperature:
Storage: -20 –+60 °C
Operation: +5 –+45 °C (Sea Level)
+5 –+30 °C (2000 m NN)
Bakeout Temperature:
max. 80 °C at Flange
Relative Air Humidity:
max. 80 % (to 30 °C)
Decreasing to max. 50 % (from 40 °C)
Usage:
Indoors (max. 2000 m NN)
Protection Class:
IP40
4.10 Dimensions and Weight
Dimensions:
Length: 96.5 mm
Width: 72.7 mm
Depth: 66.0 mm
Weight:
0.3 kg
Figure 2 –Dimensions JEVAmet®IOM (in mm)
4.11 Standards
•Compliance with EMC Directive 2014/30/EU
•Compliance with RoHS Directive 2011/65/EU
•Compliance with WEEE Directive 2012/19/EU
International/national standards as well as specifications:
•DIN EN 61010-1 (2011)
(Safety requirements for electrical equipment for measurement, control, and laboratory
use)
•DIN EN 61326-1 (2013) (Electrical equipment for measurement, control and laboratory
use –EMC requirements. Industrial interference immunity; electromagnetic emissions
household sector Class B)

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5. Installation
5.1 Mechanische Installation
The installation of the JEVAmet®IOM is carried outdirectly on the vacuum system. Basically,
the JEVAmet®IOM is operational at any arbitrary mounting position.
It is recommended to choose a mounting location with unimpeded airflow. During bakeout
of the vacuum chamber for achieving very low pressures the JEVAmet®IOM should be
mounted in a way so that the convection heat of the heated vacuum chamber does not
significantly heat up the instrument. As a matter of principle, the ambient temperature must
not exceed the specified temperature of 45 °C.
The most common cause for the failure of vacuum gauges is the contamination of the
sensor. Contamination can occur by reactions of process gases with sensor parts, by
accumulation of process material on sensor parts or by charged particles which have
entered from a process in the vacuum system. Possible consequences of a contamination
of the sensor are noisy or erroneous measured pressure values or even a total failure of the
sensor. Instrument failures which are caused by contamination are not covered under the
warranty.
A suspended mounting position (vacuum flange upside) is to be avoided especially for
vacuum applications which are subject to condensation or other precipitates. Protect the
sensor from contaminations especially in vacuum applications with sources of material or
charged particles (vaporization etc.) or when there is danger of oil contamination.
If necessary the sensor can be protected by choosing a noncritical mounting position and/or
by application of a baffle, elbow pipe, gate valve etc.
NOTE:
During the installation of the vacuum gauge always proceed with the required
carefulness.
WARNING: Disconnection
Set up and install the vacuum gauge in such a way that a disconnection of the
voltage supply is possible at any time.
CAUTION: Vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure
cleanliness and prevent damages.
DANGER: Contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions when
handling contaminated parts.
•Remove the protective lid. Keep the protective lid for servicing.
•Connect the vacuum gauge to the vacuum system. Please note the previous specified
mounting instructions and warnings.

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5.2 Electrical Installation
5.2.1 Rear of the Instrument
Figure 3, page 14 is showing the rear of the JEVAmet®IOM. The pin assignment of the
connector as well as the operating and display elements are described in the following
chapters.
Figure 3 –Rear of the Instrument
A Connector for Voltage Supply, Analog Output and
Digital In- and Outputs
B LED displaying the Operating Mode
C Switch for the Selection of the Filament
5.2.2 Input / Output
The input / output connector ( Figure 4, page 14) combines the voltage supply input,
the analog output and the digital in- and outputs for the control and monitoring of the
instrument.
Figure 4 –Connector for Input / Output (D-SUB, 9 pin, male)
1 Control Input Emission On
2 Input Voltage Supply GND
3 Output Analog Output Signal (0 –+10.5 V, Ri= 100 Ω)
4 Input Voltage Supply +24 VDC, max. 12 W
5 Status Output Status Degas (Open Collector, max. 40 V, 50 mA)
6 Control Input Degas On
7 Output Analog Output GND
8 Control Input High Emission Current On
9 Status Output Status Emission (Open Collector, max. 40 V, 50 mA)
(All Control Inputs and Status Outputs are "low active".)
Connecting:
•Connect your system with the input / output connector on the user interface of the
JEVAmet®IOM by means of an appropriate shielded cable.
ATTENTION: Grounded Protective Low Voltage
The voltage supply has to meet the requirements of a grounded protective
low voltage (SELV-E) according to EN 61010.

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6. Operation
6.1 Operating Modes and Error Conditions (LED “Mode”)
The LED “Mode”( Figure 3, B, page 14) shows the operation modes and error
conditions of the instrument.
LED Status
Description
OFF
No voltage supply. Instrument is not ready for operation.
Red
Instrument is ready for operation. Emission is switched off.
Green
Instrument in operation. Emission is switched on. Measuring mode.
Green blinking
Instrument in operation. Emission is switched on. Degassing is activated.
Table 3 –Operating Modes
LED Status
Cause and Remedy
OFF
If voltage supply on:
Instrument is not ready for operation. The polyswitch fuse has been activated.
Disconnect the instrument from the voltage supply and reconnect. If the fuse is
activated again there is a failure of the electronics. Please contact JEVATEC.
Red blinking
Emission error. Automatic deactivation of the emission.
Restart the emission. If the LED is continuing to blink red there is a failure of the
active filament. Switch to the other filament and restart the emission. If the LED
is continuing to blink red there is a failure of both filaments. The sensor has to be
replaced.
Table 4 –Error Conditions
6.2 Readiness for Operation
Establish the readiness for operation of the instrument as follows:
•Connect pin 2 of the input / output connector ( Figure 4, page 14) with the ground
(GND) of the voltage supply.
•Connect pin 4 of the input / output connector ( Figure 4, page 14) with 24 VDC (max.
12 W) of the yoltage supply.
•The LED “Mode” lights up red.
To terminate the readiness for operation, disconnect the instrument from the voltage supply.

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6.3 Measuring Mode (Emission)
Start the emission as follows:
•Apply LOW level on pin 1 of the input / output connector ( Figure 4, page 14).
•The LED “Mode”lights up green.
Stop the emission as follows:
•Disconnect pin 1 of the input / output connector ( Figure 4, page 14) from LOW level.
•The LED “Mode” lights up red.
If the switching threshold for the automatic overpressure switch-off is exceeded, the
emission will be switched off automatically. The LED ”Mode” lights up red. To restart the
emission, you have to disconnect and reapply LOW level on pin 1 of the input / output
connector.
6.4 Analog Output
The analog output ( Figure 1, page 11) is provided by the input / output connector (
Figure 4, page 14).
6.5 Emission Current
The sensor can be operated at low (20 µA) as well as high emission current (2 mA). It is
recommended to operate the sensor at high emission current for pressures < 5∙10-6 mbar.
In the unconnected state the low emission current is preset at 20 µA.
The switching to the high emission current (2 mA) is accomplished as follows:
•Apply LOW level on pin 8 of the input / output connector ( Figure 4, page 14).
The switching to the low emission current (20 µA) is accomplished as follows:
•Disconnect pin 8 of the input / output connector( Figure 4, page 14) from LOW level.

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6.6 Degas Mode
Contaminations in the sensor can cause an increase and fluctuations of the pressure
reading (increased outgassing inside the tube). In that case it is recommended to clean the
sensor by degassing at pressures 1∙10-4 mbar during which the sensor is heated by means
of electron bombardment. The pressure reading serves as an orientation about the cleaning
procedure but is beyond the accuracy specifications of the JEVAmet® IOM. By degassing of
the sensor, the contaminations are removed to a large extent.
The instrument has to be ready for operation and in measuring mode. The emission is
switched on.
Start the degassing procedure as follows:
•Apply LOW level on pin 6 of the input / output connector ( Figure 4, page 14).
•The LED “Mode” is blinking green.
The degassing procedure ends automatically after two minutes. The instrument reverts to
measuring mode. The LED “Mode” lights up green.
If the switching threshold for the automatic overpressure switch-off is exceeded, the
emission will be switched off automatically. The LED “Mode”lights up red. To restart the
emission, you have to disconnect and reapply LOW level on pin 1 of the input / output
connector.
6.7 Selection oft he Filaments
The sensor of the JEVAmet® IOM features two filaments, whereof only one filament is active
during operation. A switch on the user interface of the instrument electronics can be used to
select between the two filaments.
•Select the active filament using the switch on rear of the instrument ( Figure 3, C,
page 14).
NOTE: Switching of the Filaments
It is recommended to change filaments during switched off emission current
only.
6.8 Dependence on the Gas Type
Due to gas specific ionization probabilities the pressure measurement with ionization
vacuum gauges is dependent on the gas type as a matter of principle. The analog signal of
the JEVAmet®IOM is calibrated for nitrogen (N2).
If the pressure is being measured with a gas or gas mixture other than N2or air, the
application of a correction factor for the specific gas type is reasonable. Literature values for
correction factors can be used as an orientation.

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7. Maintenance and Service
7.1 Maintenance
7.1.1 General Maintenance Advices
For external cleaning normally a lightly moistened piece of cloth is sufficient. Do not use any
aggressive or abrasive detergents.
DANGER: Voltage Carrying Components
The instrument contains internal voltage carrying components. Do not
introduce any objects into the openings of the instrument. Keep the instrument
dry.
7.1.2 Replacement Parts
Part Number
Product
100040
JEVAmet®IOM-Sensor DN16KF
100041
JEVAmet®IOM-Sensor DN25KF
Table 5 –Part numbers of the replacement parts
7.1.3 Sensor Replacement
After burning through both of filaments, it is possible to replace the sensor itself or to send
the device to JEVATEC for sensor replacement.
WARNING: Forwarding contaminated products
Contaminated products (e.g. radioactive, toxic, caustic or microbiological
hazard) can be detrimental to health and environment.
Products returned to JEVATEC should preferably be free of harmful
substances. Adhere to the forwarding regulations of all involved countries and
forwarding companies and enclose a duly completed declaration of
contamination*).
*) You will find the copy template in the appendix 2 of this manual. The copy template is also available for download under
the following address: https://jevatec.de/index.php/en/downloads/category/37-miscellaneous-documents
Follow the steps described as follows, if you want to carry out the sensor replacement
yourself ( Figure 5, page 19):
•Disconnect the instrument from the voltage supply.
•Remove the input / output connector plug.
•Demount the instrument from the vacuum chamber.
•Loosen the four screws (B) at the cover plate (C) of the sensor.
•Pull the sensor together with the cover plate out of the electronics housing (E).
•Carefully insert the new sensor into the electronics housing until the contacts are
securely connected. Respect the alignment of the contact strips (D).
•Tighten all four mounting screws (B).
•Mount the instrument to the vacuum chamber.
•Connect the instrument to the input / output connector plug.
•Re-establish the readiness for operation of the instrument.

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Figure 5 –Schematic design of the JEVAmet®IOM
A Vacuum Flange for the Connection to the Vacuum
Chamber
B Mounting Screws between Sensor and Electronics
Housing
C Sensor Cover Plate
D Contact Strips between Sensor and Electronics
E Electronics Housing
7.2 Troubleshooting
7.2.1 Trouble Indication and Help in Case of Malfunctions
A malfunction of the JEVAmet®IOM is shown by the LED “Mode” on the rear of the
instrument ( Table 4 –Error Conditions , page 15).
CAUTION:
In case of an error, it may be helpful to just turn off the mains supply and
turn it on again after 5 seconds.
If the malfunction persists even after having switched on and off the instrument several times
and/or having replaced the sensor, please contact JEVATEC.
7.2.2 Repair
Defective products must be sent to JEVATEC. JEVATEC will not assume any responsibility
or warranty in case the operator or third persons repair the JEVAmet®IOM.

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8. Storage and Waste Disposal
8.1 Packaging
Please keep the original packaging. You will need this packaging in case of storing the
JEVAmet®IOM or shipping to JEVATEC.
8.2 Storage
The JEVAmet®IOM must only be stored in dry rooms. During storage, the following ambient
conditions need to be maintained:
•Ambient temperature: -20 –+60 °C
•Humidity of the air: As low as possible.
Preferably in a sealed plastic bag with desiccant.
8.3 Waste Disposal
Regarding waste disposal, the branch specific and local waste disposal and environment
protection regulations for systems and electronics components are valid.
In case of return JEVATEC will execute the professional resource separation and disposal.